CN217655895U - Coating machine and graphite boat - Google Patents

Abstract

Coating machine and graphite boat belongs to solar cell technical field. The film coating machine comprises a furnace body, a support piece and two groups of conductive pieces, wherein the support piece and the two groups of conductive pieces are arranged in the furnace body. The two groups of conductive pieces are arranged at intervals on the support piece and protrude out of the surface of the support piece for a preset distance so as to be in conductive connection with boat feet in the graphite boat. Because the conductive piece protrudes out of the surface of the support piece by a certain height, impurities accumulated on the surface of the support piece can be prevented from being attached to a contact part of the conductive piece and the boat foot in conductive contact to a certain extent, the part in the conductive piece is matched with the groove in the boat foot, and the groove bottom of the groove is an inclined plane or a curved surface, so that the probability that the impurities are attached to the conductive piece is low, the arcing frequency of the graphite boat is reduced, and the film coating quality is improved.

Description

Coating machine and graphite boat

Technical Field

The application relates to the technical field of solar cells, in particular to a film coating machine and a graphite boat.

Background

The commonly used PERC cell manufacturing process flow is: texturing, phosphorus diffusion, back etching, annealing, al2O3 coating, back SiNx coating, front SiNx coating, back laser grooving, screen printing and sintering. The back coating is also used as a main process of PERC, a production machine table of the back coating process commonly seen in the industry at present is mainly of a tubular coating machine type, and a radio frequency discharge mode is mainly that a boat foot of a graphite boat is in conductive contact with a conducting strip installed on a ceramic supporting rod in a furnace tube. But the existing graphite boat has high arc striking frequency, thereby causing high loss of a production line.

SUMMERY OF THE UTILITY MODEL

Based on the defects, the application provides a film coating machine and a graphite boat, so as to partially or completely improve and even solve the problem that the arc striking frequency of the graphite boat is high in the related technology.

The application is realized as follows:

in a first aspect, an example of the present application provides a film coating machine, including a furnace body, and a support member and two sets of conductive members disposed in the furnace body:

the support piece is equipped to support the graphite boat, the graphite boat comprises at least two boat feet, the boat feet are provided with grooves, and the bottoms of the grooves are inclined planes or curved surfaces;

the two groups of conductive pieces are arranged on the supporting piece at intervals, and protrude out of the surface of the supporting piece along a first preset direction for a first preset distance respectively; the conductive piece is equipped to be electrically connected with the boat foot, and the part of the conductive piece, which is used for being contacted with the boat foot, is matched with the groove.

In the implementation process, two groups of conductive pieces are arranged at intervals at a support piece for supporting the graphite boat in the coating machine, the graphite boat is placed in the furnace body through the support piece, and two boat feet of the graphite boat are respectively contacted with the two groups of conductive pieces, so that an electric field is formed in the graphite boat to coat the battery plates placed in the graphite boat. Because the conductive piece protrudes out of the surface of the support piece along the first preset direction by a preset distance, a certain gap is formed between the connecting part electrically connected with the boat foot and the conductive piece and the support piece, so that the phenomenon that impurities accumulated on the surface of the support piece are attached to the connecting part electrically connected with the boat foot and the conductive piece to increase the arc striking frequency of the boat foot can be avoided, the loss of the coating machine in the working process is reduced, and the coating quality is improved.

In addition, the part of the conductive piece, which is used for being in contact with the groove of the boat foot, is matched with the groove of the boat foot, so that the contact area of the conductive piece and the boat foot in conductive contact can be increased, and the stability of a film coating process of a film coating machine is improved. Because the groove bottom of the groove is an inclined plane or a curved surface, the part of the conductive piece matched with the groove is also the corresponding inclined plane or the curved surface. Therefore, when the impurities accumulated on the supporting member fall on the inclined surface or the curved surface, the fallen impurities slide along the inclined surface or the curved surface and further slide away from the conductive member for electrically connecting with the boat foot. The probability that the contact part of the conductive piece and the boat foot in conductive connection can deposit impurities is smaller, so that the arcing frequency of the graphite boat can be reduced, and the use stability of the film plating machine is improved.

