CN111302652A - Flat-bent matched double-silver coated glass and preparation method thereof - Google Patents
Flat-bent matched double-silver coated glass and preparation method thereof Download PDFInfo
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- CN111302652A CN111302652A CN202010272823.5A CN202010272823A CN111302652A CN 111302652 A CN111302652 A CN 111302652A CN 202010272823 A CN202010272823 A CN 202010272823A CN 111302652 A CN111302652 A CN 111302652A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
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Abstract
The invention discloses a flat-bent matched double-silver coated glass, which comprises a glass substrate and a film layer structure arranged on the surface of the glass substrate, wherein the film layer structure sequentially comprises the following components from the glass substrate to the outside: the first dielectric combination layer, the first silver layer, the first blocking protective layer, the first crystal bed dielectric layer, the second dielectric combination layer, the SiOx layer, the third dielectric combination layer, the second silver layer, the second blocking protective layer, the second crystal bed dielectric layer and the fourth dielectric combination layer, wherein the thickness of the SiOx layer is 1-50 nm. In addition, the preparation method of the flat-bent matched double-silver coated glass is provided, the vacuum magnetron sputtering coating technology is adopted, the color change of a product can be monitored in real time, the consistency of the transmission color and the reflection color of a bent part and a flat part of the product is ensured, meanwhile, the optical performance of the product is improved, the subsequent toughening imaging process is improved, the production efficiency is greatly improved, the rejection rate is reduced, the cost is saved, and the preparation method is simple and mature, is suitable for industrial production and can be widely popularized and applied.
Description
Technical Field
The invention relates to the technical field of double-silver coated glass, in particular to flat-bent matched double-silver coated glass and a preparation method thereof.
Background
The magnetron sputtering coating technology is one of the most main technologies in the current industrial coating production, and the magnetron sputtering has a series of advantages of uniform film thickness, low substrate temperature, high settling speed and the like. The low-emissivity coated glass produced by taking magnetron sputtering as a film forming technology has the characteristics of low surface emissivity, high infrared reflectivity and moderate visible light transmittance, can meet the good lighting requirement of buildings, can effectively prevent the glass from transferring heat in a radiation mode, has good heat insulation performance, is an optimal material for realizing energy saving of doors and windows under the current technical condition, and is widely applied to the large-area building glass coating industry. In the prior art, the production process of the Low-E glass is to plate a multilayer film system which takes Ag as a functional layer and comprises a dielectric layer and other metal layers on a high-quality float substrate. If the division is carried out according to the number of layers of the functional layer silver, the Low-E glass can be divided into single-silver Low-E glass, double-silver Low-E glass and triple-silver Low-E glass. At present, double silver is a relatively mature energy-saving scheme in the field of architectural glass, the performance of the double silver is far higher than that of a single silver product and slightly lower than that of a three-silver product with higher cost, and along with the change of market situation, more and more customers pursue the consistency of the whole color, particularly the double silver is reflected on bent glass. In the prior art, bent glass is generally plated first and then steel, and flat glass is generally plated first and then steel. Because of different processing technologies, the color difference between the curved part and the flat part is large, and the reflection color and the transmission color are inconsistent outdoors, so that the curved part and the flat part are not beautiful enough and are difficult to be adopted by customers.
Therefore, it is highly desirable to provide a flat-curved matched double-silver coated glass and a preparation method thereof, so as to ensure the consistency of the transmission color and the reflection color of the curved glass part and the flat glass part of the product.
Content of application
One of the purposes of the invention is to provide a flat-bent matched double-silver coated glass, which realizes the consistency of the transmission color and the reflection color of a bent glass part and a flat glass part.
The invention also aims to provide a preparation method of the flat-bent matched double-silver coated glass, which is used for improving the coating process of plating the bent glass first and then plating steel and plating the flat glass first and then plating steel, monitoring the color change of the product in real time and ensuring the consistency of the transmission color and the reflection color of the bent glass part and the flat glass part of the product.
