CN1117648C - 激光加工装置 - Google Patents

激光加工装置 Download PDF

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Publication number
CN1117648C
CN1117648C CN96100566A CN96100566A CN1117648C CN 1117648 C CN1117648 C CN 1117648C CN 96100566 A CN96100566 A CN 96100566A CN 96100566 A CN96100566 A CN 96100566A CN 1117648 C CN1117648 C CN 1117648C
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CN
China
Prior art keywords
laser beam
fluid
laser
processing
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN96100566A
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English (en)
Chinese (zh)
Other versions
CN1137430A (zh
Inventor
小山内肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=14902629&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN1117648(C) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of CN1137430A publication Critical patent/CN1137430A/zh
Application granted granted Critical
Publication of CN1117648C publication Critical patent/CN1117648C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B23K26/125—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases of mixed gases
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
CN96100566A 1995-05-24 1996-04-30 激光加工装置 Expired - Lifetime CN1117648C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP07125131A JP3138613B2 (ja) 1995-05-24 1995-05-24 レーザ加工装置
JP125131/95 1995-05-24
JP125131/1995 1995-05-24

Publications (2)

Publication Number Publication Date
CN1137430A CN1137430A (zh) 1996-12-11
CN1117648C true CN1117648C (zh) 2003-08-13

Family

ID=14902629

Family Applications (1)

Application Number Title Priority Date Filing Date
CN96100566A Expired - Lifetime CN1117648C (zh) 1995-05-24 1996-04-30 激光加工装置

Country Status (6)

Country Link
US (1) US5889256A (de)
JP (1) JP3138613B2 (de)
KR (1) KR100193952B1 (de)
CN (1) CN1117648C (de)
DE (1) DE19613252C2 (de)
TW (1) TW283107B (de)

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TW425322B (en) * 1998-05-13 2001-03-11 Mitsubishi Electric Corp Laser processing machine
US6392192B1 (en) 1999-09-15 2002-05-21 W. A. Whitney Co. Real time control of laser beam characteristics in a laser-equipped machine tool
US6128138A (en) * 1999-07-15 2000-10-03 W. A. Whitney Co. Reflective laser collimator
JP2001121278A (ja) * 1999-10-22 2001-05-08 Sumitomo Electric Ind Ltd レーザ切断方法
FR2803918B1 (fr) 2000-01-17 2003-05-16 Commissariat Energie Atomique Dispositif de balayage d'un foyer de faisceau de laser
US6407363B2 (en) 2000-03-30 2002-06-18 Electro Scientific Industries, Inc. Laser system and method for single press micromachining of multilayer workpieces
JP4659300B2 (ja) * 2000-09-13 2011-03-30 浜松ホトニクス株式会社 レーザ加工方法及び半導体チップの製造方法
ES2285634T3 (es) 2002-03-12 2007-11-16 Hamamatsu Photonics K. K. Metodo para dividir un siustrato.
DE50209599D1 (de) * 2002-11-29 2007-04-12 Trumpf Werkzeugmaschinen Gmbh Spiegel einer Laserbearbeitungsmaschine
US7656572B2 (en) * 2003-02-26 2010-02-02 Universitat Bern Method, array, and influencing unit for said array in order to modify a wavefront of an optical beam
AU2003295382A1 (en) * 2003-11-19 2005-07-14 Picanol N.V. Device for drying at least one yarn
US7060934B2 (en) * 2003-12-04 2006-06-13 Universal Laser Systems, Inc. High resolution laser beam delivery apparatus
DE502004008645D1 (de) * 2004-08-06 2009-01-22 Trumpf Werkzeugmaschinen Gmbh Laserbearbeitungskopf
US6986585B1 (en) * 2004-11-01 2006-01-17 Southeastern Univ. Research Assm Radius of curvature controlled mirror
DE502005009184D1 (de) * 2005-02-25 2010-04-22 Trumpf Werkzeugmaschinen Gmbh Anordnung zur Laserbearbeitung, insbesondere zum Laserschweissen von 3D-Bauteilen, mit einem ersten optischen Element zur Aufteilung eines Laserstrahles und einem zweiten optischen Element zur Fokusierung der Teilstrahlen
WO2007000171A1 (de) * 2005-06-24 2007-01-04 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Adaptiver spiegel einer optik einer laserbearbeitungsmaschine
CN100496855C (zh) * 2005-08-19 2009-06-10 中国科学院光电技术研究所 精密加工激光切割机
TWI271568B (en) * 2006-01-18 2007-01-21 Micro Star Int Co Ltd Mirror structure and image-taking apparatus
JP2007266387A (ja) * 2006-03-29 2007-10-11 Mitsubishi Electric Corp レーザ発振器
DE102007024701A1 (de) * 2007-05-25 2008-11-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Materialabtragung sowie Vorrichtung zur Durchführung des Verfahrens
JP2008168352A (ja) * 2008-01-23 2008-07-24 Rezakku:Kk レーザ加工装置の使用方法
US7740362B1 (en) * 2008-02-19 2010-06-22 Jefferson Science Associates Mirror with thermally controlled radius of curvature
EP2149421B1 (de) 2008-07-30 2011-11-30 IPG Photonics Corporation Laser-Schweißwerkzeug mit einem Faserlaser
EP2684636B1 (de) * 2011-03-08 2017-12-13 Kawasaki Jukogyo Kabushiki Kaisha Laserbearbeitungsvorrichtung mit einer optischen abtastvorrichtung
CN103056531A (zh) * 2013-01-14 2013-04-24 苏州领创激光科技有限公司 一种激光切割机自动变焦的方法与装置
DE102013008646B4 (de) * 2013-05-21 2020-06-10 Lt-Ultra Precision Technology Gmbh Adaptiver Spiegel für eine Laserbearbeitungsvorrichtung
US10359603B1 (en) * 2013-08-21 2019-07-23 The Board Of Trustees Of The University Of Alabama, For And On Behalf Of The University Of Alabama In Huntsville Lightweight adaptive metal cooled mirrors
US9360600B2 (en) * 2013-11-20 2016-06-07 Asml Netherlands B.V. System and method for correcting the focus of a laser beam
CN107813060A (zh) * 2016-08-30 2018-03-20 奔腾激光(温州)有限公司 一种光纤激光切割机用反射式切割头及控制方法
JP6676189B2 (ja) * 2016-12-16 2020-04-08 三菱電機株式会社 形状可変鏡及びレーザ加工装置
JP7285713B2 (ja) * 2019-07-05 2023-06-02 三菱電機株式会社 レーザ加工ヘッド及びレーザ加工装置
CN110842355A (zh) * 2019-11-29 2020-02-28 奔腾楚天激光（武汉）有限公司 一种光纤激光切割机快速换气的装置及控制方法

