CN115631987B - Boat foot, carrier and deposition equipment - Google Patents

Boat foot, carrier and deposition equipment Download PDF

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Publication number
CN115631987B
CN115631987B CN202211015818.1A CN202211015818A CN115631987B CN 115631987 B CN115631987 B CN 115631987B CN 202211015818 A CN202211015818 A CN 202211015818A CN 115631987 B CN115631987 B CN 115631987B
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Prior art keywords
boat
conductive
piece
foot
block
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CN115631987A (en
Inventor
严大
张胜
李挺
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Jiangsu Leadmicro Nano Technology Co Ltd
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Jiangsu Leadmicro Nano Technology Co Ltd
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Priority to CN202211015818.1A priority Critical patent/CN115631987B/en
Publication of CN115631987A publication Critical patent/CN115631987A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention provides a boat foot, a carrier and deposition equipment, wherein the carrier comprises: a plurality of first conductive boat pieces and a plurality of second conductive boat pieces which are alternately arranged at intervals; the first conductive boat piece comprises a first connecting convex piece; the second conductive boat piece comprises a second connecting convex piece; part of the first conductive boat pieces and the second conductive boat pieces form a first boat piece group, and the first conductive boat pieces in the first boat piece group further comprise first complementary connecting convex pieces positioned on the front side; the first boat foot conductive block is provided with a first isolation groove; the first isolation groove is provided with a first main insulating piece; the second connecting convex piece in the first boat piece group is electrically isolated from the first boat foot conductive block through the first main insulating piece; the first supplementary connection convex piece in the first boat piece group is electrically connected with the first boat foot conductive block; the second connecting convex piece outside the first boat piece group is electrically connected; the adjacent first connecting convex pieces are electrically connected and electrically isolated from the second conductive boat piece. The position stability and the coating process parameter stability of the carrier are improved.

Description

Boat foot, carrier and deposition equipment
Technical Field
The invention relates to the technical field of battery piece processing, in particular to a boat foot, a carrier and a deposition device.
Background
In the photovoltaic industry, graphite boats are used as carriers for photovoltaic cells, and they occupy an important position in the coating process. The structural design of the graphite boat directly influences the yield of the plasma discharge, process gas and the like which participate in chemical reaction coating, so that the graphite boat becomes an indispensable component in the photovoltaic coating process.
The graphite boat in the prior art is formed by combining a plurality of graphite boat sheets with the thickness of only 2-3mm, every two layers of graphite boat sheets are separated by an insulating ceramic ring, an odd number boat sheet or an even number boat sheet can be formed, electrodes with opposite electrical properties are required to be fed into the adjacent graphite boat sheets, a positive and negative electric field is formed between the adjacent graphite boat sheets, and a flow field formed by process gas reaches between the adjacent graphite boat sheets, so that the radio-frequency discharge starting is achieved. Different electrode feeding modes are available at present, and the different electrode feeding modes directly influence plasma gas discharge, complexity of a process and maintenance difficulty of later hardware equipment.
There are two common ways in which electrodes are fed. One is that the feed mode is that the front boat leg and the rear boat leg at the front side in the graphite boat are fed, namely, different electrode rods at the bottom of the graphite boat are respectively connected with the front boat leg and the rear boat leg, but the structure can introduce complicated electrode rod designs, the electrode rod is often caused to be subjected to high-frequency discharge and arc striking melting in a high-temperature and high-pressure environment due to the existence of a temperature field, so that instability and high time cost of maintenance downtime are brought to the whole system, and secondly, the electric conduction path of the electrode rod connected with the front boat leg and the electric conduction path of the electrode rod connected with the rear boat leg are inconsistent, so that the speed of positive and negative electric signal switching of the front boat leg and the rear boat leg is different, plasma in the graphite boat is unstable, the film plating process is adversely affected, and the stability of the film plating process parameters of the graphite boat is poor. The other feeding mode is an inserting type feeding mode, namely, two feeding holes are respectively formed in a graphite block at the upper end and a graphite block at the lower end of the rear side of the graphite boat, only two extremely short electrode rods are used for matching with the feeding holes when the graphite boat is conveyed into a furnace body by adopting a paddle rod, the electrode rods and the graphite boat are extruded when the graphite boat is placed, so that the electrode rods generate certain deflection, the straightness of the two electrode rods can be influenced, high precision requirements are provided for the stability of conveying the boat by the paddle rod, and extremely high precision requirements are also required for debugging the two electrode rods.
In conclusion, the graphite boat in the prior art has poor position stability and poor stability of coating process parameters.
Disclosure of Invention
In view of the above, the invention provides a boat foot, a carrier and a deposition device, which are used for solving the problems of poor position stability and poor stability of coating process parameters of a graphite boat in the prior art.
The invention provides a boat foot, comprising: the boat foot conductive block is provided with an isolation groove; a main insulator located in the isolation groove; the boat foot conductive block is suitable for being electrically isolated from a part of conductive boat sheets of a first polarity through a main insulating piece, and is also suitable for being electrically connected with a part of conductive boat sheets of a second polarity through a connecting part, wherein the first polarity and the second polarity are opposite.
Optionally, the primary insulation comprises a ceramic primary insulation.
Optionally, the connection part is a connection groove in the boat leg conductive block, and the connection groove and the isolation groove are alternately arranged at intervals.
Optionally, the boat foot conductive block comprises a supporting piece and a conductive fixing block which is positioned on the supporting piece and connected with the supporting piece, and the isolation groove and the connecting groove are both positioned in the conductive fixing block.
Optionally, the conductive fixing block includes a first side wall and a second side wall which are oppositely arranged, and a first top wall which is away from the supporting piece, and the first top wall is connected with the first side wall and the second side wall; the isolation groove penetrates through the conductive fixing block from the first side wall to the second side wall, and the isolation groove is exposed out of the first top wall.
Optionally, the connecting groove extends from the first side wall into a part of the conductive fixing block, a distance from the connecting groove to the second side wall is greater than zero, and the first top wall exposes the connecting groove.
