CN110977362B - Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof - Google Patents
Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof Download PDFInfo
- Publication number
- CN110977362B CN110977362B CN201911369230.4A CN201911369230A CN110977362B CN 110977362 B CN110977362 B CN 110977362B CN 201911369230 A CN201911369230 A CN 201911369230A CN 110977362 B CN110977362 B CN 110977362B
- Authority
- CN
- China
- Prior art keywords
- cover plate
- alloy cover
- protective layer
- alloy
- salt spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 102
- 239000000956 alloy Substances 0.000 title claims abstract description 102
- 238000003466 welding Methods 0.000 title claims abstract description 38
- 150000003839 salts Chemical class 0.000 title claims abstract description 27
- 230000007797 corrosion Effects 0.000 title claims abstract description 26
- 238000005260 corrosion Methods 0.000 title claims abstract description 26
- 239000007921 spray Substances 0.000 title claims abstract description 26
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 239000011241 protective layer Substances 0.000 claims abstract description 72
- 238000004140 cleaning Methods 0.000 claims abstract description 17
- 238000001035 drying Methods 0.000 claims abstract description 13
- 239000010410 layer Substances 0.000 claims abstract description 13
- 238000005520 cutting process Methods 0.000 claims abstract description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052737 gold Inorganic materials 0.000 claims abstract description 8
- 239000010931 gold Substances 0.000 claims abstract description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910017052 cobalt Inorganic materials 0.000 claims description 4
- 239000010941 cobalt Substances 0.000 claims description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 3
- 229910001096 P alloy Inorganic materials 0.000 claims description 3
- 229910000833 kovar Inorganic materials 0.000 claims description 3
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical group [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 claims description 3
- 238000004806 packaging method and process Methods 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 20
- 230000008018 melting Effects 0.000 description 15
- 238000002844 melting Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 14
- 238000007747 plating Methods 0.000 description 13
- 229910052759 nickel Inorganic materials 0.000 description 10
- 239000000126 substance Substances 0.000 description 7
- 238000007789 sealing Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 4
- 239000003292 glue Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
The invention discloses a salt spray corrosion resistant parallel seam welding alloy cover plate and a preparation method thereof, and belongs to the technical field of integrated circuit packaging. The preparation method of the salt spray corrosion resistant parallel seam welding alloy cover plate comprises the following steps: the alloy cover plate is machined or corroded to obtain a T-shaped alloy cover plate column; forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying; forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying; cutting the alloy cover plate column transversely to form a single alloy cover plate body; removing burrs of the alloy cover plate body; and forming a third gold protection layer on the outer surface of the alloy cover plate body. According to the salt spray corrosion resistant parallel seam welding alloy cover plate and the preparation method thereof, after the first protective layer and the second protective layer are sequentially formed on the outer surface of the T-shaped alloy cover plate column, the alloy cover plate body is formed by cutting, and a plurality of alloy cover plate bodies with the first protective layer and the second protective layer can be obtained rapidly.
Description
Technical Field
The invention relates to the technical field of integrated circuit packaging, in particular to a salt spray corrosion resistant parallel seam welding alloy cover plate and a preparation method thereof.
Background
The parallel seam welding is an important cover plate sealing technology for the airtight package of a high-reliability integrated circuit, and is characterized in that high temperature is locally generated, the temperature of a chip in the shell is low, and thermal shock is not generated on the chip. The common parallel seam welding alloy cover plate adopts nickel as a surface coating, and in order to avoid the influence of overhigh temperature on circuit chips and devices in a packaging shell in the welding process, a chemical nickel plating process with a lower melting point is generally adopted. In the process, the weight ratio of the doped phosphorus in the chemical nickel plating solution is generally 8% -12%, and the melting point of the plating layer is 880 ℃. In parallel seam welding, when the temperature of the contact part of the cover plate and the sealing ring is higher than the melting point of the chemical nickel plating layer by controlling the welding current, the sealing welding between the cover plate and the sealing ring can be realized.
The conventional parallel seam welding alloy cover plate adopts an integral chemical nickel plating process to form a surface nickel plating layer with the thickness of only a few micrometers, so that the diffusion exposure of iron elements in a substrate at the bottom of a plating layer is difficult to avoid in the parallel seam welding process, and the diffusion exposure is the root cause of corrosion failure frequently occurring in a salt spray test of a packaged product adopting a parallel seam welding sealing process. Therefore, the corrosion failure problem occurs in the salt spray test, and hidden danger is brought to the reliability in circuit application.
Disclosure of Invention
The invention aims to provide a salt spray corrosion resistant parallel seam welding alloy cover plate and a preparation method thereof, which are used for solving the problem that the conventional parallel seam welding alloy cover plate adopts an integral chemical nickel plating process to form a surface nickel plating layer with the thickness of only a few microns, so that the diffusion exposure of iron element in a substrate at the bottom of a plating layer is difficult to avoid in the parallel seam welding process.
In order to solve the technical problems, the invention provides a preparation method of a salt spray corrosion resistant parallel seam welding alloy cover plate, which comprises the following steps:
cleaning the alloy cover plate, and drying;
The alloy cover plate is machined or corroded to obtain a T-shaped alloy cover plate column;
forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying;
forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying;
Cutting the alloy cover plate column transversely to form a single alloy cover plate body;
removing burrs of the alloy cover plate body;
forming a third gold protection layer on the outer surface of the alloy cover plate body;
And (5) after cleaning, manufacturing the alloy cover plate.
The utility model provides an anti salt fog corrosion's parallel seam welding alloy apron, includes the alloy apron body of T type, the surface parcel of alloy apron body is formed with first protective layer, second protective layer and third protective layer in proper order.
Optionally, the material of the first protective layer includes titanium, cobalt, zirconium, hafnium, niobium, tantalum, titanium, platinum, molybdenum, tungsten, and chromium.
Optionally, the thickness of the first protective layer is 2 μm to 8.89 μm.
Optionally, the thickness of the second protective layer is 2 μm to 8.89 μm.
Optionally, the material of the third protective layer is gold, and the thickness of the third protective layer is 0.01-6 μm.
Optionally, the second protective layer is nickel-phosphorus alloy, wherein the weight ratio of phosphorus is 8% -12%.
Optionally, the alloy cover plate body is kovar or iron-nickel alloy.
In the parallel seam welding alloy cover plate resistant to salt spray corrosion and the preparation method thereof provided by the invention, the preparation method of the parallel seam welding alloy cover plate resistant to salt spray corrosion comprises the following steps: cleaning the alloy cover plate, and drying; the alloy cover plate is machined or corroded to obtain a T-shaped alloy cover plate column; forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying; forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying; cutting the alloy cover plate column transversely to form a single alloy cover plate body; removing burrs of the alloy cover plate body; forming a third gold protection layer on the outer surface of the alloy cover plate body by using an electroplating technology; and (5) after cleaning, manufacturing the alloy cover plate. In the parallel seam welding alloy cover plate resistant to salt spray corrosion and the preparation method thereof, after a first protective layer and a second protective layer are sequentially formed on the outer surface of a T-shaped alloy cover plate column, a single alloy cover plate body is formed by transverse cutting, so that a plurality of alloy cover plate bodies with the first protective layer and the second protective layer can be quickly obtained, and the working efficiency is greatly improved; meanwhile, after the first protective layer and the second protective layer are formed on the outer surface of the alloy cover plate column, cutting is carried out to form a single alloy cover plate body, and compared with the process of directly spraying the first protective layer and the second protective layer on the single alloy cover plate body, the spraying difficulty is reduced; in addition, after the first protective layer and the second protective layer are formed on the outer surface of the alloy cover plate column, cutting is carried out to form a single alloy cover plate body, and compared with the method that the protective layer is directly sprayed on the side edge of the single alloy cover plate body, the protective layer with larger thickness can be obtained, so that the diffusion exposure of iron element in the alloy cover plate body is avoided.
Drawings
FIG. 1 is a schematic structural view of an alloy sheet;
FIG. 2 is a schematic structural view of a T-shaped alloy decking column;
FIG. 3 is a schematic view of the structure of the outer surface of a T-shaped alloy cover plate column to form a first protection layer;
FIG. 4 is a schematic view of the structure of the first protective layer after forming a second protective layer;
FIG. 5 is a cross-sectional view of a parallel seam welded alloy cover plate resistant to salt spray corrosion provided by the invention;
FIG. 6 is an elevation view of a salt spray corrosion resistant parallel seam welded alloy cover plate provided by the present invention;
FIG. 7 is a top view of a parallel seam welded alloy cover plate resistant to salt spray corrosion provided by the invention.
