CN111349895A - 一种清理装置 - Google Patents
一种清理装置 Download PDFInfo
- Publication number
- CN111349895A CN111349895A CN201811574740.0A CN201811574740A CN111349895A CN 111349895 A CN111349895 A CN 111349895A CN 201811574740 A CN201811574740 A CN 201811574740A CN 111349895 A CN111349895 A CN 111349895A
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- CN
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- Prior art keywords
- slide
- cleaning
- assembly
- cleaning device
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004544 sputter deposition Methods 0.000 claims abstract description 72
- 239000011248 coating agent Substances 0.000 claims abstract description 25
- 238000000576 coating method Methods 0.000 claims abstract description 25
- 238000010408 sweeping Methods 0.000 claims description 9
- 238000004026 adhesive bonding Methods 0.000 claims description 6
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- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims 2
- 239000000463 material Substances 0.000 abstract description 15
- 230000003749 cleanliness Effects 0.000 abstract description 6
- 239000013077 target material Substances 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 description 11
- 239000000428 dust Substances 0.000 description 7
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 4
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- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- B08B1/12—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811574740.0A CN111349895A (zh) | 2018-12-21 | 2018-12-21 | 一种清理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811574740.0A CN111349895A (zh) | 2018-12-21 | 2018-12-21 | 一种清理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN111349895A true CN111349895A (zh) | 2020-06-30 |
Family
ID=71190209
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811574740.0A Pending CN111349895A (zh) | 2018-12-21 | 2018-12-21 | 一种清理装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN111349895A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111876746A (zh) * | 2020-07-09 | 2020-11-03 | Tcl华星光电技术有限公司 | 防着板 |
CN112458426A (zh) * | 2020-11-16 | 2021-03-09 | 凯盛科技集团有限公司 | 一种真空磁控溅射镀膜设备除渣装置 |
CN114049775A (zh) * | 2021-12-13 | 2022-02-15 | 长春师范大学 | 一种交通实况监控装置及其使用方法 |
-
2018
- 2018-12-21 CN CN201811574740.0A patent/CN111349895A/zh active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111876746A (zh) * | 2020-07-09 | 2020-11-03 | Tcl华星光电技术有限公司 | 防着板 |
CN112458426A (zh) * | 2020-11-16 | 2021-03-09 | 凯盛科技集团有限公司 | 一种真空磁控溅射镀膜设备除渣装置 |
CN112458426B (zh) * | 2020-11-16 | 2022-07-08 | 凯盛信息显示材料(洛阳)有限公司 | 一种真空磁控溅射镀膜设备除渣装置 |
CN114049775A (zh) * | 2021-12-13 | 2022-02-15 | 长春师范大学 | 一种交通实况监控装置及其使用方法 |
CN114049775B (zh) * | 2021-12-13 | 2022-08-23 | 长春师范大学 | 一种交通实况监控装置及其使用方法 |
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PB01 | Publication | ||
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CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Applicant before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20210408 Address after: 518066 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210915 Address after: 201203 3rd floor, no.665 Zhangjiang Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Applicant after: Shanghai zuqiang Energy Co.,Ltd. Address before: 518066 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
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