In order to achieve the purpose, the invention provides flat-bent matched double-silver coated glass, which comprises a glass substrate and a film layer structure arranged on the surface of the glass substrate, wherein the film layer structure sequentially comprises from the glass substrate to the outside: the first dielectric combination layer, the first silver layer, the first blocking protective layer, the first crystal bed dielectric layer, the second dielectric combination layer, the SiOx layer, the third dielectric combination layer, the second silver layer, the second blocking protective layer, the second crystal bed dielectric layer and the fourth dielectric combination layer, wherein the thickness of the SiOx layer is 1-50 nm.
Preferably, the SiOx layer of the present invention is nano-scale silicon dioxide, and the value of x ranges from 1.5 to 2.5.
Preferably, the first dielectric combination layer of the present invention comprises, in order from the glass substrate: the multilayer film comprises a ZnO layer I, a SiNx layer I and a ZnO layer II, wherein the thicknesses of the ZnO layer I and the ZnO layer II are smaller than that of the SiNx layer I, preferably, the thicknesses of the ZnO layer I and the ZnO layer II are both 4-8nm, and the thickness of the SiNx layer I is 30-35 nm. The ZnO layer II of the first dielectric medium combination layer has good adhesiveness with the first silver layer and has a synergistic effect, and the zinc oxide layer is tightly adhered with the metal silver layer, so that the metal silver layer is effectively prevented from being oxidized, the blocking effect of the metal silver layer on infrared rays and ultraviolet rays is kept, and the service life of the coated glass is prolonged.
Preferably, the thickness of the first silver layer of the present invention is less than the thickness of the second silver layer, preferably, the thickness of the first silver layer is 3-6nm, and the thickness of the second silver layer is 20-25 nm.
Preferably, the first blocking protection layer is a NiCr layer I, the second blocking protection layer is a NiCr layer II, the thickness of the first blocking protection layer is 3-6nm, and the thickness of the second blocking protection layer is 4-8 nm. The nickel-chromium alloy has acid, alkali and corrosion resistance, and can be plated on the surface of the silver layer to further protect the silver layer from being oxidized.
Preferably, the first crystal bed dielectric layer is an AZO layer I, the second crystal bed dielectric layer is an AZO layer II, and the thicknesses of the first crystal bed dielectric layer and the second crystal bed dielectric layer are both 3-6 nm. The zinc aluminum oxide material in the crystal bed dielectric layer is transparent, so that the light transmittance of the glass is effectively improved.
Preferably, the second dielectric composite layer of the present invention comprises, in order from the glass substrate: a SiNx layer II and a ZnSnO layer I; the third dielectric combination layer comprises the following components in sequence from the glass substrate to the outside: and the thicknesses of the SiNx layer II, the ZnSnO layer I and the ZnSnO layer II are all larger than that of the ZnO layer III, preferably, the thicknesses of the SiNx layer II, the ZnSnO layer I and the ZnSnO layer II are all 15-20nm, and the thickness of the ZnO layer III is 4-8 nm.
Preferably, the fourth dielectric combination layer is a SiNx layer iii, the thickness of the SiNx layer iii is greater than the thickness of the SiNx layer i and the thickness of the SiNx layer ii, and the thickness of the SiNx layer iii is preferably 40-45 nm. The SiNx layer III is the outermost layer of the coated glass, is large in thickness and high in hardness, and accordingly the outermost layer of the coated glass is wear-resistant and scratch-resistant.
Preferably, the thickness of the film structure of the present invention is 190 nm and 275 nm.
The invention also provides a preparation method of the flat-bent matched double-silver coated glass, which is realized by adopting a vacuum magnetron sputtering coating technology and comprises the following steps:
(1) sputtering a ZnO layer I, a SiNx layer I and a ZnO layer II on the surface of a glass substrate in sequence, wherein target materials are a zinc-aluminum alloy target, a silicon-aluminum alloy target and a zinc-aluminum alloy target respectively, the ZnO layer I and the ZnO layer II are sputtered in an argon-oxygen atmosphere, and the SiNx layer I is sputtered in an argon-nitrogen atmosphere;
(2) sputtering a first silver layer, a NiCr layer I and an AZO layer I on the surface of the ZnO layer II in sequence, wherein target materials are a silver target, a nickel-chromium target and a zinc-aluminum oxide target respectively, and the sputtering is carried out in a pure argon atmosphere;
(3) sequentially sputtering a SiNx layer II, a ZnSnO layer I, a SiOx layer, a ZnSnO layer II and a ZnO layer III on the surface of the AZO layer I, wherein target materials are a silicon-aluminum alloy target, a zinc-tin alloy target, a silicon-aluminum alloy target, a zinc-tin alloy target and a zinc-aluminum alloy target respectively, the SiNx layer II is sputtered in an argon-nitrogen atmosphere, and the ZnSnO layer I, the SiOx layer, the ZnSnO layer II and the ZnO layer III are sputtered in an argon-oxygen atmosphere;
(4) sputtering a second silver layer, a NiCr layer II and an AZO layer II on the surface of the ZnO layer III in sequence, wherein target materials are a silver target, a nickel-chromium target and a zinc-aluminum oxide target respectively, and the sputtering is carried out in a pure argon atmosphere;
(5) and sputtering a SiNx layer III on the surface of the AZO layer II, wherein the target material is a silicon-aluminum alloy target and sputtering in an argon-nitrogen atmosphere.