Detailed Description
The invention provides a salt spray corrosion resistant parallel seam welding alloy cover plate and a preparation method thereof, and the salt spray corrosion resistant parallel seam welding alloy cover plate and the preparation method thereof are described in further detail below with reference to the accompanying drawings and specific embodiments. Advantages and features of the invention will become more apparent from the following description and from the claims. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
Example 1
The invention provides a preparation method of a salt spray corrosion resistant parallel seam welding alloy cover plate, which comprises the following steps: the alloy cover plate shown in fig. 1 is cleaned and then dried; the alloy cover plate is machined or corroded to obtain a T-shaped alloy cover plate column shown in figure 2; forming a first protective layer on the outer surface of the alloy cover plate column, referring to fig. 3, and cleaning and drying; forming a second protective layer on the outer surface of the first protective layer, please refer to fig. 4, and cleaning and drying; cutting the alloy cover plate column transversely to form a single alloy cover plate body; removing burrs of the alloy cover plate body; forming a third gold protection layer on the outer surface of the alloy cover plate body, please refer to fig. 5; and (5) after cleaning, manufacturing the alloy cover plate. The means for forming the first protective layer is to apply plasma spraying, electron beam thermal evaporation, ion sputtering, electroplating and chemical plating technology, the means for forming the second protective layer is to apply ion sputtering, electroplating and chemical plating technology, and the means for forming the third protective layer is to apply electroplating technology. In the parallel seam welding alloy cover plate resistant to salt spray corrosion and the preparation method thereof, after a first protective layer and a second protective layer are sequentially formed on the outer surface of a T-shaped alloy cover plate column, a single alloy cover plate body is formed by transverse cutting, so that a plurality of alloy cover plate bodies with the first protective layer and the second protective layer can be quickly obtained, and the working efficiency is greatly improved; meanwhile, after the first protective layer and the second protective layer are formed on the outer surface of the alloy cover plate column, cutting is carried out to form a single alloy cover plate body, and compared with the process of directly spraying the first protective layer and the second protective layer on the single alloy cover plate body, the spraying difficulty is reduced; in addition, after forming the first protective layer and the second protective layer on the outer surface of the alloy cover plate column, cutting is performed to form a single alloy cover plate body, and compared with the process of directly spraying the protective layer on the side edge of the single alloy cover plate body, the protective layer with larger thickness can be obtained (for example, glue is coated on the side edge of a book and glue is coated on a piece of paper, obviously, the side edge of the book is easier to coat, and the obtained glue layer is thicker). Compared with the existing parallel seam welding nickel plating cover plate, the invention can obtain the same sealing effect without increasing welding current.
The utility model provides a parallel seam welding alloy apron of salt spray corrosion resistance, as shown in fig. 5-7, includes the alloy apron body 4 of T, the surface parcel of alloy apron body 4 is formed with first protective layer 1, second protective layer 2 and third protective layer 3 in proper order. Preferably, the alloy cover plate body 4 is kovar or iron-nickel alloy.
Specifically, in the first embodiment, the material of the first protective layer 1 may be titanium, cobalt, zirconium, hafnium, niobium, tantalum, titanium, platinum, molybdenum, tungsten, and chromium, wherein the titanium has a melting point of 3410 ℃, the cobalt has a melting point of 1495 ℃, the zirconium has a melting point of 1852 ℃, the hafnium has a melting point of 2230 ℃, the niobium has a melting point of 2468 ℃, the tantalum has a melting point of 2996 ℃, the titanium has a melting point of 1675 ℃, the platinum has a melting point of 1774 ℃, the molybdenum has a melting point of 2617 ℃, the tungsten has a melting point of 3410 ℃, and the chromium has a melting point of 1857 ℃. The thickness of the first protective layer 1 is 2-8.89 μm. The thickness of the second protective layer 2 is 2-8.89 μm. The second protective layer 2 is nickel-phosphorus alloy, the melting point is 880 ℃, and the weight ratio of phosphorus is 8% -12%. The material of the third protective layer 3 is gold, and the thickness of the third protective layer is 0.01-6 mu m.
Because the parallel seam welding process is unavoidable to the damage of the welding edge, the damage size can only be controlled by the process improvement, and the problem of the damage of the welding edge can not be fundamentally solved. The parallel seam welding alloy cover plate resistant to salt spray corrosion can not form obvious welding seam points at the welding seam of the outer surface in the parallel seam welding process, the alloy cover plate body 4 can not be melted while the nickel material is melted, the damage to the structure of an outer surface coating is reduced to the minimum, the diffusion exposure of iron element is effectively avoided, the corrosion phenomenon of a packaged product in a salt spray test can be improved or even avoided, and the requirement of high-reliability ceramic package on the salt spray test can be met.