With reference to the first aspect, in a first possible implementation manner of the first aspect, the first preset distance is 6-9mm.

In the implementation process, the protrusion height of the conductive piece protruding out of the surface of the supporting piece is set to be 6-9mm, so that the arcing frequency of the graphite boat can be reduced on the premise of ensuring the stability of the graphite boat. If the protrusion height of the conductive member protruding the surface of the supporting member is too low, the probability that the impurities accumulated on the surface of the supporting member adhere to the contact portion of the conductive member and the boat foot in conductive contact is relatively increased, which affects the quality of the coating film.

Because two boat feet of the graphite boat are contacted with the conductive piece with certain protruding height, the rest boat feet or other parts of the graphite boat which are not required to be contacted with the conductive piece are contacted with the supporting piece. If the protrusion height of the conductive member protruding the surface of the support member is too high, the gap difference between the different boat legs of the graphite boat and the support member is too large, which may affect the stability of the graphite boat placed on the support member (the graphite boat may shake, etc.).

With reference to the first aspect, in a second possible implementation manner of the first aspect, when the groove bottom of the groove is a curved surface, a part of the conductive member, which is used for being fitted with the groove, is in a semi-cylindrical structure, and an arc surface of the semi-cylindrical structure is used for being fitted with the groove.

With reference to the first aspect, in a third possible embodiment of the first aspect, the semi-cylindrical structure has a diameter of 10-15mm.

In the implementation process, the part of the conductive piece, which is used for being matched with the groove in the boat foot of the graphite boat, is set into the semi-cylindrical structure, the cambered surface of the semi-cylindrical structure is used for being matched with the groove of the boat foot, and due to the smoothness of the cambered surface, the deposition of impurities on the smooth cambered surface can be well avoided.

And, the cambered surface that utilizes the semi-cylindrical structure agrees with the recess of boat foot, and smooth cambered surface structure is when bearing the pressure of graphite boat, and the atress is more even, can increase the durability of electrically conductive piece and graphite boat.

In addition, the cambered surface of the semi-cylindrical structure is matched with the groove of the boat foot, the smooth cambered surface is compared with the inclined plane, the area of the cambered surface is larger to a certain extent, the contact area of the conductive piece and the boat foot can be increased, the conductivity between the conductive piece and the graphite boat is further improved (for example, the conductive piece is prevented from being lost due to poor contact or overlarge voltage, or the influence on the stability of electric arcs is avoided), and the film coating quality is improved. The diameter of the semi-cylindrical structure is limited to 10-15mm, so that the acting force applied on the conductive piece can be more uniform, and the contact area is properly increased (if the contact area is too large, the contact resistance may be larger).

With reference to the first aspect, in a fourth possible implementation manner of the first aspect, the supporting member includes a first supporting rod and a second supporting rod that are disposed at an interval, the two sets of conductive members are disposed on the first supporting rod and the second supporting rod, respectively, and the first preset direction intersects a plane formed by an axis of the first supporting rod and an axis of the second supporting rod.

In the implementation process, the supporting pieces are arranged into the first supporting rod and the second supporting rod which are arranged at intervals, so that the two groups of conductive pieces can be arranged at intervals conveniently. If the supporting member is, for example, an integral body of a supporting plate, the positions of the conductive members may be changed before and after the conductive members are replaced, that is, the distance between the conductive members may be changed. In order to meet the requirement of placing graphite boats with the same size and specification (generally, the distance between boat foot positions of the graphite boats is fixed), accurate adjustment is needed, and the use convenience of the coating machine is affected.