Preferably, in the preparation method of the flat-bending matched double-silver coated glass, the power type is direct current, and the cathode type is a planar target; in the preparation of the ZnO layer I, the SiNx layer I, the ZnO layer II, the NiCr layer I, the AZO layer I, the SiNx layer II, the ZnSnO layer I, the SiOx layer, the ZnSnO layer II, the ZnO layer III, the NiCr layer II, the AZO layer II and the SiNx layer III, the power type adopts alternating current, and the cathode type adopts a rotating target.
Compared with the prior art, the flat-bent matched double-silver coated glass takes the SiOx material with a special crystal structure as a special medium layer, the SiOx layers with different thicknesses have different transmittances to visible light due to the existence of the crystal structure, so that different colors are visually presented, and the transmittance color adjustment of the coated glass is realized by adjusting the thickness of the SiOx layer, so that the transmittance color and the reflection color of a bent glass part and a flat glass part are kept consistent; the flat-bent matched double-silver coated glass further matches and combines various coating materials in the coating, the zinc oxide layer of the dielectric combination layer and the metal silver layer of the functional layer are good in adhesion and have a synergistic effect, the zinc oxide layer is tightly adhered to the metal silver layer, and the metal silver layer is effectively prevented from being oxidized, so that the infrared ray and ultraviolet ray blocking effect of the metal silver layer is kept, and the service life of the coated glass is prolonged. The flat-bent matched double-silver coated glass is prepared by adopting a vacuum magnetron sputtering coating technology, and is sequentially coated under a high vacuum background, the product has strong additivity, simple debugging and stable quality, and the color change can be monitored in real time, so that the consistency of the transmission color and the reflection color of the bent glass part and the flat glass part of the product is ensured, the performance of an interlayer product is improved, the subsequent toughening imaging process is improved, the production efficiency is greatly improved, the rejection rate is reduced, the production cost is saved, and the preparation method is simple and mature, is suitable for industrial production, and can be widely popularized and applied.
Drawings
FIG. 1 is a schematic diagram of the film structure of the flat-bending matched double-silver coated glass.
FIG. 2 is a schematic view of a process flow for preparing flat-bent matched double-silver coated glass.
Fig. 3 is a more detailed process flow diagram of the flat-bent matched double-silver coated glass shown in fig. 2.
Detailed Description
In order to explain technical contents and structural features of the present invention in detail, the following description is made with reference to the embodiments and the accompanying drawings.
Referring to fig. 1, the flat-bent matched double-silver coated glass of the invention comprises a glass substrate and a film structure arranged on the surface of the glass substrate, wherein the film structure sequentially comprises from the glass substrate to the outside: the first crystal bed dielectric layer, the second crystal bed dielectric layer and the fourth dielectric combination layer are sequentially arranged on the first crystal bed dielectric layer and the second crystal bed dielectric layer.
The first dielectric combination layer comprises the following components in sequence from the glass substrate to the outside: the ZnO layer I, the SiNx layer I and the ZnO layer II are sequentially arranged on the substrate;
the second dielectric medium combination layer comprises the following components in sequence from the glass substrate to the outside: a SiNx layer II and a ZnSnO layer I;
the third dielectric combination layer comprises the following components in sequence from the glass substrate to the outside: ZnSnO layer II and ZnO layer III;
the fourth dielectric medium combination layer is a SiNx layer III;
the first barrier protection layer is a NiCr layer I, and the second barrier protection layer is a NiCr layer II;
the first crystal bed dielectric layer is an AZO layer I, and the second crystal bed dielectric layer is an AZO layer II.
With reference to fig. 2-3, the preparation method of the flat-bent matched double-silver coated glass is realized by adopting a vacuum magnetron sputtering coating technology, and after a glass substrate is cleaned and dried, the glass substrate is subjected to pre-vacuum transition, and then the following steps are carried out:
(1) sputtering a ZnO layer I, a SiNx layer I and a ZnO layer II on the surface of a glass substrate in sequence, wherein target materials are a zinc-aluminum alloy target, a silicon-aluminum alloy target and a zinc-aluminum alloy target respectively, the ZnO layer I and the ZnO layer II are sputtered in an argon-oxygen atmosphere, and the SiNx layer I is sputtered in an argon-nitrogen atmosphere;
(2) sputtering a first silver layer, a NiCr layer I and an AZO layer I on the surface of the ZnO layer II in sequence, wherein target materials are a silver target, a nickel-chromium target and a zinc-aluminum oxide target respectively, and the sputtering is carried out in a pure argon atmosphere;
(3) sputtering a SiNx layer II, a ZnSnO layer I, a SiOx layer, a ZnSnO layer II and a ZnO layer III on the surface of the AZO layer I in sequence, wherein target materials are a silicon-aluminum alloy target, a zinc-tin alloy target, a silicon-aluminum alloy target, a zinc-tin alloy target and a zinc-aluminum alloy target respectively, the SiNx layer II is sputtered in an argon-nitrogen atmosphere, and the rest is sputtered in an argon-oxygen atmosphere;
(4) sputtering a second silver layer, a NiCr layer II and an AZO layer II on the surface of the ZnO layer III in sequence, wherein target materials are a silver target, a nickel-chromium target and a zinc-aluminum oxide target respectively, and the sputtering is carried out in a pure argon atmosphere;
(5) and sputtering a SiNx layer III on the surface of the AZO layer II, wherein the target material is a silicon-aluminum alloy target and sputtering in an argon-nitrogen atmosphere.
Preparing a first silver layer and a second silver layer, wherein the power type adopts direct current, and the cathode type adopts a planar target; preparing a ZnO layer I, a SiNx layer I, a ZnO layer II, a NiCr layer I, an AZO layer I, a SiNx layer II, a ZnSnO layer I, a SiOx layer, a ZnSnO layer II, a ZnO layer III, a NiCr layer II, an AZO layer II and a SiNx layer III, wherein the power type adopts alternating current, and the cathode type adopts a rotating target.
Specific process parameter settings for inventive example 1 are shown in table 1.
TABLE 1
The thickness of the SiOx layer in the process parameters of example 1 was set to 30nm, 20nm, 10nm, and 0nm, respectively, to obtain flat-bent matched double silver coated glasses of examples 2, 3, 4, and 1.
According to the method for measuring the color and the color difference of the building glass GB T36142-2018, the single-sheet transmission colors T, a, b, the single-sheet reflection colors T, a, b and the total color difference △ E of the bent glass and the flat bent transmission color are respectively measured on the flat bent matched double-silver coated glass prepared in the embodiments 1 to 4 and the comparative example 1, and the obtained measurement data are shown in tables 2 and 3.
TABLE 2
TABLE 3
From the data in table 2, it can be seen that in examples 1 to 4, compared with comparative example 1, the difference between the values of the transmission colors T, a, b of the bent glass sheet of comparative example 1 and the values of the transmission colors T, a, b of the flat glass sheet is larger, and the total color difference △ E of the flat bent transmission colors of examples 1 to 4 is smaller than that of comparative example 1, which indicates that the arrangement of the SiOx layer effectively improves the transmission color of the bent glass, so that the bent glass of examples 1 to 4 achieves the same transmission colors of the bent glass and the flat glass by adjusting the thickness of the SiOx layer, and that in example 1, compared with examples 2 to 4, the values of the transmission colors T, a, b of the bent glass sheet of example 1 and the transmission colors T, a, b of the flat glass sheet are closest to each other, and the total color difference △ E of the flat bent transmission colors of example 1 is only 0.4, which indicates that the difference between the bent glass sheet of SiOx layer of example 1 and the flat glass is 40nm, and the bent glass has the minimum transmission color difference between the bent glass and the flat glass.
