JP2020124753A - 測定治具 - Google Patents
測定治具 Download PDFInfo
- Publication number
- JP2020124753A JP2020124753A JP2019016824A JP2019016824A JP2020124753A JP 2020124753 A JP2020124753 A JP 2020124753A JP 2019016824 A JP2019016824 A JP 2019016824A JP 2019016824 A JP2019016824 A JP 2019016824A JP 2020124753 A JP2020124753 A JP 2020124753A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- wheel
- screw
- mount
- female screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 239000000523 sample Substances 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 241000669069 Chrysomphalus aonidum Species 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019016824A JP2020124753A (ja) | 2019-02-01 | 2019-02-01 | 測定治具 |
TW109102290A TW202030051A (zh) | 2019-02-01 | 2020-01-21 | 測定治具 |
KR1020200011168A KR20200096152A (ko) | 2019-02-01 | 2020-01-30 | 측정 지그 |
CN202010077654.XA CN111730498A (zh) | 2019-02-01 | 2020-01-31 | 测量治具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019016824A JP2020124753A (ja) | 2019-02-01 | 2019-02-01 | 測定治具 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2020124753A true JP2020124753A (ja) | 2020-08-20 |
Family
ID=72048163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019016824A Pending JP2020124753A (ja) | 2019-02-01 | 2019-02-01 | 測定治具 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2020124753A (ko) |
KR (1) | KR20200096152A (ko) |
CN (1) | CN111730498A (ko) |
TW (1) | TW202030051A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220281063A1 (en) * | 2021-03-05 | 2022-09-08 | Disco Corporation | Grinding apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115213814B (zh) * | 2022-07-28 | 2024-01-23 | 宁波芯丰精密科技有限公司 | 一种磨削主轴 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5530586A (en) * | 1978-08-16 | 1980-03-04 | Mcphersons Ltd | Chip accommodatable washer |
JPS6280009U (ko) * | 1985-11-09 | 1987-05-22 | ||
JPH10315103A (ja) * | 1997-05-16 | 1998-12-02 | Okamoto Kosaku Kikai Seisakusho:Kk | 研削/研磨方法およびその装置 |
JP2002257120A (ja) * | 2001-12-27 | 2002-09-11 | Nitto Seiko Co Ltd | 雌ねじ成形屑吸着ねじ |
KR20060134577A (ko) * | 2005-06-23 | 2006-12-28 | 삼성전자주식회사 | 그라인딩 휠 기울기 측정용 도구 |
JP2012055998A (ja) * | 2010-09-07 | 2012-03-22 | Disco Corp | 切削ブレードを装着する回転スピンドルの取り付け状態確認治具および取り付け状態確認方法 |
JP2013141725A (ja) * | 2012-01-11 | 2013-07-22 | Disco Corp | 研削装置 |
JP3189990U (ja) * | 2013-03-06 | 2014-04-10 | 優鋼機械股▲ふん▼有限公司 | 締結力測定機能付き締結具 |
JP2016079994A (ja) * | 2014-10-09 | 2016-05-16 | 千住金属工業株式会社 | はんだ付け装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7955037B2 (en) * | 2004-03-22 | 2011-06-07 | Universal Metal Products, Inc. | Fastener assembly |
JP2014075448A (ja) * | 2012-10-03 | 2014-04-24 | Sumitomo Wiring Syst Ltd | プリント基板の固定構造 |
US20170087603A1 (en) * | 2015-09-25 | 2017-03-30 | David Fleegle | Thread Cleaner System |
JP6912284B2 (ja) * | 2017-06-23 | 2021-08-04 | 株式会社ディスコ | 研削装置 |
-
2019
- 2019-02-01 JP JP2019016824A patent/JP2020124753A/ja active Pending
-
2020
- 2020-01-21 TW TW109102290A patent/TW202030051A/zh unknown
- 2020-01-30 KR KR1020200011168A patent/KR20200096152A/ko active Search and Examination
- 2020-01-31 CN CN202010077654.XA patent/CN111730498A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5530586A (en) * | 1978-08-16 | 1980-03-04 | Mcphersons Ltd | Chip accommodatable washer |
JPS6280009U (ko) * | 1985-11-09 | 1987-05-22 | ||
JPH10315103A (ja) * | 1997-05-16 | 1998-12-02 | Okamoto Kosaku Kikai Seisakusho:Kk | 研削/研磨方法およびその装置 |
JP2002257120A (ja) * | 2001-12-27 | 2002-09-11 | Nitto Seiko Co Ltd | 雌ねじ成形屑吸着ねじ |
KR20060134577A (ko) * | 2005-06-23 | 2006-12-28 | 삼성전자주식회사 | 그라인딩 휠 기울기 측정용 도구 |
JP2012055998A (ja) * | 2010-09-07 | 2012-03-22 | Disco Corp | 切削ブレードを装着する回転スピンドルの取り付け状態確認治具および取り付け状態確認方法 |
JP2013141725A (ja) * | 2012-01-11 | 2013-07-22 | Disco Corp | 研削装置 |
JP3189990U (ja) * | 2013-03-06 | 2014-04-10 | 優鋼機械股▲ふん▼有限公司 | 締結力測定機能付き締結具 |
JP2016079994A (ja) * | 2014-10-09 | 2016-05-16 | 千住金属工業株式会社 | はんだ付け装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220281063A1 (en) * | 2021-03-05 | 2022-09-08 | Disco Corporation | Grinding apparatus |
US11858087B2 (en) * | 2021-03-05 | 2024-01-02 | Disco Corporation | Grinding apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN111730498A (zh) | 2020-10-02 |
TW202030051A (zh) | 2020-08-16 |
KR20200096152A (ko) | 2020-08-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2008264913A (ja) | 研削加工装置 | |
JP6157229B2 (ja) | 研削装置及び研削方法 | |
JP2008124292A (ja) | 加工装置のウエーハ位置調整治具 | |
JP2009050944A (ja) | 基板の厚さ測定方法および基板の加工装置 | |
JP2008084976A (ja) | ウエーハの研削加工方法 | |
JP2010199227A (ja) | 研削装置 | |
JP2018083266A (ja) | 研削装置及び粗さ測定方法 | |
JP2008087104A (ja) | 研削加工方法 | |
JP2020124753A (ja) | 測定治具 | |
JP2016078147A (ja) | 研削装置 | |
JP2009038267A (ja) | 基板の裏面研削装置および裏面研削方法 | |
CN110170892B (zh) | 磨削装置 | |
JP2015036170A (ja) | 研削装置 | |
JP2020093338A (ja) | 研削装置 | |
JP2019115961A (ja) | 切削装置 | |
TWI778235B (zh) | 攝像圖像形成單元 | |
JP2008130808A (ja) | 研削加工方法 | |
JP7127994B2 (ja) | ドレッシングボード及びドレッシング方法 | |
US11850705B2 (en) | Grinding apparatus | |
JP7474082B2 (ja) | ウェーハの研削方法 | |
CN112338706B (zh) | 主轴单元 | |
JP2009088073A (ja) | 研削ステージでの半導体基板の厚み測定方法 | |
KR102427972B1 (ko) | 높이 측정용 지그 | |
JP2011224697A (ja) | 研磨パッドの修正方法 | |
JP2018027597A (ja) | 測定治具 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211210 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220921 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221018 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230411 |