Optionally, the dimension of the connecting groove extending from the first side wall toward the second side wall is 30% -70% of the distance from the first side wall to the second side wall.
Optionally, the conductive fixing block further includes a third side wall and a fourth side wall which are oppositely arranged, the third side wall is connected with the first side wall and the second side wall, and the fourth side wall is connected with the first side wall and the second side wall; the boat foot further comprises: and the auxiliary insulating piece is positioned on the third side wall and the fourth side wall of the boat foot conductive block.
The present invention also provides a carrier having oppositely disposed front and rear sides in a length direction of the carrier, comprising: the first conductive boat pieces and the second conductive boat pieces are alternately arranged at intervals; the first conductive boat piece comprises a first connecting convex piece positioned at the front side, and the first connecting convex piece is positioned at the upper end of the first conductive boat piece in the height direction; the second conductive boat piece comprises a second connecting convex piece positioned at the front side, and the second connecting convex piece is positioned at the lower end of the second conductive boat piece in the height direction; the first conductive boat pieces and the second conductive boat pieces which are arranged in sequence form a first boat piece group, the first conductive boat pieces in the first boat piece group further comprise first supplementary connection convex pieces positioned at the front side, and the first supplementary connection convex pieces are positioned at the lower ends of the first conductive boat pieces in the first boat piece group in the height direction; first boat foot that is connected with first boat piece group, first boat foot includes: the first boat foot conductive block is provided with a first isolation groove; a first main insulator located in the first isolation groove; the second connecting convex piece in the first boat piece group is electrically isolated from the first boat foot conductive block through the first main insulating piece; the first supplementary connection convex piece in the first boat piece group is electrically connected with the first boat foot conductive block; the second connecting convex piece outside the first boat piece group is electrically connected; the adjacent first connecting convex pieces are electrically connected and electrically isolated from the second conductive boat piece.
Optionally, the second connecting protruding member of the first boat sheet group is embedded in the first main insulating member.
Optionally, the first boat leg conductive block is further provided with a first connecting groove, and the first connecting groove and the first isolation groove are alternately arranged at intervals; the first supplemental connector tab is positioned in the first connector slot.
Optionally, the dimension of the first connecting groove in the length direction of the carrier is smaller than the dimension of the first isolation groove in the length direction of the carrier.
Optionally, the method further comprises: the first connecting conductive blocks are positioned between the adjacent first connecting convex pieces and are spaced from the second conductive boat pieces.
Optionally, the first boat foot further includes: the first auxiliary insulating piece is positioned between the first boat foot conductive block and the second connecting convex piece adjacent to the first boat foot conductive block.
Optionally, the method further comprises: and the second boat foot conductive blocks are connected with the second connecting convex pieces in part of the second conductive boat pieces and are spaced from the first boat piece group, and the polarity of electrodes used for feeding by the first boat foot conductive blocks is opposite to that of electrodes used for feeding by the second boat foot conductive blocks.
Optionally, the method further comprises: the second connecting conductive block is positioned between the first boat leg conductive block and the adjacent second connecting convex piece on the side part of the second boat leg conductive block.
Optionally, the method further comprises: the first insulating connecting rod penetrates through the first boat foot conductive block, the second connecting convex piece and the second connecting conductive block; and/or a second insulating connecting rod, wherein the second insulating connecting rod penetrates through the first boat leg conductive block, the second connecting convex piece, the first complementary connecting convex piece and the second connecting conductive block.
Optionally, the method further comprises: the third connecting rod penetrates through the first connecting convex parts of the first conductive boat pieces and the first connecting conductive blocks between the adjacent first connecting convex parts, and the third connecting rod is made of insulating materials or conductive materials.
Optionally, the first conductive boat piece further comprises a third connecting convex piece positioned at the rear side, and the third connecting convex piece is positioned at the lower end of the first conductive boat piece in the height direction; the second conductive boat piece further comprises a fourth connecting convex piece positioned at the rear side, and the fourth connecting convex piece is positioned at the upper end of the second conductive boat piece in the height direction; the first conductive boat piece and the second conductive boat piece which are arranged in sequence form a second boat piece group, and the second boat piece group and the first boat piece group are arranged at intervals; the second conductive boat pieces in the second boat piece group further comprise second complementary connecting convex pieces positioned at the rear side, and the second complementary connecting convex pieces are positioned at the lower ends of the second conductive boat pieces in the second boat piece group in the height direction; the carrier further comprises: and a third boat leg connected with the second boat sheet group, the third boat leg comprising: the third boat foot conductive block is provided with a third isolation groove; a third main insulator located in the third isolation groove; the third connecting convex piece in the second boat piece group is electrically isolated from the third boat foot conductive block through a third main insulating piece; the second supplementary connection convex piece in the second boat piece group is electrically connected with the third boat foot conductive block; the third connecting convex piece outside the second boat piece group is electrically connected; the adjacent fourth connecting convex piece is electrically connected with and isolated from the first conductive boat piece.
Optionally, a third connecting protrusion in the second boat sheet set is embedded in the third main insulating member.
Optionally, a third connecting groove is further formed in the third boat leg conductive block, and the third connecting groove and the third isolation groove are alternately arranged at intervals; the second supplemental connector tab is located in the third connector slot.
Optionally, the method further comprises: and the third connecting conductive block is positioned between the adjacent fourth connecting convex pieces and is spaced from the first conductive boat piece.
Optionally, the third boat leg further includes: and the third auxiliary insulating piece is positioned between the third boat leg conductive block and the third connecting convex piece adjacent to the third boat leg conductive block.
Optionally, the method further comprises: and the fourth boat foot conductive block is connected with the third connecting convex piece in part of the first conductive boat piece and is spaced from the second boat piece group.
Optionally, the carrier comprises a graphite boat.
The present invention also provides a deposition apparatus comprising: a chamber; a support rod positioned in the chamber, the support rod being provided with an electrode block; a carrier, the carrier being located on the electrode block; the electrode block is suitable for feeding electric signals with opposite electric properties to the same side of the first conductive boat piece and the plurality of second conductive boat pieces.
