CN213037843U - Energy-saving high-efficient type graphite boat - Google Patents
Energy-saving high-efficient type graphite boat Download PDFInfo
- Publication number
- CN213037843U CN213037843U CN202021895053.1U CN202021895053U CN213037843U CN 213037843 U CN213037843 U CN 213037843U CN 202021895053 U CN202021895053 U CN 202021895053U CN 213037843 U CN213037843 U CN 213037843U
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- graphite
- connecting part
- conductive mounting
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses an energy-saving and high-efficiency graphite boat, which comprises a plurality of graphite boat pieces and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part and a negative electrode connecting part, the positive electrode connecting part is connected with the positive electrode of the power supply, and the negative electrode connecting part is connected with the negative electrode of the power supply; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the anode connecting part, and both ends of the other graphite boat piece are connected with the cathode connecting part; and hollow grooves are formed in the two groups of conductive mounting frames. The utility model discloses a graphite boat not only can alleviate the whole weight of graphite boat, and the operation of being convenient for can also shorten silicon chip coating film process and heat up or the time of cooling operation to graphite boat, improves coating film efficiency moreover.
Description
Technical Field
The utility model relates to a solar wafer production technical field, in particular to energy-conserving high-efficient type graphite boat.
Background
At present, as the solar photovoltaic industry develops rapidly, the market scale continues to increase, but the market competition is fierce, so that in order to realize the flat-price internet surfing as soon as possible and the popularization and application in a wider range, each link of the whole industry strives to pursue and obtain the high-efficiency and low-cost battery. In the cell segment, it is very important to obtain a high-quality and low-cost cell.
The graphite boat is a bearing tool for depositing a silicon nitride film on the surface of a polycrystalline or monocrystalline silicon wafer treated by texturing, diffusion and other processes in a Plasma Enhanced Chemical Vapor Deposition (PECVD) tube furnace. The plasma enhanced chemical deposition method is adopted to coat the surface of the silicon wafer and needs to be carried out at the temperature of about 450 ℃.
The existing graphite boat comprises a plurality of graphite boat pieces, a plurality of graphite cushion blocks and a plurality of boat feet, wherein each graphite boat piece is provided with a plurality of bearing positions, and the bearing positions are matched with the silicon wafers in size and used for supporting the silicon wafers; the graphite cushion blocks are positioned at two ends of the graphite boat and respectively arranged between the two graphite boat pieces for separating and fixing the graphite boat pieces. The traditional graphite cushion block and boat foot adopt solid structural design, the structure is single and heavy, the weight of the whole graphite boat is heavier, and the operation and control process is inconvenient; and the solid graphite cushion block and the boat foot are not beneficial to temperature transmission, and more time needs to be consumed in the process of temperature rise or temperature reduction, so that the efficiency of coating the surface of the silicon wafer is low, and the energy consumption is high.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art not enough, provide an energy-conserving high-efficient type graphite boat, the graphite boat not only can alleviate the whole weight of graphite boat, but also can shorten silicon chip coating film process and heat up or the time of cooling down the operation to the graphite boat, improve coating film efficiency.
The utility model provides a technical scheme of above-mentioned technical problem is:
an energy-saving and high-efficiency graphite boat comprises a plurality of graphite boat sheets and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part and a negative electrode connecting part, the positive electrode connecting part is connected with the positive electrode of the power supply, and the negative electrode connecting part is connected with the negative electrode of the power supply; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the anode connecting part, and both ends of the other graphite boat piece are connected with the cathode connecting part; and hollow grooves are formed in the two groups of conductive mounting frames.