The above description is only illustrative of the preferred embodiments of the present invention and is not intended to limit the scope of the present invention, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the appended claims.
Claims (2)
1. The preparation method of the salt spray corrosion resistant parallel seam welding alloy cover plate is characterized by comprising the following steps of:
cleaning the alloy cover plate, and drying;
The alloy cover plate is machined or corroded to obtain a T-shaped alloy cover plate column;
forming a first protective layer on the outer surface of the alloy cover plate column, and cleaning and drying;
forming a second protective layer on the outer surface of the first protective layer, and cleaning and drying;
Cutting the alloy cover plate column transversely to form a single alloy cover plate body;
removing burrs of the alloy cover plate body;
forming a third gold protection layer on the outer surface of the alloy cover plate body;
After cleaning, manufacturing an alloy cover plate; the material of the first protective layer comprises titanium, cobalt, zirconium, hafnium, niobium, tantalum, titanium, platinum, molybdenum, tungsten and chromium; the thickness of the first protective layer is 2-8.89 mu m; the thickness of the second protective layer is 2-8.89 mu m; the third protective layer is made of gold, and the thickness of the third protective layer is 0.01-6 mu m; the second protective layer is nickel-phosphorus alloy, wherein the weight ratio of phosphorus is 8% -12%.
2. The salt spray corrosion resistant parallel seam welded alloy cover plate of claim 1, wherein said alloy cover plate body is kovar or iron-nickel alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911369230.4A CN110977362B (en) | 2019-12-26 | 2019-12-26 | Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911369230.4A CN110977362B (en) | 2019-12-26 | 2019-12-26 | Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110977362A CN110977362A (en) | 2020-04-10 |
| CN110977362B true CN110977362B (en) | 2024-05-07 |
Family
ID=70077607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911369230.4A Active CN110977362B (en) | 2019-12-26 | 2019-12-26 | Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110977362B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113707618A (en) * | 2021-08-26 | 2021-11-26 | 中国电子科技集团公司第五十八研究所 | Salt-spray-corrosion-resistant parallel seam welding alloy cover plate and preparation method thereof |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4331258A (en) * | 1981-03-05 | 1982-05-25 | Raychem Corporation | Sealing cover for an hermetically sealed container |
| EP0175901A1 (en) * | 1984-09-26 | 1986-04-02 | Semi-Alloys Inc. | Plated parts and their production |
| JPH09199622A (en) * | 1996-01-18 | 1997-07-31 | Ngk Spark Plug Co Ltd | Metal lid substrate for electronic part package, metal lid, and its manufacturing method |
| CN101633014A (en) * | 2009-08-04 | 2010-01-27 | 包信海 | Method for manufacturing SMD metal cover plate |
| JP2012028453A (en) * | 2010-07-21 | 2012-02-09 | Murata Mfg Co Ltd | Metallic hermetic lid manufacturing method |
| CN103107141A (en) * | 2013-02-16 | 2013-05-15 | 马国荣 | Parcel-gilt cover plate structure |
| CN104952808A (en) * | 2015-06-12 | 2015-09-30 | 广州先艺电子科技有限公司 | Presetting gold-tin cover plate and manufacturing method thereof |
| CN105529311A (en) * | 2016-01-11 | 2016-04-27 | 无锡中微高科电子有限公司 | Parallel seam welding alloy cover plate for package of integrated circuit and fabrication method of parallel seam welding alloy cover plate |
| JP2018014581A (en) * | 2016-07-20 | 2018-01-25 | 日本電波工業株式会社 | Package and piezoelectric device |
| JP2018113282A (en) * | 2017-01-06 | 2018-07-19 | 日立金属株式会社 | Hermetic sealing cap and electronic component housing package |
| CN211840836U (en) * | 2019-12-26 | 2020-11-03 | 中国电子科技集团公司第五十八研究所 | Parallel seam welding alloy cover plate resistant to salt mist corrosion |
-
2019
- 2019-12-26 CN CN201911369230.4A patent/CN110977362B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4331258A (en) * | 1981-03-05 | 1982-05-25 | Raychem Corporation | Sealing cover for an hermetically sealed container |
| EP0175901A1 (en) * | 1984-09-26 | 1986-04-02 | Semi-Alloys Inc. | Plated parts and their production |
| JPH09199622A (en) * | 1996-01-18 | 1997-07-31 | Ngk Spark Plug Co Ltd | Metal lid substrate for electronic part package, metal lid, and its manufacturing method |
| CN101633014A (en) * | 2009-08-04 | 2010-01-27 | 包信海 | Method for manufacturing SMD metal cover plate |
| JP2012028453A (en) * | 2010-07-21 | 2012-02-09 | Murata Mfg Co Ltd | Metallic hermetic lid manufacturing method |
| CN103107141A (en) * | 2013-02-16 | 2013-05-15 | 马国荣 | Parcel-gilt cover plate structure |
| CN104952808A (en) * | 2015-06-12 | 2015-09-30 | 广州先艺电子科技有限公司 | Presetting gold-tin cover plate and manufacturing method thereof |
| CN105529311A (en) * | 2016-01-11 | 2016-04-27 | 无锡中微高科电子有限公司 | Parallel seam welding alloy cover plate for package of integrated circuit and fabrication method of parallel seam welding alloy cover plate |
| JP2018014581A (en) * | 2016-07-20 | 2018-01-25 | 日本電波工業株式会社 | Package and piezoelectric device |
| JP2018113282A (en) * | 2017-01-06 | 2018-07-19 | 日立金属株式会社 | Hermetic sealing cap and electronic component housing package |
| CN211840836U (en) * | 2019-12-26 | 2020-11-03 | 中国电子科技集团公司第五十八研究所 | Parallel seam welding alloy cover plate resistant to salt mist corrosion |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110977362A (en) | 2020-04-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6725890B2 (en) | Method for manufacturing vapor deposition mask, method for manufacturing pattern, and method for manufacturing organic semiconductor element | |
| CN110977361B (en) | Parallel seam welding alloy cover plate for integrated circuit packaging and preparation method thereof | |
| JP6123301B2 (en) | Method for manufacturing vapor deposition mask, resin layer with metal mask, and method for manufacturing organic semiconductor element | |
| CN211840836U (en) | Parallel seam welding alloy cover plate resistant to salt mist corrosion | |
| CN110977362B (en) | Salt spray corrosion resistant parallel seam welding alloy cover plate and preparation method thereof | |
| CN102142465A (en) | Front electrode structure of schottky diode and process manufacturing method of front electrode structure | |
| WO2011058062A4 (en) | Soldering method, gyroscope and soldered part | |
| CN104241511B (en) | Method for manufacturing high-brightness flip ultraviolet LED chips | |
| CN105789031A (en) | Mask for laser direct writing and etching method of mask | |
| CN105529311B (en) | Parallel seam welding alloy cover plate of integrated antenna package and preparation method thereof | |
| CN106271211A (en) | Solder and method for welding for ceramic/metal soldering | |
| CN105834541A (en) | Preparing method for low-temperature-connection and high-temperature-use Cu/Sn/Cu brazing interface and structure | |
| CA2881722A1 (en) | Contact strips for electrolysis cells | |
| CN108130534A (en) | Activity containing nickel oxide spreads the nickel-base alloy/high temperature coating and preparation method of barrier layer | |
| KR101713016B1 (en) | Manufacturing method of sheet with exothermic and amorphous characteristics by plating | |
| JP3368271B2 (en) | Selective electrochemical etching method and etchant used therefor | |
| CN211490318U (en) | Parallel seam welding alloy cover plate for integrated circuit packaging | |
| TW201405679A (en) | Method for applying a final metal layer for wafer level packaging and associated device | |
| US20200185309A1 (en) | Die attach surface copper layer with protective layer for microelectronic devices | |
| CN107768257B (en) | A method of making thin film circuit gold-tin alloy pad | |
| JP6163724B2 (en) | Vapor deposition mask and metal frame integrated vapor deposition mask | |
| JP6822529B2 (en) | Manufacturing method of thin-film mask, resin layer with metal mask, and manufacturing method of organic semiconductor element | |
| CN110429060A (en) | A kind of method making air bridges and its structure and application | |
| CN113707618A (en) | Salt-spray-corrosion-resistant parallel seam welding alloy cover plate and preparation method thereof | |
| CN106206402B (en) | Accurate film circuit fabrication method on a kind of curved surface |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |