CN215799889U - Coating device and coating equipment - Google Patents
Coating device and coating equipment Download PDFInfo
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- CN215799889U CN215799889U CN202121919838.2U CN202121919838U CN215799889U CN 215799889 U CN215799889 U CN 215799889U CN 202121919838 U CN202121919838 U CN 202121919838U CN 215799889 U CN215799889 U CN 215799889U
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Abstract
The utility model discloses a film coating device and film coating equipment, wherein the film coating device comprises a base, a first carrier, a second carrier and a film coating motor, the first carrier comprises a first connecting body and a first boat sheet, the second carrier comprises a second connecting body and a second boat sheet, the first connecting body and the second connecting body are respectively arranged at two ends of the base, the first boat sheet and the second boat sheet are positioned between the first connecting body and the second connecting body, the film coating electrode comprises a first electrode group and a second electrode group, the first electrode group is electrically connected with the first connecting body, and the second electrode group is electrically connected with the second connecting body; the coating equipment comprises the coating device. In the utility model, the two electrode groups can be compensated oppositely to reduce the transmission loss of the electrodes, so that the plasma strength excited by different areas of the first boat sheet and the second boat sheet is more uniform, and the coating uniformity of the substrate to be coated is improved.
Description
Technical Field
The utility model relates to the technical field of film coating, in particular to a film coating device and film coating equipment.
Background
In the film coating process, a carrier bearing the substrate to be coated is usually placed in a film coating cavity, gas is introduced into the film coating cavity, an electrode is introduced into the carrier, the introduced gas is ionized by electrode discharge, and a film is formed on the surface of the substrate to be coated.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides a coating device which can reduce the transmission loss of an electrode and improve the uniformity of coating.
The utility model also provides a coating device with the coating device.
According to a first aspect of the present invention, a plating device includes:
a base;
the first carrier is fixed on the base and comprises a first connecting body and a first boat sheet, and one end of the first boat sheet is connected with the first connecting body;
the second carrier is fixed on the base and comprises a second connector and a second boat sheet, one end of the second boat sheet is connected with the second connector, the first connector and the second connector are respectively arranged at two ends of the base, and the first boat sheet and the second boat sheet are positioned between the first connector and the second connector;
and the coated electrode comprises a first electrode group and a second electrode group, the first electrode group is electrically connected with the first connector, and the second electrode group is electrically connected with the second connector.
The film coating device provided by the embodiment of the utility model at least has the following beneficial effects:
the coating device provided by the embodiment of the utility model is provided with the first electrode group and the second electrode group, the two electrode groups are respectively arranged at the two ends of the first boat sheet and the second boat sheet, and the two electrode groups can be compensated oppositely to reduce the transmission loss of the electrodes, so that the plasma strength excited by different areas of the first boat sheet and the second boat sheet is more uniform, and the coating uniformity of a substrate to be coated is improved.
According to some embodiments of the utility model, the first carrier comprises a plurality of the first boat sheets, the second carrier comprises a plurality of the second boat sheets, and the first boat sheets and the second boat sheets are alternately distributed in a stacked manner.
According to some embodiments of the utility model, the boat further comprises a plurality of connecting rods, the connecting rods are distributed at intervals along the length direction of the first boat sheet or the second boat sheet, and the connecting rods are arranged in the first boat sheet and the second boat sheet in a penetrating manner.
According to some embodiments of the present invention, a first boat leg and a second boat leg are disposed at the bottom of the base, the first boat leg and the second boat leg are respectively located at two ends of the base, the first boat leg is electrically connected to the first connecting body and the first electrode group, and the second boat leg is electrically connected to the second connecting body and the second electrode group.
According to some embodiments of the utility model, the first boat foot has a first contact surface, the second boat foot has a second contact surface, the first contact surface is in contact with a surface of the first electrode group, and the second contact surface is in contact with a surface of the second electrode group.
According to some embodiments of the utility model, the first connection body comprises a plurality of first pads, and the first pads are clamped between the adjacent first boat pieces; the second connector comprises a plurality of second cushion blocks, and the second cushion blocks are clamped between the adjacent second boat sheets.