The working principle of the energy-saving and high-efficiency graphite boat is as follows:
when the graphite boat is installed, firstly installing one graphite boat sheet between the two groups of conductive installation frames, then installing the other graphite boat sheet between the two groups of conductive installation frames in a manner of being parallel to the first graphite boat sheet, and so on until the plurality of graphite boat sheets are installed on the conductive installation frames in a manner of being parallel at equal intervals; in two adjacent graphite boat pieces, two ends of one graphite boat piece are connected with the anode connecting part of the conductive mounting frame, and two ends of the other graphite boat piece are connected with the cathode connecting part of the conductive mounting frame, so that a directional electric field can be generated between the two adjacent graphite boat pieces, and the plasma can directionally move under the action of the directional electric field to complete film coating; the hollow groove is formed in the conductive mounting frame, which is equivalent to digging a part of the conductive mounting frame, so that the weight of the conductive mounting frame is reduced, and the weight of the whole graphite boat is reduced; on the other hand, when the surface of the silicon wafer is coated by adopting a plasma enhanced chemical deposition method, the hollow groove is formed in the conductive mounting frame, the interior of the conductive mounting frame is communicated with the outside air through the hollow groove, heat is transferred more smoothly, the heating speed of the graphite boat can be increased in the heating and temperature rising process, the temperature rising speed of the graphite boat is increased, and the consumed energy is less; in addition, the hollow-out grooves are formed in the conductive mounting frame, the surface area of the conductive mounting frame is increased, namely the heat dissipation area of the conductive mounting frame is increased, so that the cooling speed is higher during heat dissipation, the working hours of the plasma enhanced chemical deposition process are saved in the processes of temperature rise and temperature reduction, the film coating efficiency of the silicon wafer is improved, and the energy conservation and environmental protection are realized.
The utility model discloses an optimal scheme, positive pole connecting portion and negative pole connecting portion all include a plurality of graphite pieces and graphite rod, be provided with connect the through hole on the graphite piece, still be equipped with the fretwork groove on the graphite piece, the graphite rod is worn to establish connect into rectangular form with a plurality of graphite pieces among the connect the through hole. The graphite rod is arranged in the plurality of graphite blocks in a penetrating way, so that the plurality of graphite blocks are connected into an integral graphite strip; the graphite strip is arranged into a form consisting of a plurality of graphite blocks, so that the graphite strip can be more conveniently mounted and dismounted, when more graphite boat pieces need to be mounted, the number of the graphite blocks can be increased to match the number of the graphite boat pieces, and the adaptability of the conductive mounting frame is improved; in addition, the hollow-out grooves are formed in the graphite block, so that the volume of the graphite block is reduced, the weight of the graphite block is reduced, and the graphite block can have a higher temperature rise speed in the heating process; on the other hand, the hollow-out grooves are formed in the graphite blocks, the surface area of the graphite blocks is increased, and due to the fact that the heat dissipation area is increased, the cooling speed is higher in the heat dissipation process, and working hours are saved.
Preferably, the hollow grooves of the graphite block comprise a transverse hollow groove and a vertical hollow groove, wherein the transverse hollow groove is arranged along the axis direction of the connecting through hole and penetrates through the graphite block; the vertical hollow-out grooves are formed in two sides of the graphite block. The transverse hollow-out grooves are arranged, and two sides of each graphite block are communicated with each other, so that heat transfer is smoother, the heating speed in the heating process is higher, the cooling speed in the heat dissipation process is higher, and the working hours are saved; set up vertical fretwork groove for the inside of graphite piece is direct and outside air intercommunication, and when the heating, the heat can get into inside the graphite piece fast, and when the heat dissipation, the heat can be followed inside the quick outside air that escapes of graphite piece, thereby saves process time, improves production efficiency.
The utility model discloses a preferred scheme, anodal connecting portion set up the top of electrically conductive mounting bracket, the negative pole connecting portion set up the below of electrically conductive mounting bracket.
Preferably, the graphite block comprises a graphite cushion block, an electrode block and a graphite boat foot for supporting the graphite boat; the front end of the electrode block is provided with an electrode hole for connecting with a power line, and the electrode block is arranged on one group of the conductive mounting frames and is respectively arranged in the middle of the positive electrode connecting part and the middle of the negative electrode connecting part; the graphite boat feet are respectively arranged at two ends of the graphite boat and are positioned at two sides of the negative electrode connecting part. In the structure, the electrode blocks are respectively arranged on the positive electrode connecting part and the negative electrode connecting part, and the positive electrode connecting part and the negative electrode connecting part are connected together through the graphite rod, so that after the electrode blocks are connected with one electrode of a power supply through the electrode holes, the positive electrode connecting part is connected with the positive electrode of the power supply, and the negative electrode connecting part is connected with the negative electrode of the power supply; in addition, set up the graphite boat foot respectively in the both sides of negative pole connecting portion for the distance between the graphite boat foot is longer, thereby makes the stress point of graphite boat more dispersed, has improved the stability of graphite boat.
