CN105568257B - Electrode graphite boat and chemical vapor depsotition equipment before and after a kind of - Google Patents
Electrode graphite boat and chemical vapor depsotition equipment before and after a kind of Download PDFInfo
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- CN105568257B CN105568257B CN201610120139.9A CN201610120139A CN105568257B CN 105568257 B CN105568257 B CN 105568257B CN 201610120139 A CN201610120139 A CN 201610120139A CN 105568257 B CN105568257 B CN 105568257B
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- graphite
- electrically conductive
- boat
- block
- boat body
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Hybrid Cells (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of front and back electrode graphite boats, including：The boat body being made of the odd number graphite flake of uniform intervals setting and even number graphite flake, odd number graphite flake and even number graphite flake are concatenated by graphite rod, the front bottom end of boat body is equipped at least one preceding electrically conductive graphite block, and the rear end bottom of boat body is equipped at least one rear electrically conductive graphite block.The invention also provides a kind of chemical vapor depsotition equipments using above-mentioned front and back electrode graphite boat.The present invention is respectively equipped with electrically conductive graphite in the rear and front end of boat body, and positive and negative electrode bar introduces positive and negative anodes by being contacted with electrically conductive graphite, from the rear and front end of boat body, the electric fields uniform for making boat body generate.
Description
Technical field
The present invention relates to photovoltaic cell technical field of processing equipment more particularly to a kind of front and back electrode graphite boat and use should
The chemical vapor depsotition equipment of front and back electrode graphite boat.
Background technology
In photovoltaic cell processing industry, graphite boat is the silicon chip carrier in chemical vapor depsotition equipment, chemical vapor deposition
The principle of product equipment is to make the gas ionization containing film composed atom by microwave or radio frequency etc., is being partially formed plasma
Body, the parallel-plate coated graphite boat to being inserted into solar silicon wafers carry out chemical gaseous phase deposition, form desired film.
Occurs graphite boat structure in the prior art, as shown in Figure 1, 2, publication No. is the hair of CN102534564A
Bright patent, including：The graphite boat ontology being connected with electrode stem, graphite boat ontology is by strange electrode plate 2, even electrode plate 3, top electrode
Spacer block 6, electrode spacer block 8 and graphite boat foot 9 form in spacer block 5, symmetrical lower electrode in spacer block 4, lower electrode, graphite boat sheet
Body both ends are opened there are two electrode hole, and in two electrode holes of every one end, superposed electrode hole is arranged at positioned at stone
In the top electrode at black boat ontology both ends on spacer block 6, lower electrode hole is separately positioned on spacer block 5 and symmetrical lower electricity in lower electrode
Extremely on middle spacer block 6, spacer block 5 is respectively provided at graphite boat ontology both ends with spacer block 6 in symmetrically lower electrode in the lower electrode, stone
Distance is equal between two electrode holes at black boat ontology both ends.
In the two-sided setting electrode hole of graphite boat, can meet electrode stem 1 can be inserted into electrode hole, stone from both ends respectively for the invention
The black possible smooth operation of boat cart rotation 180 degree, but this graphite boat is same from boat body using positive and negative electrode in traditional technology
The mode that one end introduces, this can cause the field distribution of graphite boat uneven, and front end electric field is weakened or increased compared to rear end battery
Add, the film thickness uniformity of silicon chip is poor, largely effects on the quality of production of solar cell.
Invention content
In order to solve the above technical problems, a kind of front and back electrode graphite boat of present invention proposition and chemical vapor depsotition equipment, just
Negative electrode can be introduced from the rear and front end of the front and back electrode graphite boat respectively, the electric fields uniform for making boat body generate, the film thickness of silicon chip
Uniformity is good.
The technical solution adopted by the present invention is a kind of front and back electrode graphite boat of design, including：By the strange of uniform intervals setting
The boat body that number graphite flake and even number graphite flake are constituted, odd number graphite flake and even number graphite flake are concatenated by graphite rod.Odd number graphite
Piece and even number graphite flake are placed with hollow-out parts, and the hollow-out parts horizontal alignment on odd number graphite flake and even number graphite flake.
The front bottom end of odd number graphite flake is equipped with auricle under the front end that forward extends out, is bonded between auricle under adjacent front end
Equipped with spacer block under front end or preceding electrically conductive graphite block, the front bottom end of boat body is equipped at least one preceding electrically conductive graphite block.Odd number graphite
It is equipped with auricle on the rear end stretched out backward in the middle part of the rear end of piece, spacer block on rear end is fitted between auricle on adjacent rear end.
The rear end bottom of even number graphite flake is equipped with auricle under the rear end stretched out backward, is bonded between auricle under adjacent rear end
Equipped with spacer block under rear end or rear electrically conductive graphite block, the rear end bottom of boat body is equipped at least one rear electrically conductive graphite block.Even number graphite
The front center of piece is equipped with auricle on the front end that forward extends out, and spacer block on front end is fitted between auricle on adjacent front end.
Odd number graphite flake is protruded in preceding electrically conductive graphite block bottom, and even number graphite flake is protruded in rear electrically conductive graphite block bottom, boat body
Both ends bottom surface is set there are four support leg.
In one embodiment, the both sides of boat body are odd number graphite flake, and the rear end both sides of boat body are conductive after being arranged with two
The front end both sides of graphite block, boat body are also arranged with two preceding electrically conductive graphite blocks.Electrically conductive graphite block is located at boat body after two
Two outermosts of rear end, two preceding electrically conductive graphite blocks respectively with spacer block under one, the two outermost interval front end of boat body.
Preferably, the bottom outside face of electrically conductive graphite block is circular arc before the bottom outside face and two of electrically conductive graphite block after two
Face.
The invention also provides a kind of chemical vapor depsotition equipments using above-mentioned front and back electrode graphite boat, including：Boiler tube,
Graphite boat in the boiler tube and electrode assembly, the boiler tube are made of cavity, the protecgulum positioned at cavity both ends and rear cover, electrode
Device, which includes two, is provided separately and is fixed on the electrode fixed link and positive and negative electrode bar that protecgulum is covered with after, positive and negative electrode bar point
It is not fixed in electrode fixed link using fixed block, and extended in entire graphite boat length, graphite boat is placed on positive and negative electrode
On bar top surface, positive and negative electrode bar contacts energization with preceding electrically conductive graphite block and rear electrically conductive graphite block respectively.
The present invention is respectively equipped with electrically conductive graphite in the front-end and back-end of boat body, and positive and negative electrode bar with electrically conductive graphite by connecing
It touches, is introduced from the rear and front end of boat body, the electric fields uniform for making boat body generate.The front-end and back-end of boat body are arranged with two and lead
Electro-graphitic so that after boat body rotates 180 °, energization still can be contacted with positive and negative electrode bar, uses and is convenient to.
Description of the drawings
With reference to embodiment and attached drawing, the present invention is described in detail, wherein：
Fig. 1 is the front schematic view of graphite boat in the prior art；
Fig. 2 is the end construction schematic diagram of graphite boat in the prior art；
Fig. 3 is the front schematic view that electrode is accessed from boat body both ends in the present invention；
Fig. 4 is the overlooking structure diagram of boat body in the present invention；
Fig. 5 is the front schematic view of odd number graphite flake in the present invention；
Fig. 6 is the front schematic view of even number graphite flake in the present invention；
Fig. 7 is the front-end architecture schematic diagram of boat body in preferred embodiment；
Fig. 8 is the rear end structure schematic diagram of boat body in preferred embodiment；
Fig. 9 is the front schematic view of chemical vapor depsotition equipment in the present invention；
Figure 10 is the schematic top plan view of chemical vapor depsotition equipment in the present invention.
Specific implementation mode
As shown in Figure 3,4, front and back electrode graphite boat proposed by the present invention, including：Boat body 1, boat body 1 are arranged by interleaved
Odd number graphite flake 11 and even number graphite flake 12 constitute, odd number graphite flake 11 and even number graphite flake 12 concatenated by graphite rod, is gone here and there
The spacing distance connect between rear odd number graphite flake 11 and even number graphite flake 12 is consistent.The height of odd number graphite flake 11, length, thickness
It is consistent with even number graphite flake 12, hollow-out parts, and odd number graphite flake are all placed on odd number graphite flake 11 and even number graphite flake 12
11 and even number graphite flake 12 on hollow-out parts horizontal alignment.
As shown in Fig. 5,7,8, the front bottom end of odd number graphite flake 11 is equipped with auricle 110 under the front end forward extended out, adjacent
Front end under be fitted with spacer block 13 or preceding electrically conductive graphite block 14 under front end, at least a pair of adjacent front end between auricle 110
Preceding electrically conductive graphite block 14 is equipped between lower auricle 110, that is to say, that, that is to say, that the front bottom end of boat body 1 is equipped at least one
Preceding electrically conductive graphite block 14.Auricle 111 on the rear end stretched out backward is equipped in the middle part of the rear end of odd number graphite flake 11, on adjacent rear end
Spacer block 15 on rear end are fitted between auricle 111.
As shown in Fig. 6,7,8, the rear end bottom of even number graphite flake 12 is equipped with auricle 120 under the rear end stretched out backward, adjacent
Rear end under spacer block 16 or rear electrically conductive graphite block 17, at least a pair of adjacent rear end under rear end are fitted between auricle 120
Rear electrically conductive graphite block 17 is equipped between lower auricle 120, that is to say, that the rear end bottom of boat body 1 is equipped at least one rear conductive stone
Ink stick 17.The front center of even number graphite flake 12 is equipped with auricle 121 on the front end that forward extends out, auricle 121 on adjacent front end
Between be fitted with spacer block 18 on front end.
As shown in Figure 7,8, after separating adjacent odd number graphite flake 11 and adjacent even number graphite flake 12 with spacer block, graphite rod
Across spacer block and graphite flake, both ends graphite rod both ends are being fixed with nut.The both ends bottom surface of boat body 1, which is additionally provided with, is used to support boat body
1 four support legs 19, four support legs 19 spacer block corresponding with its top link into an integrated entity.Preceding 14 bottom of electrically conductive graphite block
Protrude odd number graphite flake 11.17 bottom of electrically conductive graphite block protrusion even number graphite flake 12 afterwards.When graphite boat only need to complete it is unidirectional
When stroke, electrically conductive graphite block 17 after a preceding electrically conductive graphite block 14 and one need to be only respectively set in the both ends of boat body 1, positive and negative
Electrode stem contacts energization with two electrically conductive graphite blocks respectively, you can and ensure that the both ends of boat body 1 are powered, makes its both ends electric fields uniform,
The film thickness uniformity of silicon chip is good.
In the preferred embodiment, as shown in Figure 7,8, the both sides of boat body 1 are odd number graphite flake 11 so that entire
The both sides symmetrical shape of boat body 1, electrically conductive graphite block 17 after the rear end both sides of boat body 1 are arranged with two, the front end both sides of boat body 1
Also two preceding electrically conductive graphite blocks 14 are arranged with, 1 shape of boat body, rear electrically conductive graphite block 17, preceding electrically conductive graphite block 14 are arranged to
Symmetrically, after to facilitate boat body 1 to rotate 180 °, still energization can be contacted with positive electricity pole bar and negative electricity pole bar respectively.
Wherein, it is contacted for convenience with positive and negative electrode bar, electrically conductive graphite block 17 is located at 1 rear end of boat body after this two
Two outermosts, this two preceding electrically conductive graphite blocks 14 respectively with spacer block 13 under one, the two outermost interval front end of boat body 1, further
Optimization, the bottom outside face of electrically conductive graphite block 14 is arc surface before two, and the bottom outside face of electrically conductive graphite block 17 is also after two
Arc surface, arc surface can increase the contact area of electrically conductive graphite block and electrode stem, and contact is more stable, can more meet conductive needs.
As shown in Figures 9 and 10, the invention also provides a kind of chemical vapor depositions using above-mentioned front and back electrode graphite boat to set
It is standby, including：Boiler tube, be set to the boiler tube in graphite boat and electrode assembly, the boiler tube by cavity, positioned at the protecgulum 2 at cavity both ends
It is formed with rear cover 3, electrode assembly includes two electrode fixed links 4 being provided separately and be fixed between protecgulum 2 and rear cover 3, just
Electrode stem 5 and negative electricity pole bar 6, positive electricity pole bar 5 and negative electricity pole bar 6 are fixed on using fixed block in electrode fixed link 4 respectively, and
Extend in entire graphite boat length.Boat body 1 is placed on positive and negative electrode bar top surface, the position point of positive electricity pole bar 5 and negative electricity pole bar 6
Do not coordinate with preceding electrically conductive graphite block 15 and rear electrically conductive graphite block 17, ensures that positive and negative electrode is accessed from the both ends of boat body 1.
Shown in Fig. 10, positive electricity pole bar 5 and the position of rear electrically conductive graphite block 17 coordinate, and positive electricity pole bar 5 is after boat body 1
End is conductive, and negative electricity pole bar 6 and the position of preceding electrically conductive graphite block 14 coordinate, and negative electricity pole bar 6 is conductive from the front end of boat body 1, certainly
The position of positive electricity pole bar 5 can be arranged to coordinate with preceding electrically conductive graphite block 14, the position of negative electricity pole bar 6 is arranged to and rear conduction
Graphite block 17 coordinates.Since two preceding electrically conductive graphite blocks 14 on boat body 1 are symmetrical, electrically conductive graphite block 17 is also symmetrical after two, because
After this boat body 1 rotates 180 °, energization still can be contacted with positive and negative electrode bar, such electric field imports from graphite boat rear and front end, makes
It obtains graphite boat tail portion electric field with graphite boat front electric field difference to reduce, entire graphite boat electric field is more uniform.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.
Claims (7)
1. a kind of front and back electrode graphite boat, including：The odd number graphite flake being arranged by uniform intervals（11）With even number graphite flake（12）
The boat body of composition（1）, the odd number graphite flake（11）With even number graphite flake（12）It is concatenated by graphite rod, which is characterized in that
The odd number graphite flake（11）Front bottom end be equipped with auricle under the front end that forward extends out（110）, ear under adjacent front end
Piece（110）Between be fitted with spacer block under front end（13）Or preceding electrically conductive graphite block（14）, the boat body（1）Front bottom end be equipped with
At least one preceding electrically conductive graphite block（14）；
The even number graphite flake（12）Rear end bottom be equipped with auricle under the rear end stretched out backward（120）, ear under adjacent rear end
Piece（120）Between be fitted with spacer block under rear end（16）Or rear electrically conductive graphite block（17）, the boat body（1）Rear end bottom be equipped with
Electrically conductive graphite block after at least one（17）, the boat body（1）Be placed on positive and negative electrode bar top surface, positive and negative electrode bar respectively with it is preceding
Electrically conductive graphite block（14）With rear electrically conductive graphite block（17）Contact is powered；
The boat body（1）Both sides be odd number graphite flake（11）, the boat body（1）Rear end both sides be arranged with two after it is conductive
Graphite block（17）, the boat body（1）Front end both sides be also arranged with two preceding electrically conductive graphite blocks（14）, the boat body（1）Rotation
After turning 180 °, still energization can be contacted with positive electricity pole bar and negative electricity pole bar respectively.
2. front and back electrode graphite boat as described in claim 1, which is characterized in that the odd number graphite flake（11）Rear end in the middle part of
Equipped with auricle on the rear end stretched out backward（111）, auricle on adjacent rear end（111）Between be fitted with spacer block on rear end
（15）；
The even number graphite flake（12）Front center be equipped with auricle on the front end that forward extends out（121）, ear on adjacent front end
Piece（121）Between be fitted with spacer block on front end（18）.
3. front and back electrode graphite boat as claimed in claim 2, which is characterized in that the preceding electrically conductive graphite block（14）It protrudes bottom
Odd number graphite flake（11）, the rear electrically conductive graphite block（17）Protrude even number graphite flake in bottom（12）.
4. front and back electrode graphite boat as claimed in claim 3, which is characterized in that the boat body（1）Both ends bottom surface be equipped with four
A support leg（19）.
5. front and back electrode graphite boat as described in claim 1, which is characterized in that electrically conductive graphite block after described two（17）Respectively
Positioned at boat body（1）Two outermosts of rear end, described two preceding electrically conductive graphite blocks（14）Respectively with boat body（1）Two outermost intervals
Spacer block under one front end（13）.
6. front and back electrode graphite boat as claimed in claim 5, which is characterized in that electrically conductive graphite block after described two（17）Bottom
Electrically conductive graphite block before lateral surface and described two（14）Bottom outside face be arc surface.
7. such as electrode graphite boat before and after claim 1 to 6 any one of them, which is characterized in that the odd number graphite flake（11）
With even number graphite flake（12）It is placed with hollow-out parts, and odd number graphite flake（11）With even number graphite flake（12）On hollow-out parts it is horizontal
Alignment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610120139.9A CN105568257B (en) | 2016-03-03 | 2016-03-03 | Electrode graphite boat and chemical vapor depsotition equipment before and after a kind of |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610120139.9A CN105568257B (en) | 2016-03-03 | 2016-03-03 | Electrode graphite boat and chemical vapor depsotition equipment before and after a kind of |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105568257A CN105568257A (en) | 2016-05-11 |
| CN105568257B true CN105568257B (en) | 2018-08-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610120139.9A Active CN105568257B (en) | 2016-03-03 | 2016-03-03 | Electrode graphite boat and chemical vapor depsotition equipment before and after a kind of |
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| CN (1) | CN105568257B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207967023U (en) * | 2018-02-02 | 2018-10-12 | 深圳丰盛装备股份有限公司 | A kind of electrode mechanism of tubular type PECVD |
| CN110760821A (en) * | 2019-10-08 | 2020-02-07 | 无锡嘉瑞光伏有限公司 | Bidirectional tubular PECVD system and preparation process thereof |
| CN110931339B (en) * | 2019-10-23 | 2022-04-22 | 深圳市拉普拉斯能源技术有限公司 | Processing device for semiconductor or photovoltaic material |
| CN111139460A (en) * | 2019-12-27 | 2020-05-12 | 北京北方华创微电子装备有限公司 | Radio frequency leading-in device and semiconductor processing equipment |
| CN111979531A (en) * | 2020-08-20 | 2020-11-24 | 江西展宇新能科技有限公司 | Method for prolonging service life of graphite boat |
| CN112663030A (en) * | 2020-12-28 | 2021-04-16 | 无锡松煜科技有限公司 | Vertical photovoltaic cell passivation deposition device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5356475A (en) * | 1993-02-22 | 1994-10-18 | Lsi Logic Corporation | Ceramic spacer assembly for ASM PECVD boat |
| CN202017047U (en) * | 2011-03-22 | 2011-10-26 | 无锡绿波新能源设备有限公司 | Vertical graphite boat |
| CN102181846B (en) * | 2011-04-01 | 2013-05-01 | 石金精密科技（深圳）有限公司 | Cavity-type graphite boat |
| CN102534564A (en) * | 2012-02-24 | 2012-07-04 | 湖南红太阳光电科技有限公司 | Graphite boat with electrode holes formed on double sides for PECVD (Plasma Enhanced Chemical Vapor Deposition) |
| CN102943251B (en) * | 2012-12-05 | 2015-03-25 | 山东力诺太阳能电力股份有限公司 | Device for enhancing uniformity of PECVD (plasma enhanced chemical vapour deposition) coating film |
| CN204558431U (en) * | 2015-04-24 | 2015-08-12 | 上海弘枫实业有限公司 | A kind of big-power solar cell piece graphite boat |
| CN205046195U (en) * | 2015-11-03 | 2016-02-24 | 绿华能源科技（杭州）有限公司 | A graphite boat structure for battery piece coating film |
| CN205710906U (en) * | 2016-03-03 | 2016-11-23 | 深圳市捷佳伟创新能源装备股份有限公司 | Electrode graphite boat and chemical vapor depsotition equipment before and after one |
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2016
- 2016-03-03 CN CN201610120139.9A patent/CN105568257B/en active Active
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Effective date of registration: 20230814 Address after: 312000 Area A south of Yuejiang Road, Ma'an Street, Heqiao District, Shaoxing City, Zhejiang Province Patentee after: Zhejiang Riyue Solar Energy Technology Co.,Ltd. Address before: 518000 D Silicon Valley, Guangdong Province, Longgang, Henggang, Shenzhen No. 89 Ping Ping Road, No. Patentee before: SHENZHEN HEADQUARTER: S.C NEW ENERGY TECHNOLOGY Corp. |
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