CN221028667U - Graphite boat and processing equipment - Google Patents

Abstract

The utility model discloses a graphite boat and processing equipment, relates to the technical field of photovoltaics, and aims to solve the problem that the qualification rate of a battery piece to be coated after coating is reduced due to the fact that the electric field intensity at a boat She Lengbian is high. The graphite boat includes boat blades and an insulating layer. Along a first direction, the plurality of boats She Jiange are distributed, and the insulating layer is disposed on at least a portion of an edge region of at least one boat blade. The utility model also provides processing equipment. The processing equipment is provided with a hollow inner cavity, the graphite boat in the technical scheme is positioned in the hollow inner cavity, and an insulating layer is arranged on the inner wall of the processing equipment.

Description

Graphite boat and processing equipment

Technical Field

The utility model relates to the technical field of photovoltaics, in particular to a graphite boat and processing equipment.

Background

In the prior art, it is generally required to coat the surface of the battery piece to be coated by using a tubular plasma enhanced chemical vapor deposition (abbreviated as PECVD). At this time, the battery piece to be coated to be treated is required to be placed in a graphite boat, and then the graphite boat carrying the battery piece to be coated is placed in coating equipment for treatment.

Graphite boats generally include ceramic rods and a plurality of opposed and spaced apart boat blades. In the practical use process, the high-voltage electric field exists in the deposition chamber of PECVD, so that the electric field at the edge of the boat blade placed in the deposition chamber is larger. In the film plating process, the ionization concentration of the gas at the boat She Lengbian is increased, so that arc discharge, electric spark and other phenomena are easy to occur between the boats She Lengbian and between the boat She Lengbian and the inner cavity of the deposition chamber, and the qualification rate of the battery piece to be plated after film plating is reduced.

Disclosure of utility model

The utility model aims to provide a graphite boat and processing equipment, which are used for reducing the electric field intensity at a boat She Lengbian so as to improve the qualification rate of battery pieces to be coated after coating.

To achieve the above object, in a first aspect, the present utility model provides a graphite boat. The graphite boat includes boat blades and an insulating layer. Along a first direction, the plurality of boats She Jiange are distributed, and the insulating layer is disposed on at least a portion of an edge region of at least one boat blade.

As is known in the art, the sharper the conductor surface, the greater the charge density, the denser the equipotential surface distribution, and thus the higher the electric field strength, when the conductor is charged. Therefore, when the graphite boat is electrified, the electric field intensity at the edges (namely, edge regions) of the boat blades is much higher than that of the middle regions of the boat blades, so that arc discharge, electric spark and other phenomena are easy to occur in the edge regions of the boat blades. Based on this, in the present utility model, an insulating layer is provided at least in a part of the edge region of at least one boat blade. At this time, the insulating layer generates induced charges under the applied electric field to weaken the external electric field, thereby reducing the electric field strength of at least part of the edge region of at least one boat blade. It should be understood that the insulating layer does not affect the placement of the battery piece to be coated and the normal use of the graphite boat.

Further, since the insulating layer is disposed in at least a portion of the edge region of at least one of the boat blades, the electric field strength of at least a portion of the edge region of at least one of the boat blades can be reduced, so as to reduce the probability of arc discharge, spark, etc. occurring between the boat She Bianyan regions and between the boat She Bianyan region and the inner chamber of the deposition chamber, and further improve the yield of the battery to be coated after coating. Meanwhile, the electric field intensity difference between the partial edge area of the boat blade and the middle area of the boat blade can be reduced, so that the electric field uniformity of the graphite boat is improved, and the uniformity of the coating is further improved.

Still further, by reducing the electric field strength of at least a portion of the edge region of at least one boat blade, the gas ionization strength of the boat She Bianyan region can be reduced to reduce the generation of powder and reduce or eliminate the probability of dust contaminating the battery sheet to be coated. Based on the method, the uniformity of the coating of the battery piece to be coated can be improved, and the quality of the battery piece to be coated is ensured.

In one implementation, the insulating layer is disposed on all edge regions of at least one boat blade.

Under the condition of adopting the technical scheme, the electric field intensity of all edge areas of at least one boat blade can be reduced, so that the probability of arc discharge, electric spark and other phenomena between all edge areas of the boat blade and adjacent boat She Bianyan areas and between all edge areas of the boat blade and the inner cavity of a deposition chamber is reduced, and the qualification rate of the battery piece to be coated after coating is further improved. Meanwhile, the electric field intensity difference between the whole edge area of the boat blade and the middle area of the boat blade can be reduced, so that the electric field uniformity of the graphite boat is further improved, and the uniformity of the coating is further improved.

In one implementation, the edge region includes: end face regions and side face regions. The end surface region comprises at least one end of the boat blade, the side surface region comprises at least one side surface adjacent to the at least one end of the boat blade, the two side surfaces of the boat blade are distributed along a first direction, and the insulating layer is arranged in at least one of the end surface region and the side surface region.

Under the condition of adopting the technical scheme, when the insulating layer is only arranged in the end surface area, the manufacturing material of the insulating layer can be saved, and the material cost is reduced. Meanwhile, the probability of arc discharge, electric spark and other phenomena between the end surface area of the boat blade and the inner cavity of the deposition chamber can be reduced, and the qualification rate of the battery piece to be coated after coating is improved.

When the insulating layer is arranged in the side surface area, the probability of arc discharge, electric spark and other phenomena between the side surface area of the boat blade and the side surface area of the adjacent boat blade can be reduced, so that the qualification rate of the battery piece to be coated after coating is improved.

When the insulating layer is arranged in the end surface area and the side surface area at the same time, the probability of arc discharge, electric spark and other phenomena between the boat blade end surface area and the inner cavity of the deposition chamber and between the boat blade side surface area and the adjacent boat blade side surface area can be reduced, so that the qualification rate of the battery piece to be coated after coating is further improved.

In summary, the insulating layer may be disposed in various positions according to actual situations. At this time, the graphite boat can be adapted to different application scenes, and the application range of the graphite boat is enlarged.

In one implementation, when the insulating layer is only disposed in the end surface region, the width of the insulating layer is greater than or equal to the width of the end surface region, and the width direction of the insulating layer and the width direction of the end surface region are both consistent with the first direction.

Under the condition of adopting the technical scheme, the insulating layer can be ensured to completely cover the end surface area, so that the probability of arc discharge, electric spark and other phenomena between each position of the end surface area and the inner cavity of the deposition chamber can be reduced, and the qualification rate of the battery piece to be coated after coating is improved. Meanwhile, the setting difficulty of the insulating layer can be reduced, the process error can meet the actual requirement, and the width of the insulating layer is not necessarily required to be equal to the width of the end face area. At this time, not only can improve the preparation efficiency, but also easily use widely simultaneously.

In one implementation, when the insulating layer is disposed in the side area, the insulating layer protrudes at any position corresponding to the sidewall of the side area, and the ratio of the total thickness of the two insulating layers disposed opposite to each other to the two boats She Jianju disposed opposite to each other is greater than or equal to the ratio of the thickness of the boat blade to the sum of the thickness of the boat blade and the two boats She Jianju/2 disposed opposite to each other, and is less than or equal to the sum of the thickness of the boat blade and the two boats She Jianju/2 disposed opposite to each other.

Under the condition of adopting the technical scheme, the ratio is larger than or equal to the ratio of the thickness of the boat blade to the sum of the thickness of the boat blade and the two boats She Jianju/2 which are oppositely arranged, so that the insulation effect of the insulating layer can be ensured at the moment, and the qualification rate of the battery piece to be coated after coating can be improved. Further, the ratio is smaller than or equal to the sum of the thickness of the boat blade and the two boats She Jianju/2 which are oppositely arranged, so that the probability that the battery piece to be coated is not easy to be placed in the boat blade due to the overlarge total thickness of the insulating layer can be reduced or eliminated, and the normal use of the graphite boat is ensured. Still further, the thickness of the single-sided insulating layer on each boat blade can be adjusted according to the type of power source, voltage intensity and the like adopted when the battery piece to be coated is actually processed, so that the insulating effect of the single-sided insulating layer meets the actual requirement.

In one implementation, when the insulating layer is disposed in the side area, the insulating layer is in the same plane with the sidewall that is adjacent to the side area and is not disposed with the insulating layer, and the side area is located on the sidewall.

Under the condition of adopting the technical scheme, the boat blade provided by the utility model can ensure that the dimension of the integral structure formed by the boat blade and the insulating layer is basically consistent with or consistent with the dimension of the original boat blade under the condition of ensuring that the boat blade meets the actual requirement. At this time, the process of placing or taking out the battery piece to be coated is consistent with the prior art, and the adjustment of processing parameters is not needed, so that the method is simple and convenient.

In one implementation, when the insulating layers are disposed on two sides of the same boat blade, the thicknesses of the two insulating layers are equal.

Under the condition of adopting the technical scheme, the degree of the reduction of the electric field intensity of the two side surfaces of the same boat blade is basically consistent or identical, so that the electric field of the whole graphite boat is more uniform, and the uniformity of the coating is improved.

In one implementation, the graphite boat further includes: spacer particles and supports. Along the second direction, the spacer blocks and the supporting pieces are arranged between two adjacent boat leaves and positioned at the end parts of the boat leaves, and the first direction is perpendicular to the second direction. The spacer particles and the support members are oppositely and alternately distributed along a third direction which is perpendicular to the first direction and the second direction respectively.

The insulating layer is also arranged on the outer surface of the spacer particles and/or the insulating layer is also arranged on the outer surface of the supporting piece.

Under the condition of adopting the technical scheme, the electric field of the whole graphite boat can be more uniform, so that the uniformity of the coating film is further improved. Meanwhile, the probability of arc discharge, electric spark and other phenomena at the positions of the spacer blocks and/or the supporting pieces can be reduced, and the qualification rate of the battery piece to be coated after coating is further improved. In addition, the ionization intensity of the gas at the spacer and/or the support member can be reduced to reduce the generation of powder, so as to reduce or eliminate the probability of dust pollution to the battery piece to be coated. Based on the method, the uniformity of the coating of the battery piece to be coated can be improved, and the quality of the battery piece to be coated is ensured.

In one implementation, the insulating layer includes an inorganic insulating layer or an organic insulating layer. The inorganic insulating layer includes any one of a ceramic insulating layer, a quartz insulating layer, or a mica insulating layer. The organic insulating layer comprises any one of polytetrafluoroethylene insulating layer, epoxy resin insulating layer, epoxy glass cloth insulating layer or aramid fiber insulating layer.

Under the condition of adopting the technical scheme, the insulating layers made of different materials can be selected according to actual conditions, so that the selectivity of the insulating layers is increased. Based on the method, the graphite boat can be further adapted to different application scenes, and the application range of the graphite boat is enlarged.

In a second aspect, the utility model also provides a processing device. The processing equipment is provided with a hollow inner cavity, the graphite boat in the technical scheme is positioned in the hollow inner cavity, and an insulating layer is arranged on the inner wall of the processing equipment.

Compared with the prior art, in the processing equipment provided by the utility model, the insulating layer is arranged on the inner wall of the processing equipment, so that the electric field in the whole processing equipment is more uniform, and the uniformity of the coating is further improved. Meanwhile, the probability of arc discharge, electric spark and other phenomena generated at the inner wall of the processing equipment and the boat She Bianyan area can be reduced, and the qualification rate of the battery piece to be coated after coating is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and do not constitute a limitation on the utility model. In the drawings:

FIG. 1 is a schematic diagram of a graphite boat according to an embodiment of the present utility model without an insulating layer;

FIG. 2 is a schematic view of a graphite boat according to an embodiment of the present utility model, in which an insulating layer is provided on the graphite boat;

FIG. 3 is a schematic view of a structure of a boat blade with an insulating layer thereon according to an embodiment of the present utility model;

FIG. 4 is a schematic view of a plurality of boat blades according to an embodiment of the present utility model;

FIG. 5 is a schematic diagram showing the positional relationship between the boat blade and the insulating layer according to an embodiment of the present utility model;

FIG. 6 is a second schematic diagram of the positional relationship between the boat blade and the insulating layer in an embodiment of the present utility model;

FIG. 7 is a third schematic diagram of the positional relationship between the boat blade and the insulating layer in an embodiment of the present utility model;

FIG. 8 is a diagram showing a relationship between boat blade and insulating layer in an embodiment of the present utility model;

FIG. 9 is a diagram showing a fifth positional relationship between boat blade and insulating layer in an embodiment of the present utility model;

FIG. 10 is a schematic diagram of a first embodiment of the present utility model in which an insulating layer is disposed on a spacer;

FIG. 11 is a second schematic structural diagram of the spacer with an insulating layer thereon according to an embodiment of the present utility model;

FIG. 12 is a schematic view of a first embodiment of the present utility model, in which an insulating layer is disposed on a supporting member;

Fig. 13 is a schematic diagram of a second structure of the support member according to the embodiment of the utility model.

Reference numerals:

1-graphite boat, 10-boat blade, 100-edge region,

101-Side area, 1010-side, 102-end area,

1020-End, 11-insulating layer, 12-spacer,

13-Support.

Detailed Description

In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise. The meaning of "a number" is one or more than one unless specifically defined otherwise.

In the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc., are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In combination with the background art, in the actual processing process, PECVD establishes a high-voltage electric field in a deposition chamber, and under the action of a certain temperature, air pressure and high-voltage electric field, a reaction gas is excited into plasma, and glow discharge is generated. In the process, the deposition reaction temperature is greatly reduced, the chemical reaction process is accelerated, and the deposition rate is improved.

In addition to the technical problems described in the background section, the following technical problems exist: in the prior art, the electric field intensity at the boat She Lengbian is obviously higher than that at the gap between two adjacent boat blades, so that the ionization degree of the gas at the boat She Lengbian is high, and the discharge phenomenon is easy to occur. Currently, the discharge phenomenon of the boat She Lengbian is generally reduced by increasing the distance between two adjacent boat leaves.

However, although the above method reduces the electric field strength at boat She Lengbian, it is inevitable that the electric field strength at the gap between adjacent two boat leaves is also reduced. At this time, the ionization rate of the gas is lowered and the reaction rate is remarkably lowered, thereby resulting in lowered production efficiency, increased production cost of the single-chip battery, lowered yield, lowered coating effect and lowered quality.

In order to solve the technical problems, in a first aspect, an embodiment of the present utility model provides a graphite boat. Referring to fig. 1 to 13, the graphite boat 1 includes boat blades 10 and an insulating layer 11. The plurality of boat blades 10 are spaced apart along the first direction a, and the insulating layer 11 is disposed at least in a portion of the edge area 100 of at least one boat blade 10.

The insulating layer can be arranged on the boat blade through the technological methods of bonding, film plating, spraying, pouring, coating, mechanical connection and the like. It should be appreciated that the insulating layer may also be provided on the boat blade in other ways, not limited to the above description. Further, the plurality of boat blades may be arranged opposite to each other at intervals.

As is known in the art, the sharper the conductor surface, the greater the charge density, the denser the equipotential surface distribution, and thus the higher the electric field strength, when the conductor is charged. Therefore, when the graphite boat 1 is energized, the electric field intensity at the edge of the boat blade 10 (i.e., the edge region 100) is much higher than that in the middle region of the boat blade 10, and thus the edge region 100 of the boat blade 10 is likely to generate arc discharge, spark, and the like. Based on this, in the embodiment of the present utility model, the insulating layer 11 is disposed on at least a part of the edge region 100 of at least one boat blade 10. At this time, the insulating layer 11 generates induced charges under the applied electric field to weaken the external electric field, thereby reducing the electric field strength of at least a part of the edge region 100 of the at least one boat blade 10. It should be understood that the insulating layer 11 does not affect the taking of the battery piece to be coated and the normal use of the graphite boat 1.

Further, since the insulating layer 11 is disposed in at least a portion of the edge region 100 of at least one of the boat blades 10, the electric field strength of at least a portion of the edge region 100 of at least one of the boat blades 10 can be reduced, so as to reduce the probability of arc discharge, spark, etc. occurring between the edge regions 100 of the boat blades 10 and the inner chamber of the deposition chamber, thereby improving the qualification rate of the battery to be coated after coating. Meanwhile, the electric field intensity difference between the partial edge area 100 of the boat blade 10 and the middle area of the boat blade 10 can be reduced, so that the electric field uniformity of the graphite boat 1 is improved, and the uniformity of the coating is further improved.

Still further, by reducing the electric field strength of at least a portion of the edge region 100 of at least one of the boat blades 10, the gas ionization strength of the edge region 100 of the boat blade 10 can be reduced to reduce the generation of powder and to reduce or eliminate the probability of dust contaminating the battery sheet to be coated. Based on the method, the uniformity of the coating of the battery piece to be coated can be improved, and the quality of the battery piece to be coated is ensured.

As a possible implementation, referring to fig. 3, the insulating layer 11 is disposed on the entire edge area 100 of at least one boat blade 10.

At this time, the electric field intensity of all edge regions 100 of at least one of the boat blades 10 can be reduced, so as to reduce the probability of arc discharge, electric spark and other phenomena occurring between all edge regions 100 of the boat blade 10 and the edge regions 100 of the adjacent boat blade 10, and between all edge regions 100 of the boat blade 10 and the inner cavity of the deposition chamber, thereby further improving the qualification rate of the battery to be coated after coating. Meanwhile, the electric field intensity difference between the whole edge area 100 of the boat blade 10 and the middle area of the boat blade 10 can be reduced, so that the electric field uniformity of the graphite boat 1 is further improved, and the uniformity of the coating is further improved.

As a possible implementation, referring to fig. 4, the edge area 100 includes: end face region 102 and side face region 101. The end surface region 102 includes at least one end 1020 of the boat blade 10, the side surface region 101 includes at least one side surface 1010 of the boat blade 10 adjacent to the at least one end 1020, the boat blade 10 includes two side surfaces 1010 distributed along the first direction, and the insulating layer 11 is provided in at least one of the end surface region 102 and the side surface region 101.

The side and end regions are of different sides of the boat leaf. Specifically, the boat blade includes four ends 1020, a top surface, a bottom surface, and two opposing narrow sides of the boat blade. The boat leaf includes two sides 1010, i.e., two opposite wide side partial areas.

In an alternative way, when the insulating layer is only arranged in the end surface area, not only the manufacturing material of the insulating layer can be saved, but also the material cost can be reduced. Meanwhile, the probability of arc discharge, electric spark and other phenomena between the end surface area of the boat blade and the inner cavity of the deposition chamber can be reduced, and the qualification rate of the battery piece to be coated after coating is improved.

In an alternative manner, referring to fig. 4 to 6, when the insulating layer 11 is disposed only in the end surface region 102, the width W1 of the insulating layer 11 is greater than or equal to the width W2 of the end surface region 102, and the width direction of the insulating layer 11 and the width direction of the end surface region 102 are both identical to the first direction a.

At this time, the insulating layer 11 can be ensured to completely cover the end surface area 102, so that the probability of arc discharge, electric spark and other phenomena between each position of the end surface area 102 and the inner cavity of the deposition chamber can be reduced, and the qualification rate of the battery piece to be coated after coating can be improved. Meanwhile, the setting difficulty of the insulating layer 11 can be reduced, the process error can meet the actual requirement, and the width of the insulating layer 11 is not necessarily required to be equal to the width of the end surface area 102. Based on the above, the manufacturing efficiency can be improved, and the method is easy to popularize and use.

In one alternative, since the end face region includes at least one end, in an embodiment of the present utility model, the end face region of one boat blade includes four ends. Therefore, the insulating layer may be provided at only one end, or may be provided at two or three or four ends at the same time.

In an alternative way, when the insulating layer is arranged in the side surface area, the probability of arc discharge, electric spark and other phenomena between the side surface area of the boat blade and the side surface area of the adjacent boat blade can be reduced, so that the qualification rate of the battery piece to be coated after coating is improved.

In one alternative, the side region of one boat blade includes two sides in an embodiment of the present utility model, since the side region includes at least one side. Therefore, the insulating layer may be provided on only one side surface, or may be provided on both side surfaces.

In an alternative manner, referring to fig. 4 and fig. 7 to fig. 9, when the insulating layer 11 is disposed in the end surface area 102 and the side surface area 101 at the same time, the probability of arc discharge, spark, etc. occurring between the end surface area 102 of the boat blade 10 and the inner cavity of the deposition chamber, and between the side surface area 101 of the boat blade 10 and the side surface area 101 of the adjacent boat blade 10 can be reduced, so as to further improve the qualification rate of the battery to be coated after coating.

In the embodiment of the present utility model, the insulating layer 11 is disposed at both four ends 1020 (i.e., top, bottom, two opposite narrow sides) and two sides 1010 (i.e., partial areas of two opposite wide sides) of the boat blade.

In summary, the insulating layer may be disposed in various positions according to actual situations. At this time, the graphite boat can be adapted to different application scenes, and the application range of the graphite boat is enlarged.

In an alternative manner, referring to fig. 4, 7 and 8, when the insulating layer 11 is disposed in the side area 101, the insulating layer 11 protrudes at any position relative to the sidewall where the side area 101 is located, and the ratio of the total thickness of the two insulating layers 11 disposed opposite to the spacing between the two boat leaves 10 disposed opposite to each other is greater than or equal to the ratio of the thickness of the boat leaves to the sum of the thickness of the boat leaves and the two boat She Jianju/2 disposed opposite to each other, and is less than or equal to the sum of the thickness of the boat leaves and the two boat She Jianju/2 disposed opposite to each other.

Because the ratio is greater than or equal to the ratio of the thickness of the boat blade to the sum of the thickness of the boat blade and the two boats She Jianju/2 which are oppositely arranged, the insulation effect of the insulating layer 11 can be ensured at the moment, so that the qualification rate of the battery piece to be coated after coating can be improved. Further, since the ratio is smaller than or equal to the sum of the thickness of the boat blade and the two boats She Jianju/2 arranged oppositely, the probability that the battery piece to be coated is not easy to be placed in the boat blade 10 due to the overlarge total thickness of the insulating layer 11 can be reduced or eliminated at this time, so that the graphite boat 1 can be ensured to be used normally.

Still further, the thickness of the single-sided insulating layer 11 on each boat blade 10 may be adjusted according to the type of power source, voltage intensity, etc. used when the battery sheet to be coated is actually processed, so that the insulating effect thereof meets the actual requirement. Illustratively, the thickness D of the single-sided insulating layer 11 on the boat blade 10 in fig. 8 is greater than the thickness D of the single-sided insulating layer 11 on the boat blade 10 in fig. 7. Specifically, in fig. 7, the insulating layer 11 is provided directly on the side surface region of the boat blade 10. In fig. 8, the side regions of the original boat blade are thinned before the insulating layer 11 is provided, the thickness of the side regions of the original boat blade is reduced, and then the insulating layer 11 is provided. Further, the insulating layer 11 in fig. 7 and 8 is substantially uniform or consistent in size compared to the sidewall projections where the side regions of the insulating layer 11 are not provided.

In an alternative manner, referring to fig. 4 and 9, when the insulating layer 11 is disposed on the side area 101, the insulating layer 11 is in the same plane with the sidewall that is adjacent to the side area 101 and is not disposed with the insulating layer 11.

The boat blade 10 provided by the utility model is ensured to meet the actual requirements, so that the dimension of the integral structure formed by the boat blade 10 and the insulating layer 11 is basically consistent with or consistent with the dimension of the original boat blade. At this time, the process of placing or taking out the battery piece to be coated is consistent with the prior art, and the adjustment of processing parameters is not needed, so that the method is simple and convenient.

Illustratively, before the insulating layer 11 is disposed, the side area 101 of the original boat blade may be thinned to reduce the thickness of the side area 101 of the original boat blade, so that the insulating layer 11 is in the same plane with the sidewall of the side area 101 where the insulating layer 11 is not disposed.

In an alternative, referring to fig. 7 to 9, when the insulating layers 11 are disposed on both sides 1010 of the same boat blade 10, the thicknesses of the two insulating layers 11 are equal. At this time, the electric field intensity of the two sides 1010 of the same boat blade 10 can be reduced to be substantially uniform or consistent, so that the electric field of the whole graphite boat 1 is more uniform, and the uniformity of the coating film is improved.

As a possible implementation, referring to fig. 1 and 2, the graphite boat 1 further includes: spacer particles 12 and supports 13. The spacer 12 and the support 13 are disposed between two adjacent boat blades 10 along the second direction B, and are located at the ends of the boat blades 10, and the first direction a is perpendicular to the second direction B. The spacer particles 12 and the support members 13 are opposed to each other and spaced apart along a third direction C, which is perpendicular to the first and second directions a and B, respectively.

Referring to fig. 10 to 13, the insulating layer 11 is further provided on the outer surface of the spacer 12 and/or the insulating layer 11 is further provided on the outer surface of the support 13.

At this time, the electric field of the whole graphite boat 1 can be more uniform, so that the uniformity of the coating film can be further improved. Meanwhile, the probability of arc discharge, electric spark and other phenomena at the positions of the spacer blocks 12 and/or the supporting pieces 13 can be reduced, and the qualification rate of the battery piece to be coated after coating is further improved. In addition, the gas ionization intensity at the spacer 12 and/or the support 13 can be reduced to reduce the generation of powder to reduce or eliminate the probability of dust contaminating the battery sheet to be coated. Based on the method, the uniformity of the coating of the battery piece to be coated can be improved, and the quality of the battery piece to be coated is ensured.

In the actual use process, the insulating layers 11 are arranged on the spacer 12 and the supporting piece 13, and the insulating layers 11 are used for separating the reaction gas from the spacer 12 and the supporting piece 13.

In an alternative, a plurality of spacer particles are connected in series with a graphite rod in a first direction. Similarly, in the first direction, the plurality of supports are also connected in series using graphite rods. Reference may be made to the prior art for a specific manner of connection and fixation, and no specific limitation is made here.

As a possible implementation, the insulating layer includes an inorganic insulating layer or an organic insulating layer. The inorganic insulating layer includes any one of a ceramic insulating layer, a quartz insulating layer, or a mica insulating layer. The organic insulating layer comprises any one of polytetrafluoroethylene insulating layer, epoxy resin insulating layer, epoxy glass cloth insulating layer or aramid fiber insulating layer. The ceramic insulating layer includes an aluminum oxide insulating layer.

As a possible implementation manner, the insulating layer may also be an insulating layer made of a mixed insulating material, where the mixed insulating material is made of an inorganic insulating material and an organic insulating material.

At this time, the insulating layers made of different materials can be selected according to actual conditions, so that the selectivity of the insulating layers is increased. Based on the method, the graphite boat can be further adapted to different application scenes, and the application range of the graphite boat is enlarged.

As a possible implementation manner, the graphite boat may further include: a ceramic rod. Along a first direction, the ceramic rod is used for connecting a plurality of boat leaves in series. The ceramic rods are used for connecting and fixing the plurality of boat blades which are distributed at intervals, so that the probability of the relative position deviation of the boat blades in the actual use process of the graphite boat is reduced or eliminated, the safety and stability of the graphite boat are ensured, and the quality of the battery piece to be coated after coating is ensured.

As a possible implementation manner, the graphite boat provided in the embodiment of the present utility model is suitable for power sources in all frequency ranges, including rf power sources such as dc, low frequency, intermediate frequency, high frequency, and vhf. Further, the graphite boat may be a vertical graphite boat, a horizontal graphite boat, or a plate type graphite boat.

As is known in the art, the electric field strength e=kq ₀/d², where E is the electric field strength, k is the electrostatic constant, q ₀ is the electric quantity of the plasma, and d is the distance between two adjacent electrode plates (i.e. the boat blade in the energized state in the embodiment of the present utility model). In the embodiment of the utility model, the q ₀ value of the boat She Bianyan area is changed to adjust the electric field intensity of the boat She Bianyan area, so that the problem caused by adjusting the electric field intensity of the edge area by changing d between two adjacent boat blades in the prior art is solved. That is, in the embodiment of the present utility model, the electric field strength at the gap between two adjacent boat blades is ensured while the electric field strength at the region of boat She Bianyan is reduced. Based on the method, the gas ionization speed and the reaction speed can be improved, so that the production efficiency is improved, the production cost of the single-chip battery is reduced, and the qualification rate, the coating effect and the quality are improved. It should be noted that d in the above formula is the distance between two adjacent boat leaves in the energized state, and is not the distance between two adjacent insulating layers, so the thickness of the insulating layers does not affect the electric field strength between two adjacent boat leaves (i.e. at the gap between two adjacent boat leaves).

In a second aspect, the embodiment of the utility model also provides processing equipment. The processing equipment is provided with a hollow inner cavity, the graphite boat in the technical scheme is positioned in the hollow inner cavity, and an insulating layer is arranged on the inner wall of the processing equipment.

In the processing equipment provided by the embodiment of the utility model, the insulating layer is arranged on the inner wall of the processing equipment, so that the electric field in the whole processing equipment is more uniform, and the uniformity of the coating is further improved. Meanwhile, the probability of arc discharge, electric spark and other phenomena generated at the inner wall of the processing equipment and the boat She Bianyan area can be reduced, and the qualification rate of the battery piece to be coated after coating is improved.

The thickness of the insulating layer may be selected according to practical situations, and is not particularly limited herein. Further, the material of the insulating layer may refer to the first aspect, which is not described herein.

In the description of the above embodiments, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims (10)

1. A graphite boat, comprising:

A plurality of boat leaves distributed along a first direction, the plurality of boats She Jiange;

The insulating layer is arranged on at least part of edge areas of at least one boat blade;

The edge region includes:

An end face region including at least one end of the boat blade;

a side region including at least one side of the boat blade adjacent the at least one end.

2. The graphite boat of claim 1 wherein said insulating layer is disposed on all edge regions of at least one of said boat leaves.

3. The graphite boat of claim 1 wherein said boat blade comprises two of said sides distributed along said first direction;

the insulating layer is disposed in at least one of the end surface region and the side surface region.

4. The graphite boat of claim 3, wherein when the insulating layer is provided only in the end face region, a width of the insulating layer is greater than or equal to a width of the end face region, and a width direction of the insulating layer and a width direction of the end face region are both aligned with the first direction.

5. The graphite boat of claim 3, wherein when said insulating layer is provided on said side surface region,

The insulation layer protrudes from any position of the side wall where the side surface area is located, and the ratio of the total thickness of the two insulation layers which are oppositely arranged to the two boats She Jianju which are oppositely arranged is greater than or equal to the ratio of the thickness of the boat blade to the sum of the thickness of the boat blade and the two boats She Jianju/2 which are oppositely arranged, and is less than or equal to the sum of the thickness of the boat blade and the two boats She Jianju/2 which are oppositely arranged.

6. The graphite boat of claim 3, wherein when the insulating layer is disposed on the side surface region, the insulating layer is in the same plane as a side wall which is adjacently located and is not provided with the insulating layer, and the side surface region is located on the side wall.

7. A graphite boat according to claim 3, wherein when said insulating layers are provided on both said sides of the same boat blade, the thicknesses of both said insulating layers are equal.

8. The graphite boat of any one of claims 1 to 7, further comprising: spacer blocks and supports;

The spacer blocks and the supporting pieces are arranged between two adjacent boat leaves along the second direction and positioned at the end parts of the boat leaves; the first direction is perpendicular to the second direction;

The spacer blocks and the supporting pieces are opposite to each other along a third direction and are distributed at intervals; the third direction is perpendicular to the first direction and the second direction, respectively;

The insulating layer is also arranged on the outer surface of the spacer block and/or the insulating layer is also arranged on the outer surface of the supporting piece.

9. The graphite boat of claim 1, wherein the insulating layer comprises an inorganic insulating layer or an organic insulating layer;

The inorganic insulating layer comprises any one of a ceramic insulating layer, a quartz insulating layer or a mica insulating layer;

The organic insulating layer comprises any one of a polytetrafluoroethylene insulating layer, an epoxy resin insulating layer, an epoxy glass cloth insulating layer or an aramid fiber insulating layer.

10. A machining apparatus, wherein the machining apparatus has a hollow interior; the graphite boat of any one of claims 1 to 9 being located in the hollow interior cavity; the inner wall of the processing equipment is provided with an insulating layer.