Preferably, the graphite boat foot comprises a fixing part and a supporting part, the connecting through hole is arranged on the fixing part, one end of the supporting part is connected with the fixing part, and the other end of the supporting part extends downwards; the fixing part and the supporting part are both provided with hollow grooves. The graphite boat foot with the structure is arranged, the fixing part is provided with the connecting through hole, and when the graphite rod passes through the connecting through hole of the fixing part to be connected with other graphite blocks, the graphite boat foot and the other graphite blocks are connected into a whole; one end of the support part of the graphite boat foot extends downwards, namely the support part protrudes downwards relative to the fixing part, and the support function is realized; in addition, the fixing parts and the supporting parts of the graphite boat feet are provided with hollow grooves, so that the effects of reducing weight and accelerating temperature rise and reduction are more obvious.
The utility model discloses an optimal scheme, strutting arrangement is still including setting up ceramic rod and the ceramic ring at graphite boat middle part, the ceramic ring sets up between two adjacent graphite boat pieces, the ceramic rod is worn to establish in the ceramic ring and with graphite boat piece and ceramic ring fixed connection, the axis direction perpendicular to graphite boat piece of ceramic rod. The ceramic rod and the ceramic ring are arranged, the ceramic ring separates two adjacent graphite boat pieces, and because two ends of the ceramic ring are parallel, the graphite boat pieces are arranged on the conductive mounting frame in a mutually parallel and equidistant mode; the graphite boat piece and the ceramic ring are fixedly connected by the ceramic rod, so that a plurality of graphite boat pieces are connected and fixed together to form a whole.
Preferably, there are two groups of ceramic rods respectively arranged at the upper part and the lower part of the graphite boat piece, each group of ceramic rods has a plurality of ceramic rods, and the ceramic rods are uniformly arranged along the length direction of the graphite boat. Two sets of ceramic rods that evenly arrange along graphite boat length direction about setting, the tie point between the graphite boat piece is more like this, and the connection between the graphite boat piece is firm more stable.
In a preferable scheme of the utility model, among the plurality of graphite boat pieces, the positive graphite boat piece is connected with the positive electrode connecting part, and the negative graphite boat piece is connected with the negative electrode connecting part; the positive graphite boat piece is provided with a positive connecting plate at two ends, and the positive connecting plate extends to the positive connecting part and is connected with the positive connecting part; the both ends of burden graphite boat piece all are equipped with the negative connecting plate, and this negative connecting plate extends to negative pole connecting portion and with the negative pole connecting portion are connected. The positive connecting plates or the negative connecting plates are arranged at the two ends of the plurality of graphite boat pieces, so that the graphite boat pieces are mounted, and each graphite boat piece can be communicated with a power supply with corresponding polarity.
According to a preferable scheme of the utility model, a bearing position for loading silicon wafers is arranged on the graphite boat piece, and the inner ring of the bearing position is provided with a chamfer angle; the plurality of bearing positions are uniformly arranged along the length direction of the graphite boat; and a plurality of clamping point holes for supporting the silicon wafer are arranged around the bearing position. The plurality of bearing positions are arranged on the graphite boat piece, so that each graphite boat piece can be provided with more silicon wafers, and the utilization rate of the graphite boat piece is improved; and a plurality of clamping point holes for supporting the silicon wafer are arranged, so that the silicon wafer has better stability on the graphite boat.
Compared with the prior art, the utility model following beneficial effect has:
1. the utility model discloses a graphite boat includes multi-disc graphite boat piece, and the both ends of multi-disc graphite boat piece are installed on electrically conductive mounting bracket. Through set up the fretwork groove on electrically conductive mounting bracket, alleviateed the weight of electrically conductive mounting bracket to the weight of whole graphite boat has been alleviateed, makes the operation of using plasma reinforcing chemical deposition technology to silicon chip coating film more convenient.
2. The utility model discloses a graphite boat sets up the fretwork groove on electrically conductive mounting bracket, and the fretwork groove is passed through with the outside air intercommunication in the inside of mounting bracket, and thermal transmission is more smooth and easy, consequently has faster heating rate in the heating process, reduces the energy consumption, and on the same way also has faster radiating rate in the radiating process to when having saved, improved production efficiency.
Drawings
Fig. 1 is a schematic view of the overall structure of the graphite boat of the present invention.
Fig. 2 is a front view of the graphite boat of the present invention.
Fig. 3 is a perspective view of a positive graphite boat piece of the graphite boat of the present invention.
Fig. 4 is a perspective view of the graphite boat piece of the graphite boat of the present invention.
Fig. 5 is a perspective view of the graphite boat of the present invention.