From the data in table 3, it can be seen that in examples 1 to 4, compared with comparative example 1, the difference between the values of the curved glass single-sheet reflected colors T, a and b of comparative example 1 and the values of the flat glass single-sheet reflected colors T, a and b is larger, and the total color difference △ E of the flat curved reflected colors of examples 1 to 4 is smaller than that of comparative example 1, which indicates that the arrangement of the SiOx layer effectively improves the reflected color of the curved glass, so that the curved glasses of examples 1 to 4 achieve the same reflected colors of the curved glass and the flat glass by adjusting the thickness of the SiOx layer, and that in example 1, compared with examples 2 to 4, the values of the curved glass single-sheet reflected colors T, a and b of example 1 and the flat glass single-sheet reflected colors T, a and b of example 1 are closest to each other, and the total color difference △ E of the flat curved reflected colors of example 1 is only 0.2, which indicates that the curved glass and the flat glass in example 1, the curved glass, the flat glass, have the thickness of SiOx.
In conclusion, the flat-bent matched double-silver coated glass prepared by the preparation method solves the problem that the transmission color and the reflection color of the bent glass part and the flat glass part of the coated glass in the prior art are not consistent; the flat-bent matched double-silver coated glass further matches and combines various coating materials in the coating, the zinc oxide layer of the dielectric combination layer and the metal silver layer of the functional layer are good in adhesion and have a synergistic effect, the zinc oxide layer is tightly adhered to the metal silver layer, and the metal silver layer is effectively prevented from being oxidized, so that the infrared ray and ultraviolet ray blocking effect of the metal silver layer is kept, and the service life of the coated glass is prolonged. The flat-bent matched double-silver coated glass is prepared by adopting a vacuum magnetron sputtering coating technology, and is sequentially coated under a high vacuum background, the product has strong additivity, simple debugging and stable quality, and the color change can be monitored in real time, so that the consistency of the transmission color and the reflection color of the bent glass part and the flat glass part of the product is ensured, the performance of an interlayer product is improved, the subsequent toughening imaging process is improved, the production efficiency is greatly improved, the rejection rate is reduced, the production cost is saved, and the preparation method is simple and mature, is suitable for industrial production, and can be widely popularized and applied.
The above disclosure is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, so that the appended claims are intended to cover all such modifications and changes as fall within the true spirit of the invention.
Claims (10)
1. The utility model provides a supporting double silver coated glass of flat curved, includes the glass substrate and locates the membranous layer structure on glass substrate surface, its characterized in that, membranous layer structure certainly the glass substrate outwards includes in proper order: the structure comprises a first dielectric combination layer, a first silver layer, a first blocking protective layer, a first crystal bed dielectric layer, a second dielectric combination layer, a SiOx layer, a third dielectric combination layer, a second silver layer, a second blocking protective layer, a second crystal bed dielectric layer and a fourth dielectric combination layer, wherein the thickness of the SiOx layer is 1-50 nm.
2. The flatwise curved mating double silver coated glass of claim 1, wherein the first dielectric composite layer comprises, in order from the glass substrate: ZnO layer I, SiNx layer I and ZnO layer II, ZnO layer I with ZnO layer II's thickness all is less than SiNx layer I's thickness.
3. The flatwise curved mating double silver coated glass of claim 1, wherein the thickness of the first silver layer is less than the thickness of the second silver layer.
4. The flatwise bending matched double-silver coated glass according to claim 1, wherein the first barrier protective layer is a NiCr layer I, the second barrier protective layer is a NiCr layer II, the thickness of the first barrier protective layer is 3-6nm, and the thickness of the second barrier protective layer is 4-8 nm.
5. The flatwise bending matched double-silver coated glass according to claim 1, wherein the first crystal bed dielectric layer is an AZO layer I, the second crystal bed dielectric layer is an AZO layer II, and the thicknesses of the first crystal bed dielectric layer and the second crystal bed dielectric layer are both 3-6 nm.