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* Cited by examiner, † Cited by third party
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JPS576804A (en) * 1980-06-17 1982-01-13 Toshiba Corp Light reflection method
JPS5954484A (ja) † 1982-09-20 1984-03-29 Mitsubishi Electric Corp レ−ザ加工機
JPS60187492A (ja) * 1984-02-21 1985-09-24 Mitsubishi Electric Corp レ−ザビ−ムによる加工装置
JPS61159613A (ja) * 1985-01-07 1986-07-19 Kokuritsu Kogai Kenkyusho 反射曲面鏡
JPS61242778A (ja) * 1985-04-18 1986-10-29 アマダ　エンジニアリング　アンド　サ−ビス　カンパニ−　インコ−ポレ−テツド レ−ザ加工装置における加工ヘツド位置制御装置
FR2584824B1 (fr) * 1985-07-10 1987-09-25 Commissariat Energie Atomique Miroir deformable
JPS63146479A (ja) * 1986-07-16 1988-06-18 Amada Co Ltd レ−ザビ−ムの発散角調整方法および装置
JPS63159613A (ja) * 1986-12-23 1988-07-02 Sanshin Ind Co Ltd 水冷エンジン用ポンプのドレン装置
JPH0534860Y2 (de) * 1987-06-11 1993-09-03
US4837708A (en) * 1987-07-01 1989-06-06 Maraven, S.A. Process and apparatus for determining flow rate of a flow medium in a flow line
JPH01113192A (ja) * 1987-10-23 1989-05-01 Hitachi Ltd レーザ加工機用集光装置
JPH01166894A (ja) * 1987-12-21 1989-06-30 Mitsubishi Electric Corp レーザ加工機
JPH01219801A (ja) * 1988-02-29 1989-09-01 Meitetsuku:Kk 可変焦点式反射鏡
DE3900467C2 (de) * 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
JPH0351402U (de) * 1989-09-25 1991-05-20
JPH03128187A (ja) * 1989-10-12 1991-05-31 Yoshizawa Kogyo Kk レーザ切断装置
JPH03174995A (ja) * 1989-12-01 1991-07-30 Amada Co Ltd レーザ加工装置の加工ヘッド
JPH03189089A (ja) * 1989-12-18 1991-08-19 Koike Sanso Kogyo Co Ltd レーザー加工装置
DE4137832A1 (de) * 1991-11-16 1993-05-19 Kugler Gmbh Feinmechanik & Opt Vorrichtung zum lagern einer gesteuert deformierbaren platte geringer dicke, insbesondere eines spiegels als reflektionseinrichtung fuer laserstrahlen o. dgl.
DE9205810U1 (de) * 1992-04-30 1993-08-26 Diehl GmbH & Co, 90478 Nürnberg Einrichtung zur Beeinflussung der Fokuslage eines Laser-Bearbeitungskopfes
JPH0736551A (ja) * 1993-07-20 1995-02-07 Smc Corp 電空レギュレータ用圧力制御装置
US5493095A (en) * 1994-02-14 1996-02-20 Data Technology, Inc. Laser beam divergence compensation apparatus
DE9407288U1 (de) * 1994-05-02 1994-08-04 Trumpf Gmbh & Co, 71254 Ditzingen Laserschneidmaschine mit Fokuslageneinstellung

Also Published As

Publication number Publication date
DE19613252C2 (de) 2000-06-15
US5889256A (en) 1999-03-30
KR100193952B1 (ko) 1999-06-15
KR960040544A (ko) 1996-12-17
JP3138613B2 (ja) 2001-02-26
CN1137430A (zh) 1996-12-11
JPH08318383A (ja) 1996-12-03
TW283107B (en) 1996-08-11
DE19613252A1 (de) 1996-11-28

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