CN112301331A - Energy-saving efficient graphite boat with uniform film coating - Google Patents
Energy-saving efficient graphite boat with uniform film coating Download PDFInfo
- Publication number
- CN112301331A CN112301331A CN202011122688.2A CN202011122688A CN112301331A CN 112301331 A CN112301331 A CN 112301331A CN 202011122688 A CN202011122688 A CN 202011122688A CN 112301331 A CN112301331 A CN 112301331A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- graphite
- conductive mounting
- connecting part
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses an energy-saving and efficient graphite boat with uniform film coating, which comprises a plurality of graphite boat sheets and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part and a negative electrode connecting part, the positive electrode connecting part is connected with the positive electrode of the power supply, and the negative electrode connecting part is connected with the negative electrode of the power supply; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the anode connecting part, and both ends of the other graphite boat piece are connected with the cathode connecting part; and hollow grooves along the length direction of the graphite boat pieces are formed in the two groups of conductive mounting frames. The graphite boat can reduce the whole weight of the graphite boat, can improve the film coating efficiency by shortening the time of heating or cooling operation of the graphite boat in the silicon wafer film coating process, and can also improve the film coating efficiency and the film coating effect by enhancing the mobility of gas during film coating.
Description
Technical Field
The invention relates to the technical field of solar cell production, in particular to an energy-saving and efficient graphite boat with uniform film coating.
Background
At present, as the solar photovoltaic industry develops rapidly, the market scale continues to increase, but the market competition is fierce, so that in order to realize the flat-price internet surfing as soon as possible and the popularization and application in a wider range, each link of the whole industry strives to pursue and obtain the high-efficiency and low-cost battery. In the cell segment, it is very important to obtain a high-quality and low-cost cell.
The graphite boat is a bearing tool for depositing a silicon nitride film on the surface of a polycrystalline or monocrystalline silicon wafer treated by texturing, diffusion and other processes in a Plasma Enhanced Chemical Vapor Deposition (PECVD) tube furnace. The plasma enhanced chemical deposition method is adopted to coat the surface of the silicon wafer, and the coating is carried out at the temperature of about 500 ℃.
The existing graphite boat comprises a plurality of graphite boat pieces, a plurality of graphite cushion blocks and a plurality of boat feet, wherein each graphite boat piece is provided with a plurality of bearing positions, and the bearing positions are matched with the silicon wafers in size and used for supporting the silicon wafers; the graphite cushion blocks are positioned at two ends of the graphite boat and respectively arranged between the two graphite boat pieces for separating and fixing the graphite boat pieces. The conventional graphite boat has the following disadvantages:
1. graphite cushion and boat foot adopt solid structural design, and the structure is single heavy for the weight of whole graphite boat is heavier, and it is inconvenient to control the process.
2. The solid graphite cushion block and the boat foot are not beneficial to temperature transmission, and more time needs to be consumed in the process of temperature rise or temperature reduction, so that the efficiency of coating the surface of the silicon wafer is low, and the energy consumption is high.
3. In the process of coating the surface of the silicon wafer by adopting a plasma enhanced chemical deposition method, the solid graphite block and the boat foot block the flow of gas, and the coating efficiency and the coating effect are reduced.
4. The thickness of the graphite boat sheet is thicker, so that the distance between the two graphite boats is smaller, and the flowing of the coating gas and the uniformity of an electric field are influenced.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an energy-saving and efficient graphite boat with uniform film coating, the graphite boat can reduce the whole weight of the graphite boat, improve the film coating efficiency by shortening the time of heating or cooling operation of the graphite boat in the process of silicon wafer film coating, and also improve the film coating efficiency and the film coating effect by enhancing the flowability of gas during film coating.
The technical scheme for solving the technical problems is as follows:
an energy-saving and high-efficiency graphite boat with uniform film coating comprises a plurality of graphite boat sheets and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part and a negative electrode connecting part, the positive electrode connecting part is connected with the positive electrode of the power supply, and the negative electrode connecting part is connected with the negative electrode of the power supply; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the anode connecting part, and both ends of the other graphite boat piece are connected with the cathode connecting part; and hollow grooves along the length direction of the graphite boat pieces are formed in the two groups of conductive mounting frames.
The working principle of the energy-saving and high-efficiency graphite boat is as follows:
when the graphite boat is installed, firstly installing one graphite boat sheet between the two groups of conductive installation frames, then installing the other graphite boat sheet between the two groups of conductive installation frames in a manner of being parallel to the first graphite boat sheet, and so on until the plurality of graphite boat sheets are installed on the conductive installation frames in a manner of being parallel at equal intervals; in two adjacent graphite boat pieces, two ends of one graphite boat piece are connected with the anode connecting part of the conductive mounting frame, and two ends of the other graphite boat piece are connected with the cathode connecting part of the conductive mounting frame, so that a directional electric field can be generated between the two adjacent graphite boat pieces, and the plasma can directionally move under the action of the directional electric field to complete film coating; the conductive mounting frame is provided with the hollow groove along the length direction of the graphite boat piece, namely, a part of the conductive mounting frame is dug, so that the weight of the conductive mounting frame is reduced, and the weight of the whole graphite boat is reduced; in addition, when the surface of the silicon wafer is coated by adopting a plasma enhanced chemical deposition method, the conductive mounting frame is provided with the hollow groove along the length direction of the graphite boat piece, the interior of the conductive mounting frame is communicated with the outside air through the hollow groove, the heat transfer is smoother, and the heating speed of the graphite boat can be increased in the heating and warming process, so that the heating speed of the graphite boat is higher, and the consumed energy is less; on the other hand, the hollow-out grooves along the length direction of the graphite boat piece are formed in the conductive mounting frame, so that the surface area of the conductive mounting frame is increased, namely the heat dissipation area of the conductive mounting frame is increased, and the cooling speed is higher during heat dissipation; the working hours of the plasma enhanced chemical deposition process are saved in the processes of temperature rise and temperature drop, and the film coating efficiency of the silicon wafer is improved; meanwhile, in the deposition furnace, the flowing direction of the gas is parallel to the direction of the graphite boat, so that hollow grooves along the length direction of the graphite boat sheets are formed, the blocking of the conductive mounting frame to the air flow can be reduced as far as possible at the air inlet end in the film coating process, the air flow can enter the inner space of each graphite boat uniformly, the mobility of the gas inside and outside the graphite boat and the flowing uniformity of the gas are enhanced, the film coating efficiency and the film coating effect are improved, the energy is saved, the environment is protected, and the deposition effect of each battery sheet is consistent.
According to a preferable scheme of the invention, the positive electrode connecting part and the negative electrode connecting part respectively comprise a plurality of graphite blocks and graphite rods perpendicular to the length direction of the graphite boat piece, connecting through holes are formed in the graphite blocks, hollow holes perpendicular to the connecting through holes are also formed in the graphite blocks, the hollow holes form the hollow grooves, and the graphite rods are arranged in the connecting through holes in a penetrating mode to connect the graphite blocks into a long strip shape.
According to a preferred scheme of the invention, the conductive mounting rack comprises a left end conductive mounting rack and a right end conductive mounting rack, the positive electrode connecting part is respectively arranged below the left end conductive mounting rack and above the right end conductive mounting rack, and the negative electrode connecting part is respectively arranged above the left end conductive mounting rack and below the right end conductive mounting rack.
Preferably, the graphite block comprises a graphite cushion block, an electrode block and a graphite boat foot for supporting the graphite boat; the graphite cushion block comprises an end graphite cushion block arranged at the outermost side of the conductive mounting frame and a plurality of middle graphite cushion blocks, and the middle graphite cushion blocks are provided with hollow grooves perpendicular to the direction of the connecting through holes; the front end of the electrode block is provided with an electrode hole for connecting with a power line, and the electrode block is arranged on one group of the conductive mounting frames and is respectively arranged in the middle of the positive electrode connecting part and the middle of the negative electrode connecting part; the graphite boat feet are respectively arranged at two ends of the graphite boat and are positioned at two sides below the conductive mounting rack.
Preferably, the graphite boat foot comprises a fixing part and a supporting part, the connecting through hole is arranged on the fixing part, one end of the supporting part is connected with the fixing part, and the other end of the supporting part extends downwards; the fixing part is provided with a hollow groove perpendicular to the direction of the connecting through hole.
Preferably, hollow holes are formed in the middle graphite cushion block in a direction perpendicular to the connecting through holes, and the hollow holes form the hollow grooves.
According to a preferable scheme of the invention, the supporting device further comprises a ceramic rod and a ceramic ring which are arranged in the middle of the graphite boat, the ceramic ring is arranged between two adjacent graphite boat pieces, the ceramic rod penetrates through the ceramic ring and fixedly connects the graphite boat pieces with the ceramic ring, and the axial direction of the ceramic rod is perpendicular to the graphite boat pieces.
Preferably, there are two groups of ceramic rods respectively arranged at the upper part and the lower part of the graphite boat piece, each group of ceramic rods has a plurality of ceramic rods, and the ceramic rods are uniformly arranged along the length direction of the graphite boat.
In a preferred scheme of the invention, among the plurality of graphite boat pieces, a positive graphite boat piece is connected with the positive electrode connecting part, and a negative graphite boat piece is connected with the negative electrode connecting part; the positive graphite boat piece is provided with a positive connecting plate at two ends, and the positive connecting plate extends to the positive connecting part and is connected with the positive connecting part; the both ends of burden graphite boat piece all are equipped with the negative connecting plate, and this negative connecting plate extends to negative pole connecting portion and with the negative pole connecting portion are connected.
According to a preferable scheme of the invention, a plurality of bearing positions for loading silicon wafers are arranged on the graphite boat piece, and the bearing positions are uniformly arranged along the length direction of the graphite boat; and a plurality of clamping point holes for supporting the silicon wafer are arranged around the bearing position.
In a preferred embodiment of the present invention, the thickness of the graphite boat piece is 1.5 to 2 mm.
Compared with the prior art, the invention has the following beneficial effects:
1. the energy-saving and high-efficiency graphite boat comprises a plurality of graphite boat sheets, wherein two ends of the plurality of graphite boat sheets are arranged on the conductive mounting frame. Through set up the fretwork groove along graphite boat piece length direction on electrically conductive mounting bracket, alleviateed the weight of electrically conductive mounting bracket to alleviateed the weight of whole graphite boat, makeed the operation of using plasma reinforcing chemical deposition technology to silicon chip coating film more convenient.
2. According to the energy-saving efficient graphite boat, the hollow-out grooves along the length direction of the graphite boat piece are formed in the conductive mounting frame, the interior of the mounting frame is communicated with the outside air through the hollow-out grooves, and heat is transferred more smoothly, so that the energy-saving efficient graphite boat has higher heating speed in the heating process, reduces energy consumption, and has higher heat dissipation speed in the heat dissipation process, so that the working time is saved, and the production efficiency is improved.
3. According to the energy-saving and high-efficiency graphite boat, the conductive mounting frame is provided with the hollow grooves along the length direction of the graphite boat piece, and in the process of film coating, air flow can enter the inner space of the graphite boat from the hollow grooves, so that the flowability of the air inside and outside the graphite boat is enhanced, the film coating efficiency is improved, and the energy-saving and high-efficiency graphite boat is more energy-saving and environment-friendly.
Drawings
FIG. 1 is a perspective view of a graphite boat according to the present invention from one of its viewing angles.
FIG. 2 is a front view of the graphite boat of the present invention.
Fig. 3 is a perspective view of a positive graphite boat piece of the graphite boat of the present invention.
Fig. 4 is a perspective view of the negative graphite boat piece of the graphite boat of the present invention.
FIG. 5 is a perspective view of a graphite boat graphite block of the present invention.
FIG. 6 is a perspective view of a graphite boat foot of the graphite boat of the present invention.
FIG. 7 is a schematic view of a graphite boat of the present invention in a tube furnace, wherein the directions of the arrows are inlet and outlet directions.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited thereto.
Referring to fig. 1-7, the energy-saving and high-efficiency graphite boat with uniform film coating comprises a plurality of graphite boat sheets and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part 1 and a negative electrode connecting part 2, the positive electrode connecting part 1 is connected with a positive electrode of a power supply, and the negative electrode connecting part 2 is connected with a negative electrode of the power supply; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the positive electrode connecting part 1, and both ends of the other graphite boat piece are connected with the negative electrode connecting part 2; and hollow grooves 8 along the length direction of the graphite boat pieces are formed in the two groups of conductive mounting frames.
Referring to fig. 1-2, the positive electrode connecting portion 1 and the negative electrode connecting portion 2 both include a plurality of graphite blocks and a graphite rod 3 perpendicular to the length direction of the graphite boat piece, the graphite blocks are provided with connecting through holes 7, the graphite blocks are further provided with hollow holes perpendicular to the connecting through holes 7, the hollow holes form the hollow grooves 8, and the graphite rod 3 is inserted into the connecting through holes 7 to connect the plurality of graphite blocks into a long strip shape. The graphite rod 3 is arranged in the plurality of graphite blocks in a penetrating way, so that the plurality of graphite blocks are connected into an integral graphite strip; the graphite strip is arranged into a form consisting of a plurality of graphite blocks, so that the graphite strip can be more conveniently mounted and dismounted, when more graphite boat pieces need to be mounted, the number of the graphite blocks can be increased to match the number of the graphite boat pieces, and the adaptability of the conductive mounting frame is improved; in addition, the hollow grooves 8 are formed in the graphite block, so that the volume of the graphite block is reduced, and the weight of the graphite block is reduced; in the heating process, the graphite block can have a faster temperature rise speed; on the other hand, the hollow-out grooves 8 are formed in the graphite block, so that the surface area of the graphite block is increased, and the cooling speed is higher in the heat dissipation process due to the increase of the heat dissipation area, and the working hours are saved; meanwhile, during film coating, the air flow in the graphite boat forms convection with the outside air through the hollow groove 8, so that the film coating speed and the film coating effect are increased, and the production efficiency is improved.
Referring to fig. 1-2, the conductive mounting bracket includes a left conductive mounting bracket and a right conductive mounting bracket, the positive electrode connecting portion 1 is disposed below the left conductive mounting bracket and above the right conductive mounting bracket, and the negative electrode connecting portion 2 is disposed above the left conductive mounting bracket and below the right conductive mounting bracket.
Referring to fig. 1-2, the graphite block includes a graphite cushion block, an electrode block 5, and a graphite boat foot 6 for supporting a graphite boat; the graphite cushion block comprises an end graphite cushion block 4-1 arranged at the outermost side of the conductive mounting frame and a plurality of middle graphite cushion blocks 4-2, and the middle graphite cushion blocks 4-2 are provided with hollow grooves 8 perpendicular to the direction of the connecting through holes 7; the front end of the electrode block 5 is provided with an electrode hole 5-1 used for being connected with a power line, and the electrode block 5 is arranged on one group of the conductive mounting frames and is respectively arranged in the middle of the positive electrode connecting part 1 and the middle of the negative electrode connecting part 2; the graphite boat feet 6 are respectively arranged at two ends of the graphite boat and are positioned at two sides below the conductive mounting rack. In the structure, the electrode block 5 is respectively arranged on the positive electrode connecting part 1 and the negative electrode connecting part 2, and the positive electrode connecting part 1 and the negative electrode connecting part 2 are connected together through the graphite rod 3, so that after the electrode block 5 is connected with one pole of a power supply through the electrode hole 5-1, the positive electrode connecting part 1 is connected with the positive electrode of the power supply, and the negative electrode connecting part 2 is connected with the negative electrode of the power supply; in addition, set up graphite boat foot 6 respectively in the both sides of electrically conductive mounting bracket below for distance between the graphite boat foot 6 is longer, thereby makes the stress point of graphite boat more dispersed, has improved the stability when the graphite boat is put.
Referring to fig. 1 and 6, the graphite boat foot 6 comprises a fixed part 6-1 and a supporting part 6-2, the connecting through hole 7 is arranged on the fixed part 6-1, one end of the supporting part 6-2 is connected with the fixed part 6-1, and the other end extends downwards; the fixing part 6-1 is provided with a hollow groove 8 perpendicular to the direction of the connecting through hole 7. The graphite boat foot 6 with the structure is arranged, the connecting through hole 7 is arranged on the fixing part 6-1, and when the graphite rod 3 passes through the connecting through hole 7 of the fixing part 6-1 to be connected with other graphite blocks, the graphite boat foot 6 and the other graphite blocks are connected into a whole; one end of the support part 6-2 of the graphite boat foot 6 extends downwards, namely the support part 6-2 protrudes downwards relative to the fixed part 6-1 to play a role in supporting; in addition, the fixing part 6-1 of the graphite boat foot 6 is provided with the hollow groove 8 perpendicular to the connecting through hole 7, so that the effects of reducing weight and accelerating temperature rise and reduction are more obvious, and meanwhile, gas outside the graphite boat can enter the graphite boat from the hollow groove 8, and the film coating efficiency and the film coating effect are better.
Referring to fig. 1 and 5, hollow holes are formed in the middle graphite pad 4-2 in a direction perpendicular to the connecting through holes 7, and the hollow holes form the hollow grooves 8. Therefore, the hollow grooves 8 are formed in the middle graphite blocks, so that the weight of the whole graphite boat is reduced; in addition, the hollow-out grooves 8 are arranged, so that the heating speed during heating is increased, the heat dissipation speed during cooling is increased, and the film coating efficiency is improved; meanwhile, in the coating process, the air flow in the graphite boat forms convection with the outside air through the hollow groove 8, so that the coating speed is increased, and the production efficiency is improved.
Referring to fig. 1-2, the support device further includes a ceramic rod 10 and a ceramic ring 9, the ceramic ring 9 is disposed between two adjacent graphite boat pieces, the ceramic rod 10 is inserted into the ceramic ring 9 and fixedly connects the graphite boat pieces with the ceramic ring 9, and an axial direction of the ceramic rod 10 is perpendicular to the graphite boat pieces. The ceramic rod 10 and the ceramic ring 9 are arranged, the ceramic ring 9 separates two adjacent graphite boat pieces, and the graphite boat pieces are arranged on the conductive mounting frame in parallel at equal intervals because two ends of the ceramic ring 9 are parallel; the graphite boat pieces are fixedly connected with the ceramic ring 9 by the ceramic rod 10, so that a plurality of graphite boat pieces are connected and fixed together to form a whole.
Referring to fig. 1-2, two groups of ceramic rods 10 are respectively arranged at the upper part and the lower part of the graphite boat piece, each group of ceramic rods 10 has a plurality of ceramic rods 10, and the ceramic rods 10 are uniformly arranged along the length direction of the graphite boat. The ceramic rods 10 which are uniformly distributed along the length direction of the graphite boat are arranged in an upper group and a lower group, so that the connection points between the graphite boat pieces are more, and the connection between the graphite boat pieces is firmer and more stable.
Referring to fig. 1 to 4, among the plurality of graphite boat pieces, a positive graphite boat piece 11 is connected with the positive electrode connecting part 1, and a negative graphite boat piece 12 is connected with the negative electrode connecting part 2; the two ends of the positive graphite boat piece 11 are respectively provided with a positive connecting plate 11-1, and the positive connecting plates 11-1 extend to the positive connecting part 1 and are connected with the positive connecting part 1; and the two ends of the negative graphite boat piece 12 are respectively provided with a negative connecting plate 12-1, and the negative connecting plates 12-1 extend to the negative connecting part 2 and are connected with the negative connecting part 2. The positive connecting plate 11-1 or the negative connecting plate 12-1 is arranged at the two ends of the plurality of graphite boat pieces, so that the graphite boat pieces are installed, and each graphite boat piece can be communicated with a power supply with corresponding polarity.
Referring to fig. 1-4, a plurality of carrying positions 13 for loading silicon wafers are arranged on the graphite boat sheet, and the carrying positions 13 are uniformly arranged along the length direction of the graphite boat; and a plurality of bayonet holes 14 for supporting the silicon wafer are arranged around the bearing position 13. A plurality of bearing positions 13 are arranged on the graphite boat piece, so that each graphite boat piece can be provided with more silicon chips, and the utilization rate of the graphite boat piece is improved; and a plurality of clamping point holes 14 for supporting the silicon wafer are arranged, so that the silicon wafer has better stability on the graphite boat.
Referring to fig. 1 to 4, the thickness of the graphite boat piece is 1.5 to 2 mm. Compared with the traditional graphite boat, the thickness of the graphite boat pieces is reduced to 1.5-2mm, so that the distance between every two adjacent graphite boat pieces is increased, gas flows more smoothly, an electric field is more uniform, the quality of a coated film is improved, and chromatic aberration is reduced.
The working principle of the energy-saving and high-efficiency graphite boat is as follows:
when the graphite boat is installed, firstly installing one graphite boat sheet between the two groups of conductive installation frames, then installing the other graphite boat sheet between the two groups of conductive installation frames in a manner of being parallel to the first graphite boat sheet, and so on until the plurality of graphite boat sheets are installed on the conductive installation frames in a manner of being parallel at equal intervals; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the positive electrode connecting part 1 of the conductive mounting frame, and both ends of the other graphite boat piece are connected with the negative electrode connecting part 2 of the conductive mounting frame, so that a directional electric field can be generated between the two adjacent graphite boat pieces, and the plasma performs directional movement under the action of the directional electric field to complete film coating; the hollow-out grooves 8 along the length direction of the graphite boat piece are arranged on the conductive mounting frame, namely, a part of the conductive mounting frame is dug, so that the weight of the conductive mounting frame is reduced, and the weight of the whole graphite boat is reduced; in addition, when the surface of the silicon wafer is coated by adopting a plasma enhanced chemical deposition method, the hollow-out grooves 8 along the length direction of the graphite boat piece are arranged on the conductive mounting frame, the interior of the conductive mounting frame is communicated with the outside air through the hollow-out grooves 8, heat is transferred more smoothly, and the heating speed of the graphite boat can be increased in the heating and warming process, so that the heating speed of the graphite boat is higher, and the consumed energy is less; on the other hand, the hollow-out grooves 8 along the length direction of the graphite boat piece are formed in the conductive mounting frame, so that the surface area of the conductive mounting frame is increased, namely the heat dissipation area of the conductive mounting frame is increased, and the cooling speed is higher during heat dissipation; the working hours of the plasma enhanced chemical deposition process are saved in the processes of temperature rise and temperature drop, and the film coating efficiency of the silicon wafer is improved; meanwhile, in the deposition furnace, the flowing direction of the gas is parallel to the direction of the graphite boat, so that hollow grooves 8 along the length direction of the graphite boat sheets are formed, the blocking of the conductive mounting frame to the gas flow can be reduced as far as possible at the gas inlet end in the film coating process, the gas flow can enter the inner space of each graphite boat uniformly through the hollow grooves 8, the mobility of the gas inside and outside the graphite boat and the flowing uniformity of the gas are enhanced, the film coating efficiency and the film coating effect are improved, the energy is saved, the environment is protected, and the deposition effect of each battery sheet is consistent.
The present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents and are included in the scope of the present invention.
Claims (10)
1. An energy-saving and high-efficiency graphite boat with uniform film coating comprises a plurality of graphite boat sheets and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part and a negative electrode connecting part, the positive electrode connecting part is connected with the positive electrode of the power supply, and the negative electrode connecting part is connected with the negative electrode of the power supply; in two adjacent graphite boat pieces, the both ends of one graphite boat piece all are connected with positive pole connecting portion, and the both ends of another graphite boat piece all are connected with negative pole connecting portion, its characterized in that, all be equipped with the fretwork groove along graphite boat piece length direction on two sets of electrically conductive mounting brackets.
2. The energy-saving and efficient graphite boat with uniform coating according to claim 1, wherein the conductive mounting rack comprises a left conductive mounting rack and a right conductive mounting rack, the positive connecting parts are respectively arranged below the left conductive mounting rack and above the right conductive mounting rack, and the negative connecting parts are respectively arranged above the left conductive mounting rack and below the right conductive mounting rack.
3. The energy-saving and efficient graphite boat with uniform coating according to claim 2, wherein the positive electrode connecting part and the negative electrode connecting part each comprise a plurality of graphite blocks and graphite rods perpendicular to the length direction of the graphite boat piece, connecting through holes are formed in the graphite blocks, hollow holes perpendicular to the connecting through holes are formed in the graphite blocks, the hollow holes form the hollow grooves, and the graphite rods are inserted into the connecting through holes to connect the plurality of graphite blocks into a long strip shape.
4. The energy-saving and high-efficiency graphite boat with uniform coating according to claim 3, wherein the graphite block comprises a graphite cushion block, an electrode block and graphite boat feet for supporting the graphite boat; the graphite cushion block comprises an end graphite cushion block arranged at the outermost side of the conductive mounting frame and a plurality of middle graphite cushion blocks, and the middle graphite cushion blocks are provided with hollow grooves perpendicular to the direction of the connecting through holes; the front end of the electrode block is provided with an electrode hole for connecting with a power line, and the electrode block is arranged on one group of the conductive mounting frames and is respectively arranged in the middle of the positive electrode connecting part and the middle of the negative electrode connecting part; the graphite boat feet are respectively arranged at two ends of the graphite boat and are positioned at two sides below the conductive mounting rack.
5. The energy-saving efficient graphite boat with uniform coating according to claim 4, wherein the graphite boat leg comprises a fixing portion and a supporting portion, the connecting through hole is arranged on the fixing portion, one end of the supporting portion is connected with the fixing portion, and the other end of the supporting portion extends downwards; the fixing part is provided with a hollow groove perpendicular to the direction of the connecting through hole.
6. The energy-saving and efficient graphite boat with uniform coating according to claim 4, wherein the middle graphite pad block is provided with hollowed holes perpendicular to the direction of the connecting through holes, and the hollowed holes form the hollowed grooves.
7. The energy-saving and efficient graphite boat with uniform coating according to claim 1, wherein the support device further comprises a ceramic rod and a ceramic ring arranged in the middle of the graphite boat, the ceramic ring is arranged between two adjacent graphite boat pieces, the ceramic rod is arranged in the ceramic ring in a penetrating manner and fixedly connects the graphite boat pieces with the ceramic ring, and the axis direction of the ceramic rod is perpendicular to the graphite boat pieces.
8. The energy-saving and efficient graphite boat of claim 7, wherein the ceramic rods are arranged in two groups, respectively on the upper and lower parts of the graphite boat piece, and there are multiple ceramic rods in each group, and the multiple ceramic rods are uniformly arranged along the length direction of the graphite boat.
9. The energy-saving and high-efficiency graphite boat with uniform coating according to claim 1, wherein among the plurality of graphite boat pieces, the graphite boat piece connected with the positive electrode connecting part is a positive graphite boat piece, and the graphite boat piece connected with the negative electrode connecting part is a negative graphite boat piece; the positive graphite boat piece is provided with a positive connecting plate at two ends, and the positive connecting plate extends to the positive connecting part and is connected with the positive connecting part; the both ends of burden graphite boat piece all are equipped with the negative connecting plate, and this negative connecting plate extends to negative pole connecting portion and with the negative pole connecting portion are connected.
