CN110977362A - Salt-fog-corrosion-resistant parallel seam welding alloy cover plate and preparation method thereof - Google Patents
Salt-fog-corrosion-resistant parallel seam welding alloy cover plate and preparation method thereof Download PDFInfo
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- CN110977362A CN110977362A CN201911369230.4A CN201911369230A CN110977362A CN 110977362 A CN110977362 A CN 110977362A CN 201911369230 A CN201911369230 A CN 201911369230A CN 110977362 A CN110977362 A CN 110977362A
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- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 112
- 239000000956 alloy Substances 0.000 title claims abstract description 112
- 238000003466 welding Methods 0.000 title claims abstract description 42
- 238000005260 corrosion Methods 0.000 title claims abstract description 30
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 239000011241 protective layer Substances 0.000 claims abstract description 83
- 239000007921 spray Substances 0.000 claims abstract description 29
- 150000003839 salts Chemical class 0.000 claims abstract description 28
- 230000007797 corrosion Effects 0.000 claims abstract description 27
- 238000004140 cleaning Methods 0.000 claims abstract description 14
- 238000001035 drying Methods 0.000 claims abstract description 14
- 238000005520 cutting process Methods 0.000 claims abstract description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052737 gold Inorganic materials 0.000 claims abstract description 8
- 239000010931 gold Substances 0.000 claims abstract description 8
- 238000003754 machining Methods 0.000 claims abstract description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910017052 cobalt Inorganic materials 0.000 claims description 4
- 239000010941 cobalt Substances 0.000 claims description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 3
- 229910001096 P alloy Inorganic materials 0.000 claims description 3
- 229910000833 kovar Inorganic materials 0.000 claims description 3
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 18
- 230000008018 melting Effects 0.000 description 16
- 238000002844 melting Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 13
- 238000007747 plating Methods 0.000 description 10
- 229910052759 nickel Inorganic materials 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- 238000007789 sealing Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000006378 damage Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 239000003292 glue Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
The invention discloses a salt-fog-corrosion-resistant parallel seam welding alloy cover plate and a preparation method thereof, and belongs to the technical field of integrated circuit packaging. The preparation method of the salt spray corrosion resistant parallel seam welding alloy cover plate comprises the following steps: machining or corroding the alloy cover plate to obtain a T-shaped alloy cover plate column; forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying; forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying the second protective layer; cutting the alloy cover plate column along the transverse direction to form a single alloy cover plate body; removing burrs of the alloy cover plate body; and forming a third gold protective layer on the outer surface of the alloy cover plate body. According to the salt spray corrosion resistant parallel seam welding alloy cover plate and the preparation method thereof, the first protective layer and the second protective layer are sequentially formed on the outer surface of the T-shaped alloy cover plate column, and then the alloy cover plate body is formed by cutting, so that a plurality of alloy cover plate bodies with the first protective layer and the second protective layer can be quickly obtained.
Description
Technical Field
The invention relates to the technical field of integrated circuit packaging, in particular to a salt spray corrosion resistant parallel seam welding alloy cover plate and a preparation method thereof.
Background
Parallel seam welding is an important cover plate sealing technology for high-reliability integrated circuit airtight packaging, and is characterized in that high temperature is locally generated, the temperature of a chip in a shell is low, and thermal shock is not generated on the chip. The common parallel seam welding alloy cover plate adopts nickel as a surface coating, and a chemical nickel plating process with a lower melting point is generally adopted in order to avoid the influence of overhigh temperature in the welding process on circuit chips and devices in a packaging shell. In the process, the weight ratio of phosphorus doped in the chemical nickel plating solution is generally between 8 and 12 percent, and the melting point of a plating layer is 880 ℃. In parallel seam welding, when the temperature of the contact part of the cover plate and the sealing ring is higher than the melting point of the electroless nickel plating layer by controlling the welding current, the sealing welding between the cover plate and the sealing ring can be realized.