Fig. 6 is a perspective view of the electrode block of the graphite boat of the present invention.
Fig. 7 is a perspective view of a graphite boat leg of the graphite boat of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, but the present invention is not limited thereto.
Referring to fig. 1-4, an energy-saving and efficient graphite boat comprises a plurality of graphite boat pieces and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part 1 and a negative electrode connecting part 2, the positive electrode connecting part 1 is connected with a positive electrode of a power supply, and the negative electrode connecting part 2 is connected with a negative electrode of the power supply; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the positive electrode connecting part 1, and both ends of the other graphite boat piece are connected with the negative electrode connecting part 2; and hollow grooves are formed in the two groups of conductive mounting frames.
Referring to fig. 1-7, the positive electrode connecting portion 1 and the negative electrode connecting portion 2 both include a plurality of graphite blocks and graphite rods 3, the graphite blocks are provided with connecting through holes 7, the graphite blocks are further provided with hollow grooves, and the graphite rods 3 are arranged in the connecting through holes 7 in a penetrating manner to connect the graphite blocks into a strip shape. The graphite rod 3 is arranged in the plurality of graphite blocks in a penetrating way, so that the plurality of graphite blocks are connected into an integral graphite strip; the graphite strip is arranged into a form consisting of a plurality of graphite blocks, so that the graphite strip can be more conveniently mounted and dismounted, when more graphite boat pieces need to be mounted, the number of the graphite blocks can be increased to match the number of the graphite boat pieces, and the adaptability of the conductive mounting frame is improved; in addition, the hollow-out grooves are formed in the graphite block, so that the volume of the graphite block is reduced, the weight of the graphite block is reduced, and the graphite block can have a higher temperature rise speed in the heating process; on the other hand, the hollow-out grooves are formed in the graphite blocks, the surface area of the graphite blocks is increased, and due to the fact that the heat dissipation area is increased, the cooling speed is higher in the heat dissipation process, and working hours are saved.
Referring to fig. 5-7, the hollowed-out grooves of the graphite block include a horizontal hollowed-out groove 8-1 and a vertical hollowed-out groove 8-2, wherein the horizontal hollowed-out groove 8-1 is arranged along the axial direction of the connecting through hole 7 and penetrates through the graphite block; the vertical hollow-out grooves 8-2 are arranged on two sides of the cushion block. The transverse hollow-out grooves 8-1 are arranged, and the two sides of each graphite block are communicated with each other, so that heat transfer is smoother, the heating speed in the heating process is higher, the cooling speed in the heat dissipation process is higher, and the working hours are saved; the vertical hollow-out grooves 8-2 are arranged, so that the inside of the graphite block is directly communicated with the outside air, heat can quickly enter the inside of the graphite block during heating, and can quickly escape from the inside of the graphite block into the outside air during heat dissipation, so that the process time is saved, and the production efficiency is improved.
Referring to fig. 1 to 2, the positive electrode connection part 1 is disposed above the conductive mount, and the negative electrode connection part 2 is disposed below the conductive mount. Like this the anodal connecting portion 1 and the anodal power connection of electrically conductive mounting bracket top, the negative pole connecting portion 2 and the power negative pole of electrically conductive mounting bracket below are connected.
Referring to fig. 1-2, the graphite block comprises a graphite cushion block 4, an electrode block 5, and a graphite boat foot 6 for supporting a graphite boat; the front end of the electrode block 5 is provided with an electrode hole 5-1 used for being connected with a power line, and the electrode block 5 is arranged on one group of the conductive mounting frames and is respectively arranged in the middle of the positive electrode connecting part 1 and the middle of the negative electrode connecting part 2; the graphite boat feet 6 are respectively arranged at two ends of the graphite boat and are positioned at two sides of the negative electrode connecting part 2. In the structure, the electrode block 5 is respectively arranged on the positive electrode connecting part 1 and the negative electrode connecting part 2, and the positive electrode connecting part 1 and the negative electrode connecting part 2 are connected together through the graphite rod 3, so that after the electrode block 5 is connected with one pole of a power supply through the electrode hole 5-1, the positive electrode connecting part 1 is connected with the positive electrode of the power supply, and the negative electrode connecting part 2 is connected with the negative electrode of the power supply; in addition, set up graphite boat foot 6 respectively in the both sides of negative pole connecting portion 2 for the distance between the graphite boat foot 6 is longer, thereby makes the stress point of graphite boat more dispersed, has improved the stability of graphite boat.
