CN218596511U - Chemical vapor deposition device convenient to control temperature - Google Patents

Abstract

The utility model discloses a chemical vapor deposition device convenient to controlled temperature, including chemical vapor deposition device main part, glass pipeline and hook rod, the glass pipeline runs through between two arc electric hot plates, the bottom of glass pipeline one end is fixed with the glass pipeline of bleeding, the one end of glass pipeline is fixed with the air inlet plug through the second bolt, and the other end of glass pipeline is fixed with the air outlet plug through the ferrule. This chemical vapor deposition device convenient to controlled temperature, can place the glass pipeline in the chemical vapor deposition device main part after opening the cover, close the cover and pull down the glass tray that can will hold the copper foil after the gas plug and put into the glass pipeline, usable hook lever stretches into the glass pipeline in with the glass tray afterwards, the gas in the glass pipeline is taken away to usable vacuum pump after the fixed gas plug that goes out, usable arc-shaped electric plate carries out heat treatment to the glass pipeline after letting in argon gas in the glass pipeline, heating temperature can be controlled well through operation control panel.

Description

Chemical vapor deposition device convenient to control temperature

Technical Field

The utility model relates to a chemical vapor deposition device correlation technique field specifically is a chemical vapor deposition device convenient to controlled temperature.

Background

Chemical vapor deposition is a chemical technology, which is a method for generating a film by performing a chemical reaction on the surface of a substrate by using one or more gaseous compounds or simple substances containing film elements.

The prior chemical vapor deposition device is inconvenient to adjust the stability before use, and is inconvenient to control the heating temperature accurately, the stability of an internal component is insufficient, and the prior equipment needs to be improved aiming at the problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a chemical vapor deposition device convenient to controlled temperature to solve the inconvenient its stability of adjusting before using of current chemical vapor deposition device that proposes in the above-mentioned background art, and inconvenient accurate control heating temperature, the problem that the stability of inner assembly is not enough.

In order to achieve the above object, the utility model provides a following technical scheme: a chemical vapor deposition device convenient for controlling temperature comprises a chemical vapor deposition device main body, a glass pipeline and a hook rod,

a control panel is fixed on the front end face of the chemical vapor deposition device main body, a cover is rotatably connected to the top of the chemical vapor deposition device main body, and the cover is fixed on the chemical vapor deposition device main body through a first bolt;

the glass pipeline runs through between two arc-shaped electric heating plates, and two arc-shaped electric heating plates are fixed respectively at the top of chemical vapor deposition device main part and the bottom of cover, the bottom of glass pipeline one end is fixed with the glass pipeline of bleeding, and the bottom of the glass pipeline of bleeding is fixed with the vacuum pump through the nut, and the vacuum pump is fixed in one side of chemical vapor deposition device main part simultaneously, the one end of glass pipeline is fixed with the air inlet plug through the second bolt, and the other end of glass pipeline is fixed with the air outlet plug through the ferrule.

Through adopting above-mentioned technical scheme, need adjust the device's stability before using the device, open the cover and place the glass pipeline and close and fix the cover again after in the chemical vapor deposition device main part, the air cock is drawn down and will contain the glass tray of copper foil and fix the air cock again after putting into the glass pipeline, can let in argon gas in the glass pipeline after utilizing the vacuum pump to take away the gas in the glass pipeline, usable arc-shaped electric plate carries out heat treatment to the glass pipeline afterwards, the while can be controlled the heating degree, successively let in hydrogen and methane in to the glass pipeline after then, a period after the heating, prop up the cover and dispel the heat, the usable copper foil with the gib bar good graphite alkene of length takes out after the temperature is enough low.

Preferably, the bottom of the chemical vapor deposition device body is in threaded connection with four cushion blocks, and the four cushion blocks are symmetrically arranged about a vertical central axis of the chemical vapor deposition device body.

By adopting the technical scheme, the cushion blocks play a role in supporting the device, and the height difference among the four cushion blocks can be adjusted before the device is used until the device is stable.

Preferably, the cover is rotatably connected to the top of the chemical vapor deposition device body through a shaft.

Through adopting above-mentioned technical scheme, can manually rotate and open the cover under the effect of axostylus axostyle after unscrewing the bolt, conveniently lay the glass pipeline, lay and close the cover again after the glass pipeline.

Preferably, a snap ring is fixed on the outer side of the glass pipeline, and the snap ring is clamped and connected between the chemical vapor deposition device main body and the cover.

Through adopting above-mentioned technical scheme, the snap ring can play the effect of strengthening the connection, makes placing between chemical vapor deposition device main part and cover that glass pipeline can be more steady.

Preferably, the hook rod is clamped on one side of the top of the machine cover, the bearing box is fixed in the middle of the top of the machine cover, and the glass tray is placed in the bearing box.

Through adopting above-mentioned technical scheme, utilize the hooked pole can stretch into the glass pipeline with glass tray and pull out glass tray hook from the glass pipeline.

Compared with the prior art, the beneficial effects of the utility model are that: the chemical vapor deposition device convenient for controlling the temperature,

(1) After the device is placed in a required place, the cushion blocks can be manually screwed up and down, so that the height difference among the four cushion blocks can be conveniently adjusted, and the device can be placed more stably;

(2) Open the cover after can place the glass pipeline in the chemical vapor deposition device main part, close the cover and pull down the glass tray that can will hold the copper foil after the air plug and put into the glass pipeline, usable hook lever stretches into the glass pipeline with the glass tray afterwards in, the gas in the glass pipeline is taken away to usable vacuum pump after the fixed air plug that goes out, accessible arc electric plate carries out heat treatment to the glass pipeline after letting in argon gas in the glass pipeline, heating temperature can be controlled well through operation control panel.

Drawings

Fig. 1 is a schematic view of the front cross-sectional structure of the present invention;

FIG. 2 is a schematic front view of the present invention;

fig. 3 is a schematic view of the left side view section structure of the present invention.

In the figure: 1. the chemical vapor deposition device comprises a chemical vapor deposition device body, 2, cushion blocks, 3, a control panel, 4, a cover, 5, a shaft rod, 6, a first bolt, 7, an arc-shaped electric heating plate, 8, a glass pipeline, 9, a clamping ring, 10, an air exhaust glass pipeline, 11, a vacuum pump, 12, an air inlet plug, 13, a second bolt, 14, an air outlet plug, 15, a hook rod, 16, a bearing box, 17 and a glass tray.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a chemical vapor deposition device convenient to control temperature, as shown in figure 1 and figure 2, the preceding terminal surface of chemical vapor deposition device main part 1 is fixed with control panel 3, and the top of chemical vapor deposition device main part 1 rotates and is connected with cover 4, cover 4 is fixed on chemical vapor deposition device main part 1 through first bolt 6 simultaneously, the bottom threaded connection of chemical vapor deposition device main part 1 has cushion 2, and cushion 2 is provided with four, four cushion 2 set up about the vertical axis symmetry of chemical vapor deposition device main part 1 simultaneously, can manually twist cushion 2 from top to bottom before using the device, conveniently adjust the difference in height between four cushion 2, make the device can be steady place in required place, cover 4 rotates the top of connecting at chemical vapor deposition device main part 1 through axostylus axostyle 5 through axostyle 5, can rotate and open on cover 4 under axostylus axostyle 5's effect after laying glass pipeline 8, can close cover 4 and utilize first bolt 6 to fix cover 4, conveniently spacing glass pipeline 8.

According to fig. 1, fig. 2 and fig. 3, the glass pipeline 8 penetrates between the two arc-shaped electric heating plates 7, the two arc-shaped electric heating plates 7 are respectively fixed at the top of the chemical vapor deposition device body 1 and the bottom of the cover 4, a snap ring 9 is fixed at the outer side of the glass pipeline 8, the snap ring 9 is clamped and connected between the chemical vapor deposition device body 1 and the cover 4, after the glass pipeline 8 is placed and the cover 4 is closed, the snap ring 9 is clamped and connected between the chemical vapor deposition device body 1 and the cover 4, so that the reinforcing and stabilizing effects are conveniently achieved, an air extraction glass pipeline 10 is fixed at the bottom of one end of the glass pipeline 8, a vacuum pump 11 is fixed at the bottom of the air extraction glass pipeline 10 through a nut, meanwhile, the vacuum pump 11 is fixed at one side of the chemical vapor deposition device body 1, an air inlet plug 12 is fixed at one end of the glass pipeline 8 through a second bolt 13, an air outlet plug 14 is fixed at the other end of the glass pipeline 8 through a pipe hoop, a hook rod 15 is clamped at one side of the top of the cover 4, a bearing box 16 is fixed at the middle of the top of the cover 4, a glass pipeline 17 is placed in the glass pipeline 8, and a hook rod 17 can be pushed into the glass pipeline 8 after the glass pipeline 17 can be used for pushing the glass pipeline 8 from the hook rod 17 into the hook rod 17.

The working principle is as follows: when the chemical vapor deposition device convenient for temperature control is used, the device is firstly placed at a required place, then the cushion blocks 2 are manually screwed up and down, so that the height difference between the four cushion blocks 2 is adjusted, the device is placed stably, an external power supply is connected, the operation of the whole device is controlled by operating the control panel 3, the glass pipeline 8 is placed on the chemical vapor deposition device main body 1 after the first bolt 6 is unscrewed and the cover 4 is rotated and opened, then the cover 4 is closed, at the moment, the clamping ring 9 is clamped and connected between the chemical vapor deposition device main body 1 and the cover 4, the air outlet plug 14 is detached and the glass tray 17 which is placed in the copper foil pipeline 8, the hook rod 15 is taken down, the glass tray 17 is extended into the glass pipeline 8 by the hook rod 15, the air outlet plug 14 is fixed by the pipe hoop, the vacuum pump 11 is started, so that the air in the glass pipeline 10 is extracted, the argon is introduced into the glass pipeline 8, the arc-shaped glass pipeline 7 is started, so as to control the temperature of the glass pipeline 8, then the hydrogen and the glass pipeline 10 are introduced, the methane and the heating is stopped, the whole graphite heat radiation technology is described in the prior art, and the whole technology is described in the art, and the whole technology is taken out, and the technology is long enough.

The terms "central," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like refer to orientations or positional relationships illustrated in the drawings, and are used merely to simplify the description of the present disclosure, rather than to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the scope of the present disclosure.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims (5)

1. A chemical vapor deposition device convenient for temperature control comprises a chemical vapor deposition device main body (1), a glass pipeline (8) and a hook rod (15), and is characterized in that:

a control panel (3) is fixed on the front end face of the chemical vapor deposition device main body (1), a cover (4) is rotatably connected to the top of the chemical vapor deposition device main body (1), and meanwhile, the cover (4) is fixed on the chemical vapor deposition device main body (1) through a first bolt (6);

glass pipeline (8) run through between two arc-shaped electric heat plates (7), and two arc-shaped electric heat plates (7) are fixed respectively in the top of chemical vapor deposition device main part (1) and the bottom of cover (4), the bottom of glass pipeline (8) one end is fixed with air exhaust glass pipeline (10), and the bottom of air exhaust glass pipeline (10) is fixed with vacuum pump (11) through the nut, and one side in chemical vapor deposition device main part (1) is fixed in vacuum pump (11) simultaneously, the one end of glass pipeline (8) is fixed with air inlet plug (12) through second bolt (13), and the other end of glass pipeline (8) is fixed with air outlet plug (14) through the ferrule.

2. The chemical vapor deposition apparatus facilitating temperature control as recited in claim 1, wherein: the bottom of the chemical vapor deposition device main body (1) is in threaded connection with the four cushion blocks (2), the four cushion blocks (2) are arranged, and meanwhile the four cushion blocks (2) are symmetrically arranged relative to a vertical central axis of the chemical vapor deposition device main body (1).

3. The chemical vapor deposition apparatus facilitating temperature control as recited in claim 1, wherein: the cover (4) is rotatably connected to the top of the chemical vapor deposition device main body (1) through a shaft lever (5).

4. The chemical vapor deposition apparatus facilitating temperature control as recited in claim 1, wherein: the outer side of the glass pipeline (8) is fixed with a clamping ring (9), and the clamping ring (9) is clamped and connected between the chemical vapor deposition device main body (1) and the machine cover (4).

5. The chemical vapor deposition apparatus for facilitating temperature control as recited in claim 1, wherein: the hook rod (15) is clamped on one side of the top of the cover (4), a bearing box (16) is fixed in the middle of the top of the cover (4), and a glass tray (17) is placed in the bearing box (16).

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