And, set up first bracing piece and the second bracing piece that the interval set up with support piece, can make being heated of graphite boat or temperature variation more even. If the support member is configured as a plate, for example, the area of the support plate is large, and the temperature change of the contact portion between the graphite boat and the support plate is affected by the support member (for example, when the thermal conductivity of the support member is lower than that of the graphite boat, the temperature rise rate or the temperature decrease rate of the portion of the graphite boat close to the support member is different from that of the other portions, which affects the temperature uniformity of the graphite boat).

With reference to the first aspect, in a fifth possible implementation manner of the first aspect, the first support bar and the second support bar are arranged in parallel, and a distance between the first support bar and the second support bar is not greater than 200mm.

The graphite boat is usually a rectangular frame structure extending along a certain direction, and the bottom plate of the graphite boat is a rectangular flat plate with two parallel sides. In the implementation process, the first support rod and the second support rod are arranged in parallel, so that two long edges of the graphite boat bottom plate can be in contact with the first support rod and the second support rod respectively, and the support stability of the graphite boat is improved. If the axes of the two support rods are intersected, the support surfaces formed between the two contact parts respectively contacted with the support rods in the graphite boat placed on the support rods are different in size, so that the installation stability of the graphite boat in a film coating machine is reduced.

In addition, the gap between the two supporting rods is not more than 200mm, so that the electric field performance in the two groups of conductive pieces can be improved, and the film coating performance is improved.

With reference to the first aspect, in a sixth possible implementation manner of the first aspect, the diameter of the semi-cylindrical structure is not greater than the diameter of the first support bar or the second support bar.

At above-mentioned realization in-process, the diameter of semicylindrical structure is not more than the diameter of first bracing piece or second bracing piece for first bracing piece or second bracing piece can provide sufficient support position for electrically conductive piece, improve the stability of electrically conductive piece.

With reference to the first aspect, in a seventh possible implementation manner of the first aspect, the conductive member includes a first connection portion, and the first connection portion is equipped to be connected with the first support bar or the second support bar.

With reference to the first aspect, in an eighth possible implementation manner of the first aspect, the first connecting portion is of a snap ring structure and is sleeved on the first supporting rod or the second supporting rod.

In the implementation process, the first connecting part is arranged in the conductive piece, so that the conductive piece is conveniently connected with the rod-shaped supporting rod. The first connecting part is arranged to be of a clamping ring structure so as to enable the conductive piece to be sleeved at the corresponding position of the supporting rod and fixed. The snap ring has simple structure and is convenient to sleeve or disassemble.

In a second aspect, examples of the present application provide a graphite boat comprising at least two boat legs, the boat legs having a groove, a bottom of the groove being an inclined or curved surface;

the groove is used for matching with the conductive piece in the film plating machine provided by the first aspect.

In the implementation process, the graphite boat comprises at least two boat feet, and the two boat feet are respectively used for being in conductive connection with two groups of conductive pieces arranged at intervals in the film coating machine so as to facilitate film coating of the battery pieces placed in the graphite boat. The part of the boat foot, which is used for being contacted with the conductive piece of the coating machine, is arranged into a groove structure, and the groove bottom of the groove is an inclined plane or a curved surface, so that when the groove is matched with the conductive piece, impurities in the coating machine are not easy to attach to the contact part of the groove and the conductive piece, and the arcing frequency of the graphite boat is reduced. And the contact area of the boat foot and the conductive piece can be increased by utilizing the fit of the groove and the conductive piece, so that the supporting force borne by the groove of the boat foot can be more uniform (if the groove matched with the conductive piece is not arranged, the boat foot is directly placed at the conductive piece, the boat foot and the conductive piece are possibly in line contact, the contact area is smaller, and the stress is more concentrated).

Drawings

In order to more clearly illustrate the technical solutions in the embodiments or the prior art of the present application, the drawings used in the embodiments or the prior art description will be briefly described below.