The conventional parallel seam welding alloy cover plate adopts the integral chemical nickel plating process to form the surface nickel plating layer with the thickness of only a few microns, so that the diffusion and exposure of iron elements in a base body at the bottom of a plating layer are difficult to avoid in the parallel seam welding process, and the basic reason that a packaged product adopting the parallel seam welding sealing process is often rusted and failed in a salt spray test is shown. Therefore, the problem of corrosion failure in a salt spray test occurs, and hidden danger is brought to reliability in circuit application.
Disclosure of Invention
The invention aims to provide a salt spray corrosion resistant parallel seam welding alloy cover plate and a preparation method thereof, and aims to solve the problem that the diffusion and exposure of iron elements in a base body at the bottom of a coating layer are difficult to avoid in the parallel seam welding process because the thickness of a nickel coating layer formed on the surface of the conventional parallel seam welding alloy cover plate by adopting an integral chemical nickel plating process is only a few micrometers.
In order to solve the technical problem, the invention provides a preparation method of a parallel seam welding alloy cover plate capable of resisting salt spray corrosion, which comprises the following steps:
after the alloy cover plate is cleaned, drying the alloy cover plate;
machining or corroding the alloy cover plate to obtain a T-shaped alloy cover plate column;
forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying;
forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying the second protective layer;
cutting the alloy cover plate column along the transverse direction to form a single alloy cover plate body;
removing burrs of the alloy cover plate body;
forming a third gold protective layer on the outer surface of the alloy cover plate body;
and finishing the manufacture of the alloy cover plate after cleaning.
The utility model provides an anti parallel seam welding alloy apron of salt spray corrosion, includes the alloy apron body of T type, the surface of alloy apron body wraps up in proper order and is formed with first protective layer, second protective layer and third protective layer.
Optionally, the material of the first protective layer includes titanium, cobalt, zirconium, hafnium, niobium, tantalum, titanium, platinum, molybdenum, tungsten, and chromium.
Optionally, the thickness of the first protection layer is 2 μm to 8.89 μm.
Optionally, the thickness of the second protective layer is 2 μm to 8.89 μm.
Optionally, the third protective layer is made of gold, and the thickness of the third protective layer is 0.01-6 μm.
Optionally, the second protective layer is a nickel-phosphorus alloy, wherein the weight ratio of phosphorus is 8% -12%.
Optionally, the alloy cover plate body is kovar or iron-nickel alloy.
In the salt spray corrosion resistant parallel seam welding alloy cover plate and the preparation method thereof provided by the invention, the preparation method of the salt spray corrosion resistant parallel seam welding alloy cover plate comprises the following steps: after the alloy cover plate is cleaned, drying the alloy cover plate; machining or corroding the alloy cover plate to obtain a T-shaped alloy cover plate column; forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying; forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying the second protective layer; cutting the alloy cover plate column along the transverse direction to form a single alloy cover plate body; removing burrs of the alloy cover plate body; forming a third gold protective layer on the outer surface of the alloy cover plate body by applying an electroplating technology; and finishing the manufacture of the alloy cover plate after cleaning. In the salt spray corrosion resistant parallel seam welding alloy cover plate and the preparation method thereof, after a first protective layer and a second protective layer are sequentially formed on the outer surface of a T-shaped alloy cover plate column, a single alloy cover plate body is formed by cutting along the transverse direction, a plurality of alloy cover plate bodies with the first protective layer and the second protective layer can be quickly obtained, and the working efficiency is greatly improved; meanwhile, a first protective layer and a second protective layer are formed on the outer surface of the alloy cover plate column and then cut to form a single alloy cover plate body, and compared with the method for directly spraying the first protective layer and the second protective layer on the single alloy cover plate body, the spraying difficulty is reduced; in addition, the first protective layer and the second protective layer are formed on the outer surface of the alloy cover plate column and then cut to form a single alloy cover plate body, and the protective layer with larger thickness can be obtained compared with the protective layer directly sprayed on the side edge of the single alloy cover plate body, so that the diffusion and exposure of iron elements in the alloy cover plate body are avoided.
