CN213184235U

CN213184235U - Graphite boat and graphite boat coating equipment

Info

Publication number: CN213184235U
Application number: CN202021284606.XU
Authority: CN
Inventors: 郑峰峰
Original assignee: Ningxia Longi Solar Technology Co Ltd
Current assignee: Ningxia Longi Solar Technology Co Ltd
Priority date: 2020-07-03
Filing date: 2020-07-03
Publication date: 2021-05-11
Anticipated expiration: 2030-07-03
Also published as: WO2022000931A1

Abstract

The utility model discloses a graphite boat and graphite boat coating equipment relates to solar cell technical field to solve the easy not hard up problem of graphite boat piece. The graphite boat comprises M graphite boat pieces and a plurality of rows of insulating fixing pieces for fixing the M graphite boat pieces. Every insulating mounting formula of arranging is integral type structure or split type structure, and the insulating mounting of integral type structure contains an insulating fixed unit, and the insulating mounting of split type structure contains two above insulating fixed units. Each insulation fixing unit is connected with the corresponding graphite boat piece in a clamping mode through the arranged groove. The number and distribution of the insulating fixing units in each row of insulating fixing pieces are set so that the space between the M graphite boat pieces can be fixed. The utility model provides a graphite boat and graphite boat coating equipment is used for plasma enhanced chemical vapor deposition coating film technology.

Description

Graphite boat and graphite boat coating equipment

Technical Field

The utility model relates to a solar cell technical field especially relates to a graphite boat and graphite boat coating equipment.

Background

The manufacturing process of the solar cell mainly comprises the steps of surface texturing, diffusion knot making, post cleaning, surface coating, screen printing, high-temperature sintering and the like. The surface coating process mainly adopts a Plasma Enhanced Chemical Vapor Deposition (PECVD) method to form an antireflection film on the surface of a silicon wafer on which a PN junction is formed, so as to improve the photoelectric conversion efficiency of the finally manufactured solar cell.

In the process of coating a film on the surface of the silicon wafer, the silicon wafer is hung on the graphite boat pieces of the graphite boat, and the graphite boat pieces are fixedly connected with the graphite nut through the ceramic screw. And placing the graphite boat hung with the silicon wafer in coating equipment for coating treatment. However, after the graphite boat is operated for a long time, the ceramic screw and the graphite nut fixing the graphite boat piece are easily loosened, resulting in the loosening of the graphite boat piece.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a graphite boat and graphite boat coating film equipment to solve the easy not hard up problem of graphite boat piece.

In a first aspect, the present invention provides a graphite boat. The graphite boat comprises M graphite boat pieces and a plurality of rows of insulating fixing pieces for fixing the M graphite boat pieces. Every insulating mounting formula of arranging is integral type structure or split type structure, and the insulating mounting of integral type structure contains an insulating fixed unit, and the insulating mounting of split type structure contains two above insulating fixed units. Each insulation fixing unit is connected with the corresponding graphite boat piece in a clamping mode through the arranged groove. The insulating fixed unit is provided with at least two grooves, and the distance between the grooves is consistent with the distance between the graphite boat pieces clamped and connected with the grooves. The number and distribution of the insulating fixing units in each row of insulating fixing pieces are set so that the space between the M graphite boat pieces can be fixed.

When the technical scheme is adopted, each insulating fixing unit of the insulating fixing piece is connected with the corresponding graphite boat piece in a clamping mode through the arranged groove, and therefore M graphite boat pieces can be fixed through the insulating fixing piece of the integrated structure or the split structure. At the moment, each graphite boat piece is fixed in a clamping mode with the corresponding groove, and the connecting piece is not needed to be assisted, so that the problem that the graphite boat piece is not flexible due to the fact that the connecting piece is connected and is not flexible is solved. In view of the fact that the graphite boat piece is deviated from the set position after the graphite boat piece is loosened, the graphite boat piece needs to be corrected and fixed again by the boat corrector. The utility model discloses the difficult not hard up of graphite boat piece of graphite boat can reduce the number of times that the school boat ware corrected graphite boat piece position. In addition, because graphite boat piece position is firm, consequently, when the manipulator was got and is put the wafer, can improve the manipulator and snatch, place the success rate of wafer, avoid inserting garrulous graphite boat piece or inserting garrulous wafer.

In some possible implementations, at least one row of the insulating fixing pieces is of an integrated structure, and the number of the grooves formed in at least one row of the insulating fixing pieces is M. That is, the number of the grooves formed on the insulating fixing piece is the same as that of the graphite boat pieces. The insulating fixing piece of this integral type structure can be processed and made to modes such as casting this moment, and the unified fluting in the position that corresponds graphite boat piece on insulating fixing piece can, processing is convenient. During the installation, with each graphite boat piece card go into the recess that corresponds on the insulating mounting can, easy operation, labour saving and time saving can effectively improve production efficiency.

In some possible implementation manners, each row of insulating fixing pieces is of an integrated structure, and the number of the grooves formed in each row of insulating fixing pieces is M. At the moment, the insulating fixing pieces of the one-row integrated structure can fix the relative positions of the M graphite boat pieces. The insulating mounting combination of multiseriate integral type structure is used, can promote the fixed effect to graphite boat piece greatly, further reduces the not hard up probability of graphite boat piece.

In some possible implementations, at least one column of insulating fixtures is a split structure. At the moment, the length of the insulation fixing piece of the split structure is relatively small, so that the insulation fixing piece has good strength and long service life. And when equipment maintenance, change, only need maintain, change a small amount of damaged split type structure insulation mounting can, consider that the insulation mounting cost of single split type structure is lower, can effectively reduce the equipment maintenance cost of production solar wafer.

In some possible implementations, each row of the insulating fixing pieces is of a split structure. At this moment, the number and the distribution condition of the insulating fixing units in each row can be designed, so that a plurality of modes for fixing the graphite boat piece are provided, and the fixing mode of the graphite boat piece is more flexible.

In some possible implementations, the number of grooves of the insulating fixing unit is 2. At this time, the number of the grooves of the insulating fixing unit is the minimum, and the relative positions of two adjacent graphite boat pieces can be fixed. The combined use mode, replacement and maintenance of the plurality of insulating fixing units are more flexible.

In some possible implementations, 0 or 1 graphite boat piece is arranged between adjacent insulation fixing units in each column of insulation fixing pieces at intervals.

In some possible implementations, the insulating fixture units of each column of insulating fixtures are clamped alternately from the first and second ink boat sheets in sequence. At this time, compared with the situation that the arrangement positions of the insulating fixing pieces of the rows are consistent, the insulating fixing pieces of the rows are arranged in a staggered mode, and a better fixing effect can be achieved.

In a second aspect, the present invention provides a graphite boat, wherein the groove structure of the insulating fixing unit may have the following deformation with respect to the above-mentioned aspect. The graphite boat comprises M graphite boat pieces and a plurality of rows of insulating fixing pieces for fixing the M graphite boat pieces. Every insulating mounting formula of arranging is integral type structure or split type structure, and the insulating mounting of integral type structure contains an insulating fixed unit, and the insulating mounting of split type structure contains two above insulating fixed units. Each insulating fixing unit is provided with at least one groove, each groove spans N graphite boat pieces, and therefore the distance between two boat pieces in the N graphite boat pieces is limited, wherein N is greater than 1; the number and distribution of the insulating fixing units in each row of insulating fixing pieces are set so that the space between the M graphite boat pieces can be fixed.

When the technical scheme is adopted, each insulating fixing unit of the insulating fixing piece spans N graphite boat pieces through the groove, so that the distance between two boat pieces in the N graphite boat pieces is limited, and the insulating fixing units are matched with each other to fix M graphite boat pieces. At this moment, each graphite boat piece is limited in relative position by the corresponding insulating fixing unit, and the connecting piece is not needed for assistance, so that the problem of looseness of the graphite boat piece caused by connection looseness of the connecting piece is solved. In view of the fact that the graphite boat piece is deviated from the set position after the graphite boat piece is loosened, the graphite boat piece needs to be corrected and fixed again by the boat corrector. The utility model discloses the difficult not hard up of graphite boat piece of graphite boat can reduce the number of times that the school boat ware corrected graphite boat piece position. In addition, because graphite boat piece position is firm, consequently, when the manipulator was got and is put the wafer, can improve the manipulator and snatch, place the success rate of wafer, avoid inserting garrulous graphite boat piece or inserting garrulous wafer.

In some possible implementations, each row of insulating fixtures is a split structure. At this time, the insulating fixing units of adjacent rows are matched with each other, so that the purpose of limiting the distance between the graphite boat pieces (the relative position of the graphite boat pieces) is achieved.

In some possible implementations, N ═ 2. At this moment, every recess stridees across 2 graphite boat pieces, prescribes a limit to the interval of adjacent 2 graphite boat pieces, and the crisscross setting of insulating mounting in each row can realize the fixed to graphite boat piece, and the setting mode is simple, the operation of being convenient for.

In some possible implementations, the insulating fixing units of the respective columns of insulating fixing members are alternately disposed in sequence from the first and second ink boat sheets. At this time, the insulating fixing units of each row are arranged in a staggered mode, the insulating fixing units of each row are matched with each other, acting force is applied to the graphite boat pieces from the front direction and the rear direction, and therefore the function of fixing the graphite boat pieces is achieved.

In a third aspect, the present invention provides a graphite boat coating apparatus, which comprises the graphite boat according to any one of the above technical solutions. The insulating fixed part is a ceramic fixed part, or the insulating fixed part is a plastic fixed part.

In some possible implementations, the graphite boat further includes at least one electrode block. The length of each electrode block along the length direction of the graphite boat piece is 32mm-36 mm.

When the technical scheme is adopted, the length of the electrode block is 32mm-36mm, and compared with the prior art, the length of the electrode block is shortened. Under the condition that the length of the graphite boat is not changed, the length of the electrode blocks at the two ends of the graphite boat is shortened, and available space can be provided for extending the graphite boat piece, so that the length of the graphite boat piece is further increased. At the moment, a wafer inserting position can be added on the graphite boat wafer with the increased length, so that the number of the wafers of the graphite boat is increased, and the production efficiency is improved.

In some possible implementations, the graphite boat further includes at least one boat foot. The plurality of graphite boat pieces form a boat body. Each boat foot is arranged at the end part of the boat body, and each boat foot is provided with a supporting platform for supporting at least one graphite boat piece. The length of each boat foot along the length direction of the graphite boat piece is 52mm-56 mm.

When the technical scheme is adopted, each boat foot is provided with the supporting platform, and the length of each boat foot along the length direction of the graphite boat piece is 52mm-56 mm. When electrode block length on the boat foot shrinks, the length of boat foot maintains unchangeably, and is the same with prior art's boat foot length for utility model's boat foot can drag equipment such as match with current boat, reduces the equipment transformation expense.

In some possible implementations, each graphite boat wafer includes a plurality of wafer insertion sites and two clamping points located between two adjacent wafer insertion sites. The angle formed by the connecting line of the geometric centers of the two clamping points and the length direction of the graphite boat piece is 85-95 degrees. At this moment, compare with prior art, the utility model discloses a two stuck points between two adjacent insertion piece positions of graphite boat piece are close to more on the horizontal direction, and the position of stuck point is more concentrated to the space that the stuck point occupy on graphite boat piece has been reduced. Based on this, under the unchangeable condition of graphite boat piece length, the reduction of stuck point occupation space can provide the space for increasing an inserted sheet position on the graphite boat piece.

In some possible implementations, each graphite boat piece has at least nine tab sites. At this time, the number of wafers which can be carried by the graphite boat is increased, thereby improving the production efficiency.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:

FIG. 1 is a first schematic structural diagram of a graphite boat according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a graphite boat according to an embodiment of the present invention;

fig. 3 is a first schematic structural view of an insulation fixing unit of a graphite boat according to an embodiment of the present invention;

fig. 4 is a schematic structural view of an insulating fixing unit of a graphite boat according to an embodiment of the present invention;

fig. 5 is a top view of the staggered arrangement of the rows of insulating fixing members provided in the embodiment of the present invention;

fig. 6 is a third schematic structural view of an insulating fixing unit of a graphite boat according to an embodiment of the present invention;

fig. 7 is a second top view of the staggered arrangement of the rows of insulating fixing members according to the embodiment of the present invention;

FIG. 8 is a schematic view of a boat foot and an electrode block in the prior art;

fig. 9 is a schematic structural view of a boat foot and an electrode block of the graphite boat according to an embodiment of the present invention;

FIG. 10 is a schematic view of a prior art chucking point on a graphite boat wafer;

fig. 11 is a schematic view of a stuck point on a graphite boat according to an embodiment of the present invention.

Reference numerals:

10-graphite boat piece, 11-insertion position, 12-clamping point, 20-insulating fixing piece, 201-insulating fixing unit, 21-groove, 22-protrusion, 30-electrode block, 40-boat foot and 41-supporting table.

Detailed Description

For the convenience of clearly describing the technical solution of the embodiment of the present invention, in the embodiment of the present invention, the words "first", "second", etc. are adopted to distinguish the same items or similar items with basically the same functions and actions. Those skilled in the art will appreciate that the terms "first," "second," etc. do not denote any order or quantity, nor do the terms "first," "second," etc. denote any order or importance.

It is to be understood that the terms "exemplary" or "such as" are used herein to mean serving as an example, instance, or illustration. Any embodiment or design described herein as "exemplary" or "e.g.," is not necessarily to be construed as preferred or advantageous over other embodiments or designs. Rather, use of the word "exemplary" or "such as" is intended to present concepts related in a concrete fashion.

In the present invention, "at least one" means one or more, "a plurality" means two or more. "and/or" describes the association relationship of the associated objects, meaning that there may be three relationships, e.g., a and/or B, which may mean: a exists alone, A and B exist simultaneously, and B exists alone, wherein A and B can be singular or plural. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship. "at least one of the following" or similar expressions refer to any combination of these items, including any combination of the singular or plural items. For example, at least one (one) of a, b, or c, may represent: a, b, c, a and b combination, a and c combination, b and c combination, or a, b and c combination, wherein a, b and c can be single or multiple.

In the production process of the solar cell, the surface coating process is to form an antireflection film on the surface of a wafer on which a PN junction is formed. The antireflection film can reduce the reflection phenomenon of incident light, improve the utilization rate of the finally manufactured solar cell to sunlight and improve the photoelectric conversion rate.

Currently, a Plasma Enhanced Chemical Vapor Deposition (PECVD) process is commonly used to plate a wafer.

When the wafer is coated by using the plasma enhanced chemical vapor deposition process, the wafer is loaded in a graphite boat at first, then the graphite boat with the wafer is placed in PECVD equipment, and the wafer is subjected to a coating process in the PECVD equipment.

In the prior art, when wafers are loaded on a graphite boat, the wafers are hung on graphite boat pieces of the graphite boat, and a plurality of graphite boat pieces are arranged in parallel and fixedly connected with each other through ceramic screws and graphite nuts. However, when the graphite boat is operated for a long time and transported many times, the ceramic screw and the graphite nut that fix the graphite boat piece are easily loosened, resulting in loosening of the graphite boat piece. When the manipulator takes and places the wafer, the graphite boat piece is loosened, so that the manipulator is easy to fail in grabbing the wafer, and the manipulator can be used for crushing the graphite boat piece or the wafer in a serious condition. In addition, when the graphite boat piece is easy to loosen, the graphite boat needs to be corrected again for many times by using the boat corrector, so that the production efficiency is reduced.

In order to solve the problem that the graphite boat piece is easy to loosen, the embodiment of the utility model provides a graphite boat. The graphite boat is applied to a PECVD process and is used for bearing wafers. Fig. 1 shows a schematic structural diagram of a graphite boat according to an embodiment of the present invention. Fig. 2 is a schematic structural diagram of another graphite boat according to an embodiment of the present invention.

As shown in fig. 1 to 4, a graphite boat according to an embodiment of the present invention includes M graphite boat pieces 10 and a plurality of rows of insulating fixing members 20 for fixing the M graphite boat pieces 10. Each row of insulating fixing members 20 is of an integrated structure or a split structure, the insulating fixing member 20 of the integrated structure includes one insulating fixing unit 201, and the insulating fixing member 20 of the split structure includes more than two insulating fixing units 201. Each insulating fixing unit 201 is clamped with the corresponding graphite boat piece 10 through the opened groove 21. The insulating fixing unit 201 is provided with at least two grooves 21, and the distance between the grooves is consistent with the distance between the graphite boat pieces 10 clamped and connected with the grooves. The number and distribution of the insulating fixing units 201 in each row of insulating fixing members 20 are set so that the pitch of the M graphite boat pieces 10 is fixed.

In specific implementation, a plurality of graphite boat pieces 10 of the graphite boat are fixed by the respective insulating fixing units 201 of the insulating fixing member 20, and then the wafer is placed on the wafer inserting position 11 on each graphite boat piece 10 by a robot.

The embodiment of the utility model provides a graphite boat, every insulating fixed unit 201 of insulating mounting 20 is in the same place through recess 21 and corresponding graphite boat piece 10 joint offered to can utilize the fixed M graphite boat piece 10 of insulating mounting 20 of integral type structure or split type structure. At this time, each graphite boat piece 10 is fixed in a manner of being clamped with the corresponding groove 21 without the assistance of a connecting piece, thereby solving the problem that the graphite boat piece 10 is not flexible due to the connection of the connecting piece. In view of the fact that the graphite boat 10 is displaced from the set position after the graphite boat 10 becomes loose, it is necessary to correct the position by the boat corrector and fix it again. The graphite boat piece 10 of the graphite boat of the utility model is not easy to loose, and the times of correcting the position of the graphite boat piece 10 by the boat corrector can be reduced. In addition, because the graphite boat piece 10 is stable in position, when the manipulator takes and places the wafer, the success rate of grabbing and placing the wafer by the manipulator can be improved, and the graphite boat piece 10 or the wafer can be prevented from being broken.

The graphite boat 10 may have a long shape. The number of the graphite boat pieces 10 may be set according to production needs. For example, 52 pieces, 21 pieces, etc. Each graphite boat piece 10 may have a plurality of insert sites 11 arranged in the horizontal direction, and each insert site 11 may be inserted with one wafer so that each graphite boat piece 10 may be inserted with a plurality of wafers. At this time, the number of the slide glass of the graphite boat is the number of the inserting position 11 of each graphite boat piece 10 multiplied by the number of the graphite boat pieces 10. For example, a "416 graphite boat" carrying 166mm silicon wafers has 52 graphite boat pieces 10, each graphite boat piece 10 having 8 insert sites 11, which can carry 416 wafers in total.

The plurality of graphite boat pieces 10 are arranged in parallel to form a boat body. In this case, one graphite boat 10 is used as one row, and the boat body has a plurality of rows of graphite boat 10 and a plurality of rows of insert sites 11.

When fixing the plurality of graphite boat pieces 10 such that the relative positions of the plurality of graphite boat pieces 10 are fixed (the distance between adjacent graphite boat pieces 10 is fixed), it is necessary to fix at least the upper and lower sides of the plurality of graphite boat pieces 10.

In practical application, the lower side of the boat body can be fixed through a ceramic screw and graphite nut assembly. For example: through holes are formed at two ends of the lower side of each graphite boat piece 10 and between the adjacent insert positions 11. The ceramic screw rod passes through the through holes at the corresponding positions on the graphite boat pieces 10, and the two ends of the ceramic screw rod are in threaded connection with the graphite nuts. At this time, ceramic screw and graphite nut assemblies are arranged at both ends of the lower side of the boat body along the length direction of the graphite boat piece 10 and between the insertion piece positions 11 of adjacent rows.

The upper side of the boat body can be fixed by the insulating fixing member 20 provided by the embodiment of the present invention. In order to improve the stability of the relative positions of the plurality of graphite boat pieces 10, through holes may be formed at both ends of the upper side of each graphite boat piece 10. The ceramic screw rod is used for penetrating through holes at two ends of the upper side of the plurality of graphite boat pieces 10, and two ends of the ceramic screw rod are in threaded connection with the graphite nut. That is, the positions outside the first and last rows of insert sites 11 on the boat body are fixed by ceramic screws and graphite nuts. Meanwhile, the insulating fixing unit 201 of the insulating fixing member 20 provided by the embodiment of the present invention is installed between the adjacent rows of the inserting pieces 11 on the boat body.

In terms of material, the insulating fixing member 20 is made of an insulating material. Such as ceramics, high temperature resistant plastics, etc. When the insulating fixing member 20 is a ceramic fixing member, the insulating fixing member 20 has a good strength, and has high temperature resistance and corrosion resistance. In the process of coating the graphite boat in the PECVD equipment, the ceramic fixing piece has stable performance and is not easy to corrode or burn at high temperature, thereby being beneficial to prolonging the service life of the graphite boat and reducing the production cost.

In terms of shape, the insulating fixing unit 201 of the insulating fixing member 20 may have a flat plate shape, or may have another shape such as a curved shape, as long as each graphite boat 10 can be fixed. When the shape of the insulation fixing unit 201 of the insulation fixing member 20 is curved, any one surface of the insulation fixing unit 201 may be designed to be curved.

In terms of size, the size of each insulating and fixing unit 201 described above should be such that the insulating and fixing unit 201 can be provided with a corresponding number of grooves 21 to fix the graphite boat piece 10.

For example, when the insulating fixing unit 201 has two recesses 21 for fixing two graphite boat pieces 10, the insulating fixing unit 201 may be sized to provide two recesses 21 corresponding to the positions of the graphite boat pieces 10. When the insulating fixing unit 201 has M grooves 21 for fixing M graphite boat pieces 10, the length of the insulating fixing unit 201 should be greater than the width of the M grooves 21.

The grooves 21 of the insulating fixing units 201 are engaged with the corresponding graphite boat pieces 10, that is, the graphite boat pieces 10 are engaged with the grooves 21. In order to firmly clamp the graphite boat piece 10 and the groove 21 together, to improve the position stability of the graphite boat piece 10, and to prevent the graphite boat piece 10 from loosening, the width of the groove 21 may be designed to be equal to the thickness of the graphite boat piece 10. Of course, in order to facilitate the insertion of the graphite boat 10 into the groove 21 of the insulating fixing member 20, the width of the groove 21 may be designed to be larger than the thickness of the graphite boat 10. Here, the width of the groove 21 refers to the dimension of the groove 21 along the length direction of the insulating holder 20.

Illustratively, when the thickness of the graphite boat piece 10 is 0.2mm, the width of the groove 21 is 0.2mm or more and less than 0.25 mm. For example, the width of the groove 21 is 0.2mm, 0.21mm, 0.22mm, 0.23mm, 0.24mm, 0.25mm, or the like.

The distance between adjacent grooves 21 of the insulating fixing unit, that is, the length a of the protrusion 22 between adjacent grooves 21 defines the distance between two adjacent graphite boat pieces 10. At this time, by designing the length a of the protrusion 22, the distance between adjacent graphite boat pieces 10 can be precisely controlled, and a sufficient space is reserved for the insert pieces.

Illustratively, the design blade space of the graphite boat is 0.6mm, that is, when the design distance between two adjacent graphite boat blades 10 is 0.6mm, the length a of the protruding portion 22 in the length direction of the insulating fixing member 20 is greater than or equal to 0.6 mm. For example, the length A of the projection 22 is 0.6mm, 0.62mm, 0.65mm, 0.7mm, 0.73mm, or the like.

Two, four or more columns of insulating fixtures 20 may be provided in the boat body in terms of number. In practical application, the number of rows of the insulating fixtures 20 may be set according to parameters such as the number of rows of the wafer insertion sites 11 on the graphite boat.

In terms of layout, the rows of insulating fixtures 20 are arranged in parallel along the longitudinal direction of the boat. In order to enhance the fixing effect on the graphite boat piece 10, a row of insulating fixing pieces 20 is arranged between any two adjacent rows of inserting piece positions 11.

For example, when the boat body has 6 rows of insert sites 11, the insulating fixing members 20 are disposed between the first row of insert sites 11 and the second row of insert sites 11, between the second row of insert sites 11 and the third row of insert sites 11, between the third row of insert sites 11 and the fourth row of insert sites 11, between the fourth row of insert sites 11 and the fifth row of insert sites 11, and between the fifth row of insert sites 11 and the sixth row of insert sites 11. At this time, 5 rows of insulating fixtures 20 are provided on the upper side of the boat body. Of course, in order to save the insulating fixing member 20, 4, 3, or 3 rows of insulating fixing members 20 may be provided on the upper side of the boat body.

It should be noted that the insulating fixing member 20 should be disposed on the graphite boat 10 in the region other than the wafer inserting position 11 to prevent the insulating fixing member 20 from blocking the robot from picking and placing the wafer.

In terms of arrangement, there are various arrangements of the insulating fixing member 20 of the integrated structure and the insulating fixing member 20 of the split structure. The multiple rows of insulating fixing members 20 may be of a split structure or an integral structure, or may be combined with each other.

When at least one row of the insulating fixing members 20 in the plurality of rows of insulating fixing members 20 is an integrated structure, the number of the grooves 21 formed in the at least one row of the insulating fixing members 20 is M. At this time, the insulating fixing member 20 of the integrated structure may be manufactured by casting or the like, and the insulating fixing member 20 may be uniformly provided with the grooves 21 at positions corresponding to the graphite boat pieces 10, so that the processing is convenient. During installation, each graphite boat piece 10 is clamped into the corresponding groove 21 on the insulating fixing piece 20, so that the operation is simple, time and labor are saved, and the production efficiency can be effectively improved. At least one row of the insulating fixing members 20 is described above, it should be understood that the number of the insulating fixing members 20 may be one row, or two, three or more rows, and the rest rows are the insulating fixing members 20 in the split structure.

As shown in fig. 1 and 3, when each row of insulating fixing members 20 is of an integral structure, each row of insulating fixing members 20 has M number of grooves 21. At this time, the insulating fixing members 20 of one-row integrated structure can fix the relative positions of the M graphite boat pieces 10. The insulating fixing pieces 20 of the multi-column integrated structure are combined for use, so that the fixing effect on the graphite boat piece 10 can be greatly improved, and the probability of looseness of the graphite boat piece 10 is further reduced.

When at least one row of the insulating fixing members 20 in the plurality of rows of insulating fixing members 20 is in a split structure, the length of the insulating fixing member 20 in the split structure is relatively small, so that the insulating fixing member has good strength and long service life. And, when equipment maintenance, when changing, only need maintain, change a small amount of damaged split type structure insulation mounting 20 can, consider that the insulation mounting 20 cost of single split type structure is lower, can effectively reduce the equipment maintenance cost of production solar wafer. At least one row of the insulating fixing members 20 is described above, it should be understood that the number of the split insulating fixing members 20 may be one row, or two, three or more rows, and the rest rows are the insulating fixing members 20 of the integrated structure.

As shown in fig. 2 and 4, when each row of insulating fixing members 20 is of a split structure, the number of the grooves 21 formed in each insulating fixing unit 201 is smaller than the number of the graphite boat pieces 10. In this case, the number and distribution of the insulating fixing units 201 in each row may be designed to provide various ways of fixing the graphite boat 10, so that the fixing way of the graphite boat 10 is more flexible. The number of the grooves 21 of the insulation fixing unit 201 of each row of insulation fixing members 20 is at least 2, and may be 2, 3, or 4. The insulating and fixing units 201 may have the same structure or different structures.

When each row of insulating fixing parts 20 is of a split structure, the insulating fixing units 201 with the grooves 21 in a proper number, the insulating fixing units 201 in a proper number and the distribution of the insulating fixing units 201 in a proper number can be flexibly arranged according to the number of the graphite boat pieces 10 and the number of rows of the inserting piece positions 11, so that the distance between the M graphite boat pieces 10 can be fixed.

The number of the grooves 21 provided in the insulating fixing units 201 of each column may be the same or different.

When the number of the grooves 21 of each insulation fixing unit 201 is different, the number of the grooves 21 formed in at least two insulation fixing units 201 is different. At this time, the number of the concave grooves 21 formed in the insulating fixing unit 201 is different, and the number of the graphite boat pieces 10 that can be fixed by the insulating fixing unit 201 is also different depending on the structure of the insulating fixing unit 201. The insulating fixing units 201 of various structures may be combined to fix the graphite boat pieces 10 according to the number of the graphite boat pieces 10 of the graphite boat, thereby improving flexibility of fixing the graphite boat pieces 10 by the insulating fixing member 20.

Illustratively, when the boat body has 9 graphite boat pieces 10 and the number of rows of tab sites 11 is 8, 7 rows of insulating fixtures 20 may be provided. At this time, the first row of insulating holders 20 includes 1 insulating holder 201 having 2 grooves, 1 insulating holder 201 having 3 grooves, and 1 insulating holder 201 having 4 grooves in this order. The distribution mode of the insulation fixing units 201 of the second row of insulation fixing members 20 is opposite to the direction of the first row, and so on, and the arrangement of 7 rows of insulation fixing members 20 is completed.

When the number of the grooves 21 of each insulating fixing unit 201 is the same, all the insulating fixing units 201 have the same structure, so that the uniform processing and production are facilitated, and the universality is better. For example, the number of the grooves of the insulating fixing unit 201 is 2.

For example, when the boat body has 52 graphite boat pieces 10 and the number of rows of the insert piece sites 11 is 8, 7 rows of insulating fixing members 20 may be provided, each row of insulating fixing members 20 may include 26 insulating fixing units 201, and each insulating fixing unit 201 has 2 grooves 21.

When the insulation fixing members 20 of the split structure are mounted on the plurality of graphite boat pieces 10, not only the number of the insulation fixing units 201 and the number of the grooves 21 of the insulation fixing units 201, but also the distribution mode of the insulation fixing units 201 should be considered.

Specifically, when a plurality of rows of insulating fixing members 20 are mounted on the M

graphite boat pieces

10, 0 graphite boat piece 10 may be spaced between adjacent insulating fixing units 201 in each row of insulating fixing members 20, or 1 graphite boat piece 10 may be spaced between adjacent insulating fixing units 201.

For example, the number of the grooves of each insulating fixing unit 201 is 2, and no matter 0 or 1 graphite boat 10 may be arranged between adjacent insulating fixing units 201 in the insulating fixing member 20, the insulating fixing units 201 of each row of insulating fixing members 20 are sequentially and alternately clamped from the first graphite boat 10 and the second graphite boat 10.

As shown in fig. 5, the graphite boat includes 27 graphite boat pieces 10, and 8 rows of insulating fixing members 20 are provided, each row including 9 insulating fixing units 201, each insulating fixing unit 201 having two grooves 21. The first row of insulating fixing pieces 20 are clamped from the first graphite boat piece 10, wherein the first insulating fixing unit 201 is clamped with the first graphite boat piece 10 and the second graphite boat piece 10; the second insulating fixing unit 201 is clamped with the fourth graphite boat piece 10 and the fifth graphite boat piece 10; the third insulating fixing unit 201 is clamped with the seventh graphite boat piece 10 and the eighth graphite boat piece 10; and the same goes for the installation of the first column of insulating fixtures 20. The second row of insulating fixing pieces 20 are clamped from the second graphite boat piece 10, wherein the first insulating fixing unit 201 is clamped with the second and the third graphite boat pieces 10, the second insulating fixing unit 201 is clamped with the fifth and the sixth graphite boat pieces 10, the third insulating fixing unit 201 is clamped with the eighth and the ninth graphite boat pieces 10, and so on, and the second row of insulating fixing pieces 20 is installed. The insulating fixing units 201 in the third, fifth and seventh columns are arranged in the same manner as the insulating fixing units 201 in the first column, and the insulating fixing units 201 in the fourth, sixth and eighth columns are arranged in the same manner as the insulating fixing units 201 in the second column.

The embodiment of the utility model provides a still provide a graphite boat, compare with above-mentioned embodiment, the recess of insulating fixed unit can also have following deformation. The graphite boat includes M graphite boat pieces 10 and a plurality of rows of insulating fixtures 20 for fixing the M graphite boat pieces 10. Each row of insulating fixing members 20 is of an integrated structure or a split structure, the insulating fixing member 20 of the integrated structure includes one insulating fixing unit 201, and the insulating fixing member 20 of the split structure includes more than two insulating fixing units 201. Each insulating fixing unit 201 is provided with at least one groove 21, each groove 21 spans N graphite boat pieces 10, so as to limit the distance between two boat pieces in the N graphite boat pieces 10, wherein N is more than 1; the number and distribution of the insulating fixing units 201 in each row of insulating fixing members 20 are set so that the pitch of the M graphite boat pieces 10 is fixed.

As can be seen from the above-described structure, each insulating fixing unit 201 of the insulating fixing member 20 spans the N-piece graphite boat pieces 10 through the groove 21, thereby defining the pitch of the two boat pieces in the N-piece graphite boat pieces 10, and the plurality of insulating fixing units 201 cooperate with each other to fix the M graphite boat pieces 10. At this time, the relative position of each graphite boat piece 10 is defined by the corresponding insulating fixing unit 201 without the assistance of a connecting member, thereby solving the problem of looseness of the graphite boat piece 10 caused by the looseness of the connection of the connecting member. In view of the fact that the graphite boat 10 is displaced from the set position after the graphite boat 10 becomes loose, it is necessary to correct the position by the boat corrector and fix it again. The embodiment of the utility model provides a graphite boat piece 10 of graphite boat is difficult not hard up, can reduce the number of times that the school boat ware corrected graphite boat piece 10 positions. In addition, because the graphite boat piece 10 is stable in position, when the manipulator takes and places the wafer, the success rate of grabbing and placing the wafer by the manipulator can be improved, and the graphite boat piece 10 or the wafer can be prevented from being broken.

Fig. 6 is a schematic view showing a structure of an insulation fixing unit of the insulation fixing member 20. As shown in fig. 6, the insulating fixing unit 201 has 1 groove 21. Of course, the insulating fixing unit 201 may have a plurality of grooves 21.

In practical applications, each row of the insulating fixing members 20 may be a split structure. At this time, the insulating fixing units 201 of adjacent rows are engaged with each other to achieve the purpose of defining the pitch between the graphite boat pieces 10 (the relative position of the graphite boat pieces 10). 0 or 1 graphite boat piece 10 is arranged between the adjacent insulation fixing units 201 in each row of insulation fixing pieces 20.

The number 1< N ≦ M of the graphite boat pieces 10 spanned by the grooves 21 of the insulating and fixing unit 201. In order to simplify the installation of the insulating fixture 20 and improve the fixing effect, N is 2. At this moment, each groove 21 strides over 2 graphite boat pieces 10 to limit the space between the adjacent 2 graphite boat pieces 10, and the insulating fixing pieces 20 in each row are arranged in a staggered manner to fix the graphite boat pieces 10, so that the arrangement mode is simple and convenient to operate.

When the respective rows of insulating fixing members 20 are alternately arranged, the insulating fixing units 201 of the respective rows of insulating fixing members 20 may be alternately arranged in sequence from the first and second boat sheets. At this time, the insulating fixing units 201 of the respective rows are engaged with each other to apply forces to the graphite boat pieces 10 from the front and rear directions, thereby serving to fix the respective graphite boat pieces 10.

Illustratively, as shown in fig. 7, each insulating fixing unit 201 has a groove 21, each groove 21 spans 2 graphite boat pieces 10, 1 graphite boat piece 10 is spaced between adjacent insulating fixing units 201 in the insulating fixing member 20, and the insulating fixing units 201 of the insulating fixing members 20 of each row are clamped alternately from the first graphite boat piece 10 and the second graphite boat piece 10.

The embodiment of the utility model provides a graphite boat coating equipment is still provided, its graphite boat that contains any kind of above-mentioned technical scheme record.

The insulating fixing member 20 is made of an insulating material. Such as ceramics, high temperature resistant plastics, etc. When the insulating fixing member 20 is a ceramic fixing member, the insulating fixing member 20 has a good strength, and has high temperature resistance and corrosion resistance. In the process of coating the graphite boat in the PECVD equipment, the ceramic fixing piece has stable performance and is not easy to corrode or burn at high temperature, thereby being beneficial to prolonging the service life of the graphite boat and reducing the production cost.

As shown in fig. 1, 2 and 9, the graphite boat further includes at least one electrode block 30. The length of each electrode block 30 along the length direction of the graphite boat piece 10 is 32mm-36 mm.

As shown in fig. 8, the conventional length of the electrode block 30 is greater than 40mm in the prior art. As shown in fig. 9, the graphite boat according to the embodiment of the present invention has the electrode block 30 with a length of 32mm to 36mm, and the length of the electrode block 30 is shortened. Under the condition that the length of the graphite boat is not changed, the length of the electrode blocks 30 at the two ends of the graphite boat is shortened, so that the available space can be provided for extending the graphite boat piece 10, and the length of the graphite boat piece 10 can be further increased. At this time, one insert position 11 can be added on the graphite boat piece 10 with the increased length, so that the number of the slide glass of the graphite boat is increased, and the production efficiency is improved.

As shown in fig. 1, 2 and 9, the graphite boat further includes at least one boat foot 40. A plurality of graphite boat pieces 10 constitute a boat body. Each boat foot 40 is provided at an end of the boat body, and each boat foot 40 has a support table 41 that supports at least one graphite boat piece 10. The length of each boat foot 40 along the length direction of the graphite boat piece 10 is 52mm to 56 mm. When electrode block 30 length shrinks, the length of boat foot 40 is the same with the 40 length of boat foot of prior art, makes the utility model discloses a boat foot 40 can drag equipment such as match with current boat, reduces the equipment transformation expense.

As shown in fig. 1, 2 and 11, each graphite boat 10 includes a plurality of insert sites 11 and two clamping points 12 located between two adjacent insert sites 11. The angle formed by the connecting line of the geometric centers of the two clamping points 12 and the length direction of the graphite boat piece 10 is 85-95 degrees.

As shown in fig. 10, in the prior art, the positions of the clamping points 12 are scattered, and a large space is occupied on the graphite peripheral sheet. As shown in fig. 11, in the graphite boat provided by the embodiment of the present invention, the positions of the clamping points 12 are more concentrated, so that the space occupied by the clamping points 12 on the graphite boat piece 10 is saved, and a sufficient space is provided for adding one insertion position 11 to the graphite boat piece 10.

Illustratively, two clamping points 12 on the graphite boat piece 10 between two adjacent insert positions 11 form an included angle of 85 °, 86 °, 88 °, 90 °, 92 °, 94 °, 95 °, and the like with the length direction of the graphite boat piece 10.

As described above, in the case where the length of the graphite boat 10 is not changed, when the length of the electrode block 30 of the graphite boat is shortened and the positions of the seizing points 12 on the graphite boat 10 are concentrated, the graphite boat 10 can be provided with one more insertion site 11. Taking 416 graphite boats as an example, each graphite boat blade 10 has at least nine blade insertion sites 11. When the graphite boat has 52 graphite boat pieces 10, the number of the slide glass of the graphite boat is increased from 416 wafers to 468 wafers, and the production capacity is improved by 12.5 percent. Therefore, the embodiment of the utility model provides a graphite boat can improve the slide glass quantity of graphite boat, improves production efficiency.

While the invention has been described in connection with various embodiments, other variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing the claimed invention, from a review of the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other elements or steps, and the word "a" or "an" does not exclude a plurality. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage.

While the invention has been described in conjunction with specific features and embodiments thereof, it will be apparent that various modifications and combinations can be made thereto without departing from the spirit and scope of the invention. Accordingly, the specification and figures are merely exemplary of the invention as defined in the appended claims and are intended to cover any and all modifications, variations, combinations, or equivalents within the scope of the invention. It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. A graphite boat is characterized by comprising M graphite boat pieces and a plurality of rows of insulating fixing pieces for fixing the M graphite boat pieces;

each row of the insulating fixing pieces are of an integrated structure or a split structure, each insulating fixing piece of the integrated structure comprises an insulating fixing unit, and each insulating fixing piece of the split structure comprises more than two insulating fixing units; each insulation fixing unit is clamped with the corresponding graphite boat piece through a groove;

the insulation fixing unit is provided with at least two grooves, and the distance between the grooves is consistent with the distance between the graphite boat pieces clamped by the grooves;

the number and distribution of the insulating fixing units in each row of insulating fixing pieces are set so that the space between the M graphite boat pieces can be fixed.

2. The graphite boat of claim 1, wherein at least one row of the insulating mounts is a unitary structure, and the at least one row of insulating mounts defines M number of slots.

3. The graphite boat of claim 2, wherein each row of the insulating holders is of an integral structure, and each row of the insulating holders has M number of grooves.

4. The graphite boat of claim 1, wherein at least one row of the insulating mounts is a split configuration.

5. The graphite boat of claim 4, wherein each row of the insulating mounts is a split structure.

6. The graphite boat according to claim 5, wherein the number of the grooves of the insulating and fixing unit is 2.

7. The graphite boat of claim 6, wherein adjacent insulating fixture units in each column of the insulating fixtures are spaced 0 or 1 graphite boat piece apart.

8. The graphite boat of claim 7, wherein the insulating fixture units of each row of insulating fixtures are clamped alternately from the first and second boat sheets in sequence.

9. A graphite boat is characterized by comprising M graphite boat pieces and a plurality of rows of insulating fixing pieces for fixing the M graphite boat pieces;

each row of the insulating fixing pieces are of an integrated structure or a split structure, each insulating fixing piece of the integrated structure comprises an insulating fixing unit, and each insulating fixing piece of the split structure comprises more than two insulating fixing units;

each insulating fixing unit is provided with at least one groove, and each groove spans N graphite boat pieces so as to limit the distance between two boat pieces in the N graphite boat pieces, wherein N is more than 1;

10. The graphite boat of claim 9, wherein each row of the insulating mounts is a split configuration.

11. The graphite boat of claim 10, wherein N-2.

12. The graphite boat of claim 11, wherein adjacent insulating fixture units in each column of the insulating fixtures are spaced 0 or 1 graphite boat piece apart.

13. The graphite boat of claim 12, wherein the insulating fixture units of each row of insulating fixtures are disposed alternately from the first and second boat sheets in sequence.

14. A graphite boat coating apparatus comprising the graphite boat according to any one of claims 1 to 13, wherein the insulating fixture is a ceramic fixture or the insulating fixture is a plastic fixture.

15. The graphite boat plating apparatus of claim 14, wherein the graphite boat further comprises at least one boat foot; the graphite boat pieces form a boat body, each boat foot is arranged at the end part of the boat body, each boat foot is provided with a supporting platform for supporting at least one graphite boat piece, and the length of each boat foot along the length direction of the graphite boat piece is 52mm-56 mm; and/or the presence of a gas in the gas,

the graphite boat also comprises at least one electrode block; the length of each electrode block along the length direction of the graphite boat piece is 32mm-36 mm.

16. The graphite boat coating apparatus of claim 14, wherein each graphite boat piece comprises a plurality of insert sites and two clamping points located between two adjacent insert sites, and a geometric center connecting line of the two clamping points forms an included angle of 85 ° to 95 ° with a length direction of the graphite boat piece.

17. The graphite boat coating apparatus of claim 14, wherein each graphite boat blade has at least nine tab positions.