FIG. 1 is a schematic view of a prior art tubular coater and cell carrier installation;

FIG. 2 is a schematic plan view of a coater provided in accordance with an example of the present disclosure;

FIG. 3 is a schematic plan view of a graphite boat provided in accordance with an example of the present application;

fig. 4 is a schematic view illustrating an installation of a coater and a graphite boat according to an example of the present application.

Icon: 01-tubular coating machine; 011-furnace tube; 012-a ceramic rod; 013-a conductive sheet; 02-a cell carrier; 021-leg;

3-coating machine; 31-a furnace body; 32-a support member; 321-a first support rod; 322-a second support bar; 33-a conductive member; 331-a first connection; 4-graphite boat; 41-boat feet; 411-grooves; the direction D is preset.

Detailed Description

Embodiments of the present application will be described in detail below with reference to examples, but those skilled in the art will appreciate that the following examples are only illustrative of the present application and should not be construed as limiting the scope of the present application. The examples, in which specific conditions are not specified, were conducted under conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are not indicated by the manufacturer, and are all conventional products available commercially.

The following is a detailed description of the coater and the graphite boat provided in the examples of the present application:

the commonly used PERC cell manufacturing process flow is: texturing, phosphorus diffusion, back etching, annealing, al2O3 coating, back SiNx coating, front SiNx coating, back laser grooving, screen printing and sintering. The back coating is also used as a main process of PERC, and a production machine of the back coating process commonly seen in the industry at present is mainly a tubular coating machine 01.

Referring to fig. 1, the conventional tubular coating machine 01 mainly adopts the following radio frequency discharge modes: the legs 021 of the cell carrier 02 are in conductive contact with conductive sheets 013 mounted on ceramic rods 012 inside the furnace tubes 011. The support legs 021 are triangular prisms, one of the planes of each triangular prism is in surface-to-surface contact with the body of the battery piece carrier 02, and one of the edges of each triangular prism is in conductive connection with the conductive piece 013.

The inventor finds that, since the legs 021 are in line contact with the conductive sheet 013, and the contact portions of the legs 021 and the conductive sheet 013 are close to the ceramic rods 012, and the conductive sheet 013 has a flat structure, impurities in the furnace tube 011, especially impurities attached to the ceramic rods 012 are easily accumulated at the conductive sheet 013, and the arcing frequency of the cell carrier 02 during the plating process is increased, thereby affecting the plating effect.

Based on this, the inventor provides a coating machine 3 and a graphite boat 4. Referring to fig. 2-4, fig. 2 is a schematic plan view of a coater 3; fig. 3 is a schematic plan view of the graphite boat 4, and fig. 4 is a schematic installation view of the graphite boat 4 and the coater 3.

When the graphite boat 4 and the film coating machine 3 are used for coating the battery piece, for example, back SiNx coating, the boat feet 41 in the graphite boat 4 are in contact with the conductive piece 33 in the film coating machine 3. Because the conductive element 33 protrudes the surface of the supporting element 32 by a certain height, the impurities accumulated on the surface of the supporting element 32 can be prevented from attaching to the contact part of the conductive element 33 and the boat leg 41, the conductive element 33 fits with the groove 411 in the boat leg 41, and the groove bottom of the groove 411 is an inclined plane or a curved surface, so that the probability of attaching the impurities to the conductive element 33 is low, the arcing frequency of the graphite boat 4 is reduced, and the film coating effect is improved.

The coating machine 3 and the graphite boat 4 provided in this example will be described in further detail with reference to the accompanying drawings.

Referring to fig. 2, the coater 3 includes a furnace body 31, a supporting member 32, and two sets of conductive members 33. The support member 32 and the conductive member 33 are disposed in the furnace body 31, and the support member 32 is configured to support the graphite boat 4, so that the graphite boat 4 can be placed in the furnace body 31 for film coating. The two sets of conductive members 33 are disposed at intervals on the supporting member 32, and are respectively used for electrically connecting with two boat legs 41 of the graphite boat 4.

In the example, the furnace body 31 is a tubular structure, and the interior of the furnace tube is used for arranging a support member 32 and a conductive member 33 for placing and conducting the graphite boat 4, and for containing reaction gas and providing a reaction field for the coating process.

The application does not limit the specific arrangement form of the furnace body 31, and related personnel can carry out corresponding adjustment under the condition that the graphite boat 4 can carry out the coating process in the furnace body 31.

In some possible embodiments, the furnace body 31 may have a box-type structure, and the furnace chamber inside the box-type furnace body 31 may have a cylindrical structure or a rectangular parallelepiped structure. The furnace body 31 may have a plurality of chambers formed therein, and the plurality of chambers may have different shapes. In order to facilitate the introduction of the reaction gas, a gas pipeline may be further disposed in the furnace body 31, the gas pipeline may include a plurality of mutually independent pipelines, and each pipeline may be used for conveying different reaction gases. In order to facilitate the conduction of the conductive elements such as the conductive member 33 and the heating element in the furnace body 31, a corresponding wire or power supply is also provided outside the furnace body 31 (such as a rack or a control cabinet).

The support 32 is used for supporting the graphite boat 4, in an example, the support 32 includes a first support rod 321 and a second support rod 322 which are arranged at intervals, the first support rod 321 and the second support rod 322 are cylindrical structures, the axes of the first support rod 321 and the second support rod 322 are parallel to each other, and the distance between the first support rod 321 and the second support rod 322 is 200mm.

The first support rod 321 and the second support rod 322 which are arranged at intervals are arranged on the support 32, so that two ends (two long edges of the bottom plate) of the graphite boat 4 are respectively contacted with the first support rod 321 and the second support rod 322, the contact area between the graphite boat 4 and the support 32 is reduced, and the temperature change or the air flow change of the graphite boat 4 is more uniform.

The present application is not limited to the specific arrangement of the support members 32, and in some possible embodiments, the support members 32 may be arranged in a plate-like structure, and the graphite boat 4 is placed on the support plate. However, when the support member 32 is formed in a plate-like structure, the area of the support plate is large, and a change in temperature, for example, at a portion of the graphite boat 4 in contact with the support plate is affected by the support member 32 (for example, when the heat conductivity of the support member 32 is lower than that of the graphite boat 4, the temperature increase rate or the temperature decrease rate of a portion of the graphite boat 4 close to the support member 32 is different from that of other portions, thereby affecting the temperature uniformity of the graphite boat 4).

Alternatively, four support platforms (two of the support platforms are connected to the conductive member 33) are disposed at intervals in the furnace body 31, and four boat pins 41 of the graphite boat 4 (two of the boat pins 41 are in contact with the conductive member 33) are respectively disposed on the four support platforms, so as to stably dispose the graphite boat 4 in the furnace body 31.

Alternatively, the first support rod 321 and the second support rod 322 may be flat rod-shaped structures such as elliptic cylinders, and the axes of the first support rod 321 and the second support rod 322 may intersect. However, the axes of the first support rod 321 and the second support rod 322 are not parallel, so that the size of the support surface formed between the two contact portions of the graphite boat 4 placed on the corresponding support rods, which are in contact with the first support rod 321 and the second support rod 322, is different, which may reduce the stability of placing the graphite boat 4 in the film plating machine 3.

Or, the distance between the first support rod 321 and the second support rod 322 arranged in parallel is greater than 200mm, but the distance between the first support rod 321 and the second support rod 322 is greater than 200mm, so that the distance between the conductive members 33 respectively connected to the first support rod 321 and the second support rod 322 is greater than 200mm, which may affect the performance of the electric field formed by the two conductive members 33 and affect the film coating effect.

The first support rod 321 and the second support rod 322 may be ceramic rods, which have good electrical insulation and good mechanical properties, and can provide a good support function and a good coating environment for the graphite boat 4.

The conductive member 33 is used for electrically connecting with the boat legs 41 of the graphite boat 4 to form an electric field for performing a plating process.

In the example, two sets of conductive members 33 are respectively disposed on the first support bar 321 and the second support bar 322, and the two sets of conductive members 33 are respectively adapted to fit into corresponding recesses 411 of the two sets of boat legs 41, and the sections of the fit portions are semicircular along the direction perpendicular to the axis of the first support bar 321 or the second support bar 322. That is, the portions of the two sets of conductive members 33 for fitting the recess 411 are semi-cylindrical structures, and the arc surfaces of the semi-cylindrical structures fit the recess 411.

The part of the conductive piece 33, which is used for being matched with the groove 411, is set into a semi-cylindrical structure, and because the smooth cambered surface is not easy to accumulate impurities, and the contact area of the smooth curved surface is larger, the arcing frequency of the graphite boat 4 can be reduced, and the film coating efficiency of the film coating machine 3 is improved.

The application does not limit the specific shape of the portion of the conductive member 33 for engaging with the recess 411, and the relevant person can adjust the conductive member 33 to engage with the recess 411.

In some possible embodiments, when the bottom of the recess 411 is a slope, the portion of the conductive member 33 contacting the recess 411 is a corresponding bump structure, and the top of the bump structure is a slope. For example, when the cross section of the groove 411 is a first triangle and the bottom of the groove 411 is located at one of the top corners, the cross section of the portion of the electric element 33 contacting the groove 411 is a second triangle, wherein the first triangle and the second triangle are similar in shape, and the second triangle can be embedded in the first triangle. Alternatively, when the cross-section of the recess 411 has a curved structure such as a semi-ellipse, the cross-section of the portion of the electric element 33 for contacting the recess 411 has a corresponding semi-ellipse.

In the example, the conductive elements 33 protrude a predetermined distance of 9mm from the surface of the corresponding support element 32 along the predetermined direction D, wherein the diameter of the semi-cylindrical structure is 12mm.

The present application does not limit the preset distance that the conductive members 33 protrude from the surface of the corresponding support member 32, and in some possible embodiments, the preset distance includes, but is not limited to, a range between one or any two of 6mm, 6.5mm, 7mm, 8mm, or 9mm.

In some possible embodiments, the included angle between the preset direction D and the antigravity direction includes, but is not limited to, any value not exceeding 90 ° such as 15 °, 30 °, 45 °, 75 °, 85 °, and the like.

The present application does not limit the diameter of the semi-cylindrical structures, which in some possible embodiments include, but are not limited to, a range between one or any two of 10mm, 11mm, 12mm, 14mm, or 15mm. Alternatively, the diameter of the semi-cylindrical structure is larger than 15mm, but the diameter of the semi-cylindrical structure is too large, which may increase the contact resistance between the conductive member 33 and the boat foot 41. Alternatively, the diameter of the semi-cylindrical structure is smaller than 10mm, and the smaller diameter of the semi-cylindrical structure may further reduce the probability of impurity accumulation, but the contact area between the conductive member 33 and the boat leg 41 is too small, which may reduce the stability of conductive contact between the conductive member 33 and the boat leg 41 and the structural stability of the conductive member 33 and the boat leg 41 (the contact area is too small, and the concentrated force received by the conductive member 33 and the boat leg 41 is larger).

In an example, in order to facilitate the connection of the conductive member 33 to the first support rod 321 or the second support rod 322, the conductive member 33 is further provided with a first connection portion 331. The conductive member 33 is connected to the first support rod 321 or the second support rod 322 by a first connection portion 331, which may be a fixed connection or a detachable connection.

The application does not limit the specific arrangement form of the first connection portion 331, and in some possible embodiments, the first connection portion 331 has a snap ring structure. The snap ring structure is formed by enclosing two semi-rings, an enclosed cavity formed by the two semi-rings can accommodate the first support rod 321 or the second support rod 322, and the size of the enclosed cavity can be adjusted, so that the snap ring structure can be tightly sleeved on the corresponding support rod or can be detached from the corresponding support rod. The adjustment of the enclosed cavity may be, for example, by compressing the distance between the two half-rings, etc. One end of one of the semi-ring snap ring structures, which is far away from the support rod, protrudes out of the support rod by a preset distance so as to be in contact with the boat foot 41. Or, the first connection portion 331 may be a protrusion structure, and a groove may be formed at a corresponding position of the first support rod 321 or the second support rod 322, so that the first connection portion 331 and the corresponding support rod are connected (clamped) in a concave-convex fit manner.

Referring to fig. 3 and 4, the graphite boat 4 includes at least two boat legs 41, the boat legs 41 have a groove 411, a bottom of the groove 411 is an inclined plane or a curved plane, and the groove 411 is used to fit with a portion of the conductive member 33 in the coater 3.

The specific arrangement form of the graphite boat 4 is not limited by the present application, and the relevant personnel can perform corresponding adjustment as required under the condition that the groove 411 can be ensured to be matched with the conductive piece 33.

In some possible embodiments, when the contact portion of the conductive member 33 for contacting the boat foot 41 is a curved surface (e.g., a semicircular arc), the bottom of the groove 411 in the boat foot 41 is a curved surface (e.g., a semicircular arc); when the contact portion of the conductive member 33 for contacting the boat leg 41 is an inclined surface, the bottom of the groove 411 in the boat leg 41 is an inclined surface.

The number of the boat feet 41 is not limited in the present application, and in some possible embodiments, the graphite boat 4 includes 4 boat feet 41, two boat feet 41 are used for contacting the conductive member 33 in the coater 3, and the other two boat feet 41 are used for contacting the support member 32.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. The coating machine is characterized by comprising a furnace body, a support piece and two groups of conductive pieces, wherein the support piece and the two groups of conductive pieces are arranged in the furnace body:

the support piece is equipped to support a graphite boat, the graphite boat comprises at least two boat feet, the boat feet are provided with grooves, and the bottoms of the grooves are inclined planes or curved surfaces;

the two groups of conductive pieces are arranged on the supporting piece at intervals, and protrude out of the surface of the supporting piece along a first preset direction for a first preset distance respectively; the conductive piece is equipped to be in conductive connection with the boat foot, and the part of the conductive piece, which is in contact with the boat foot, is matched with the groove.

2. The coater of claim 1 wherein the first predetermined distance is 6-9mm.

3. The coating machine as claimed in claim 1, wherein when the bottom of the groove is a curved surface, the part of the conductive member for fitting with the groove is in a semi-cylindrical structure, and the curved surface of the semi-cylindrical structure is for fitting with the groove.

4. A coater as claimed in claim 3 wherein said semi-cylindrical structures have a diameter of 10-15mm.

5. The coater according to claim 4, wherein the support member comprises a first support bar and a second support bar arranged at intervals, two sets of the conductive members are respectively arranged on the first support bar and the second support bar, and the first predetermined direction intersects with a plane formed by an axis of the first support bar and an axis of the second support bar.

6. The coater according to claim 5 wherein the first support bar and the second support bar are arranged in parallel and the distance between the first support bar and the second support bar is no greater than 200mm.

7. The coater of claim 5 wherein the diameter of the semi-cylindrical structure is no greater than the diameter of the first support bar or the second support bar.

8. A coater as claimed in any one of claims 5 to 7 wherein said conductive member includes a first connection portion, said first connection portion being provided to connect with said first support bar or said second support bar.

9. The coater according to claim 8, wherein the first connecting portion is a snap ring structure to be sleeved on the first support rod or the second support rod.

10. The graphite boat is characterized by comprising at least two boat feet, wherein each boat foot is provided with a groove, and the bottom of each groove is an inclined plane or a curved surface;

the groove is used for matching with the conductive piece in the film plating machine of any one of claims 1 to 9.

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