CN110945634B - 散热性芯片接合膜及切割-芯片接合膜 - Google Patents

散热性芯片接合膜及切割-芯片接合膜 Download PDF

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Publication number
CN110945634B
CN110945634B CN201880048265.5A CN201880048265A CN110945634B CN 110945634 B CN110945634 B CN 110945634B CN 201880048265 A CN201880048265 A CN 201880048265A CN 110945634 B CN110945634 B CN 110945634B
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heat
bonding film
filler
mass
die
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CN110945634A (zh
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上野惠子
增子崇
管井颂太
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Lishennoco Co ltd
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Lishennoco Co ltd
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/01Use of inorganic substances as compounding ingredients characterized by their specific function
    • C08K3/013Fillers, pigments or reinforcing additives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/04Non-macromolecular additives inorganic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/06Non-macromolecular additives organic
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52Mounting semiconductor bodies in containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00Additional features of adhesives in the form of films or foils
    • C09J2301/30Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/312Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Die Bonding (AREA)
  • Dicing (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Adhesive Tapes (AREA)
CN201880048265.5A 2017-07-20 2018-07-13 散热性芯片接合膜及切割-芯片接合膜 Active CN110945634B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017-140757 2017-07-20
JP2017140757A JP6889398B2 (ja) 2017-07-20 2017-07-20 放熱性ダイボンディングフィルム及びダイシングダイボンディングフィルム
PCT/JP2018/026571 WO2019017303A1 (ja) 2017-07-20 2018-07-13 放熱性ダイボンディングフィルム及びダイシング・ダイボンディングフィルム

Publications (2)

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CN110945634A CN110945634A (zh) 2020-03-31
CN110945634B true CN110945634B (zh) 2023-08-29

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JP (1) JP6889398B2 (ja)
KR (1) KR102451368B1 (ja)
CN (1) CN110945634B (ja)
TW (1) TWI765071B (ja)
WO (1) WO2019017303A1 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7178661B2 (ja) * 2019-02-21 2022-11-28 東洋紡株式会社 熱伝導性絶縁ゴム組成物、熱伝導性絶縁ゴム成形体及びその製造方法
JP7042986B1 (ja) 2020-07-30 2022-03-28 古河電気工業株式会社 接着剤用組成物及びフィルム状接着剤、並びに、フィルム状接着剤を用いた半導体パッケージ及びその製造方法
WO2023182226A1 (ja) * 2022-03-25 2023-09-28 株式会社レゾナック 半導体用接着フィルム、ダイシング・ダイボンディング一体型フィルム、及び半導体装置の製造方法
CN118696105A (zh) * 2022-03-30 2024-09-24 古河电气工业株式会社 导热性膜状粘接剂用组合物和导热性膜状粘接剂、以及使用导热性膜状粘接剂的半导体封装及其制造方法
WO2024057803A1 (ja) * 2022-09-16 2024-03-21 パナソニックIpマネジメント株式会社 樹脂組成物、プリプレグ、樹脂付きフィルム、樹脂付き金属箔、金属張積層板、及び配線板
WO2024181168A1 (ja) * 2023-02-28 2024-09-06 古河電気工業株式会社 熱伝導性接着剤用組成物及びその製造方法、熱伝導性フィルム状接着剤、並びに、熱伝導性フィルム状接着剤を用いた半導体パッケージ及びその製造方法
CN118448331B (zh) * 2024-07-05 2024-10-15 武汉新芯集成电路股份有限公司 承载膜、晶圆切割装置及晶圆切割方法

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JP2005019516A (ja) * 2003-06-24 2005-01-20 Nitto Denko Corp ダイボンド用接着フィルム、ダイシング・ダイボンド用接着フィルム、及び半導体装置
JP2011070930A (ja) * 2009-09-25 2011-04-07 Sekisui Chem Co Ltd 多層絶縁シート及び積層構造体
CN102265388A (zh) * 2008-12-24 2011-11-30 日东电工株式会社 热固型芯片接合薄膜
TW201222651A (en) * 2010-10-01 2012-06-01 Nitto Denko Corp Dicing-diebonding film and method for fabricating semiconductor device
CN102676105A (zh) * 2011-03-16 2012-09-19 新日铁化学株式会社 高热传导性膜状接着剂,该接着剂用组合物,使用该接着剂的半导体封装件及其制造方法
WO2013145961A1 (ja) * 2012-03-30 2013-10-03 昭和電工株式会社 硬化性放熱組成物
CN104231961A (zh) * 2013-06-21 2014-12-24 日东电工株式会社 切割/芯片接合薄膜
JP2016002654A (ja) * 2014-06-13 2016-01-12 パナソニックIpマネジメント株式会社 樹脂−金属複合体
JP2016098317A (ja) * 2014-11-21 2016-05-30 日東電工株式会社 接着シート、ダイシングシート付き接着シート、積層シート及び半導体装置の製造方法
CN106104774A (zh) * 2014-03-17 2016-11-09 琳得科株式会社 管芯键合层形成膜、附着有管芯键合层形成膜的加工件及半导体装置

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JPH05198701A (ja) 1992-01-22 1993-08-06 Mitsubishi Electric Corp 半導体装置用パッケージ
WO2005103180A1 (ja) * 2004-04-20 2005-11-03 Hitachi Chemical Co., Ltd. 接着シート、半導体装置、及び半導体装置の製造方法
JP2009235402A (ja) 2008-03-05 2009-10-15 Hitachi Chem Co Ltd 接着フィルム
JP4851579B2 (ja) * 2009-11-19 2012-01-11 古河電気工業株式会社 シート状接着剤及びウエハ加工用テープ
JP4976522B2 (ja) * 2010-04-16 2012-07-18 日東電工株式会社 熱硬化型ダイボンドフィルム、ダイシング・ダイボンドフィルム、及び、半導体装置の製造方法
CN102668141A (zh) * 2010-06-08 2012-09-12 积水化学工业株式会社 光半导体装置用晶片接合材料及使用其的光半导体装置
DE112012005505T5 (de) * 2011-12-27 2015-06-18 Panasonic Intellectual Property Management Co., Ltd. Wärmeleitfähige Harz-Zusammensetzung
JP5749314B2 (ja) 2013-10-11 2015-07-15 日東電工株式会社 放熱性ダイボンドフィルム

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Publication number Priority date Publication date Assignee Title
JP2005019516A (ja) * 2003-06-24 2005-01-20 Nitto Denko Corp ダイボンド用接着フィルム、ダイシング・ダイボンド用接着フィルム、及び半導体装置
CN102265388A (zh) * 2008-12-24 2011-11-30 日东电工株式会社 热固型芯片接合薄膜
JP2011070930A (ja) * 2009-09-25 2011-04-07 Sekisui Chem Co Ltd 多層絶縁シート及び積層構造体
TW201222651A (en) * 2010-10-01 2012-06-01 Nitto Denko Corp Dicing-diebonding film and method for fabricating semiconductor device
CN102676105A (zh) * 2011-03-16 2012-09-19 新日铁化学株式会社 高热传导性膜状接着剂,该接着剂用组合物,使用该接着剂的半导体封装件及其制造方法
JP2012207222A (ja) * 2011-03-16 2012-10-25 Nippon Steel Chem Co Ltd 高熱伝導性フィルム状接着剤用組成物、高熱伝導性フィルム状接着剤、並びに、それを用いた半導体パッケージとその製造方法
WO2013145961A1 (ja) * 2012-03-30 2013-10-03 昭和電工株式会社 硬化性放熱組成物
CN104231961A (zh) * 2013-06-21 2014-12-24 日东电工株式会社 切割/芯片接合薄膜
CN106104774A (zh) * 2014-03-17 2016-11-09 琳得科株式会社 管芯键合层形成膜、附着有管芯键合层形成膜的加工件及半导体装置
JP2016002654A (ja) * 2014-06-13 2016-01-12 パナソニックIpマネジメント株式会社 樹脂−金属複合体
JP2016098317A (ja) * 2014-11-21 2016-05-30 日東電工株式会社 接着シート、ダイシングシート付き接着シート、積層シート及び半導体装置の製造方法

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Publication number Publication date
CN110945634A (zh) 2020-03-31
TW201908441A (zh) 2019-03-01
WO2019017303A1 (ja) 2019-01-24
JP2019021829A (ja) 2019-02-07
KR20200026799A (ko) 2020-03-11
KR102451368B1 (ko) 2022-10-05
TWI765071B (zh) 2022-05-21
JP6889398B2 (ja) 2021-06-18

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