CN209748842U - vacuum heating coil electrode for atomic layer deposition equipment - Google Patents
vacuum heating coil electrode for atomic layer deposition equipment Download PDFInfo
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- CN209748842U CN209748842U CN201920331204.1U CN201920331204U CN209748842U CN 209748842 U CN209748842 U CN 209748842U CN 201920331204 U CN201920331204 U CN 201920331204U CN 209748842 U CN209748842 U CN 209748842U
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- layer deposition
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Abstract
The utility model relates to an electrode, in particular to a vacuum heating coil electrode for atomic layer deposition equipment, which comprises a heating pipe and an electrode arranged at the lower end of the heating pipe, wherein the heating pipe is arranged in a vacuum cavity; the electrode is fixed at the lower end of the vacuum cavity through the mounting flange, the upper end of the electrode penetrates through the vacuum cavity, the upper end of the electrode is provided with a conductive column, and the conductive column is detachably connected with the heating pipe. The heating pipe and the electrode of the utility model are installed in a thread fit way, are convenient to disassemble and are beneficial to the replacement and maintenance of the heating pipe; the current of the atmospheric environment is conducted to the heating pipe in the vacuum environment in the vacuum cavity through the electrode to work. And then solved traditional electrode and heating pipe welding and caused the inconvenient problem of dismantlement change maintenance as an organic whole.
Description
Technical Field
The utility model relates to an electrode specifically is a vacuum heating coil electrode for atomic layer deposition equipment.
Background
Atomic layer deposition is a process by which a substance can be deposited as a monoatomic film layer by layer on a substrate surface. An electrode, a component in an electronic or electrical device, an apparatus, is used as two terminals for inputting or outputting current in a conductive medium (solid, gas, vacuum or electrolyte solution). One pole of the input current is called anode or positive pole, and the other pole of the output current is called cathode or negative pole.
The hollow electrode applied to the atomic layer deposition equipment is commonly connected with an atmosphere cavity body type electrode and a vacuum cavity body type electrode, and the existing technology is to weld the electrode and a heating pipe into a whole body, which is often seen in places with larger maintenance space. However, for some small cavities and places with narrow maintenance space, the electrode and the heating pipe are welded into a whole, and the problem of inconvenient disassembly, replacement and maintenance can be caused.
In order to solve the problems, the vacuum heating coil electrode for the atomic layer deposition equipment is particularly provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a vacuum heating coil electrode for atomic layer deposition equipment to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
A vacuum heating coil electrode for atomic layer deposition equipment comprises a heating pipe and an electrode arranged at the lower end of the heating pipe, wherein the heating pipe is arranged in a vacuum cavity; the electrode is fixed at the lower end of the vacuum cavity through the mounting flange, the upper end of the electrode penetrates through the vacuum cavity, the upper end of the electrode is provided with a conductive column, and the conductive column is detachably connected with the heating pipe.
In order to further improve the using effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the conductive column and the heating pipe are in threaded connection.
In order to further improve the using effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the conductive column and the heating pipe are connected in a penetrating manner by the limiting pin.
In order to further improve the using effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the conductive column is made of copper.
In order to further improve the use effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the electrode is coated with a layer of insulating material.
In order to further improve the use effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the insulating material is ceramic.
In order to further improve the using effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the electrode and the mounting flange are welded and fixed in an integrated mode, transition welding materials are paved at the joint of the electrode and the mounting flange, and the mounting flange and the vacuum cavity are fixed through fasteners.
In order to further improve the use effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the transition welding material is kovar alloy.
In order to further improve the use effect of the vacuum heating coil electrode for the atomic layer deposition equipment, the fastening piece is composed of a bolt and a nut.
Compared with the prior art, the beneficial effects of the utility model are that:
The heating pipe and the electrode of the utility model are installed in a thread fit way, are convenient to disassemble and are beneficial to the replacement and maintenance of the heating pipe; the current of the atmospheric environment is conducted to the heating pipe in the vacuum environment in the vacuum cavity through the electrode to work.
Drawings
Fig. 1 is a schematic structural view of a vacuum heating coil electrode for an atomic layer deposition apparatus according to the present invention.
In the figure: 1-heating a tube; 2-vacuum chamber; 3-a fastener; 4-installing a flange; 5-an electrode; 6-conductive post; 7-insulating material.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Referring to fig. 1, the present invention provides a vacuum heating coil electrode for an atomic layer deposition apparatus.
