CN203923368U - A kind of diffuser for tubular type PECVD - Google Patents
A kind of diffuser for tubular type PECVD Download PDFInfo
- Publication number
- CN203923368U CN203923368U CN201420301189.3U CN201420301189U CN203923368U CN 203923368 U CN203923368 U CN 203923368U CN 201420301189 U CN201420301189 U CN 201420301189U CN 203923368 U CN203923368 U CN 203923368U
- Authority
- CN
- China
- Prior art keywords
- inlet pipe
- graphite boat
- diffuser
- small air
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 25
- 239000010439 graphite Substances 0.000 claims abstract description 25
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052710 silicon Inorganic materials 0.000 abstract description 15
- 239000010703 silicon Substances 0.000 abstract description 15
- 230000004075 alteration Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of diffuser for tubular type PECVD, graphite boat is placed in boiler tube, be close to furnace tube outer wall and be provided with arc inlet pipe, arc inlet pipe is provided with the small air inlet hole in through furnace along furnace wall surface, described small air inlet hole is over against the gap between the graphite boat sheet on graphite boat, and described arc inlet pipe is provided with total inlet pipe; The utility model can make special gas enter in the arc inlet pipe on boiler tube by total inlet pipe, in arc inlet pipe, distribute again, then by small air inlet hole, enter the graphite boat in boiler tube, be full of uniformly in the gap between graphite boat sheet, at silicon chip surface, be uniformly distributed, can reduce to a certain extent the generation of PECVD aberration sheet.
Description
Technical field
The utility model relates to technical field of solar cell manufacturing, is specifically related to a kind of tubular type PECVD.
Background technology
Modern society is along with energy problem is outstanding gradually, sun power is being played the part of more and more important role in modern energy structure as a kind of renewable energy source, and crystal silicon solar energy battery is in whole sun power industry, no matter be all in occupation of absolute advantage from efficiency of conversion or output aspect.
An important step in making as crystal silicon solar energy battery, plated film is one important procedure that reduces cell piece surface albedo, improves solar battery efficiency.Common solar cell plated film mode mainly adopts PCVD (PECVD) mode to carry out, and general device is divided into tubular type PECVD and board-like PECVD.
Compare board-like PECVD, tubular type PECVD has certain advantage aspect efficiency.In tubular type PECVD, the graphite boat that is mounted with silicon chip enters after boiler tube, special gas (NH
3, SiH
4) by diffuser, enter in Quartz stove tube, and ionize under the effect of extra electric field, generate Si
3n
4be attached to silicon chip surface.Si
3n
4thickness and specific refractory power when certain condition, after plated film, the reflectivity of silicon chip is minimum, can absorb to greatest extent sunlight and be used for producing electric energy.Conventional pipe P intake method is from fire door air inlet, and the gas entering is because meeting is subject to the obstruction of graphite boat, and the distribution in whole graphite boat exists inhomogeneous situation, and then causes the Si that produces
3n
4thickness and specific refractory power are inhomogeneous, produce aberration, affect the outward appearance of cell piece.The aberration situation causing in order to improve this intake method, we need a kind of gas more equally distributed diffuser in graphite boat that makes.
Utility model content
Utility model object: the purpose of this utility model is for the deficiencies in the prior art, provides a kind of and guarantees that air inlet is uniformly for the diffuser of tubular type PECVD.
Technical scheme: a kind of diffuser for tubular type PECVD described in the utility model, graphite boat is placed in boiler tube, be close to furnace tube outer wall and be provided with arc inlet pipe, arc inlet pipe is provided with the small air inlet hole in through furnace along furnace wall surface, described small air inlet hole is over against the gap between the graphite boat sheet on graphite boat, and described arc inlet pipe is provided with total inlet pipe; Special gas enters arc inlet pipe by total inlet pipe, in arc inlet pipe inside, distributes again, then by small air inlet hole, enters in graphite boat uniformly.
Further, described small air inlet hole radially leading in stove along boiler tube; Because graphite boat extends vertically in boiler tube, graphite boat sheet vertically and being arranged on graphite boat of being parallel to each other, silicon chip is close to graphite boat sheet and is inserted, therefore small air inlet hole radially can guarantee that the special gas that passes into can be fully and the plane contact of silicon chip, the homogeneity of special gas that enters graphite boat is strong, thereby special gas is uniformly distributed at silicon chip surface, can reduces to a certain extent the generation of PECVD aberration sheet.
Preferably, the aperture of described small air inlet hole is 1mm; This size can guarantee by the pressure-losses of special gas after aperture less, and gas is decayed in controlled range in the process of transmission, and then guarantees that gas is uniformly distributed in whole boiler tube inside.
Further, the described arc inlet pipe of hollow is welded in furnace wall, by the mode of welding, fixes, and can guarantee the stability of inlet pipe, avoids causing due to the displacement of inlet pipe the variation of aperture direction, guarantees to enter other homogeneity of boiler tube.
Further, described arc inlet pipe, total inlet pipe and boiler tube are made by quartz, because the metals content impurity in quartz ware is few, can avoid metallic impurity in pyroprocess to enter the quality that silicon chip affects silicon chip.
Beneficial effect: the utility model can make special gas enter in the arc inlet pipe on boiler tube by total inlet pipe, in arc inlet pipe, distribute again, then by small air inlet hole, enter the graphite boat in boiler tube, be full of uniformly in the gap between graphite boat sheet, at silicon chip surface, be uniformly distributed, can reduce to a certain extent the generation of PECVD aberration sheet.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Embodiment
Below technical solutions of the utility model are elaborated, but protection domain of the present utility model is not limited to described embodiment.
embodiment: a kind of diffuser for tubular type PECVD, as shown in Figure 1, comprise quartzy arc inlet pipe 2, total inlet pipe 4 and boiler tube 1, be close to boiler tube 1 outer wall and be welded with arc inlet pipe 2 along the circumferential direction, the arc inlet pipe 2 of hollow is provided with the small air inlet hole 3 in through furnace along the surface of boiler tube 1 wall, the aperture of small air inlet hole 3 is 1mm, small air inlet hole 3 radially leads in stove along boiler tube 1, columniform total inlet pipe 4 is connected with arc inlet pipe 2 by the mode of welding, placing direction by graphite boat in boiler tube 1 is placed to and makes airintake direction and silicon chip place plane parallel.
Special gas enters the arc inlet pipe 2 of hollow by columniform total inlet pipe 4, in arc inlet pipe 2 inside, distribute again, and the even small air inlet hole 3 of being then close to the curved surfaces of boiler tube 1 wall by being positioned at arc inlet pipe 2 enters Quartz stove tube 1.Compared with prior art, by this diffuser, special gas is along the in-plane air inlet at silicon chip place, can effectively avoid graphite boat to the blocking of special gas, and what make that special gas distributes at silicon chip surface is more even.
As mentioned above, although represented and explained the utility model with reference to specific preferred embodiment, it shall not be construed as the restriction to the utility model self.Not departing under the spirit and scope prerequisite of the present utility model of claims definition, can make in the form and details various variations to it.
Claims (5)
1. the diffuser for tubular type PECVD, it is characterized in that: graphite boat is placed in boiler tube, be close to furnace tube outer wall and be provided with arc inlet pipe, arc inlet pipe is provided with the small air inlet hole in through furnace along furnace wall surface, described small air inlet hole is over against the gap between the graphite boat sheet on graphite boat, and described arc inlet pipe is provided with total inlet pipe.
2. the diffuser for tubular type PECVD according to claim 1, is characterized in that: described small air inlet hole radially leads in stove along boiler tube.
3. the diffuser for tubular type PECVD according to claim 1 and 2, is characterized in that: the aperture of described small air inlet hole is 1mm.
4. the diffuser for tubular type PECVD according to claim 1, is characterized in that: the described arc inlet pipe of hollow is welded in furnace wall.
5. the diffuser for tubular type PECVD according to claim 1, is characterized in that: described arc inlet pipe, total inlet pipe and boiler tube are made by quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420301189.3U CN203923368U (en) | 2014-06-09 | 2014-06-09 | A kind of diffuser for tubular type PECVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420301189.3U CN203923368U (en) | 2014-06-09 | 2014-06-09 | A kind of diffuser for tubular type PECVD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203923368U true CN203923368U (en) | 2014-11-05 |
Family
ID=51819223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420301189.3U Expired - Lifetime CN203923368U (en) | 2014-06-09 | 2014-06-09 | A kind of diffuser for tubular type PECVD |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203923368U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106328571A (en) * | 2015-07-02 | 2017-01-11 | 无锡华润华晶微电子有限公司 | Cage boat for growing SiO2 on wafer and growth method |
| CN116005130A (en) * | 2022-12-08 | 2023-04-25 | 浙江合特光电有限公司 | Air inlet and exhaust system of tubular CVD equipment |
-
2014
- 2014-06-09 CN CN201420301189.3U patent/CN203923368U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106328571A (en) * | 2015-07-02 | 2017-01-11 | 无锡华润华晶微电子有限公司 | Cage boat for growing SiO2 on wafer and growth method |
| CN106328571B (en) * | 2015-07-02 | 2019-05-24 | 无锡华润华晶微电子有限公司 | A kind of cage boat and growing method for the growth silica on wafer |
| CN116005130A (en) * | 2022-12-08 | 2023-04-25 | 浙江合特光电有限公司 | Air inlet and exhaust system of tubular CVD equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141105 |
|
| CX01 | Expiry of patent term |