CN111730498A - 测量治具 - Google Patents
测量治具 Download PDFInfo
- Publication number
- CN111730498A CN111730498A CN202010077654.XA CN202010077654A CN111730498A CN 111730498 A CN111730498 A CN 111730498A CN 202010077654 A CN202010077654 A CN 202010077654A CN 111730498 A CN111730498 A CN 111730498A
- Authority
- CN
- China
- Prior art keywords
- grinding
- measuring
- wheel
- base
- thread
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 239000004575 stone Substances 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 238000005259 measurement Methods 0.000 description 8
- 238000003780 insertion Methods 0.000 description 7
- 230000037431 insertion Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 241000669069 Chrysomphalus aonidum Species 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019-016824 | 2019-02-01 | ||
JP2019016824A JP2020124753A (ja) | 2019-02-01 | 2019-02-01 | 測定治具 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN111730498A true CN111730498A (zh) | 2020-10-02 |
Family
ID=72048163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010077654.XA Pending CN111730498A (zh) | 2019-02-01 | 2020-01-31 | 测量治具 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2020124753A (ko) |
KR (1) | KR20200096152A (ko) |
CN (1) | CN111730498A (ko) |
TW (1) | TW202030051A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115213814A (zh) * | 2022-07-28 | 2022-10-21 | 宁波芯丰精密科技有限公司 | 一种磨削主轴 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022135442A (ja) * | 2021-03-05 | 2022-09-15 | 株式会社ディスコ | 研削装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10315103A (ja) * | 1997-05-16 | 1998-12-02 | Okamoto Kosaku Kikai Seisakusho:Kk | 研削/研磨方法およびその装置 |
US20070280802A1 (en) * | 2004-03-22 | 2007-12-06 | Universal Metal Products, Inc. | Fastener assembly |
JP2013141725A (ja) * | 2012-01-11 | 2013-07-22 | Disco Corp | 研削装置 |
WO2014054460A1 (ja) * | 2012-10-03 | 2014-04-10 | 住友電装株式会社 | プリント基板の固定構造 |
US20170087603A1 (en) * | 2015-09-25 | 2017-03-30 | David Fleegle | Thread Cleaner System |
CN109108811A (zh) * | 2017-06-23 | 2019-01-01 | 株式会社迪思科 | 磨削装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU532694B2 (en) * | 1978-08-16 | 1983-10-13 | A.F.A.Pty. Ltd. | Chip catching washers |
JPS6280009U (ko) * | 1985-11-09 | 1987-05-22 | ||
JP4298948B2 (ja) * | 2001-12-27 | 2009-07-22 | 日東精工株式会社 | 雌ねじ成形屑吸着タッピンねじ |
KR20060134577A (ko) * | 2005-06-23 | 2006-12-28 | 삼성전자주식회사 | 그라인딩 휠 기울기 측정용 도구 |
JP5606838B2 (ja) * | 2010-09-07 | 2014-10-15 | 株式会社ディスコ | 切削ブレードを装着する回転スピンドルの取り付け状態確認治具および取り付け状態確認方法 |
TWI495800B (zh) * | 2013-03-06 | 2015-08-11 | Kabo Tool Co | A screw with a locking force |
JP5878219B1 (ja) * | 2014-10-09 | 2016-03-08 | 千住金属工業株式会社 | はんだ付け装置 |
-
2019
- 2019-02-01 JP JP2019016824A patent/JP2020124753A/ja active Pending
-
2020
- 2020-01-21 TW TW109102290A patent/TW202030051A/zh unknown
- 2020-01-30 KR KR1020200011168A patent/KR20200096152A/ko not_active Application Discontinuation
- 2020-01-31 CN CN202010077654.XA patent/CN111730498A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10315103A (ja) * | 1997-05-16 | 1998-12-02 | Okamoto Kosaku Kikai Seisakusho:Kk | 研削/研磨方法およびその装置 |
US20070280802A1 (en) * | 2004-03-22 | 2007-12-06 | Universal Metal Products, Inc. | Fastener assembly |
JP2013141725A (ja) * | 2012-01-11 | 2013-07-22 | Disco Corp | 研削装置 |
WO2014054460A1 (ja) * | 2012-10-03 | 2014-04-10 | 住友電装株式会社 | プリント基板の固定構造 |
US20170087603A1 (en) * | 2015-09-25 | 2017-03-30 | David Fleegle | Thread Cleaner System |
CN109108811A (zh) * | 2017-06-23 | 2019-01-01 | 株式会社迪思科 | 磨削装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115213814A (zh) * | 2022-07-28 | 2022-10-21 | 宁波芯丰精密科技有限公司 | 一种磨削主轴 |
CN115213814B (zh) * | 2022-07-28 | 2024-01-23 | 宁波芯丰精密科技有限公司 | 一种磨削主轴 |
Also Published As
Publication number | Publication date |
---|---|
TW202030051A (zh) | 2020-08-16 |
KR20200096152A (ko) | 2020-08-11 |
JP2020124753A (ja) | 2020-08-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5275016B2 (ja) | 研削装置 | |
JP2008264913A (ja) | 研削加工装置 | |
JP2008124292A (ja) | 加工装置のウエーハ位置調整治具 | |
JP2009050944A (ja) | 基板の厚さ測定方法および基板の加工装置 | |
JP2008084976A (ja) | ウエーハの研削加工方法 | |
CN111730498A (zh) | 测量治具 | |
JP2018083266A (ja) | 研削装置及び粗さ測定方法 | |
JP2009125915A (ja) | 研削ホイール装着機構 | |
JP2016078147A (ja) | 研削装置 | |
CN111283548A (zh) | 圆板状工件的加工方法 | |
JP7127994B2 (ja) | ドレッシングボード及びドレッシング方法 | |
CN108573889B (zh) | 晶片的起伏检测方法和磨削装置 | |
KR20120040104A (ko) | 웨이퍼 반송 기구 | |
JP7227754B2 (ja) | 研削装置 | |
TWI833851B (zh) | 圓板狀工件的加工方法 | |
CN110170892A (zh) | 磨削装置 | |
US11872669B2 (en) | Cover to vacuum debris while grinding | |
JP2008130808A (ja) | 研削加工方法 | |
US20220134509A1 (en) | Grinding method of workpiece | |
US11850705B2 (en) | Grinding apparatus | |
CN111438085B (zh) | 清洗机构 | |
KR102151282B1 (ko) | 연삭 장치 | |
JP2013091120A (ja) | ブレードカバー装置 | |
JP2011143495A (ja) | 研削装置 | |
JP5389433B2 (ja) | 研削ホイール |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20201002 |