The technical scheme provided by the invention has the following effects:
the boat leg provided by the technical scheme of the invention comprises a boat leg conductive block, wherein an isolation groove is formed in the boat leg conductive block, and a main insulating piece is arranged in the isolation groove; the boat foot conductive block is suitable for being electrically isolated from a part of conductive boat sheets of a first polarity through a main insulating piece, and is also suitable for being electrically connected with a part of conductive boat sheets of a second polarity through a connecting part, wherein the first polarity and the second polarity are opposite. The boat feet can be used for selecting the electric connection or electric isolation of part of the conductive boat sheets, and can realize the feeding of electrodes on the same side of the carrier.
According to the carrier provided by the technical scheme of the invention, the first boat leg is arranged, and comprises: the first boat foot conductive block is provided with a first isolation groove; the first main insulator is positioned in the first isolation groove. The second connecting convex piece in the first boat piece group is electrically isolated from the first boat foot conductive block through the first main insulating piece; the first supplementary connection convex piece in the first boat piece group is electrically connected with the first boat foot conductive block. Thus, the first polar electrode is fed in through the first boat foot conductive block, the first boat foot conductive block is electrically connected with the first conductive boat pieces in the first boat piece group through the first complementary connecting convex piece, and the adjacent first connecting convex piece is electrically connected with and isolated from the second conductive boat pieces, namely, the first connecting convex piece of the first conductive boat pieces in the first boat piece group is electrically connected with the first connecting convex piece of the first conductive boat pieces outside the first boat piece group, so that the first polar electrode is fed in to each first conductive boat piece at the front side of the carrier. The second connecting convex parts outside the first boat piece group are electrically connected, and can feed the second polarity electrode to each second conductive boat piece at the front side of the carrier. In summary, the first conductive boat sheet and the second conductive boat sheet of the carrier can be fed with electrodes with opposite electrical properties on the same side of the carrier, so that the electrical properties of the adjacent first conductive boat sheet and second conductive boat sheet are opposite. The electrode rod for providing the electric signals for the carrier avoids using complex design, the electric conduction paths of the electric signals fed into the first conductive boat piece and the second conductive boat piece are consistent, the positive and negative electric signals on the first conductive boat piece and the second conductive boat piece are consistent in switching speed, plasma in the carrier is stable, and the stability of the coating process parameters of the carrier is improved. Meanwhile, the first boat leg conducting block is not required to be provided with holes to be connected with the electrode rod in a matched mode, deflection of the electrode rod for providing electric signals for the carrier is avoided, and accuracy of the conveying position of the carrier in operation is improved. In conclusion, the position stability of the carrier and the stability of the coating process parameters are improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic perspective view of a carrier according to an embodiment of the invention;
FIG. 2 is an enlarged view of a first boat foot according to an embodiment of the present invention;
FIG. 3 is a schematic view of a first conductive boat outside the first boat set according to an embodiment of the present invention;
FIG. 4 is a schematic view of a first conductive boat in a first boat set according to an embodiment of the invention;
FIG. 5 is a schematic view of a second conductive boat outside the second boat set according to an embodiment of the present invention;
FIG. 6 is a schematic view of a second conductive boat in a second boat set according to an embodiment of the invention;
fig. 7 is a block diagram of a boat foot according to another embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, or can be communicated inside the two components, or can be connected wirelessly or in a wired way. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The present embodiment provides a carrier having a front side and a rear side disposed opposite to each other in a length direction of the carrier, and referring to fig. 1, including:
a plurality of first conductive boat pieces 100 and a plurality of second conductive boat pieces 200, the first conductive boat pieces 100 and the second conductive boat pieces 200 being alternately arranged at intervals; the first conductive boat piece 100 includes a first connection protrusion 1001 at a front side, and the first connection protrusion 1001 is located at an upper end of the first conductive boat piece 100 in a height direction; the second conductive boat 200 includes a second connection protrusion 2002 on the front side, and the second connection protrusion 2002 is located at the lower end of the second conductive boat 200 in the height direction;
the first conductive boat pieces 100 and the second conductive boat pieces 200 which are arranged in sequence form a first boat piece group A, the first conductive boat pieces 100 in the first boat piece group A also comprise first complementary connecting convex pieces b1 positioned at the front side, and the first complementary connecting convex pieces b1 are positioned at the lower ends of the first conductive boat pieces 100 in the first boat piece group A in the height direction;
a first boat foot G1 connected to the first boat sheet group a, the first boat foot G1 including a first boat foot conductive block 301, the first boat foot conductive block 301 having a first isolation groove 3011 therein; a first main insulator 401 located in the first isolation slot 3011;
The second connecting convex piece 2002 in the first boat sheet group a is electrically isolated from the first boat foot conductive block 301 by the first main insulating piece 401; the first supplementary connection convex part b1 in the first boat sheet group a is electrically connected with the first boat foot conductive block 301; the second connecting convex piece 2002 outside the first boat piece group a is electrically connected;
adjacent first connection tabs 1001 are electrically connected and electrically isolated from the second conductive boat 200.
In this embodiment, the second connection protruding member 2002 in the first boat sheet group a is electrically isolated from the first boat foot conductive block 301 by the first main insulating member 401; the first complementary connecting convex part b1 in the first boat sheet group a is electrically connected with the first boat foot conductive block 301. Thus, the first polarity electrode is fed through the first boat foot conductive block 301, the first boat foot conductive block 301 is electrically connected with the first conductive boat pieces 100 in the first boat sheet group a through the first complementary connecting convex piece b1, and the adjacent first connecting convex piece 1001 is electrically connected with and isolated from the second conductive boat pieces 200, that is, the first connecting convex piece 1001 of the first conductive boat pieces 100 in the first boat sheet group a is electrically connected with the first connecting convex piece 1001 of the first conductive boat pieces 100 outside the first boat sheet group a, so that the first polarity electrode is fed to each first conductive boat piece 100 on the front side of the carrier. The second connection protrusions 2002 outside the first boat a are electrically connected, and can feed the second polarity electrode to each second conductive boat 200 at the front side of the carrier. In summary, the first conductive boat 100 and the second conductive boat 200 of the carrier can be fed with electrodes with opposite electrical properties on the same side of the carrier, so that the electrical properties of the adjacent first conductive boat 100 and second conductive boat 200 are opposite. Thus, the electrode rod for providing the electric signals for the carrier avoids using complex design, the electric conduction paths for feeding the electric signals to the first conductive boat piece 100 and the second conductive boat piece 200 are consistent, the positive and negative electric signals on the first conductive boat piece 100 and the second conductive boat piece 200 are consistent in switching speed, the plasmas in the carrier are stable, and the stability of the coating process parameters of the carrier is improved. Meanwhile, the first boat leg conducting block 301 does not need to be provided with holes to be connected with the electrode rod in a matched mode, deflection of the electrode rod for providing electric signals for the carrier is avoided, and accuracy of the conveying position of the carrier in operation is improved. In conclusion, the position stability of the carrier and the stability of the coating process parameters are improved.