According to some embodiments of the present invention, the first carrier further includes a first connection pillar, one end of the first connection pillar is connected to the base, the other end of the first connection pillar is locked to the first boat piece on the top layer, and the first connection pillar is inserted into the first boat piece and the first pad; the second carrier further comprises a second connecting column, one end of the second connecting column is connected with the base, the other end of the second connecting column is locked on the second boat piece on the top layer, and the second connecting column penetrates through the second boat piece and the second cushion block.
According to some embodiments of the present invention, an insulating pad block is disposed on the top of the base, the first connecting body further includes a first insulating sleeve and a third pad block, the third pad block is clamped between the first boat piece on the bottom layer and the base, the first insulating sleeve is sleeved on the third pad block, and two ends of the first insulating sleeve respectively abut against the insulating pad block and the first boat piece on the bottom layer; the second connector further comprises a second insulating sleeve and a fourth cushion block, the fourth cushion block is clamped on the bottom layer, the first boat piece and the base are arranged between the first boat piece and the base, the second insulating sleeve is sleeved on the fourth cushion block, and two ends of the second insulating sleeve respectively support and hold the second boat piece of the insulating cushion block and the bottom layer.
According to some embodiments of the present invention, the base has the mounting hole through which the first connecting column or the second connecting column passes, the end of the first connecting column is provided with a first flange, the end of the second connecting column is provided with a second flange, and both the first flange and the second flange can abut against the inner wall of the mounting hole.
The plating device according to an embodiment of a second aspect of the utility model includes:
the coating device of the embodiment of the first aspect;
the coating device is accommodated in the coating chamber, a supporting seat is arranged in the coating chamber, and the supporting seat is used for supporting the base;
and the power supply is positioned outside the coating chamber and is electrically connected with the coating electrode.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The utility model is further described with reference to the following figures and examples, in which:
FIG. 1 is a schematic structural diagram of a rear electrode-hiding structure of a coating device according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of one embodiment of the coating device of FIG. 1;
FIG. 3 is a side view of one embodiment of the coating device of the present invention;
FIG. 4 is a front view of one embodiment of the coating apparatus of the present invention;
fig. 5 is a plan view of the plating device of fig. 4.
Reference numerals:
the structure comprises a base 100, a first boat foot 110, a first contact surface 111, a second boat foot 120, a second contact surface 121 and an insulating cushion block 130; a first carrier 200, a first connecting body 210, a first block 211, a third block 212, a first insulating sleeve 213, a first connecting column 214, a first flange 2141, a first boat 220; a second carrier 300, a second connector 310, a second cushion block 311, a fourth cushion block 312, a second insulating sleeve 313, a second connecting column 314, a second flange 3141 and a second boat sheet 320; a coated electrode 400, a first electrode group 410, a second electrode group 420; a connecting rod 500; a coating chamber 600; a power supply 700; a support base 800.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and the above, below, exceeding, etc. are understood as excluding the present numbers, and the above, below, within, etc. are understood as including the present numbers. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
In the description of the present invention, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The embodiment of the utility model provides a coating device, which is used for coating a film on the surface of a substrate to be coated, wherein the substrate to be coated can be a solar cell, glass, a sheet metal part and the like, referring to fig. 1 to 3, the coating device comprises a base 100, a first carrier 200, a second carrier 300 and a coating electrode 400, the first carrier 200 and the second carrier 300 are both mounted on the base 100, the first carrier 200 and the second carrier 300 are used for bearing the substrate to be coated, specifically, the first carrier 200 comprises a first connecting body 210 and a first boat sheet 220, one end of the first boat sheet 220 is connected with the first connecting body 210, the second carrier 300 comprises a second connecting body 310 and a second boat sheet 320, one end of the second boat sheet 320 is connected with the second connecting body 310, the first boat sheet 220 and the second boat sheet 320 are both used for placing the substrate to be coated, the first connecting body 210 and the second connecting body 310 are respectively arranged at two ends of the base 100, the first boat piece 220 and the second boat piece 320 are located between the first connecting body 210 and the second connecting body 310; the coated electrode 400 comprises a first electrode group 410 and a second electrode group 420, the first electrode group 410 is electrically connected with the first connecting body 210, the second electrode group 420 is electrically connected with the second connecting body 310, because the first electrode group 410 and the second electrode group 420 are respectively positioned at two ends of the first boat 220 and the second boat 320, and the electrodes have self impedance, the transmission efficiency of the first electrode group 410 at the near end of the first boat 220 is high, the transmission efficiency at the far end is reduced, the transmission direction of the second electrode group 420 is opposite to that of the first electrode group 410, the far end of the first boat 220 is compensated by the second electrode group 420, the loss of the first electrode group 410 in the transmission process can be reduced, and similarly, the first electrode group 410 can compensate the far end of the second boat 320 to ensure the coating uniformity of the substrate to be coated.