6. The flatwise curved mating double silver coated glass of claim 2, wherein the second dielectric composite layer comprises, in order from the glass substrate: a SiNx layer II and a ZnSnO layer I; the third dielectric medium combination layer comprises the following components in sequence from the glass substrate to the outside: and the thicknesses of the SiNx layer II, the ZnSnO layer I and the ZnSnO layer II are all larger than that of the ZnO layer III.
7. The flatwise bending matched double-silver coated glass according to claim 6, wherein the fourth dielectric combination layer is a SiNx layer III, and the thickness of the SiNx layer III is larger than that of the SiNx layer I and that of the SiNx layer II.
8. The flat-bending matched double-silver coated glass as claimed in claim 1, wherein the thickness of the film structure is 190-275 nm.
9. A preparation method of flat-bent matched double-silver coated glass is realized by adopting a vacuum magnetron sputtering coating technology and is characterized by comprising the following steps:
(1) sputtering a ZnO layer I, a SiNx layer I and a ZnO layer II on the surface of a glass substrate in sequence, wherein target materials are a zinc-aluminum alloy target, a silicon-aluminum alloy target and a zinc-aluminum alloy target respectively, the ZnO layer I and the ZnO layer II are sputtered in an argon-oxygen atmosphere, and the SiNx layer I is sputtered in an argon-nitrogen atmosphere;
(2) sputtering a first silver layer, a NiCr layer I and an AZO layer I on the surface of the ZnO layer II in sequence, wherein target materials are a silver target, a nickel-chromium target and a zinc-aluminum oxide target respectively, and the sputtering is carried out in a pure argon atmosphere;
(3) sputtering a SiNx layer II, a ZnSnO layer I, a SiOx layer, a ZnSnO layer II and a ZnO layer III on the surface of the AZO layer I in sequence, wherein target materials are a silicon-aluminum alloy target, a zinc-tin alloy target, a silicon-aluminum alloy target, a zinc-tin alloy target and a zinc-aluminum alloy target respectively, the SiNx layer II is sputtered in an argon-nitrogen atmosphere, and the ZnSnO layer I, the SiOx layer, the ZnSnO layer II and the ZnO layer III are sputtered in an argon-oxygen atmosphere;
(4) sputtering a second silver layer, a NiCr layer II and an AZO layer II on the surface of the ZnO layer III in sequence, wherein target materials are a silver target, a nickel-chromium target and a zinc-aluminum oxide target respectively, and the sputtering is carried out in a pure argon atmosphere;
(5) and sputtering a SiNx layer III on the surface of the AZO layer II, wherein a target material is a silicon-aluminum alloy target and sputtering in an argon nitrogen atmosphere.
10. The method for preparing flat-bent matched double-silver coated glass according to claim 9, wherein in the preparation of the first silver layer and the second silver layer, the power type adopts direct current, and the cathode type adopts a plane target; in the preparation of the ZnO layer I, the SiNx layer I, the ZnO layer II, the NiCr layer I, the AZO layer I, the SiNx layer II, the ZnSnO layer I, the SiOx layer, the ZnSnO layer II, the ZnO layer III, the NiCr layer II, the AZO layer II and the SiNx layer III, the power type adopts alternating current, and the cathode type adopts a rotating target.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111704369A (en) * | 2020-06-24 | 2020-09-25 | 咸宁南玻节能玻璃有限公司 | Panoramic gray double-silver low-emissivity coated glass and preparation method thereof |
| CN115321835A (en) * | 2022-08-30 | 2022-11-11 | 东莞南玻工程玻璃有限公司 | Flat-bent matched double-silver glass and preparation method thereof |
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Cited By (3)
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|---|---|---|---|---|
| CN111704369A (en) * | 2020-06-24 | 2020-09-25 | 咸宁南玻节能玻璃有限公司 | Panoramic gray double-silver low-emissivity coated glass and preparation method thereof |
| CN115321835A (en) * | 2022-08-30 | 2022-11-11 | 东莞南玻工程玻璃有限公司 | Flat-bent matched double-silver glass and preparation method thereof |
| CN115321835B (en) * | 2022-08-30 | 2024-04-09 | 东莞南玻工程玻璃有限公司 | Flat-bending matched double-silver glass and preparation method thereof |
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Application publication date: 20200619 |