The carrier includes a graphite boat. In this embodiment, fig. 1 illustrates a carrier as a graphite boat.
In this embodiment, the second connecting protruding member 2002 in the first boat sheet set a is embedded in the first main insulating member 401, so that the second connecting protruding member 2002 in the first boat sheet set a is electrically isolated from the first boat foot conductive block 301, and the second connecting protruding member 2002 is limited by the first main insulating member 401, thereby improving the position stability of the second conductive boat sheet 200.
The material of the first main insulator 401 comprises a ceramic main insulator.
The first boat foot conductive block 301 comprises a graphite boat foot conductive block.
The first boat leg conductive block 301 further has first connection grooves (not shown), and the first connection grooves and the first isolation grooves 3011 are alternately arranged at intervals; the first supplemental connector tab b1 is located in the first connector slot.
In one embodiment, the first isolation groove 3011 extends from a side wall of the first boat foot conductive block 301 near the carrier side to a side wall of the first boat foot conductive block 301 away from the carrier side.
In other embodiments, the first isolation groove extends from the side wall of the first boat foot conductive block 301 near the carrier side into a part of the first boat foot conductive block 301, and the first isolation groove has a certain distance from the side wall of the first boat foot conductive block 301 far away from the carrier side.
In this embodiment, in order to embed the second connection protrusion 2002 in the first boat a in the first main insulating member 401 and maintain a state of being spaced apart from the first boat foot conductive block 301, the height dimension of the second connection protrusion 2002 in the first boat a needs to be smaller than the height dimension of the second connection protrusion 2002 of the second conductive boat 200 outside the first boat a. And the second connection protrusions 2002 of the second conductive boat 200 have the same dimension in the longitudinal direction of the carrier. This results in less structural change to the second connecting tab 2002 in the first boat deck a.
The length direction of the carrier is perpendicular to the arrangement direction of the first conductive boat sheet 100 and the second conductive boat sheet 200.
In one embodiment, the dimension of the first connection slot in the length direction of the carrier is smaller than the dimension of the first isolation slot 3011 in the length direction of the carrier. In this way, the first connecting groove does not extend to the corner between the top wall of the first boat foot conductive block 301 and the side wall of the first boat foot conductive block 301 facing away from one side of the carrier, so that the capability of bearing external force at the corner between the top wall of the first boat foot conductive block 301 and the side wall facing away from one side of the carrier is stronger, and the supporting performance of the first boat foot conductive block 301 is improved.
In other embodiments, the dimension of the first connecting slot in the length direction of the carrier is equal to or greater than the dimension of the first isolation slot 3011 in the length direction of the carrier.
In one embodiment, the dimension of the first connecting groove in the length direction of the carrier is 30% -70% of the dimension of the first boat foot conductive block 301 in the length direction of the carrier.
In this embodiment, the carrier further includes: the first connection conductive blocks 501 are located between adjacent first connection protrusions 1001 and spaced apart from the second conductive boat 200. Thus, the first conductive boat pieces 100 in the first boat piece group a are electrically connected with the first conductive boat pieces 100 outside the first boat piece group a through the first connecting conductive block 501. The first connecting conductive block 501 does not need to be provided with holes to be matched and connected with the electrode rod, so that the deflection of the electrode rod for providing electric signals for the carrier is avoided.
The first connection conductive block 501 comprises a graphite conductive block.
The first boat foot G1 further includes: the first auxiliary insulating member 801 is located between the first boat foot conductive block 301 and the second connecting convex member 2002 adjacent to the first boat foot conductive block 301. The first sub-insulating member 801 electrically isolates the first boat foot conductive block 301 from the second connection boss 2002 at the side of the first boat foot conductive block 301.
The carrier further comprises: and a second boat-foot conductive block 302 connected with the second connection convex piece 2002 in part of the second conductive boat 200 and spaced from the first boat group a, wherein the polarity of the electrode for feeding by the first boat-foot conductive block 301 is opposite to that of the electrode for feeding by the second boat-foot conductive block 302.
The second boat foot conductive block 302 is spaced from the first boat foot conductive block 301.
The second boat foot conductive bump 302 comprises a graphite boat foot conductive bump.
The second boat foot conductive block 302 has a plurality of second grooves therein, and the second connection protrusions 2002 in the second conductive boat pieces 200 outside the first boat piece group a are embedded in the second grooves in the second boat foot conductive block 302, so that the second connection protrusions 2002 in the second conductive boat pieces 200 outside the first boat piece group a are electrically connected with the second boat foot conductive block 302.
The carrier further comprises: and a second connection conductive block 502, wherein the second connection conductive block 502 is positioned between the first boat foot conductive block 301 and the adjacent second connection convex piece 2002 at the side of the second boat foot conductive block 302. The second boat foot conductive bump 302 and the second connection conductive bump 502 electrically connect adjacent second connection bumps 2002 outside the first boat sheet group a.
The second connection conductive block 502 includes a graphite conductive block.
The carrier further comprises: a first insulating connecting rod 601, wherein the first insulating connecting rod 601 passes through the first boat foot conductive block 301, the second boat foot conductive block 302, the second connecting convex piece 2002 and the second connecting conductive block 502; and/or a second insulating connecting rod 602, the second insulating connecting rod 602 passing through the first boat foot conductive block 301, the second boat foot conductive block 302, the second connecting boss 2002, the first supplemental connecting boss b1, and the second connecting conductive block 502. In fig. 1, the carrier includes a first insulating connecting rod 601 and a second insulating connecting rod 602.
The first insulating connecting rod 601 improves the positional stability of the first boat foot conductive block 301, the second boat foot conductive block 302, the second connecting convex member 2002, and the second connecting conductive block 502 with respect to each other. The second insulating connecting rod 602 allows the first boat foot conductive block 301, the second boat foot conductive block 302, the second connecting boss 2002, the first supplemental connecting boss b1, and the second connecting conductive block 502 to be more positionally stable with respect to each other.
The first insulating connecting rod 601 comprises a ceramic connecting rod. The second insulated connecting rod 602 comprises a ceramic connecting rod.
The carrier further comprises: and a third connecting rod 603, wherein the third connecting rod 603 passes through the first connecting convex pieces 1001 of each first conductive boat piece 100 and the first connecting conductive blocks 501 between the adjacent first connecting convex pieces 1001, and the material of the third connecting rod 603 is an insulating material or a conductive material.
When the material of the third connecting rod 603 is a conductive material, the third connecting rod 603 includes a graphite connecting rod.
When the material of the third connecting rod 603 is an insulating material, the third connecting rod 603 includes a ceramic connecting rod.
The first conductive boat 100 further includes a third connection boss 1003 located at the rear side, and the third connection boss 1003 is located at the lower end of the first conductive boat 100 in the height direction; the second conductive boat 200 further includes a fourth connection protrusion 2004 at the rear side, the fourth connection protrusion 2004 being located at the upper end of the second conductive boat 200 in the height direction.
The first conductive boat piece 100 and the second conductive boat piece 200 which are partially and sequentially arranged form a second boat piece group, and the second boat piece group and the first boat piece group A are arranged at intervals; the second conductive boat 200 in the second boat group further includes a second supplemental connection tab b2 located at the rear side, and the second supplemental connection tab b2 is located at the lower end of the second conductive boat 200 in the second boat group in the height direction.
In this embodiment, the carrier further includes: a third boat leg (not shown) connected to the second boat sheet group, the third boat leg including: the third boat foot conductive block is provided with a third isolation groove; and the third main insulating piece is positioned in the third isolation groove. The third boat foot conductive block comprises a graphite boat foot conductive block. The third main insulator comprises a ceramic main insulator.
The third connecting tab 1003 in the second boat set is electrically isolated from the third boat foot conductive block by a third main insulator.
The third connecting protruding member 1003 in the second boat sheet set is embedded in the third main insulating member, so that the third connecting protruding member 1003 in the second boat sheet set is electrically isolated from the third boat foot conductive block, and the third connecting protruding member 1003 in the second boat sheet set is limited by the third main insulating member, thereby improving the position stability of the first conductive boat sheet 100.
In this embodiment, in order to embed the third connecting protruding member 1003 in the second boat sheet set in the third main insulating member and maintain a state of being spaced apart from the third boat foot conductive block, the height dimension of the third connecting protruding member 1003 in the second boat sheet set needs to be smaller than the height dimension of the third connecting protruding member 1003 of the first conductive boat sheet 100 outside the second boat sheet set. And the third connecting projection 1003 of each first conductive boat 100 is uniform in size in the length direction of the carrier. This results in less structural change to the third connector lug 1003 in the second boat set.
The third boat leg conductive block is also provided with a third connecting groove, and the third connecting groove and the third isolation groove are alternately arranged at intervals; the second complementary connecting projection b2 is located in the third connecting groove.
The second supplementary connection convex part b2 in the second boat sheet group is positioned in the third connection groove and is electrically connected with the third boat foot conductive block. The third connection boss 1003 outside the second boat set is electrically connected.
The adjacent fourth connecting tab is electrically connected and electrically isolated from the first conductive boat piece 100.
The carrier further comprises: the third connecting conductive block 503 is located between the adjacent fourth connecting protrusions 2004 and spaced apart from the first conductive boat piece 100. The third connecting conductive block 503 comprises a graphite conductive block.
In one embodiment, the third isolation groove extends from a side wall of the third boat foot conductive block near the side of the carrier to a side wall of the third boat foot conductive block far from the side of the carrier. In other embodiments, the third isolation groove extends from a side wall of the third boat leg conductive block near the carrier to a part of the third boat leg conductive block, and the third isolation groove and the third boat leg conductive block are away from the side wall of the carrier by a certain distance.
In an embodiment, the dimension of the third connecting groove in the length direction of the carrier is smaller than the dimension of the third isolation groove in the length direction of the carrier, so that the supporting performance of the third boat leg conductive block is improved. In other embodiments, the dimension of the third connection groove in the length direction of the carrier is greater than or equal to the dimension of the third isolation groove in the length direction of the carrier.
In one embodiment, the dimension of the third connecting groove in the length direction of the carrier is 30% -70% of the dimension of the third boat leg conductive block in the length direction of the carrier.
The third boat leg further comprises: and the third auxiliary insulating piece is positioned between the third boat leg conductive block and the third connecting convex piece adjacent to the third boat leg conductive block. The third auxiliary insulating piece electrically isolates the third boat foot conductive block from the third connecting convex piece on the side part of the third boat foot conductive block.
The carrier further comprises: a fourth boat foot conductive block (not shown) connected to the third connection boss 1003 in part of the first conductive boat 100 and spaced apart from the second boat group. The fourth boat foot conductive block comprises a graphite boat foot conductive block. The fourth boat foot conductive block and the third boat foot conductive block are arranged at intervals.
The carrier further comprises: and a fourth connecting conductive block, the fourth connecting conductive block being located between the third boat foot conductive block and the adjacent third connecting convex member 1003 on the side of the fourth boat foot conductive block. And the fourth connecting conductive block is a graphite conductive block. The fourth connecting conductive block and the fourth boat foot conductive block electrically connect adjacent third connecting tabs 1003 outside the second boat blade set.
The fourth boat foot conductive block is provided with a plurality of fourth grooves, and the third connecting convex parts 1003 in the part of the first conductive boat piece 100 outside the second boat piece group are embedded into the fourth grooves in the fourth boat foot conductive block, so that the third connecting convex parts 1003 in the part of the first conductive boat piece 100 outside the second boat piece group are electrically connected with the fourth boat foot conductive block.
In this embodiment, the second boat foot conductive block is connected to the second connection convex member 1002 of the second conductive boat 200 in the second boat sheet set. The fourth boat foot conductive block is connected to the third connecting boss 1003 of the first conductive boat 100 in the first boat group.
In other embodiments, the second conductive boat 200 connected to the second boat foot conductive block may be partially or not belonging to the second boat group. The first conductive boat sheet 100 connected to the fourth boat foot conductive block may be partially belonging to the first boat sheet group or not belonging to the first boat sheet group.
In this embodiment, the third boat leg conductive block and the fourth boat leg conductive block are provided, and the carrier may further adopt the third boat leg conductive block and the fourth boat leg conductive block to realize electrode feeding on the same side. When the carrier is placed in the furnace body, the front and back positions do not need to be considered. When the front side of the carrier is close to the furnace mouth of the furnace body, feeding electrodes with opposite electrical properties into the first boat foot conductive block and the second boat foot conductive block; when the rear side of the carrier approaches the furnace mouth of the furnace body, electrodes with opposite electrical properties are fed into the third boat leg conductive block and the fourth boat leg conductive block.
The carrier further comprises: a fourth insulating connecting rod (not shown) passing through the third boat foot conductive block, the fourth boat foot conductive block, the third connecting convex piece, and the fourth connecting conductive block; and/or a fifth insulating connecting rod passing through the third boat foot conductive block, the fourth boat foot conductive block, the third connecting convex piece, the fourth connecting conductive block and the second complementary connecting convex piece. The fourth insulating connecting rod comprises a ceramic connecting rod. The fifth insulating connecting rod comprises a ceramic connecting rod.
The carrier further comprises: a sixth connection rod 606, the sixth connection rod 606 passes through the fourth connection convex members 2004 of each second conductive boat 200 and the third connection conductive blocks 503 between the adjacent fourth connection convex members 2004, and the material of the sixth connection rod 606 is conductive material or insulating material.
When the material of the sixth connecting rod 606 is a conductive material, the sixth connecting rod 606 includes a graphite connecting rod.
When the material of the sixth connection rod 606 is an insulating material, the sixth connection rod 606 includes a ceramic connection rod.
In other examples, the second conductive boat piece is not provided with a second supplemental connection tab. Correspondingly, the fourth boat leg conducting block is connected with a third connecting convex part of the first conducting boat sheet, a third isolation groove is not arranged in the third boat leg conducting block, and a third main insulating part and a third auxiliary insulating part are not arranged in the third boat leg. The third boat leg conductive block is connected with a third connecting convex part of the first conductive boat piece. The fourth connecting conductive block is arranged between the fourth boat foot conductive block and the adjacent third connecting convex piece on the side part of the third boat foot conductive block. The third boat foot conductive block, the fourth boat foot conductive block and the fourth connecting conductive block enable the third connecting convex pieces to be electrically connected. In this case, the fourth connecting rod passes through the third boat foot conductive block, the fourth boat foot conductive block, the third connecting convex member, and the fourth connecting conductive block, the fourth connecting rod is a conductive material or an insulating material, and no fifth insulating connecting rod is provided.
In this embodiment, the first conductive boat sheet 100 further includes; a first conductive boat piece body; the first connection protrusion 1001 protrudes outward in the length direction of the first conductive boat body with respect to the first conductive boat body, and the third connection protrusion 1003 protrudes outward in the length direction of the first conductive boat body with respect to the first conductive boat body. The first supplementary connection convex part b1 protrudes outwards in the length direction of the first conductive boat piece body relative to the first conductive boat piece body in the first boat piece group.
The second conductive boat piece 2000 further includes; a second conductive boat piece body; the second connecting convex piece 2002 protrudes outward in the length direction of the second conductive boat piece body with respect to the second conductive boat piece body. The fourth connecting convex member 2004 protrudes outward in the length direction of the second conductive boat piece body with respect to the second conductive boat piece body. The second supplementary connection convex part b2 protrudes outwards in the length direction of the second conductive boat piece body relative to the second conductive boat piece body in the second boat piece group.
For the first conductive boat 100 in the first boat group, the first connection tab 1001, the third connection tab 1003, and the first complementary connection tab b1 are three boat ears of the first conductive boat 100 in the first boat group.
For the second conductive boat 200 in the second boat set, the second connecting tab 2002, the fourth connecting tab 2004, and the second complementary connecting tab b2 are three ears of the second conductive boat 200 in the second boat set.
For the first conductive boat 100 outside the first boat group, the first connection boss 1001 and the third connection boss 1003 are two ears of the first conductive boat 100.
For the second conductive boat 200 outside the second boat group, the second connecting convex member 2002 and the fourth connecting convex member 2004 are two boat ears of the second conductive boat 200.
Another embodiment of the present invention further provides a boat foot G, referring to fig. 7, including:
the boat foot conductive block 10, wherein the boat foot conductive block 10 is provided with an isolation groove 31;
a main insulator 21 located in the isolation groove 31;
the boat foot conductive block 10 is adapted to be electrically isolated from a portion of the first polarity conductive boat sheet by a main insulator 21, the boat foot conductive block 10 is further adapted to be electrically connected to a portion of the second polarity conductive boat sheet by a connection, the first polarity and the second polarity being opposite.
The boat leg G of this embodiment can selectively electrically connect or electrically isolate a portion of the conductive boat sheets, and can feed in electrodes on the same side of the carrier.
The main insulator 21 comprises a ceramic main insulator.
In this example, the connection portion is a connection groove 32 located in the boat leg conductive block 10, and the connection groove 32 and the isolation groove 31 are alternately arranged at intervals. In other embodiments, the connection is constructed of a conductive material.
The boat foot conductive block 10 comprises a supporting piece 11 and a conductive fixing block 12 which is positioned on the supporting piece 11 and connected with the supporting piece 11, and the isolation groove 31 and the connecting groove 32 are both positioned in the conductive fixing block 12.
The boat foot conductive block 10 comprises a graphite conductive block. The support 11 is an electrically conductive support, such as a graphite support. The conductive anchor 12 comprises a graphite anchor.
The conductive fixing block 12 includes a first side wall and a second side wall which are disposed opposite to each other, and a first top wall facing away from the supporting member 11, and the first top wall is connected to both the first side wall and the second side wall.
The isolation groove 31 penetrates through the conductive fixing block 12 from the first side wall to the second side wall, and the isolation groove 31 is exposed from the first top wall.
In one embodiment, the connecting slot 32 extends from a first side wall into a portion of the conductive anchor 12, the connecting slot 32 is spaced from a second side wall by a distance greater than zero, and the first top wall exposes the connecting slot 32.
In this embodiment, the dimension of the connecting groove extending from the first sidewall toward the second sidewall is smaller than the dimension of the isolation groove 31 extending from the first sidewall toward the second sidewall. In other embodiments, the dimension of the connecting groove extending from the first sidewall toward the second sidewall is equal to or greater than the dimension of the isolation groove extending from the first sidewall toward the second sidewall.
In one example, the connecting slot 32 extends from the first sidewall toward the second sidewall by a dimension that is 30% to 70% of the distance from the first sidewall to the second sidewall.
The conductive fixing block 12 further includes a third side wall and a fourth side wall which are disposed opposite to each other, the third side wall is connected to the first side wall and the second side wall, and the fourth side wall is connected to the first side wall and the second side wall.
The boat foot G further includes: and the auxiliary insulating piece 22 is positioned on the third side wall and the fourth side wall of the boat foot conductive block.
The secondary insulator 22 comprises a ceramic secondary insulator.
Still another embodiment of the present invention provides a deposition apparatus including: a chamber; a support rod positioned in the chamber, the support rod being provided with an electrode block; a carrier, the carrier being located on the electrode block; the electrode block is suitable for feeding electric signals with opposite electric properties to the same side of the first conductive boat piece and the plurality of second conductive boat pieces.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.

Claims (25)

1. A boat foot, comprising:
the first boat leg is suitable for being connected with a first boat sheet group, the first boat sheet group comprises a plurality of first conductive boat sheets and a plurality of second conductive boat sheets, the first conductive boat sheets and the second conductive boat sheets are alternately arranged at intervals, and the electrical properties of the first conductive boat sheets and the electrical properties of the second conductive boat sheets are opposite; the first conductive boat piece comprises a first supplementary connection convex piece positioned at the front side, and the first supplementary connection convex piece is positioned at the lower end of the first conductive boat piece in the first boat piece group in the height direction; the second conductive boat piece comprises a second connecting convex piece positioned at the front side, and the second connecting convex piece is positioned at the lower end of the second conductive boat piece in the height direction;
the boat foot conductive block is provided with an isolation groove; the boat foot conductive block comprises a first boat foot conductive block and a second boat foot conductive block, and a first isolation groove is formed in the first boat foot conductive block;
A main insulator located in the isolation groove; the main insulating piece comprises a first main insulating piece and is positioned in the first isolation groove;
the boat foot conductive block is suitable for being electrically isolated from a part of conductive boat sheets of a first polarity through a main insulating piece, and is also suitable for being electrically connected with a part of conductive boat sheets of a second polarity through a connecting part, wherein the first polarity and the second polarity are opposite;
the second connecting convex piece in the first boat sheet group is electrically isolated from the first boat foot conductive block through the first main insulating piece, and the first supplementary connecting convex piece in the first boat sheet group is electrically connected with the first boat foot conductive block; the second boat foot conductive block is connected with a second connecting convex piece in part of the second conductive boat sheets and is spaced from the first boat sheet group, and the polarity of an electrode fed by the first boat foot conductive block is opposite to that of an electrode fed by the second boat foot conductive block.
2. The boat foot of claim 1 wherein the primary insulation comprises a ceramic primary insulation.
3. The boat foot of claim 1 wherein the connection is a connection slot in the boat foot conductive block, the connection slot being alternately spaced from the isolation slot.
4. The boat foot of claim 3 wherein the boat foot conductive block comprises a support member and a conductive fixing block located on and connected to the support member, the isolation slot and the connection slot being located in the conductive fixing block.
5. The boat foot of claim 4 wherein the conductive securing block includes oppositely disposed first and second side walls and a first top wall facing away from the support, the first top wall being connected to both the first and second side walls;
the isolation groove penetrates through the conductive fixing block from the first side wall to the second side wall, and the isolation groove is exposed out of the first top wall.
6. The boat foot of claim 5 wherein the connecting slot extends from a first side wall into a portion of the conductive mounting block, the connecting slot being spaced from a second side wall by a distance greater than zero, the first top wall exposing the connecting slot.
7. The boat foot of claim 5 wherein the connecting slot extends from the first sidewall toward the second sidewall by a dimension that is 30% to 70% of the distance from the first sidewall to the second sidewall.
8. The boat foot of claim 5 wherein the conductive mounting block further comprises third and fourth oppositely disposed sidewalls, the third sidewall being connected to the first and second sidewalls, the fourth sidewall being connected to the first and second sidewalls;
The boat foot further comprises: and the auxiliary insulating piece is positioned on the third side wall and the fourth side wall of the boat foot conductive block.
9. A carrier having oppositely disposed front and rear sides in a length direction of the carrier, comprising:
the first conductive boat pieces and the second conductive boat pieces are alternately arranged at intervals; the first conductive boat piece comprises a first connecting convex piece positioned at the front side, and the first connecting convex piece is positioned at the upper end of the first conductive boat piece in the height direction; the second conductive boat piece comprises a second connecting convex piece positioned at the front side, and the second connecting convex piece is positioned at the lower end of the second conductive boat piece in the height direction;
the first conductive boat pieces and the second conductive boat pieces which are arranged in sequence form a first boat piece group, the first conductive boat pieces in the first boat piece group further comprise first supplementary connection convex pieces positioned at the front side, and the first supplementary connection convex pieces are positioned at the lower ends of the first conductive boat pieces in the first boat piece group in the height direction;
first boat foot that is connected with first boat piece group, first boat foot includes: the first boat foot conductive block is provided with a first isolation groove; a first main insulator located in the first isolation groove;
The second connecting convex piece in the first boat piece group is electrically isolated from the first boat foot conductive block through the first main insulating piece; the first supplementary connection convex piece in the first boat piece group is electrically connected with the first boat foot conductive block; the second connecting convex piece outside the first boat piece group is electrically connected;
adjacent first connecting convex pieces are electrically connected and electrically isolated from the second conductive boat piece;
and the second boat foot conductive blocks are connected with the second connecting convex pieces in part of the second conductive boat pieces and are spaced from the first boat piece group, and the polarity of electrodes used for feeding by the first boat foot conductive blocks is opposite to that of electrodes used for feeding by the second boat foot conductive blocks.
10. The carrier of claim 9, wherein the second connection tab of the first boat deck is embedded in the first main insulator.
11. The carrier of claim 9, wherein the first boat foot conductive block further has first connecting grooves therein, the first connecting grooves and the first isolation grooves being alternately arranged at intervals; the first supplemental connector tab is positioned in the first connector slot.
12. The carrier of claim 11, wherein the first connecting slot has a dimension in the length direction of the carrier that is less than a dimension of the first isolation slot in the length direction of the carrier.
13. The carrier of claim 9, further comprising: the first connecting conductive blocks are positioned between the adjacent first connecting convex pieces and are spaced from the second conductive boat pieces.
14. The carrier of claim 9, wherein the first boat foot further comprises: the first auxiliary insulating piece is positioned between the first boat foot conductive block and the second connecting convex piece adjacent to the first boat foot conductive block.
15. The carrier of claim 9, further comprising: the second connecting conductive block is positioned between the first boat leg conductive block and the adjacent second connecting convex piece on the side part of the second boat leg conductive block.
16. The carrier of claim 15, further comprising: the first insulating connecting rod penetrates through the first boat foot conductive block, the second connecting convex piece and the second connecting conductive block; and/or a second insulating connecting rod, wherein the second insulating connecting rod penetrates through the first boat leg conductive block, the second connecting convex piece, the first complementary connecting convex piece and the second connecting conductive block.
17. The carrier of claim 13, further comprising: the third connecting rod penetrates through the first connecting convex parts of the first conductive boat pieces and the first connecting conductive blocks between the adjacent first connecting convex parts, and the third connecting rod is made of insulating materials or conductive materials.
18. The carrier of claim 9, wherein the first conductive boat piece further comprises a third connecting protrusion on a rear side, and the third connecting protrusion is located at a lower end of the first conductive boat piece in a height direction; the second conductive boat piece further comprises a fourth connecting convex piece positioned at the rear side, and the fourth connecting convex piece is positioned at the upper end of the second conductive boat piece in the height direction;
the first conductive boat piece and the second conductive boat piece which are arranged in sequence form a second boat piece group, and the second boat piece group and the first boat piece group are arranged at intervals; the second conductive boat pieces in the second boat piece group further comprise second complementary connecting convex pieces positioned at the rear side, and the second complementary connecting convex pieces are positioned at the lower ends of the second conductive boat pieces in the second boat piece group in the height direction;
the carrier further comprises: and a third boat leg connected with the second boat sheet group, the third boat leg comprising: the third boat foot conductive block is provided with a third isolation groove; a third main insulator located in the third isolation groove;
the third connecting convex piece in the second boat piece group is electrically isolated from the third boat foot conductive block through a third main insulating piece; the second supplementary connection convex piece in the second boat piece group is electrically connected with the third boat foot conductive block; the third connecting convex piece outside the second boat piece group is electrically connected;
The adjacent fourth connecting convex piece is electrically connected with and isolated from the first conductive boat piece.
19. The carrier of claim 18, wherein a third connecting tab of the second boat set is embedded in the third main insulator.
20. The carrier of claim 18, wherein the third boat foot conductive block further has third connecting grooves therein, the third connecting grooves and the third isolation grooves being alternately arranged at intervals; the second supplemental connector tab is located in the third connector slot.
21. The carrier of claim 18, further comprising: and the third connecting conductive block is positioned between the adjacent fourth connecting convex pieces and is spaced from the first conductive boat piece.
22. The carrier of claim 18, wherein the third boat foot further comprises: and the third auxiliary insulating piece is positioned between the third boat leg conductive block and the third connecting convex piece adjacent to the third boat leg conductive block.
23. The carrier of claim 18, further comprising: and the fourth boat foot conductive block is connected with the third connecting convex piece in part of the first conductive boat piece and is spaced from the second boat piece group.
24. The carrier of claim 9, wherein the carrier comprises a graphite boat.
25. A deposition apparatus, comprising:
a chamber;
a support rod positioned in the chamber, the support rod being provided with an electrode block;
a carrier as claimed in any one of claims 9 to 24, which is located on the electrode block;
the electrode block is suitable for feeding electric signals with opposite electric properties to the same side of the first conductive boat piece and the plurality of second conductive boat pieces.
CN202211015818.1A 2022-08-23 2022-08-23 Boat foot, carrier and deposition equipment Active CN115631987B (en)

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CN214881818U (en) * 2021-05-28 2021-11-26 浙江爱旭太阳能科技有限公司 Graphite boat
CN217026072U (en) * 2022-01-21 2022-07-22 深圳市捷佳伟创新能源装备股份有限公司 Graphite boat for PECVD (plasma enhanced chemical vapor deposition) equipment and PECVD equipment
CN114823438A (en) * 2022-03-31 2022-07-29 江苏微导纳米科技股份有限公司 Boat structure and electrode feed-in device bearing same
CN114783923A (en) * 2022-04-19 2022-07-22 深圳市石金科技股份有限公司 Novel bear graphite boat of silicon chip mode

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