Therefore, the coating device in the embodiment of the utility model is provided with the first electrode group 410 and the second electrode group 420, and the two electrode groups are arranged at the two ends of the first boat piece 220 and the second boat piece 320, and the two electrode groups can be compensated oppositely to reduce the transmission loss of the electrodes, so that the plasma intensities excited by different areas of the first boat piece 220 and the second boat piece 320 are more uniform, and the coating uniformity of the substrate to be coated is improved.
It should be noted that the first boat 220 and the second boat 320 may be made of conductive materials such as graphite and aluminum, the first electrode group 410 and the second electrode group 420 both include two electrodes, the first carrier 200 is provided with two first connectors 210 respectively connected to the two electrodes, the second carrier 300 is provided with two second connectors 310 respectively connected to the two electrodes, the electrodes may be radio frequency electrodes, medium and low frequency current electrodes, or direct current electrodes, for example, the radio frequency electrodes may be selected as one RF (radio frequency) electrode and one ground electrode, and the plasma is excited from the RF electrode to the ground electrode, or the two electrodes in each electrode group may be selected as RF electrodes, so as to improve the excitation energy of the plasma and optimize the coating effect.
The first carrier 200 may include a plurality of first boat sheets 220, the second carrier 300 may include a plurality of second boat sheets 320 to increase the number of substrates to be plated contained in the first carrier 200 and the second carrier 300, the plurality of first boat sheets 220 and the plurality of second boat sheets 320 are alternately stacked and distributed such that the first boat sheets 220 are adjacent to the second boat sheets 320; because the first boat piece 220 is connected with the first electrode group 410, the second boat piece 320 is connected with the second electrode group 420, the first electrode group 410 and the second electrode group 420 arranged at the two ends can be respectively transmitted along the first boat piece 220 and the second boat piece 320, and the transmission compensation is carried out on the adjacent boat pieces, so that the uniformity of electrode transmission is improved, and the uniformity of the coating thickness of the substrate to be coated is ensured.
In addition, the first boat sheets 220 and the second boat sheets 320 are alternately distributed in a laminated manner, so that the connection between the first boat sheets 220 and the second boat sheets 320 is more compact on the premise of ensuring the coating quantity of the substrate to be coated; the first boat piece 220 and the second boat piece 320 may be stacked and arranged in a vertical direction or a horizontal direction, in an embodiment of the present invention, the first boat piece 220 and the second boat piece 320 are arranged in the vertical direction, a substrate to be plated is horizontally placed between the first boat piece 220 and the second boat piece 320, the first connecting body 210 and the second connecting body 310 are arranged in the vertical direction, the first boat pieces 220 are connected to the first connecting body 210 one by one, and the second boat pieces 320 are connected to the second connecting body 310 one by one, which facilitates the mutual assembly of the first carrier 200 and the second carrier 300.
As shown in fig. 1 and 2, the first connecting body 210 includes a plurality of first cushion blocks 211, the first cushion blocks 211 are sandwiched between adjacent first boat pieces 220, the first cushion blocks 211 are made of a conductive material, all the first boat pieces 220 are integrated into a whole through the first connecting body 210, and the first electrode group 410 connected to the first connecting body 210 can simultaneously transmit electrodes to all the first boat pieces 220; the second connector 310 includes a plurality of second pads 311, the second pads 311 are sandwiched between adjacent second boat pieces 320, the second pads 311 are made of conductive material, so that all the second boat pieces 320 are integrated into a whole through the second connector 310, and the second electrode group 420 connected to the second connector 310 can simultaneously transmit electrodes to all the second boat pieces 320. The first pad 211 and the second pad 311 may be made of conductive material such as graphite, aluminum, etc.
