CN217077853U

CN217077853U - Novel hollow heat preservation furnace bottom of single crystal furnace thermal field

Info

Publication number: CN217077853U
Application number: CN202220866446.2U
Authority: CN
Inventors: 贾建亮; 贾建恩; 孙艳; 孙丽娜; 韩云涛; 陈毫
Original assignee: Hebei Shuori Quartz Products Co ltd; Langfang Heer Laosi Solar Energy Photovoltaic Co ltd
Current assignee: Hebei Shuori Quartz Products Co ltd; Langfang Heer Laosi Solar Energy Photovoltaic Co ltd
Priority date: 2022-04-15
Filing date: 2022-04-15
Publication date: 2022-07-29
Anticipated expiration: 2032-04-15

Abstract

The utility model discloses a novel single crystal growing furnace thermal field fretwork heat preservation stove bottom, be equipped with the base of bowl form recess in including, the base top is equipped with connecting portion, the ear spare is installed to the connecting portion both sides, the base both sides are run through and are equipped with the electrode hole, crucible pole hole and exhaust hole have been seted up to the bottom in the bowl form recess, are equipped with water conservancy diversion mechanism in the bowl form recess, water conservancy diversion mechanism is including the guide vane two and the guide vane one that are located exhaust hole top, guide vane two and guide vane one all are the toper heliciform, and guide vane two and the little one end of guide vane semi-diameter are close to each other. The utility model discloses in, through setting up the bowl form recess, slow down the speed that the heat runs off, assisted the promotion of heat preservation effect to a certain extent, through setting up guiding mechanism, utilize guide vane one and guide vane two, not only increased the heat and stopped the time in the stove bottom, still with heat homodisperse at the stove bottom, strengthened the heat preservation effect.

Description

Novel hollow heat preservation furnace bottom of single crystal furnace thermal field

Technical Field

The utility model relates to a single crystal growing furnace technical field specifically is a novel single crystal growing furnace thermal field fretwork heat preservation stove bottom.

Background

The single crystal furnace is an apparatus for growing dislocation-free single crystals by melting polycrystalline materials such as polycrystalline silicon and the like using a graphite heater in an inert gas atmosphere and then using a Czochralski method. The single crystal furnace needs to be kept at a high temperature during operation. The traditional single crystal furnace bottom mainly adopts the graphite felt to keep warm, and the graphite felt is directly connected with the pad at the single crystal furnace bottom, but the graphite felt can be aged with higher speed, and is not favorable for actual production. In the prior art, some enterprises fill high-temperature-resistant materials with small heat conductivity coefficient in the graphite felt to slow down the aging speed of the graphite felt, and simultaneously play a role in heat preservation on the furnace bottom, but how to fill a proper amount of materials in the graphite felt and how to control the distribution problem of the filling materials is troublesome. Therefore, a novel thermal field hollowed-out heat preservation furnace bottom of the single crystal furnace is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a novel single crystal growing furnace thermal field fretwork heat preservation stove bottom to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

the utility model provides a novel single crystal growing furnace thermal field fretwork heat preservation stove bottom, is equipped with the base of bowl form recess in including, the base top is equipped with connecting portion, the ear spare is installed to the connecting portion both sides, the base both sides are run through and are equipped with the electrode hole, crucible pole hole and exhaust hole have been seted up to the bottom in the bowl form recess, are equipped with water conservancy diversion mechanism in the bowl form recess, water conservancy diversion mechanism is including the guide blade two and the guide blade one that are located exhaust hole top, guide blade two and guide blade one all are the toper heliciform, and guide blade two and the little one end of guide blade radius are close to mutually.

Preferably, a first mounting ring is fixed at the top end of the first guide blade, a second mounting ring is fixed at the bottom end of the second guide blade, a first mounting groove and a second mounting groove are respectively formed at the upper end and the lower end of the inner wall of the bowl-shaped groove, and the first mounting groove and the second mounting groove are respectively matched with the first mounting ring and the second mounting ring.