Example 1
As shown in fig. 1, in an embodiment of the present invention, a vacuum heating coil electrode for an atomic layer deposition apparatus includes a heating pipe 1 and an electrode 5 disposed at a lower end of the heating pipe 1, where the heating pipe 1 is disposed inside a vacuum chamber 2; electrode 5 passes through mounting flange 4 to be fixed at 2 lower extremes of vacuum cavity, and 5 upper ends of electrode run through inside vacuum cavity 2, and 5 upper ends of electrode are equipped with and lead electrical pillar 6, lead electrical pillar 6 and heating pipe 1 and be detachable connection.
Further, the conductive column 6 and the heating tube 1 are in threaded connection.
Further, the conductive post 6 is made of copper.
The heating pipe 1 and the electrode 5 are installed in a threaded fit mode, so that the heating pipe is convenient to disassemble and is beneficial to replacement and maintenance of the heating pipe 1; the current of the atmosphere is conducted to the heating pipe 1 in the vacuum environment inside the vacuum cavity 2 through the electrode 5 to work.
In order to avoid the situation that the current is conducted to the mounting flange 4 to cause current leakage, the electrodes 5 are externally wrapped with a layer of insulating material 7.
Further, the insulating material 7 is ceramic.
Example 2
A vacuum heating coil electrode for an atomic layer deposition apparatus, as shown in fig. 1, wherein embodiments of the present invention are further defined by the features of example 1.
the conductive column 6 and the heating pipe 1 are connected by inserting a limiting pin.
Electrode 5 and mounting flange 4 formula welded fastening as an organic whole, transition welding material has been laid to electrode 5 and 4 junctions of mounting flange, and mounting flange 4 and vacuum cavity 2 are fixed through fastener 3.
Further, the transition welding material is kovar alloy.
Further, the fastening member 3 is composed of a bolt and a nut.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (9)
1. A vacuum heating coil electrode for atomic layer deposition equipment comprises a heating pipe (1) and an electrode (5) arranged at the lower end of the heating pipe (1), and is characterized in that the heating pipe (1) is arranged in a vacuum cavity (2); electrode (5) are fixed at vacuum cavity (2) lower extreme through mounting flange (4), and electrode (5) upper end runs through inside vacuum cavity (2), and electrode (5) upper end is equipped with and leads electrical pillar (6), leads electrical pillar (6) and heating pipe (1) and is detachable connection.
2. A vacuum heating coil electrode for an atomic layer deposition apparatus according to claim 1, characterized in that the conductive post (6) and the heating tube (1) are in threaded connection.
3. The vacuum heating coil electrode for atomic layer deposition equipment according to claim 1, wherein the conductive column (6) and the heating tube (1) are connected in a penetrating manner by a limit pin.
4. The vacuum heating coil electrode for atomic layer deposition equipment according to claim 1, wherein the conductive column (6) is made of copper.
5. A vacuum heating coil electrode for an atomic layer deposition apparatus according to claim 1, characterized in that the electrode (5) is externally wrapped with a layer of insulating material (7).
6. Vacuum heating coil electrode for an atomic layer deposition apparatus according to claim 5, characterized in that the insulating material (7) is ceramic.
7. The vacuum heating coil electrode for the atomic layer deposition equipment according to claim 1, wherein the electrode (5) and the mounting flange (4) are welded and fixed in an integrated manner, a transition welding material is laid at the joint of the electrode (5) and the mounting flange (4), and the mounting flange (4) and the vacuum cavity (2) are fixed through the fastener (3).
8. The vacuum heating coil electrode for an atomic layer deposition apparatus according to claim 7, wherein the transition solder material is kovar.
9. Vacuum heating coil electrode for an atomic layer deposition apparatus according to claim 7, characterized in that the fastening element (3) is constituted by a bolt and a nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920331204.1U CN209748842U (en) | 2019-03-15 | 2019-03-15 | vacuum heating coil electrode for atomic layer deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920331204.1U CN209748842U (en) | 2019-03-15 | 2019-03-15 | vacuum heating coil electrode for atomic layer deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209748842U true CN209748842U (en) | 2019-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920331204.1U Active CN209748842U (en) | 2019-03-15 | 2019-03-15 | vacuum heating coil electrode for atomic layer deposition equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112678273A (en) * | 2020-12-22 | 2021-04-20 | 苏州美拓包装技术有限公司 | Bottom sealing heating mechanism for tube-in-tube filling bottle |
-
2019
- 2019-03-15 CN CN201920331204.1U patent/CN209748842U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112678273A (en) * | 2020-12-22 | 2021-04-20 | 苏州美拓包装技术有限公司 | Bottom sealing heating mechanism for tube-in-tube filling bottle |
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