Drawings
FIG. 1 is a schematic structural view of an alloy sheet;
FIG. 2 is a schematic structural view of a T-shaped alloy cover plate column;
FIG. 3 is a schematic structural diagram of a first protective layer formed on the outer surface of a T-shaped alloy cover plate column;
FIG. 4 is a schematic structural diagram of a second protective layer formed outside the first protective layer;
FIG. 5 is a cross-sectional view of a salt spray corrosion resistant parallel seam welded alloy cover plate provided in accordance with the present invention;
FIG. 6 is a front view of a salt spray corrosion resistant parallel seam welded alloy cover plate provided in accordance with the present invention;
FIG. 7 is a top view of a salt spray corrosion resistant parallel seam welded alloy cover plate provided in accordance with the present invention.
Detailed Description
The invention provides a salt spray corrosion resistant parallel seam welding alloy cover plate and a preparation method thereof, which are further described in detail with reference to the accompanying drawings and specific embodiments. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Example one
The invention provides a preparation method of a parallel seam welding alloy cover plate capable of resisting salt spray corrosion, which comprises the following steps: after the alloy cover plate shown in FIG. 1 is cleaned, drying is carried out; machining or corroding the alloy cover plate to obtain a T-shaped alloy cover plate column shown in figure 2; forming a first protective layer on the outer surface of the alloy cover plate column, please refer to fig. 3, and cleaning and drying; forming a second protective layer on the outer surface of the first protective layer, please refer to fig. 4, and cleaning and drying; cutting the alloy cover plate column along the transverse direction to form a single alloy cover plate body; removing burrs of the alloy cover plate body; forming a third gold protective layer on the outer surface of the alloy cover plate body, please refer to fig. 5; and finishing the manufacture of the alloy cover plate after cleaning. The first protective layer is formed by applying plasma spraying, electron beam thermal evaporation, ion sputtering, electroplating and chemical plating technologies, the second protective layer is formed by applying ion sputtering, electroplating and chemical plating technologies, and the third protective layer is formed by applying electroplating technologies. In the salt spray corrosion resistant parallel seam welding alloy cover plate and the preparation method thereof, after a first protective layer and a second protective layer are sequentially formed on the outer surface of a T-shaped alloy cover plate column, a single alloy cover plate body is formed by cutting along the transverse direction, a plurality of alloy cover plate bodies with the first protective layer and the second protective layer can be quickly obtained, and the working efficiency is greatly improved; meanwhile, a first protective layer and a second protective layer are formed on the outer surface of the alloy cover plate column and then cut to form a single alloy cover plate body, and compared with the method for directly spraying the first protective layer and the second protective layer on the single alloy cover plate body, the spraying difficulty is reduced; in addition, a single alloy cover plate body is formed by cutting after the first protective layer and the second protective layer are formed on the outer surface of the alloy cover plate column, and a protective layer with a larger thickness can be obtained compared with the case that the protective layer is directly sprayed on the side edge of the single alloy cover plate body (for example, glue is coated on the side edge of a book and glue is coated on a piece of paper, obviously, the glue is more easily coated on the side edge of the book, and the obtained glue layer is thicker). Compared with the existing parallel seam welding nickel-plated cover plate, the invention can obtain the same sealing effect without increasing welding current.
The parallel seam welding alloy cover plate capable of resisting salt spray corrosion comprises a T-shaped alloy cover plate body 4, wherein a first protective layer 1, a second protective layer 2 and a third protective layer 3 are sequentially wrapped on the outer surface of the alloy cover plate body 4. Preferably, the alloy cover plate body 4 is kovar or iron-nickel alloy.
Specifically, in the first embodiment, the material of the first protection layer 1 may be titanium, cobalt, zirconium, hafnium, niobium, tantalum, titanium, platinum, molybdenum, tungsten, and chromium, wherein the melting point of titanium is 3410 ℃, the melting point of cobalt is 1495 ℃, the melting point of zirconium is 1852 ℃, the melting point of hafnium is 2230 ℃, the melting point of niobium is 2468 ℃, the melting point of tantalum is 2996 ℃, the melting point of titanium is 1675 ℃, the melting point of platinum is 1774 ℃, the melting point of molybdenum is 2617 ℃, the melting point of tungsten is 3410 ℃, and the melting point of chromium is 1857 ℃. The thickness of the first protective layer 1 is 2 μm to 8.89 μm. The thickness of the second protective layer 2 is 2 μm to 8.89 μm. The second protective layer 2 is made of nickel-phosphorus alloy, the melting point is 880 ℃, and the weight ratio of phosphorus is 8-12%. The third protective layer 3 is made of gold, and the thickness of the third protective layer is 0.01-6 mu m.
Because the damage of the parallel seam welding process to the welding edge is inevitable, the damage size can only be controlled through process improvement, and the problem of the damage of the welding edge cannot be solved fundamentally. Salt spray corrosion resistant parallel seam welding alloy apron can not form obvious welding seam point in parallel seam welding in-process at the external surface welding seam department, can not melt when melting the nickel material alloy apron body 4 reduces to the minimum to the destruction of external surface coating structure, has effectively avoided the diffusion of iron element to expose, can play and improve the corrosion phenomenon of avoiding the back product of encapsulation in the salt spray test even, can satisfy the requirement of highly reliable ceramic package to the salt spray test.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (8)
1. The preparation method of the parallel seam welding alloy cover plate resistant to salt spray corrosion is characterized by comprising the following steps of:
after the alloy cover plate is cleaned, drying the alloy cover plate;
machining or corroding the alloy cover plate to obtain a T-shaped alloy cover plate column;
forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying;
forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying the second protective layer;
cutting the alloy cover plate column along the transverse direction to form a single alloy cover plate body;
removing burrs of the alloy cover plate body;
forming a third gold protective layer on the outer surface of the alloy cover plate body;
and finishing the manufacture of the alloy cover plate after cleaning.
2. The utility model provides an anti parallel seam welding alloy apron of salt spray corrosion which characterized in that, includes alloy apron body (4) of T type, the surface of alloy apron body (4) wraps up in proper order and is formed with first protective layer (1), second protective layer (2) and third protective layer (3).
3. The salt spray corrosion resistant parallel seam weld alloy cover plate of claim 2, wherein the material of the first protective layer (1) comprises titanium, cobalt, zirconium, hafnium, niobium, tantalum, titanium, platinum, molybdenum, tungsten and chromium.
4. The salt spray corrosion resistant parallel seam welding alloy cover plate according to claim 2, wherein the thickness of the first protective layer (1) is 2 μm to 8.89 μm.
5. The salt spray corrosion resistant parallel seam welding alloy cover plate according to claim 2, wherein the thickness of the second protective layer (2) is 2 μm to 8.89 μm.
6. The salt spray corrosion resistant parallel seam welding alloy cover plate according to claim 2, wherein the material of the third protective layer (3) is gold, and the thickness of the third protective layer is 0.01-6 μm.
7. The salt-spray corrosion resistant parallel seam welding alloy cover plate according to claim 2, wherein the second protective layer (2) is a nickel-phosphorus alloy, wherein the weight ratio of phosphorus is 8-12%.
8. The salt spray corrosion resistant parallel seam welded alloy cover plate of claim 2, wherein said alloy cover plate body (4) is kovar or iron-nickel alloy.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911369230.4A CN110977362B (en) | 2019-12-26 | 2019-12-26 | Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof |
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| CN201911369230.4A CN110977362B (en) | 2019-12-26 | 2019-12-26 | Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof |
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| CN110977362A true CN110977362A (en) | 2020-04-10 |
| CN110977362B CN110977362B (en) | 2024-05-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113707618A (en) * | 2021-08-26 | 2021-11-26 | 中国电子科技集团公司第五十八研究所 | Salt-spray-corrosion-resistant parallel seam welding alloy cover plate and preparation method thereof |
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| EP0175901A1 (en) * | 1984-09-26 | 1986-04-02 | Semi-Alloys Inc. | Plated parts and their production |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113707618A (en) * | 2021-08-26 | 2021-11-26 | 中国电子科技集团公司第五十八研究所 | Salt-spray-corrosion-resistant parallel seam welding alloy cover plate and preparation method thereof |
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| CN110977362B (en) | 2024-05-07 |
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