Preferably, the second guide blade comprises a heat insulation layer and a heat conduction layer which are connected up and down, and the heat insulation layer and the heat conduction layer are fixed through assembly parts arranged on the inner side and the outer side.

Preferably, the bottom end of the heat insulation layer is provided with an insertion block, and the top end of the heat conduction layer is provided with an insertion groove matched with the insertion block.

Compared with the prior art, the beneficial effects of the utility model are that: through set up the bowl form recess at the base center, the arc inner wall has been formed in the base, the time of hot gas flow at the base inner disc bolt has been increased, the speed that the heat runs off is slowed down, the promotion of heat preservation effect has been assisted to a certain extent, through set up water conservancy diversion mechanism in the bowl form recess, utilize to be toper spiral helicine guide vane one, will try to follow the heat that the exhaust hole escaped along with the air current and upwards guide and polymerization, reuse is back taper spiral helicine guide vane two, the heat that will polymerize into a group continues upwards to guide and make its dispersion in the first half of base, the time that the heat stopped in the stove bottom has not only been increased, still with heat homodisperse at the stove bottom, the heat preservation effect has been strengthened.

Drawings

FIG. 1 is a top view of a novel single crystal furnace thermal field hollowed-out thermal insulation furnace bottom provided by the utility model;

FIG. 2 is a bottom view of the novel single crystal furnace thermal field hollowed-out thermal insulation furnace bottom provided by the utility model;

FIG. 3 is a schematic structural view of a flow guide mechanism of a novel single crystal furnace thermal field hollowed-out heat preservation furnace bottom provided by the utility model;

FIG. 4 is a cross-sectional view of the base of the novel single crystal furnace thermal field hollowed-out thermal insulation furnace bottom provided by the utility model;

fig. 5 is a schematic structural view of a second guide blade of the novel hollow heat preservation furnace bottom of the thermal field of the single crystal furnace.

In the figure: the device comprises a base 1, a connecting part 2, an ear piece 3, an electrode hole 4, a crucible rod hole 5, an exhaust hole 6, a first guide blade 7, a first mounting ring 8, a second guide blade 9, a heat insulation layer 91, a heat conduction layer 92, an assembly part 93, an insertion block 911, an insertion groove 921, a second mounting ring 10, a first mounting groove 11 and a second mounting groove 12.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: a novel thermal field hollowed-out heat preservation furnace bottom of a single crystal furnace comprises a base 1 with a bowl-shaped groove arranged therein;

specifically, through set up bowl form recess at base 1 center, formed the arc inner wall in base 1, increased the time of hot gas flow dish the bar in base 1, slowed down the speed that the heat runs off, assisted the promotion of heat preservation effect to a certain extent.

The top end of the base 1 is provided with a connecting part 2, ear pieces 3 are arranged on two sides of the connecting part 2, electrode holes 4 are arranged on two sides of the base 1 in a penetrating manner, the electrode holes 4 are positioned on the outer side of the bowl-shaped groove and are not communicated with the bowl-shaped groove, in other words, the electrode holes are not communicated with the furnace bottom of the furnace body, so that a heat loss channel is reduced, the heat loss speed is further slowed down, the heat preservation is promoted, and a crucible rod hole 5 and an exhaust hole 6 are arranged at the bottom in the bowl-shaped groove and are respectively used for installing a crucible rod and exhausting gas;

a flow guide mechanism is arranged in the bowl-shaped groove and comprises a guide vane II 9 and a guide vane I7 which are positioned above the exhaust hole 6, the guide vane II 9 and the guide vane I7 are in a conical spiral shape, and the small-radius ends of the guide vane II 9 and the guide vane I7 are close to each other; in other words, the orientation of the guide vane II 9 is opposite to that of the guide vane I7, and the guide vane II and the guide vane I are respectively in a forward conical shape and an inverted conical shape;

furthermore, a first mounting ring 8 is fixed at the top end of the first guide blade 7, a second mounting ring 10 is fixed at the bottom end of the second guide blade 9, a first mounting groove 11 and a second mounting groove 12 are respectively arranged at the upper end and the lower end of the inner wall of the bowl-shaped groove, and the first mounting groove 11 and the second mounting groove 12 are respectively matched with the first mounting ring 8 and the second mounting ring 10; the first mounting ring 8 and the second mounting ring 10 are respectively fixed with the first mounting groove 11 and the second mounting groove 12 through bolts, so that the first guide vane 7 and the second guide vane 9 can be conveniently mounted;

further, the second guide blade 9 comprises a heat insulation layer 91 and a heat conduction layer 92 which are connected up and down, the heat insulation layer 91 and the heat conduction layer 92 are fixed through assembly parts 93 arranged on the inner side and the outer side, the upper end and the lower end of each assembly part 93 are respectively fixed with the heat insulation layer 91 and the heat conduction layer 92 through bolts, and therefore the heat insulation layer 91 and the heat conduction layer 92 are connected into a whole;

specifically, the second guide vane 9 is the component closest to the heat to escape from the bottom, so to prevent heat loss, the heat should be conducted from the exhaust hole 6, the heat conduction layer 92 is used to spread the heat upwards along the spiral, and the heat insulation layer 91 is used to block the heat from continuing to move along the spiral surface and guide the heat to the center of the spiral;

further, an insertion block 911 is arranged at the bottom end of the heat insulation layer 91, and an insertion groove 921 matched with the insertion block 911 is arranged at the top end of the heat conduction layer 92; by arranging the insertion block 911 and the insertion groove 921, the heat insulation layer 91 and the heat conduction layer 92 are connected more tightly, and the insertion block 911 and the insertion groove 921 can be further fixed by high-temperature-resistant glue;

specifically, through set up water conservancy diversion mechanism in bowl form recess, utilize and be the heliciform guide vane 7 of toper, will try to follow the heat that the air current escaped from exhaust hole 6 upwards to guide and polymerize, reuse is the heliciform guide vane two 9 of back taper, will polymerize into a heat of group and continue upwards guide and make it disperse in the upper half of base 1, not only increased the heat and stopped the time in the stove bottom, still with the heat homodisperse at the stove bottom, strengthened the heat preservation effect.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a novel single crystal growing furnace thermal field fretwork heat preservation stove bottom, is equipped with base (1) of bowl form recess in including, its characterized in that: base (1) top is equipped with connecting portion (2), ear spare (3) are installed to connecting portion (2) both sides, base (1) both sides are run through and are equipped with electrode hole (4), crucible pole hole (5) and exhaust hole (6) have been seted up to the bottom in the bowl form recess, are equipped with water conservancy diversion mechanism in the bowl form recess, water conservancy diversion mechanism is including the guide vane two (9) and the guide vane (7) that are located exhaust hole (6) top, guide vane two (9) and guide vane (7) all are the toper heliciform, and guide vane two (9) and the guide vane (7) one end that the radius is little are close to each other.

2. The novel single crystal furnace thermal field hollowed-out heat preservation furnace bottom according to claim 1, is characterized in that: the guide vane is characterized in that a first mounting ring (8) is fixed at the top end of the first guide vane (7), a second mounting ring (10) is fixed at the bottom end of the second guide vane (9), a first mounting groove (11) and a second mounting groove (12) are respectively arranged at the upper end and the lower end of the inner wall of the bowl-shaped groove, and the first mounting groove (11) and the second mounting groove (12) are respectively matched with the first mounting ring (8) and the second mounting ring (10).

3. The novel single crystal furnace thermal field hollowed-out heat preservation furnace bottom according to claim 1, is characterized in that: the second guide blade (9) comprises a heat insulation layer (91) and a heat conduction layer (92) which are connected up and down, and the heat insulation layer (91) and the heat conduction layer (92) are fixed through assembly parts (93) arranged on the inner side and the outer side.

4. The novel single crystal furnace thermal field hollowed-out heat preservation furnace bottom according to claim 3, is characterized in that: the bottom end of the heat insulation layer (91) is provided with an insertion block (911), and the top end of the heat conduction layer (92) is provided with an insertion groove (921) matched with the insertion block (911).