Referring to fig. 7, the graphite boat leg 6 includes a fixing portion 6-1 and a supporting portion 6-2, the connecting through hole 7 is disposed on the fixing portion 6-1, one end of the supporting portion 6-2 is connected to the fixing portion 6-1, and the other end extends downward; the fixed part 6-1 and the supporting part 6-2 are both provided with hollow grooves. The graphite boat foot 6 with the structure is arranged, the connecting through hole 7 is arranged on the fixing part 6-1, and when the graphite rod 3 passes through the connecting through hole 7 of the fixing part 6-1 to be connected with other graphite blocks, the graphite boat foot 6 and the other graphite blocks are connected into a whole; one end of the support part 6-2 of the graphite boat foot 6 extends downwards, namely the support part 6-2 protrudes downwards relative to the fixed part 6-1 to play a role in supporting; in addition, the fixing part 6-1 and the supporting part 6-2 of the graphite boat foot 6 are both provided with hollow grooves, so that the effects of reducing weight and accelerating temperature rise and reduction are more obvious.
Referring to fig. 1-2, the support device further includes a ceramic rod 10 and a ceramic ring 9, the ceramic ring 9 is disposed between two adjacent graphite boat pieces, the ceramic rod 10 is inserted into the ceramic ring 9 and fixedly connects the graphite boat pieces with the ceramic ring 9, and an axial direction of the ceramic rod 10 is perpendicular to the graphite boat pieces. The ceramic rod 10 and the ceramic ring 9 are arranged, the ceramic ring 9 separates two adjacent graphite boat pieces, and the graphite boat pieces are arranged on the conductive mounting frame in parallel at equal intervals because two ends of the ceramic ring 9 are parallel; the graphite boat pieces are fixedly connected with the ceramic ring 9 by the ceramic rod 10, so that a plurality of graphite boat pieces are connected and fixed together to form a whole.
Referring to fig. 1-2, two groups of ceramic rods 10 are respectively arranged at the upper part and the lower part of the graphite boat piece, each group of ceramic rods 10 has a plurality of ceramic rods 10, and the ceramic rods 10 are uniformly arranged along the length direction of the graphite boat. The ceramic rods 10 which are uniformly distributed along the length direction of the graphite boat are arranged in an upper group and a lower group, so that the connection points between the graphite boat pieces are more, and the connection between the graphite boat pieces is firmer and more stable.
Referring to fig. 1, among the plurality of graphite boat pieces, a positive graphite boat piece is connected with the positive electrode connecting part 1, and a negative graphite boat piece 12 is connected with the negative electrode connecting part 2; the two ends of the positive graphite boat piece are respectively provided with a positive connecting plate 11-1, and the positive connecting plates 11-1 extend to the positive connecting part 1 and are connected with the positive connecting part 1; and the two ends of the negative graphite boat piece 12 are respectively provided with a negative connecting plate 12-1, and the negative connecting plates 12-1 extend to the negative connecting part 2 and are connected with the negative connecting part 2. The positive connecting plate 11-1 or the negative connecting plate 12-1 is arranged at the two ends of the plurality of graphite boat pieces, so that the graphite boat pieces are installed, and each graphite boat piece can be communicated with a power supply with corresponding polarity.
Referring to fig. 1-4, a bearing position 13 for loading a silicon wafer is arranged on the graphite boat piece, and an inner ring of the bearing position 13 is provided with a chamfer angle; a plurality of bearing positions 13 are arranged, and the bearing positions 13 are uniformly arranged along the length direction of the graphite boat; and a plurality of bayonet holes 14 for supporting the silicon wafer are arranged around the bearing position 13. A plurality of bearing positions 13 are arranged on the graphite boat piece, so that each graphite boat piece can be provided with more silicon chips, and the utilization rate of the graphite boat piece is improved; and a plurality of clamping point holes 14 for supporting the silicon wafer are arranged, so that the silicon wafer has better stability on the graphite boat.