10. The energy-saving and high-efficiency graphite boat with uniform coating according to claim 1, wherein a plurality of bearing positions for loading silicon wafers are arranged on the graphite boat sheet, and the bearing positions are uniformly arranged along the length direction of the graphite boat; and a plurality of clamping point holes for supporting the silicon wafer are arranged around the bearing position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011122688.2A CN112301331A (en) | 2020-10-20 | 2020-10-20 | Energy-saving efficient graphite boat with uniform film coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011122688.2A CN112301331A (en) | 2020-10-20 | 2020-10-20 | Energy-saving efficient graphite boat with uniform film coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112301331A true CN112301331A (en) | 2021-02-02 |
Family
ID=74328576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011122688.2A Pending CN112301331A (en) | 2020-10-20 | 2020-10-20 | Energy-saving efficient graphite boat with uniform film coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112301331A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115631987A (en) * | 2022-08-23 | 2023-01-20 | 江苏微导纳米科技股份有限公司 | Boat foot, carrier and deposition equipment |
| CN116732501A (en) * | 2023-08-09 | 2023-09-12 | 福建福碳新材料科技有限公司 | Support boat foot for isostatic pressure graphite boat for third-generation semiconductor |
-
2020
- 2020-10-20 CN CN202011122688.2A patent/CN112301331A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115631987A (en) * | 2022-08-23 | 2023-01-20 | 江苏微导纳米科技股份有限公司 | Boat foot, carrier and deposition equipment |
| CN115631987B (en) * | 2022-08-23 | 2024-02-13 | 江苏微导纳米科技股份有限公司 | Boat foot, carrier and deposition equipment |
| CN116732501A (en) * | 2023-08-09 | 2023-09-12 | 福建福碳新材料科技有限公司 | Support boat foot for isostatic pressure graphite boat for third-generation semiconductor |
| CN116732501B (en) * | 2023-08-09 | 2023-10-10 | 福建福碳新材料科技有限公司 | Support boat foot for isostatic pressure graphite boat for third-generation semiconductor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112301331A (en) | Energy-saving efficient graphite boat with uniform film coating | |
| CN211929454U (en) | Slide boat in photovoltaic cell process furnace | |
| CN112466809B (en) | Semiconductor process equipment and bearing device | |
| CN109082649A (en) | A kind of loading device of stable plated film | |
| CN213037843U (en) | Energy-saving high-efficient type graphite boat | |
| CN214004778U (en) | Energy-saving efficient graphite boat with uniform film coating | |
| CN114171377A (en) | Novel diffusion method | |
| CN114016004B (en) | Graphite boat front electrode reconstruction structure capable of avoiding falling sheets in furnace | |
| CN114783923A (en) | Novel bear graphite boat of silicon chip mode | |
| CN217387086U (en) | Air inlet structure | |
| CN112960674B (en) | Chassis and chassis assembly of polycrystalline silicon reduction furnace and reduction furnace | |
| CN214327881U (en) | Cavity structure of tubular PECVD equipment | |
| CN210886316U (en) | Polysilicon ingot casting thermal field heat insulation cage | |
| CN206298661U (en) | A kind of diffusion furnace | |
| CN113584595A (en) | Diffusion furnace | |
| CN111354839A (en) | Heating control method of annealing furnace and annealing furnace | |
| CN211645378U (en) | Graphite boat suitable for bearing large-size silicon wafers | |
| CN208240631U (en) | A kind of graphite boat of photovoltaic production | |
| CN216592773U (en) | Sintering furnace temperature control device and sintering furnace | |
| CN219752430U (en) | Hollow graphite block of graphite boat for preparing film by tubular PECVD method | |
| CN214422269U (en) | Chuck structure | |
| CN219607362U (en) | Transverse pipeline heating device | |
| CN218756030U (en) | PECVD with auxiliary heating device | |
| CN212895074U (en) | Heat exchanger | |
| CN212572954U (en) | High temperature resistant voice coil loudspeaker voice coil |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |