CN216039933U

CN216039933U - Split type graphite heater for thermal field of monocrystalline silicon CZ furnace

Info

Publication number: CN216039933U
Application number: CN202121964363.9U
Authority: CN
Inventors: 王通; 张勇; 陈磊; 王进
Original assignee: Hebei Boxiang Special Graphite Co ltd
Current assignee: Hebei Boxiang Special Graphite Co ltd
Priority date: 2021-08-20
Filing date: 2021-08-20
Publication date: 2022-03-15
Anticipated expiration: 2031-08-20

Abstract

The utility model provides a split type monocrystal silicon CZ furnace thermal field graphite heater, which comprises a graphite heater body, wherein the graphite heater body comprises a long graphite column, a short graphite column, a supporting plate, a lead and supporting legs, a positive electrode wiring clamping block is arranged at the top end of the short graphite column, the supporting plate is arranged at the bottom end of the short graphite column, the long graphite column is connected with the other end of the supporting plate, a negative electrode wiring clamping block is arranged at the top end of the long graphite column, clamping grooves are respectively formed in the middles of the positive electrode wiring clamping block and the negative electrode wiring clamping block, holes I are formed in two ends of each clamping groove, bolts II are arranged in the holes I, a wiring board is arranged in the middle of each clamping groove, a hole II is formed in the middle of each wiring board, the lead is arranged at one end of each wiring board, and the split type monocrystal silicon CZ furnace thermal field graphite heater is simple and convenient to install and has a wider application range, the laminating degree is higher, supports firmly, and the air permeability is strong.

Description

Split type graphite heater for thermal field of monocrystalline silicon CZ furnace

Technical Field

The utility model relates to the technical field of graphite heaters, in particular to a split type graphite heater for a thermal field of a monocrystalline silicon CZ furnace.

Background

In the production of large-size monocrystalline silicon, in order to improve the uniformity of a thermal field, shorten the material melting time and solve the problems of difficult control of the thermal field and recrystallization of molten silicon, a bottom heater is usually added on the basis of the original annular heater.

The existing graphite material heating device needs to be designed into a long loop structure in the manufacturing process, so that a large amount of materials are wasted, and the graphite material heating device needs to be independently customized for use, so that the applicability is poor.

On the other hand, the permeability of the bottom end of the existing graphite material heating device is poor, and the gap between the bottom end of the existing graphite material heating device and the bottom surface of the existing graphite material heating device is small, so that the circulation of air is influenced, and the effect during heating is reduced.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects in the prior art, the utility model aims to provide the split type monocrystalline silicon CZ furnace thermal field graphite heater to solve the problems in the background art.

In order to achieve the purpose, the utility model is realized by the following technical scheme: the utility model provides a split type monocrystalline silicon CZ stove thermal field graphite heater, includes graphite heater body, graphite heater body includes long graphite post, short graphite post, fagging, wire and supporting legs, the top of short graphite post is provided with anodal wiring clamp splice, the bottom of short graphite post is provided with the fagging, the other end of fagging is connected with long graphite post, the top of long graphite post is provided with negative pole wiring clamp splice, the draw-in groove has all been seted up to the centre of anodal wiring clamp splice and negative pole wiring clamp splice, the both ends of draw-in groove are provided with hole one, the internally mounted of hole one has bolt two, the wiring board is installed to the centre of draw-in groove, hole two has been seted up to the centre of wiring board, the one end of wiring board is provided with the wire, the bottom of fagging is provided with the insulating layer, the bottom of insulating layer is provided with the supporting legs.

In a preferred embodiment of the present invention, the bracing plate is integrally formed in a "V" shape, and two ends of the bracing plate are respectively connected to the bottom ends of the short graphite column and the long graphite column.

In a preferred embodiment of the present invention, the short graphite pillars and the feldspar graphite pillars are parallel to each other and are installed perpendicular to the stay plates.

In a preferred embodiment of the present invention, the second bolt penetrates through the first hole and the second hole in sequence to fix the wiring board inside the card slot.

In a preferred embodiment of the present invention, the wiring board is made of copper, and wiring boards having the same specification are disposed at both ends of the wire.

In a preferred embodiment of the present invention, the terminal plate is connected and attached by a first bolt passing through the second hole.

The utility model has the beneficial effects that: the utility model discloses a split type graphite heater for a thermal field of a monocrystalline silicon CZ furnace, which comprises a graphite heater body, wherein the graphite heater body comprises a short graphite column, a feldspar ink column, a positive electrode wiring clamping block, a negative electrode wiring clamping block, a first hole, a lead, a wiring board, a second hole, a supporting plate, a supporting leg, an insulating layer, a first bolt, a second bolt and a clamping groove.

1. The split type graphite heater for the CZ furnace thermal field of the monocrystalline silicon consists of four graphite heating assemblies with the same structural specification, so that the heating diameter of the heater can be adjusted according to specific use environment requirements and the size of a heating boiler of the monocrystalline silicon, and the split type graphite heater is wider in application range.

2. This split type monocrystalline silicon CZ stove thermal field graphite heater's bottom sets up the backup pad into the V type, has improved the permeability greatly, and air circulation nature is stronger, and the heating effect is better, and supports through a plurality of supporting legss in the bottom, guarantees its steadiness.

3. The split type graphite heater for the thermal field of the monocrystalline silicon CZ furnace is connected with the anode and the cathode and a power supply through leads, and four groups of heating assemblies of the heater can be electrified simultaneously by superposing a plurality of wiring boards together.

Drawings

FIG. 1 is a schematic side view of the external form of a split single crystal silicon CZ furnace thermal field graphite heater of the present invention;

FIG. 2 is a schematic view of a partial structure of a split type single crystal silicon CZ furnace thermal field graphite heater according to the present invention;

FIG. 3 is a top view of a split single crystal silicon CZ furnace thermal field graphite heater of the present invention;

FIG. 4 is a schematic structural view of a negative terminal block portion of a thermal field graphite heater of a split-type single crystal silicon CZ furnace according to the present invention;

in the figure: 1. a short graphite column; 2. a long graphite column; 3. a positive terminal block; 4. a negative terminal block; 5. a first hole; 6. a wire; 7. a wiring board; 8. a second hole; 9. a supporting plate; 10. supporting legs; 11. an insulating layer; 12. a first bolt; 13. a second bolt; 14. a clamping groove.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the utility model easy to understand, the utility model is further described with the specific embodiments.

Referring to fig. 1 to 4, the present invention provides a technical solution: a split type graphite heater for a CZ furnace thermal field of monocrystalline silicon comprises a graphite heater body, wherein the graphite heater body comprises a long graphite column 2, a short graphite column 1, a supporting plate 9, a wire 6 and supporting legs 10, an anode wiring clamping block 3 is arranged at the top end of the short graphite column 1, the supporting plate 9 is arranged at the bottom end of the short graphite column 1, the other end of the supporting plate 9 is connected with the long graphite column 2, a cathode wiring clamping block 4 is arranged at the top end of the long graphite column 2, clamping grooves 14 are formed in the middles of the anode wiring clamping block 3 and the cathode wiring clamping block 4, holes I5 are formed in two ends of each clamping groove 14, bolts II 13 are installed inside the holes I5, a wiring board 7 is installed in the middle of each clamping groove 14, holes II 8 are formed in the middle of the wiring board 7, the wire 6 is arranged at one end of the wiring board 7, an insulating layer 11 is arranged at the bottom end of the supporting plate 9, the bottom end of the insulating layer 11 is provided with a supporting leg 10.

In a preferred embodiment of the present invention, the supporting plate 9 is a V-shaped structure, and both ends of the supporting plate 9 are connected to the bottom ends of the short graphite column 1 and the feldspar graphite column 2, respectively, so that they form a single line path.

In a preferred embodiment of the present invention, the short graphite pillars 1 and the long graphite pillars 2 are installed in parallel with each other and perpendicular to the stay plates 9, so that the boiler can be surrounded.

In a preferred embodiment of the present invention, the second bolt 13 penetrates the first hole 5 and the second hole 8 in sequence to fix the wiring board 7 inside the card slot 14, and the wiring board 7 conducts electricity.

In a preferred embodiment of the present invention, the wiring board 7 is made of copper, and the wiring boards 7 having the same specification are disposed at both ends of the wire 6, so that both ends can be exchanged.

In a preferred embodiment of the utility model, the wiring board 7 is connected and attached through the second hole 8 by the first bolt 12, and after connection, centralized power supply can be performed, and a single power supply can meet the requirement.

The working principle is as follows: the split type graphite heater for the thermal field of the monocrystalline silicon CZ furnace is characterized in that an anode wiring clamping block 3 and a cathode wiring clamping block 4 are connected with an external power supply to provide electric energy for the device, the heater mainly comprises a feldspar ink column 2, a short graphite column 1, a supporting plate 9, wires 6 and supporting legs 10, when the heater is used, four groups of heating assemblies with the same specification are symmetrically placed and surrounded to form a cylindrical structure, a preparation boiler of monocrystalline silicon is placed on the supporting plate 9 at the bottom end of the heating assembly, then a clamping groove 14 between the anode wiring clamping block 3 and the cathode wiring clamping block 4 is inserted into a wiring plate 7 of one wire 6 and screwed by a bolt II 13, wiring plates 7 at the other ends of the four wires 6 connected with the anode wiring clamping block 3 are overlapped together, the four wires 6 are connected and fixed by a bolt I12, the wiring plates 7 at the other ends of the four wires 6 connected with the cathode wiring clamping block 4 are overlapped together and then fixed in the same mode, connect the power to two wiring board 7 after the stack at last, can the circular telegram heat, this heater comprises the graphite heating element that four bibliographic categories of structural specification are the same, thereby can require to adjust the heating diameter of this heater according to specific service environment and the heating boiler size of monocrystalline silicon, it is wider to make its scope of application, and can ensure to laminate with the boiler, improve heat conduction efficiency, the bottom of heater sets up to the backup pad 9 of V type, the permeability has been improved greatly, air circulation is stronger, the heating effect is better, and the bottom supports through a plurality of supporting legss 10, guarantee its steadiness, wiring board 7 stacks and can be simultaneously to the four group's heating element circular telegram of this heater together, thereby use a power can satisfy the user demand.

While there have been shown and described what are at present considered the fundamental principles and essential features of the utility model and its advantages, it will be apparent to those skilled in the art that the utility model is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a split type monocrystalline silicon CZ stove thermal field graphite heater, includes graphite heater body, its characterized in that: the graphite heater body comprises a long graphite column (2), a short graphite column (1), a supporting plate (9), a wire (6) and supporting legs (10), wherein a positive wiring clamping block (3) is arranged at the top end of the short graphite column (1), the supporting plate (9) is arranged at the bottom end of the short graphite column (1), the other end of the supporting plate (9) is connected with the long graphite column (2), a negative wiring clamping block (4) is arranged at the top end of the long graphite column (2), clamping grooves (14) are formed in the middles of the positive wiring clamping block (3) and the negative wiring clamping block (4), holes (5) are formed in the two ends of each clamping groove (14), bolts (13) are arranged inside the holes (5), a wiring board (7) is arranged in the middle of each clamping groove (14), holes (8) are formed in the middle of each wiring board (7), the wire (6) is arranged at one end of each wiring board (7), the bottom of fagging (9) is provided with insulating layer (11), the bottom of insulating layer (11) is provided with supporting legs (10).

2. The split-type single crystal silicon CZ furnace thermal field graphite heater of claim 1, wherein: the whole supporting plate (9) is of a V-shaped structure, and two ends of the supporting plate (9) are connected with the bottom ends of the short graphite column (1) and the feldspar ink column (2) respectively.

3. The split-type single crystal silicon CZ furnace thermal field graphite heater of claim 1, wherein: the short graphite column (1) and the feldspar ink column (2) are parallel to each other and are perpendicular to the supporting plate (9) for installation.

4. The split-type single crystal silicon CZ furnace thermal field graphite heater of claim 1, wherein: and the second bolt (13) penetrates through the first hole (5) and the second hole (8) in sequence to fix the wiring board (7) in the clamping groove (14).

5. The split-type single crystal silicon CZ furnace thermal field graphite heater of claim 1, wherein: the wiring board (7) is integrally made of copper metal, and the wiring boards (7) with the same specification are arranged at the two ends of the wire (6).

6. The split-type single crystal silicon CZ furnace thermal field graphite heater of claim 1, wherein: the wiring board (7) penetrates through the second hole (8) through the first bolt (12) to be connected and attached.