CN115710697A - Electrode feeder and chemical deposition equipment - Google Patents
Electrode feeder and chemical deposition equipment Download PDFInfo
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- CN115710697A CN115710697A CN202211401702.1A CN202211401702A CN115710697A CN 115710697 A CN115710697 A CN 115710697A CN 202211401702 A CN202211401702 A CN 202211401702A CN 115710697 A CN115710697 A CN 115710697A
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- 238000005234 chemical deposition Methods 0.000 title abstract description 20
- 230000000903 blocking effect Effects 0.000 claims abstract description 77
- 238000000034 method Methods 0.000 claims abstract description 52
- 230000008569 process Effects 0.000 claims abstract description 47
- 230000004888 barrier function Effects 0.000 claims description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 8
- 239000010439 graphite Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 230000004308 accommodation Effects 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 abstract description 18
- 239000010408 film Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
The application discloses an electrode feed-in device and a chemical deposition device. The electrode block is arranged on the electrode guide rod. The carrier boat has boat feet, which are connected with the electrode block to connect them electrically. Wherein, at least one of the electrode block and the boat foot is provided with a blocking part for blocking the process gas from entering a gap between the boat foot and the electrode block. Through the mode, the stability of electric field can be strengthened to this application.
Description
Technical Field
The application relates to the technical field of chemical deposition equipment, in particular to an electrode feed-in device and chemical deposition equipment.
Background
The chemical deposition equipment can deposit a film on the surface of a product, so that the product is modified, and the performance of the product is optimized. The chemical deposition apparatus may perform chemical deposition using a vapor deposition method such as plasma enhanced chemical. The plasma enhanced chemical vapor deposition method is a process of ionizing and decomposing process gas in a vacuum chamber through an electric field and then depositing a film on the surface of a product. In the related art, the electrode feeding device in the chemical deposition apparatus has unstable conductivity, which easily causes an abnormal electric field.
Disclosure of Invention
Embodiments of the present application provide an electrode feedthrough and a chemical deposition apparatus. The stability of the electric field can be enhanced.
In a first aspect, an electrode feedthrough is provided in an embodiment of the present application. The electrode feed-in device comprises an electrode guide rod, an electrode block and a slide boat. The electrode block is arranged on the electrode guide rod. The carrier boat has boat feet, which are connected with the electrode block to connect them electrically. Wherein, at least one of the electrode block and the boat foot is provided with a blocking part for blocking the process gas from entering a gap between the boat foot and the electrode block.
In a second aspect, embodiments of the present application provide an apparatus for chemical deposition. The chemical deposition equipment comprises a reaction chamber and the electrode feed-in device. The reaction chamber is filled with process gas. The electrode feed-in device is arranged in the reaction cavity.
The beneficial effect of this application is: different from the prior art, the process gas is blocked by the blocking part, so that the gap between the electrode block and the boat foot blown by the process gas can be reduced, the phenomenon that the gas is ionized by glow discharge generated between the electrode block and the boat foot is reduced, and the growth of an insulating film between the electrode block and the boat foot is reduced and inhibited. After the growth of the insulating film is inhibited, the reduction of the conductivity between the electrode block and the boat foot can be reduced, thereby reducing the abnormity of the electric field in the slide boat and increasing the stability of the electric field in the slide boat. Through setting up the stop part, can also play location or guide effect to placing of slide glass boat to reduce the deviation of the position of placing of slide glass boat in technology each time, reduce the influence to electric field repeatability, be favorable to improving the homogeneity between the technology of batch.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of an apparatus for chemical deposition according to the present application;
FIG. 2 is a schematic top view of the chemical deposition apparatus shown in FIG. 1;
FIG. 3 is a schematic diagram of an embodiment of an electrode block and a boat foot of an electrode feedthrough assembly;
FIG. 4 is a schematic view of another embodiment of the electrode block and boat foot of FIG. 3;
FIG. 5 is a schematic structural diagram of an embodiment of an electrode block and a boat foot of yet another embodiment of an electrode feedthrough apparatus;
FIG. 6 is a schematic view of another embodiment of the electrode block and boat foot of FIG. 5;
FIG. 7 is a schematic structural diagram of an embodiment of an electrode block and a boat foot of yet another embodiment of an electrode feedthrough;
FIG. 8 is a schematic view of another embodiment of the electrode block and the boat foot shown in FIG. 7.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.
In the related technology, chemical deposition equipment can be used for coating a film on a product by a plasma enhanced chemical vapor deposition method so as to achieve the purposes of modification and performance improvement. The plasma enhanced chemical vapor deposition method is a process of ionizing and decomposing process gas in a vacuum chamber by an electric field and then depositing a film on the surface of a product. The chemical deposition equipment is used for coating a product by arranging an electrode feed-in device in a reaction cavity. In the existing electrode feed-in device, the contact between the electrode block and the boat foot of the slide boat is two-plane butt contact, so that the electrode block and the boat foot are electrically conducted. Due to reasons such as production precision, gaps can exist between the electrode blocks and the boat feet, and the gaps can cause capacitance to be formed between the electrode blocks and the boat feet. The reaction chamber is filled with process gas, the gap is exposed in the flowing direction of the process gas, and the process gas can enter the gap between the electrode block and the boat foot. This results in a parasitic electric field between the electrode block and the boat foot. In the process of starting discharge, an insulating film grows gradually in the gap, and after the insulating film grows to a certain degree, the conductivity between the electrode block and the boat foot is reduced, so that the electric field is abnormal. In order to improve the above technical problem, the present application may provide the following embodiments.
The embodiment of the chemical deposition apparatus 1 of the present application describes an exemplary structure of the chemical deposition apparatus 1.
The chemical deposition apparatus 1 has a reaction chamber 20. The reaction chamber 20 is filled with a process gas, which may be SiH4 or NH3, and may be selected according to a type of a film to be deposited, and is not limited in detail. Optionally, one end of the reaction chamber 20 is filled with process gas, and the other end is evacuated, so that the process gas in the reaction chamber 20 can flow uniformly, and the interference of air to the deposition process can be reduced. The chemical deposition apparatus 1 further comprises an electrode feedthrough 10, and the electrode feedthrough 10 is disposed in the reaction chamber 20.
The specific structure of the electrode feedthrough 10 is described in an exemplary manner below.
Referring to fig. 1, the electrode feedthrough 10 includes an electrode lead 110, an electrode block 111, and a slide boat 120. The electrode block 111 is disposed on the electrode guide 110. The electrode guide 110 can be electrically connected to a power source, a relay, an electric control circuit, or the like, so as to introduce current to the electrode block 111. Meanwhile, the electrode guide 110 can also play a role of bearing the electrode block 111 and the slide boat 120 placed on the electrode block 111. The slide boat 120 may be specifically a graphite boat made of graphite or a metal boat made of metal. The carrier boat 120 may also be made of other conductive materials, the material specifically includes graphite or metal, and in the setting form, a composite method may also be adopted, for example, the center of the conductive sheet is made of metal, the outer layer of the metal material is provided with a graphite layer, the center is made of graphite boat, which can reduce loss, and the outer layer is made of graphite material which can better utilize the advantages of graphite, such as acid and alkali resistance, high thermal conductivity aluminum, and the like. The carrier 120 is used for carrying products to be coated, and the carrier 120 can generate an electric field when being powered on to ionize the process gas so as to coat the products in the carrier 120. In one embodiment, the slide boat 120 may be composed of a plurality of conductive sheets (not shown) arranged side by side, and a silicon wafer or other product is placed between adjacent conductive sheets. The adjacent conducting strips are positive and negative electrodes and are not conducted with each other. The conducting plate electrodes adjacent to the same conducting plate and arranged at intervals have the same polarity and are mutually conducted. Process gas flows between two adjacent conducting strips, and the process gas is ionized into plasma under the action of an electric field. Plasma deposition forms a thin film on the surface of the product. Further, the slide boat 120 has boat legs 121, and the boat legs 121 abut against the electrode blocks 111 to electrically connect the two. The boat pins 121 of the slide boat 120 are electrically connected to different conductive sheets to supply power to the conductive sheets.
Specifically, referring to fig. 2, in one embodiment, the electrode feedthrough 10 includes at least two electrode guides 110, wherein the two electrode guides 110 can be connected to the positive and negative electrodes of the power supply, respectively, to provide different electrode polarities to the conductive strips in the slide boat 120. Each electrode guide rod 110 is provided with at least two electrode blocks 111 along the length direction thereof, and the slide boat 120 is provided with at least two electrode blocks 111 along the length direction of the electrode guide rod 110, so that the plurality of electrode blocks 111 can supply power to the same slide boat 120 to increase the power supply stability. And/or, a plurality of electrode blocks 111 can supply power to different slide boats 120, so as to place a plurality of slide boats 120 in one process, thereby increasing the production efficiency. The slide boat 120 has at least two boat legs 121, and the boat legs 121 correspond to the electrode blocks 111 one by one, respectively, so as to electrically connect the boat legs 121 with the electrode blocks 111.
Referring to fig. 3, at least one of the electrode block 111 and the boat foot 121 is provided with a blocking portion 130, specifically, the blocking portion 130 may be provided on the electrode block 111, or may be provided on the boat foot 121, or both the electrode block 111 and the boat foot 121 are provided with the blocking portion 130, which is not limited in detail herein. The blocking portion 130 may be detachably mounted on the electrode block 111 or the boat foot 121, may be integrally provided with the electrode block 111 and the boat foot 121, or may be fixedly mounted on the electrode block 111 and the boat foot 121 by means of adhesion or the like, which is not particularly limited herein. The blocking part 130 is used to block the process gas from entering the gap between the boat foot 121 and the electrode block 111. The process gas may flow from left to right to form a flow field (the flow direction of the process gas is described as flowing from left to right in this application). The blocking part 130 is arranged to block the gap between the electrode block 111 and the boat foot 121, and the process gas cannot easily enter the gap after being blocked by the blocking part 130 due to the characteristics of the flow field. Therefore, the generation of a parasitic electric field in the gap can be reduced, and the growth of a derivative film caused by glow discharge is reduced, so that the good conductivity between the electrode block 111 and the boat foot 121 is ensured, and the stability of the electric field is improved.
Further, referring to fig. 3 and 4, at least one of the electrode block 111 and the boat foot 121 is convexly provided with a blocking portion 130, and the other of the electrode block 111 and the boat foot 121 is concavely provided with a receiving space 122 for receiving the blocking portion 130. The surface of the electrode block 111 close to the boat foot 121 is convexly provided with a blocking portion 130, and the boat foot 121 is provided with an accommodating space 122, or the surface of the boat foot 121 close to the electrode block 111 is convexly provided with a blocking portion 130, and the electrode block 111 is provided with an accommodating space 122. When the boat foot 121 is electrically connected to the electrode block 111, the stopper 130 is accommodated in the accommodation space 122. The electrical connection between the electrode block 111 and the boat foot 121 can be achieved by the barrier 130 abutting against the sidewall of the receiving space 122. So arranged, the carrier boat 120 can be positioned at the placing position on the electrode block 111. Under different batches of processes, different carrier boats 120 can be replaced on the electrode block 111, and the positioning of the relative positions of the carrier boats 120 and the electrode block 111 can reduce the deviation of the placing positions of the carrier boats 120 in each process, reduce the influence on the repeatability of an electric field, and is beneficial to improving the uniformity among the batches of processes. Optionally, the blocking portion 130 is protruded at the middle of at least one of the electrode block 111 and the boat foot 121. This arrangement enables the gap between the electrode block 111 and the boat foot 121 to be bent multiple times (e.g., the gap in fig. 3 has four bends), further reducing the possibility of process gas entering the gap. Optionally, the blocking portion 130 is disposed at an edge of at least one of the electrode block 111 and the boat foot 121, so that the limiting effect of the blocking portion 130 on the boat foot 121 can be reduced, the slide boat 120 can be conveniently placed, and the difficulty in aligning the two can be reduced.
Optionally, the projection of the barrier 130 on the surface of the electrode block 111 or the boat foot 121 having the barrier 130 accounts for 20% -75% of the surface. Specifically, if the area of the projection of the blocking portion 130 is too large compared to the surface, the accommodating space 122 needs to be larger, and the sidewall of the accommodating space 122 is thinner, which may result in a decrease in the assembling stability of the electrode block 111 and the boat foot 121. And the too large stop 130 will prevent the slide boat 120 from being installed, and will reduce the production efficiency. If the area of the projection of the barrier 130 is too small, the barrier 130 may function to block the process gas from entering. The gap between the electrode block 111 and the boat foot 121 still allows more process gas to enter, resulting in an insulating film.
Optionally, the ratio of the height of the barrier 130 protruding from the electrode block 111 or the boat foot 121 to the thickness of the electrode block 111 or the boat foot 121 is 20% to 65%. Specifically, if the height of the barrier 130 is too high, the difficulty of fitting the boat foot 121 and the electrode block 111 may be increased, and the bending moment applied to the barrier 130 may be too large, which may decrease the strength of the barrier 130. If the height of the blocking portion 130 is too low, the blocking portion 130 may not block the process gas from flowing into the gap between the electrode block 111 and the boat foot 121.
The electrode block 111 is further described below by taking the example that the blocking portion 130 is protruded from the surface of the boat foot 121, and the receiving space 122 is provided in the boat foot 121.
The barrier 130 extends from the electrode block 111 toward the boat foot 121, and the electrode block 111 and the boat foot 121 are integrally formed. In one embodiment, the blocking portion 130 is a rectangular parallelepiped, and the shape of the accommodating space 122 is matched with the blocking portion 130. A rectangular insertion opening (not shown) is provided at one side of the accommodating space 122, and the blocking portion 130 extends into the accommodating space 122 from the insertion opening. The side surface of the blocking part 130 of the cuboid is a plane, which can better block the process gas, thereby further reducing the process gas entering the gap between the electrode block 111 and the boat foot 121. In other embodiments, the blocking portion 130 may also be disposed in a cylinder, a cone, or a trapezoid, which is not limited in particular.
Referring to fig. 4, in an embodiment, the cross section of the blocking portion 130 is tapered from the surface of the electrode block 111 toward the boat foot 121, and the receiving space 122 is tapered from the surface of the boat foot 121 toward a direction away from the electrode block 111. By the arrangement, when the slide boat 120 is placed on the electrode block 111, the accommodating space 122 with the gradually-reduced cross section and the blocking portion 130 with the gradually-reduced cross section can guide the placing process, so that the slide boat 120 can be conveniently placed on the electrode block 111, and the production efficiency is improved.
Wherein, optionally, the included angle between the side of the cross section of the blocking part 130 and the surface of the electrode block 111 close to the boat foot 121 is 20-80 deg. The blocking portion 130 arranged in this way can play a good guiding role, and can facilitate the assembly of the boat foot 121 and the electrode block 111. Optionally, the ratio of the area of the surface of the blocking portion 130 close to the boat foot 121 to the projected area of the blocking portion 130 on the surface of the electrode block 130 is 30% -90%. If it exceeds 90%, the difficulty of aligning the accommodating space 122 with the stopper 130 increases. If it is less than 30%, the stability of the electrical connection between the electrode block 111 and the boat foot 121 and the structural strength of the barrier 130 are lowered.
For example, the blocking portion 130 is a truncated cone, and the included angle between the generatrix of the truncated cone and the surface of the electrode block 111 close to the boat foot 121 is 20-80 °. Or the upper surface of the truncated cone accounts for 30% -90% of the projection of the truncated cone on the electrode block 111. The blocking portion 130 may be a truncated pyramid, and the like, which will not be described in detail.
The scheme that the boat foot 121 is provided with the blocking portion 130 protruding from the surface of the electrode block 111, and the electrode block 111 is provided with the accommodating space 122 is the same as the above embodiment, and the specific implementation details may be changed adaptively, so as to at least generate the same technical effects as the above embodiment, and further description is omitted here.
In one embodiment, referring to fig. 5 and 6, at least two blocking parts 130 are provided on the electrode block 111 or the boat foot 121, or at least one of the at least two blocking parts 130 is provided on the electrode block 111 and the remaining blocking parts 130 are provided on the boat foot 121.
The number of the blocking portions 130 may be plural, for example, the number of the blocking portions 130 is two. Referring to fig. 5, when the number of the blocking portions 130 is two, both the blocking portions 130 may be disposed on the electrode block 111. Further, the boat foot 121 may be provided with two accommodating spaces 122 corresponding to the number of the blocking portions 130, and the two accommodating spaces 122 correspond to the two blocking portions 130 one to one. Alternatively, the blocking portions 130 may be disposed on the boat legs 121, and the accommodating space 122 may be disposed on the electrode block 111. With this arrangement, the gap between the electrode block 111 and the boat foot 121 can be bent more, and the possibility of the process gas entering the gap can be further reduced.
Referring to fig. 6, one of the two blocking portions 130 may be disposed on the electrode block 111, and the other blocking portion may be disposed on the boat foot 121. Further, the electrode block 111 and the boat foot 121 are provided with accommodating spaces 122 respectively corresponding to the electrode block 111. With this arrangement, the gap between the electrode block 111 and the boat foot 121 can be bent more, and the possibility of the process gas entering the gap can be further reduced. On the other hand, the blocking portion 130 and the accommodating space 122 can not only position the carrier slide 120, but also orient the carrier slide 120 so that the carrier slide 120 can be placed in the same direction every time.
The number of the blocking portions 130 may be three, and the three blocking portions 130 may be all disposed on the electrode block 111 or all disposed on the boat foot 121. The three blocking portions 130 may be one or two of the three blocks provided on the electrode block 111, and two or one of the three blocks provided on the boat foot 121. The provision of the three blocking portions 130 at least has the technical effects of the above embodiments, and will not be described again. The same applies to the case where there are more blocking portions 130, and the description thereof is omitted.
In another embodiment, referring to fig. 7, the barrier 130 is disposed on one side of the electrode block 111 or the boat foot 121, and specifically, the barrier 130 is disposed on the electrode block 111 as an example. The blocking portion 130 is disposed on one side of the electrode block 111, specifically, on a side of the electrode block 111 close to a process gas source direction. The blocking portion 130 is located at one end of the slit to block at least one direction of the slit to prevent the process gas from entering. Alternatively, the gap between the electrode block 111 and the boat foot 121 is parallel to the flow direction of the process gas, and the gap between the barrier 130 and the boat foot 121 is perpendicular to the flow direction of the process gas. This can reduce the entry of process gas into the gap, and such an electrode block 111 is convenient to manufacture. Further, referring to fig. 8, the barrier 130 may include two barriers 130, and the two barriers 130 are disposed at both sides of the electrode block 111 to block the gap from two directions, thereby further reducing the process gas from entering into the gap. Alternatively, the number of the barriers 130 may be larger and the barriers may be provided around the circumference of the electrode block 111. In other embodiments, the blocking portion 130 may be disposed on one or both sides of the boat foot 121, and the technical effects produced include at least the technical effects in the above embodiments, which are not described again.
In summary, the electrode feeding apparatus 10 can reduce the gap between the electrode block 111 and the boat foot 121 into which the process gas is blown by the blocking portion 130, so as to reduce the phenomenon that the gas is ionized by the glow discharge generated between the electrode block 111 and the boat foot 121, and further reduce and inhibit the growth of the insulating film between the electrode block 111 and the boat foot 121. After the growth of the insulating film is inhibited, the decrease of the conductivity between the electrode block 111 and the boat foot 121 can be reduced, thereby reducing the abnormality of the electric field in the slide boat 120 and increasing the stability of the electric field therein. The barrier part 130 is arranged, so that the carrier boat 120 can be positioned or guided, the deviation of the placement position of the carrier boat 120 in each process is reduced, the influence on the repeatability of an electric field is reduced, and the improvement of the uniformity among batch processes is facilitated.
The above embodiments are merely examples, and not intended to limit the scope of the present application, and all modifications, equivalents, and flow charts using the contents of the specification and drawings of the present application, or those directly or indirectly applied to other related arts, are included in the scope of the present application.
Claims (16)
1. An electrode feedthrough comprising:
an electrode guide;
the electrode block is arranged on the electrode guide rod;
the carrier boat is provided with a boat foot which is abutted against the electrode block so as to electrically connect the two;
at least one of the electrode block and the boat foot is provided with a blocking part for blocking process gas from entering a gap between the boat foot and the electrode block.
2. The electrode feedthrough as recited in claim 1, wherein:
at least one of the electrode block and the boat foot is convexly provided with the blocking part, the other one of the electrode block and the boat foot is concavely provided with an accommodating space for accommodating the blocking part, and when the boat foot is electrically connected with the electrode block, the blocking part is accommodated in the accommodating space.
3. The electrode feedthrough as recited in claim 2, wherein:
the projection of the barrier part on the surface of the electrode block or the boat foot with the barrier part accounts for 20-75% of the surface.
4. The electrode feedthrough as recited in claim 2, wherein:
the ratio of the height of the barrier part protruding out of the electrode block or the boat foot to the thickness of the electrode block or the boat foot is 20-65%.
5. The electrode feedthrough as recited in claim 2, wherein:
the blocking part is convexly arranged in the middle of at least one of the electrode block and the boat foot, the blocking part is arranged in a cuboid shape, the shape of the accommodating space is matched with that of the blocking part, a rectangular insertion hole is formed in one side of the accommodating space, and the blocking part extends into the accommodating space from the insertion hole.
6. The electrode feedthrough as recited in claim 2, wherein:
the blocking part is convexly arranged on the surface, close to the boat foot, of the electrode block, and the accommodating space is formed in the boat foot.
7. The electrode feedthrough as recited in claim 6, wherein:
the cross section of the blocking part is gradually reduced from the surface of the electrode block to the direction of the boat foot, and the cross section of the accommodating space is gradually reduced from the surface of the boat foot to the direction far away from the electrode block.
8. The electrode feedthrough as recited in claim 7, wherein:
the included angle between the side edge of the cross section of the blocking part and the surface of the electrode block close to the boat foot is 20-80 degrees, or the ratio of the area of the surface of the blocking part close to the boat foot to the projection area of the blocking part on the surface of the electrode block is 30-90 percent.
9. The electrode feedthrough as recited in claim 2, wherein:
the boat foot is close to the protruding stop part that is equipped with in the surface of electrode piece, the electrode piece is provided with accommodation space.
10. The electrode feedthrough as recited in claim 1, wherein:
the blocking parts are at least two and are arranged on the electrode block or the boat foot, or at least one of the blocking parts is arranged on the electrode block, and the rest blocking parts are arranged on the boat foot.
11. The electrode feedthrough as recited in claim 1, wherein:
the blocking part is arranged on one side of the electrode block or the boat foot and is positioned at one end of the gap so as to block at least one direction of the gap and prevent process gas from entering.
12. The electrode feedthrough as recited in claim 1, wherein:
the electrode feed-in device comprises at least two electrode guide rods, at least two electrode blocks are arranged on each electrode guide rod along the length direction of the electrode guide rod, at least two slide glass boats are arranged along the length direction of the electrode guide rods, each slide glass boat is provided with at least two boat feet, and the boat feet are respectively in one-to-one correspondence with the electrode blocks.
13. The electrode feedthrough as recited in claim 1, wherein:
the slide boat comprises a plurality of conducting strips which are arranged side by side.
14. The electrode feedthrough as recited in claim 13, wherein:
the conducting strip is made of graphite or metal.
15. The electrode feedthrough of claim 14, wherein:
the center of the conducting strip is made of metal, and a graphite layer is arranged on the outer layer of the metal material.
16. An electroless deposition apparatus, comprising:
a reaction chamber, into which process gas is introduced;
the electrode feedthrough of any one of claims 1-15, disposed within the reaction chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211401702.1A CN115710697A (en) | 2022-11-09 | 2022-11-09 | Electrode feeder and chemical deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211401702.1A CN115710697A (en) | 2022-11-09 | 2022-11-09 | Electrode feeder and chemical deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115710697A true CN115710697A (en) | 2023-02-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211401702.1A Pending CN115710697A (en) | 2022-11-09 | 2022-11-09 | Electrode feeder and chemical deposition equipment |
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| CN (1) | CN115710697A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116988045A (en) * | 2023-09-28 | 2023-11-03 | 江苏微导纳米科技股份有限公司 | Electric field feed-in structure and deposition equipment |
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2022
- 2022-11-09 CN CN202211401702.1A patent/CN115710697A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116988045A (en) * | 2023-09-28 | 2023-11-03 | 江苏微导纳米科技股份有限公司 | Electric field feed-in structure and deposition equipment |
| CN116988045B (en) * | 2023-09-28 | 2024-01-02 | 江苏微导纳米科技股份有限公司 | Electric field feed-in structure and deposition equipment |
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