In order to ensure that a stable connection structure is formed between the adjacent first boat pieces 220 and between the adjacent second boat pieces 320, and the first boat pieces 220 are stably contacted with the first cushion block 211, and the second boat pieces 320 are stably contacted with the second cushion block 311, so as to ensure that the first boat pieces 220 are electrically conducted with the first connecting body 210, and the second boat pieces 320 are electrically conducted with the second connecting body 310, as shown in fig. 1, the present invention further provides a connecting rod 500, the connecting rod 500 is used for fixing the first boat pieces 220 and the second boat pieces 320, the connecting rod 500 can be separately inserted into the first boat pieces 220, and fix a plurality of first boat pieces 220, or separately inserted into the second boat pieces 320, and fix a plurality of second boat pieces 320, in one embodiment, the connecting rod 500 is simultaneously inserted into the first boat pieces 220 and the second boat pieces 320 which are alternately distributed, and the lower end of the connecting rod 500 is connected with the base 100, the upper end of the connecting rod 500 is locked, so that the first boat 220 and the second boat 320 are fixed at the same time, the installation convenience is high, and the using amount of the connecting rod 500 can be saved. The plurality of connecting rods 500 are provided, and the connecting rods 500 may be distributed at intervals along the length direction of the first boat piece 220 and the second boat piece 320, so as to improve the connection stability of the first boat piece 220 and the second boat piece 320.
In one embodiment, the first connector 210 and the second connector 310 may be provided with an electrode connecting seat, the electrode connecting seat is electrically connected to the first connector 210 and the second connector 310, the first electrode set 410 is electrically connected to the first boat 220 after being inserted into the electrode connecting seat, and the second electrode set 420 is electrically connected to the second boat 320 after being inserted into the electrode connecting seat. In another embodiment, a part of the base 100 is made of a conductive material, and the electrical conduction between the electrode group and the boat sheet is realized by a contact connection manner, specifically, a first boat leg 110 and a second boat leg 120 are arranged at the bottom of the base 100, the first boat leg 110 is electrically connected with the first connector 210, the second boat leg 120 is electrically connected with the second connector 310, the first boat leg 110 is used for contacting the first electrode group 410, the second boat leg 120 is used for contacting the second electrode group 420, after the first boat leg 110 contacts the first electrode group 410, a conductive path is formed between the first electrode group 410 and the first boat sheet 220, and after the second boat leg 120 contacts the second electrode group 420, a conductive path is formed between the second electrode group 420 and the second boat sheet 320; this connected mode is comparatively simple, need not to set up the connecting seat that is used for the switching, can realize electric connection through the contact, and the simple operation degree is high.
It should be noted that two first boat legs 110 and two second boat legs 120 are disposed, the two first boat legs 110 are respectively connected to two electrodes in the first electrode group 410, the two second boat legs 120 are respectively connected to two electrodes in the second electrode group 420, and the first boat legs 110 and the second boat legs 120 are disposed at two ends of the base 100, so as to facilitate connection between the electrode groups and the connectors. In addition, the electrode group is in contact with the side or the bottom of the boat foot, so that electrical conduction can be realized, the electrode group can be arranged below the base 100 for improving the convenience of connection of the electrode group and the boat foot, the boat foot is just placed on the electrode group after the base 100 is fixed, and the boat foot is stably contacted with the electrode group under the action of the gravity of the base 100, so that continuous electrical connection of the electrode group and the boat foot is realized.
In one embodiment, as shown in fig. 3, the bottom of the first boat leg 110 has a first contact surface 111, the bottom of the second boat leg 120 has a second contact surface 121, the first contact surface 111 and the second contact surface 121 correspond to the shape of the electrode assembly, and can be coated on the surface of the electrode assembly, for example, the electrodes of the first electrode assembly 410 and the second electrode assembly 420 are both cylindrical, the first contact surface 111 and the second contact surface 121 are both arc surfaces, the first contact surface 111 can be coated on the surface of the first electrode assembly 410, and the second contact surface 121 can be coated on the surface of the second electrode assembly 420, so as to increase the contact area between the first boat leg 110 and the electrode assembly, and the second boat leg 120 and the electrode assembly, and ensure stable electrical conduction between the boat legs and the electrode assembly.
In order to ensure that each boat sheet is electrically connected to the electrode group, a conductive path is required to be formed between the first boat sheet 220 and the first boat leg 110, and between the second boat sheet 320 and the second boat leg 120, in one embodiment, as shown in fig. 2, the first connecting body 210 further includes a third pad 212, the third pad 212 is clamped between the first boat sheet 220 and the base 100 at the bottom layer, the third pad 212 and the base 100 are made of a conductive material, so that each first boat sheet 220 is electrically connected to the first boat leg 110; the second connector 310 further includes a fourth pad 312, and the fourth pad 312 is clamped between the bottom second boat piece 320 and the base 100, so that each second boat piece 320 is electrically connected to the second boat leg 120.
In order to facilitate the transportation of the coating apparatus and improve the work safety, the surface of the base 100 should be insulated, in one embodiment, the surface of the base 100 is covered with the insulating pad 130, the first connecting body 210 includes a first insulating sleeve 213, the second connecting body 310 includes a second insulating sleeve 313, the first insulating sleeve 213 is sleeved outside the third pad 212, two ends of the first insulating sleeve 213 respectively support the bottom first boat 220 and the insulating pad 130, so as to electrically isolate the surface of the base 100 from the first carrier 200; the second insulating sleeve 313 is sleeved on the outer wall of the fourth pad 312, and two ends of the second insulating sleeve 313 respectively support the bottom layer of the second boat 320 and the insulating pad 130, so as to electrically isolate the surface of the base 100 from the second carrier 300.
It should be noted that the first connecting body 210 further includes a first connecting column 214, the first connecting column 214 is disposed through the first boat piece 220, the first cushion block 211 and the third cushion block 212, the lower end of the first connecting column 214 is connected to the base 100, and the upper end of the first connecting column 214 is locked to the first boat piece 220 on the upper layer; by providing the first connection posts 214, the first carrier 200 is fixed to the base 100, and the plurality of first boat pieces 220 are stably connected to each other and are held in stable contact with the first and second blocks 211 and 311. Similarly, the second connector 310 includes a second connecting column 314, the second connecting column 314 is inserted into the second boat piece 320, the second cushion block 311 and the fourth cushion block 312, the lower end of the second connecting column 314 is connected to the base 100, and the upper end of the second connecting column 314 is locked to the second boat piece 320 on the upper layer.
In addition, the base 100 is further provided with a mounting hole for the first connecting column 214 and the second connecting column 314 to penetrate through, the lower end of the first connecting column 214 is provided with a first flange 2141, the lower end of the second connecting column 314 is provided with a second flange 3141, and both the first flange 2141 and the second flange 3141 can be inserted into the mounting hole and abut against the inner wall of the mounting hole; when the first connecting column 214 and the second connecting column 314 are installed, the lower ends of the first connecting column and the second connecting column do not need to be fixed, the fixing can be realized only by locking the upper ends, and the installation convenience is high. It is contemplated that the cross-section of the mounting hole is stepped, the first flange 2141 protrudes toward the side of the first connecting post 214, and the second flange 3141 protrudes toward the side of the second connecting post 314, so that the first flange 2141 and the second flange 3141 can both abut against the inner wall of the mounting hole along the length direction of the connecting post. It should be noted that the connecting rod 500 may also be provided with a flange to connect the base 100 and the boat sheet.
As shown in fig. 4 and 5, the present invention further provides a coating apparatus, which includes the above-mentioned coating device, further including a coating chamber 600 and a power supply 700, wherein the coating device is accommodated inside the coating chamber 600, a support seat 800 is disposed inside the coating chamber 600, the support seat 800 is used for supporting the base 100, so that the coating device is stably placed inside the coating chamber 600, the power supply 700 is disposed outside the coating chamber 600 and electrically connected to the coating electrode 400, and the power supply 700 is used for supplying power to the coating electrode 400.
It should be noted that the supporting base 800 should be located between two electrodes in the same electrode group, so that two sides of the coating apparatus are kept stable, and after the base 100 is placed on the supporting base 800, the boat legs just contact with the electrodes, and when the stable placement of the coating apparatus is completed, the electrical connection between the first boat 220 and the first electrode group 410 and the electrical connection between the second boat 320 and the second electrode group 420 are realized.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention. Furthermore, the embodiments of the present invention and the features of the embodiments may be combined with each other without conflict.
Claims (10)
1. Coating device, its characterized in that includes:
a base;
the first carrier is fixed on the base and comprises a first connecting body and a first boat sheet, and one end of the first boat sheet is connected with the first connecting body;
the second carrier is fixed on the base and comprises a second connector and a second boat sheet, one end of the second boat sheet is connected with the second connector, the first connector and the second connector are respectively arranged at two ends of the base, and the first boat sheet and the second boat sheet are positioned between the first connector and the second connector;
and the coated electrode comprises a first electrode group and a second electrode group, the first electrode group is electrically connected with the first connector, and the second electrode group is electrically connected with the second connector.
2. The plating device according to claim 1, wherein the first carrier comprises a plurality of the first boat pieces, the second carrier comprises a plurality of the second boat pieces, and the first boat pieces and the second boat pieces are alternately stacked.
3. The plating device according to claim 2, further comprising a plurality of connecting rods, wherein the connecting rods are distributed at intervals along the length direction of the first boat piece or the second boat piece, and the connecting rods are arranged in the first boat piece and the second boat piece in a penetrating manner.
4. The plating device according to claim 1, wherein a first boat leg and a second boat leg are disposed at the bottom of the base, the first boat leg and the second boat leg are respectively disposed at two ends of the base, the first boat leg is electrically connected to the first connector and the first electrode group, and the second boat leg is electrically connected to the second connector and the second electrode group.
5. The plating device according to claim 4, wherein the first boat foot has a first contact surface, the second boat foot has a second contact surface, the first contact surface is in contact with a surface of the first electrode group, and the second contact surface is in contact with a surface of the second electrode group.
6. The plating device according to claim 2, wherein the first connection body includes a plurality of first blocks, the first blocks being sandwiched between the adjacent first boat pieces; the second connector comprises a plurality of second cushion blocks, and the second cushion blocks are clamped between the adjacent second boat sheets.
7. The plating device according to claim 6, wherein the first carrier further comprises a first connection post, one end of the first connection post is connected with the base, the other end of the first connection post is locked to the first boat piece on the top layer, and the first connection post is inserted into the first boat piece and the first cushion block; the second carrier further comprises a second connecting column, one end of the second connecting column is connected with the base, the other end of the second connecting column is locked on the second boat piece on the top layer, and the second connecting column penetrates through the second boat piece and the second cushion block.
8. The plating device according to claim 7, wherein an insulating pad is disposed on a top of the base, the first connector further comprises a first insulating sleeve and a third pad, the third pad is clamped between the first boat piece of the bottom layer and the base, the first insulating sleeve is sleeved on the third pad, and two ends of the first insulating sleeve respectively abut against the insulating pad and the first boat piece of the bottom layer; the second connector further comprises a second insulating sleeve and a fourth cushion block, the fourth cushion block is clamped on the bottom layer, the first boat piece and the base are arranged between the first boat piece and the base, the second insulating sleeve is sleeved on the fourth cushion block, and two ends of the second insulating sleeve respectively support and hold the second boat piece of the insulating cushion block and the bottom layer.
9. The plating device according to claim 7, wherein the base has a mounting hole through which the first connection post or the second connection post passes, a first flange is provided at an end of the first connection post, a second flange is provided at an end of the second connection post, and both the first flange and the second flange can abut against an inner wall of the mounting hole.
10. Coating equipment, its characterized in that includes:
the plating device according to any one of claims 1 to 9;
the coating device is accommodated in the coating chamber, a supporting seat is arranged in the coating chamber, and the supporting seat is used for supporting the base;
and the power supply is positioned outside the coating chamber and is electrically connected with the coating electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121919838.2U CN215799889U (en) | 2021-08-16 | 2021-08-16 | Coating device and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121919838.2U CN215799889U (en) | 2021-08-16 | 2021-08-16 | Coating device and coating equipment |
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| Publication Number | Publication Date |
|---|---|
| CN215799889U true CN215799889U (en) | 2022-02-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121919838.2U Active CN215799889U (en) | 2021-08-16 | 2021-08-16 | Coating device and coating equipment |
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| CN (1) | CN215799889U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116837446A (en) * | 2023-09-01 | 2023-10-03 | 无锡釜川科技股份有限公司 | Split electroplating device |
-
2021
- 2021-08-16 CN CN202121919838.2U patent/CN215799889U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116837446A (en) * | 2023-09-01 | 2023-10-03 | 无锡釜川科技股份有限公司 | Split electroplating device |
| CN116837446B (en) * | 2023-09-01 | 2023-12-01 | 无锡釜川科技股份有限公司 | Split electroplating device |
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