The working principle of the graphite boat is as follows:
when the graphite boat is installed, firstly installing one graphite boat sheet between the two groups of conductive installation frames, then installing the other graphite boat sheet between the two groups of conductive installation frames in a manner of being parallel to the first graphite boat sheet, and so on until the plurality of graphite boat sheets are installed on the conductive installation frames in a manner of being parallel at equal intervals; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the positive electrode connecting part 1 of the conductive mounting frame, and both ends of the other graphite boat piece are connected with the negative electrode connecting part 2 of the conductive mounting frame, so that a directional electric field can be generated between the two adjacent graphite boat pieces, and the plasma performs directional movement under the action of the directional electric field to complete film coating; the hollow groove is formed in the conductive mounting frame, which is equivalent to digging a part of the conductive mounting frame, so that the weight of the conductive mounting frame is reduced, and the weight of the whole graphite boat is reduced; on the other hand, when the surface of the silicon wafer is coated by adopting a plasma enhanced chemical deposition method, the hollow groove is formed in the conductive mounting frame, the interior of the conductive mounting frame is communicated with the outside air through the hollow groove, heat is transferred more smoothly, the heating speed of the graphite boat can be increased in the heating and temperature rising process, and the temperature rising speed of the graphite boat is increased; in addition, the hollow-out grooves are formed in the conductive mounting frame, the surface area of the conductive mounting frame is increased, namely the heat dissipation area of the conductive mounting frame is increased, so that the cooling speed is higher during heat dissipation, the working hours of the plasma enhanced chemical deposition process are saved in the processes of temperature rise and temperature reduction, and the film coating efficiency of the silicon wafer is improved.
The above is the preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and all are included in the scope of the present invention.
Claims (10)
1. An energy-saving and high-efficiency graphite boat is characterized by comprising a plurality of graphite boat sheets and a supporting device; the supporting device comprises two groups of conductive mounting frames, and the plurality of graphite boat pieces are arranged between the two groups of conductive mounting frames in parallel at equal intervals; the conductive mounting frame comprises a positive electrode connecting part and a negative electrode connecting part, the positive electrode connecting part is connected with the positive electrode of the power supply, and the negative electrode connecting part is connected with the negative electrode of the power supply; in two adjacent graphite boat pieces, both ends of one graphite boat piece are connected with the anode connecting part, and both ends of the other graphite boat piece are connected with the cathode connecting part; and hollow grooves are formed in the two groups of conductive mounting frames.
2. The energy-saving and efficient graphite boat as claimed in claim 1, wherein the positive electrode connecting portion and the negative electrode connecting portion each comprise a plurality of graphite blocks and graphite rods, the graphite blocks are provided with connecting through holes, the graphite blocks are further provided with hollow grooves, and the graphite rods are inserted into the connecting through holes to connect the plurality of graphite blocks into a long strip shape.
3. The energy-saving and efficient graphite boat as claimed in claim 2, wherein the hollowed-out grooves of the graphite block comprise horizontal hollowed-out grooves and vertical hollowed-out grooves, wherein the horizontal hollowed-out grooves are arranged along the axial direction of the connecting through holes and penetrate through the graphite block; the vertical hollow-out grooves are formed in two sides of the graphite block.
4. The energy-saving and efficient graphite boat as claimed in claim 3, wherein the positive electrode connecting part is disposed above the conductive mounting frame, and the negative electrode connecting part is disposed below the conductive mounting frame.
5. The energy-saving and high-efficiency graphite boat according to claim 4, wherein the graphite blocks comprise graphite pads, electrode blocks and graphite boat feet for supporting the graphite boat; the front end of the electrode block is provided with an electrode hole for connecting with a power line, and the electrode block is arranged on one group of the conductive mounting frames and is respectively arranged in the middle of the positive electrode connecting part and the middle of the negative electrode connecting part; the graphite boat feet are respectively arranged at two ends of the graphite boat and are positioned at two sides of the negative electrode connecting part.
6. The energy-saving and high-efficiency graphite boat as claimed in claim 5, wherein the graphite boat foot comprises a fixing portion and a supporting portion, the connecting through hole is disposed on the fixing portion, one end of the supporting portion is connected with the fixing portion, and the other end of the supporting portion extends downwards; the fixing part and the supporting part are both provided with hollow grooves.
7. The energy-saving and high-efficiency graphite boat as claimed in claim 6, wherein the supporting device further comprises a ceramic rod and a ceramic ring arranged in the middle of the graphite boat, the ceramic ring is arranged between two adjacent graphite boat pieces, the ceramic rod is arranged in the ceramic ring in a penetrating way and fixedly connects the graphite boat pieces with the ceramic ring, and the axis direction of the ceramic rod is perpendicular to the graphite boat pieces.
8. The energy-saving and efficient graphite boat as claimed in claim 7, wherein there are two groups of ceramic rods respectively disposed at the upper and lower parts of the graphite boat piece, and there are a plurality of ceramic rods in each group, and the ceramic rods are uniformly arranged along the length direction of the graphite boat.
9. The energy-saving and efficient graphite boat as claimed in claim 8, wherein among the plurality of graphite boat pieces, a positive graphite boat piece is connected to the positive electrode connecting part, and a negative graphite boat piece is connected to the negative electrode connecting part; the positive graphite boat piece is provided with a positive connecting plate at two ends, and the positive connecting plate extends to the positive connecting part and is connected with the positive connecting part; the both ends of burden graphite boat piece all are equipped with the negative connecting plate, and this negative connecting plate extends to negative pole connecting portion and with the negative pole connecting portion are connected.
10. The energy-saving and high-efficiency graphite boat as claimed in claim 1, wherein the graphite boat piece is provided with a bearing position for loading silicon wafers, and the inner ring of the bearing position is provided with a chamfer angle; the plurality of bearing positions are uniformly arranged along the length direction of the graphite boat; and a plurality of clamping point holes for supporting the silicon wafer are arranged around the bearing position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021895053.1U CN213037843U (en) | 2020-09-02 | 2020-09-02 | Energy-saving high-efficient type graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021895053.1U CN213037843U (en) | 2020-09-02 | 2020-09-02 | Energy-saving high-efficient type graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213037843U true CN213037843U (en) | 2021-04-23 |
Family
ID=75533823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021895053.1U Active CN213037843U (en) | 2020-09-02 | 2020-09-02 | Energy-saving high-efficient type graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213037843U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116180054A (en) * | 2023-04-28 | 2023-05-30 | 福建福碳新材料科技有限公司 | Reinforced graphite boat |
-
2020
- 2020-09-02 CN CN202021895053.1U patent/CN213037843U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116180054A (en) * | 2023-04-28 | 2023-05-30 | 福建福碳新材料科技有限公司 | Reinforced graphite boat |
| CN116180054B (en) * | 2023-04-28 | 2023-06-27 | 福建福碳新材料科技有限公司 | Graphite boat |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112301331A (en) | Energy-saving efficient graphite boat with uniform film coating | |
| CN213037843U (en) | Energy-saving high-efficient type graphite boat | |
| CN109082649A (en) | A kind of loading device of stable plated film | |
| CN202390560U (en) | Large-capacity polysilicon ingot furnace thermal field structure | |
| CN112960674B (en) | Chassis and chassis assembly of polycrystalline silicon reduction furnace and reduction furnace | |
| CN214004778U (en) | Energy-saving efficient graphite boat with uniform film coating | |
| CN203080985U (en) | Wind, solar and electric complementary-type integrated communication tower | |
| CN210886316U (en) | Polysilicon ingot casting thermal field heat insulation cage | |
| CN208201171U (en) | Polycrystalline silicon ingot or purifying furnace top side heater | |
| CN215593235U (en) | Bottom heater of semiconductor grade silicon single crystal furnace | |
| CN208567544U (en) | Corrugated cone cylinder water cooling equipment in one kind | |
| CN112531057A (en) | Heat energy storage photovoltaic module and manufacturing method thereof | |
| CN211595849U (en) | Chain type thermal oxidation furnace | |
| CN217499364U (en) | Aluminum ingot integrated heating module | |
| CN113280618A (en) | Drying device of lithium battery | |
| CN217077853U (en) | Novel hollow heat preservation furnace bottom of single crystal furnace thermal field | |
| CN206799791U (en) | Semiconductor grade monocrystal stove primary heater | |
| CN206806305U (en) | A kind of diffusing quartz boat | |
| CN201864791U (en) | Graphite guiding cylinder of 800 type silicon single crystal furnace | |
| CN216039933U (en) | Split type graphite heater for thermal field of monocrystalline silicon CZ furnace | |
| CN214422269U (en) | Chuck structure | |
| CN221727076U (en) | Diffusion quartz boat | |
| CN216738632U (en) | Spliced combined crucible pot for single crystal furnace | |
| CN208063094U (en) | A kind of solar energy power generating plate supporting rack | |
| CN212572954U (en) | High temperature resistant voice coil loudspeaker voice coil |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: An energy-saving and efficient graphite boat Effective date of registration: 20220617 Granted publication date: 20210423 Pledgee: Shenzhen small and medium sized small loan Co.,Ltd. Pledgor: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. Registration number: Y2022440020094 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |