CN204596743U - A kind of carbon nanotube field emission electron source assembly - Google Patents
A kind of carbon nanotube field emission electron source assembly Download PDFInfo
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- CN204596743U CN204596743U CN201520351410.0U CN201520351410U CN204596743U CN 204596743 U CN204596743 U CN 204596743U CN 201520351410 U CN201520351410 U CN 201520351410U CN 204596743 U CN204596743 U CN 204596743U
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Abstract
The utility model discloses a kind of carbon nanotube field emission electron source assembly, include ceramic base, positive pole stud terminal, negative pole stud terminal, carbon nanotube cathod plate, wire netting anode and potsherd, described ceramic base is provided with and is communicated with up and down and is threaded the first threaded connection hole coordinated with negative pole stud terminal, described carbon nanotube cathod plate is positioned at the upper end of ceramic base, the lower end of carbon nanotube cathod plate supports and is arranged on positive pole stud terminal upper surface, and this carbon nanotube cathod plate is electrically connected with positive pole stud terminal, the upper end of described carbon nanotube cathod plate is disposed with potsherd, wire netting anode and metallic conduction sheet, the center of described potsherd is provided with potsherd openning, described metallic conduction sheet is provided with the metallic conduction sheet openning corresponding with potsherd openning.The utility model has the advantages that reasonable in design, easy accessibility, emitting voltage are low, venting rate is low, effectively improve service behaviour and the useful life of electron source.
Description
Technical field
The utility model relates to a kind of carbon nanotube field emission electron source assembly, especially the composition structure of electron source and the preparation of Flied emission film.
Background technology
At present, at vacuum electron device, such as: in ionization vacuum gauge, X-ray instrument, mass spectrometer etc., extensive use hot filament emission electron sources.But traditional hot filament divergent bundle exists, and energy consumption is high, poor stability and easily cause many factors being unfavorable for practical application such as the change of device composition of gases within.And Field Electron Emission has, and response is rapid, low in energy consumption, low, the feature such as thermal effect is little of exitting, it is the excellent substitute technology overcoming thermal emission electron source defect.Carbon nano-tube, as a kind of field emmision material of excellence, has and launches the advantages such as electric field is low, current density is large, vacuum performance is good.
The existing vacuum electron device based on carbon nanotube field emission, many employing welding or bonding method set up electronic source construction, the damage on take these methods to be easy to cause venting that device is larger in actual applications and carbon nanotube emission surface, shortens the useful life of device.And the high change that can cause system component of venting rate, directly affect the service behaviour of device.Meanwhile, the electronic source construction design of optimization effectively can utilize the advantage of CNT Flied emission, reduces emitting voltage, improve emission.So the application of structure to carbon nanotube field emission electronic source device designing a kind of reliable optimization has important value.
Summary of the invention
The purpose of this utility model is the shortcoming and defect existed to overcome prior art, and provides a kind of reasonable in design, reduces the carbon nanotube field emission electron source assembly of structure venting, long service life.
For achieving the above object, the technical solution of the utility model includes ceramic base, positive pole stud terminal, negative pole stud terminal, carbon nanotube cathod plate, wire netting anode and potsherd, described ceramic base is provided with and is communicated with up and down and is threaded the first threaded connection hole coordinated with negative pole stud terminal, described carbon nanotube cathod plate is positioned at the upper end of ceramic base, the lower end of carbon nanotube cathod plate supports and is arranged on positive pole stud terminal upper surface, and this carbon nanotube cathod plate is electrically connected with positive pole stud terminal, the upper end of described carbon nanotube cathod plate is disposed with potsherd, wire netting anode and metallic conduction sheet, the center of described potsherd is provided with potsherd openning, described metallic conduction sheet is provided with the metallic conduction sheet openning corresponding with potsherd openning, metallic conduction sheet, wire netting anode, potsherd and ceramic base are longitudinally coaxially arranged with the positive pole connecting hole worn with positive pole stud terminal and join location, the head end of described positive pole stud terminal is successively through metallic conduction sheet, wire netting anode, positive pole connecting hole on potsherd and ceramic base, and by positive pole hold-down nut, the head end of positive pole stud terminal is locked.
Further setting is that the upper end of described ceramic base is provided with ceramic ring seat, and the central authorities of this ceramic ring seat arrange the location hole with carbon nanotube cathod plate scarf, and the supported underneath of described potsherd is arranged on this carbon nanotube cathod plate.
Further setting is the central authorities that the first described threaded connection hole is arranged at ceramic base, positive pole connecting hole on described metallic conduction sheet, wire netting anode, potsherd and ceramic base has four roads, and Qie Gai tetra-road positive pole connecting hole is the periphery that corner is symmetricly set in the first threaded connection hole.
The utility model has the advantages that:
Electron source of the present invention adopts full thread fixed connection structure, structure is simple, can Reusability, exempt from welding, free sticky glue, greatly can reduce the structure venting produced because of welding or viscose glue thus, improve the service behaviour of electron source and improve useful life of electron source.This electron source can be applicable in ultra high vacuum, is applied in various environment device, easy and simple to handle, stable performance by settling after carrying out general assembly to electronic source device each several part.Detachably change after field-transmitting cathode performance degradation, and keep emitting performance stable and consistent.The design's structure have emitting voltage low, use in exit the advantage such as low, in the vacuum electron devices such as high vacuum measurement, high-current device, there is good using value.
Below in conjunction with specification drawings and specific embodiments, the utility model is described further.
Accompanying drawing explanation
Fig. 1 the utility model embodiment stereogram;
Fig. 2 the utility model embodiment upward view;
Fig. 3 is the A-A cutaway view of Fig. 2;
Fig. 4 is the STRUCTURE DECOMPOSITION figure of the utility model embodiment.
Embodiment
Below by embodiment, the utility model being specifically described, only for being further described the utility model, the restriction to the utility model protection range can not being interpreted as.
Embodiment of the present utility model as Figure 1-4, includes ceramic base 1, positive pole stud terminal 2, negative pole stud terminal 3, carbon nanotube cathod plate 4, wire netting anode 5 and potsherd 6.
The preparation of the present embodiment carbon nanotube cathod plate 4 adopts CVD direct growth carbon nanotube technology in anodized metal substrate.First by metal sheet substrate at oxalic acid or other sour middle-jiao yang, function of the spleen and stomach polarization reasonable time, thus make sheet metal surface become coarse, obtain in granular surface topography, anodic process is shown in shown in figure tetra-.Metallic substrates being positioned in thermal chemical vapor deposition system subsequently, take acetylene as carbon source again, and argon gas is protection gas, at high temperature grows carbon nano-tube from metal substrate surface.
In addition, ceramic base 1 described in the present embodiment is provided with and is communicated with up and down and is threaded the first threaded connection hole 11 coordinated with negative pole stud terminal 3, described carbon nanotube cathod plate 4 is positioned at the upper end of ceramic base 1, the lower end of carbon nanotube cathod plate 4 supports and is arranged on positive pole stud terminal 3 upper surface, and this carbon nanotube cathod plate 4 is connected with positive pole stud terminal electricity 4, the upper end of described carbon nanotube cathod plate 4 is disposed with potsherd 6, wire netting anode 5 and metallic conduction sheet 8, the thickness of the potsherd 6 described in the present embodiment is 100 microns, the center of the potsherd 6 described in the present embodiment is provided with potsherd openning 61, described metallic conduction sheet 8 is provided with the metallic conduction sheet openning 81 corresponding with potsherd openning 61, under "on" position, electron source is excited from carbon nanotube cathod plate 4 and is moved to wire netting anode 5 direction by this potsherd openning 61, and fly out from metallic conduction sheet openning 81.
In addition, the present embodiment metallic conduction sheet 8, wire netting anode 5, potsherd 6 and ceramic base 1 are longitudinally coaxially arranged with the positive pole connecting hole worn with positive pole stud terminal and join location, the head end of positive pole stud terminal 2 successively through the positive pole connecting hole on metallic conduction sheet 8, wire netting anode 5, potsherd 6 and ceramic base 1, and is locked by positive pole hold-down nut 21 by the head end of described positive pole stud terminal 2.
In addition, the upper end of the ceramic base 1 described in the present embodiment is provided with ceramic ring seat 9, and the central authorities of this ceramic ring seat 9 arrange the location hole 91 with carbon nanotube cathod plate scarf, and the supported underneath of described potsherd 6 is arranged on carbon nanotube cathod plate 4.The first threaded connection hole 11 described in the present embodiment is arranged at the central authorities of ceramic base, positive pole connecting hole on described metallic conduction sheet 8, wire netting anode 5, potsherd 6 and ceramic base 1 has four roads, and Qie Gai tetra-road positive pole connecting hole is the periphery that corner is symmetricly set in the first threaded connection hole 11.
Claims (3)
1. a carbon nanotube field emission electron source assembly, it is characterized in that: include ceramic base, positive pole stud terminal, negative pole stud terminal, carbon nanotube cathod plate and wire netting anode, described ceramic base is provided with and is communicated with up and down and is threaded the first threaded connection hole coordinated with negative pole stud terminal, described carbon nanotube cathod plate is positioned at the upper end of ceramic base, the lower end of carbon nanotube cathod plate supports and is arranged on positive pole stud terminal upper surface, and this carbon nanotube cathod plate is electrically connected with positive pole stud terminal, the upper end of described carbon nanotube cathod plate is disposed with potsherd, wire netting anode and metallic conduction sheet, the center of described potsherd is provided with potsherd openning, described metallic conduction sheet is provided with the metallic conduction sheet openning corresponding with potsherd openning, metallic conduction sheet, wire netting anode, potsherd and ceramic base are longitudinally coaxially arranged with the positive pole connecting hole worn with positive pole stud terminal and join location, the head end of described positive pole stud terminal is successively through metallic conduction sheet, wire netting anode, positive pole connecting hole on potsherd and ceramic base, and by positive pole hold-down nut, the head end of positive pole stud terminal is locked.
2. a kind of carbon nanotube field emission electron source assembly according to claim 1, it is characterized in that: the upper end of described ceramic base is provided with ceramic ring seat, the central authorities of this ceramic ring seat arrange the location hole with carbon nanotube cathod plate scarf, and the supported underneath of described potsherd is arranged on carbon nanotube cathod plate.
3. a kind of carbon nanotube field emission electron source assembly according to claim 1, it is characterized in that: the first described threaded connection hole is arranged at the central authorities of ceramic base, positive pole connecting hole on described metallic conduction sheet, wire netting anode, potsherd and ceramic base has four roads, and Qie Gai tetra-road positive pole connecting hole is the periphery that corner is symmetricly set in the first threaded connection hole.
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| CN201520351410.0U CN204596743U (en) | 2015-05-27 | 2015-05-27 | A kind of carbon nanotube field emission electron source assembly |
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| CN201520351410.0U CN204596743U (en) | 2015-05-27 | 2015-05-27 | A kind of carbon nanotube field emission electron source assembly |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107993908A (en) * | 2017-11-27 | 2018-05-04 | 温州大学 | A kind of ion gauge and its application process based on field-transmitting cathode electron source |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107993908A (en) * | 2017-11-27 | 2018-05-04 | 温州大学 | A kind of ion gauge and its application process based on field-transmitting cathode electron source |
| CN107993908B (en) * | 2017-11-27 | 2019-11-15 | 温州大学 | A kind of ion gauge and its application method based on field-transmitting cathode electron source |
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