CN110943004A - 基板处理装置 - Google Patents

基板处理装置 Download PDF

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CN110943004A
CN110943004A CN201910648801.1A CN201910648801A CN110943004A CN 110943004 A CN110943004 A CN 110943004A CN 201910648801 A CN201910648801 A CN 201910648801A CN 110943004 A CN110943004 A CN 110943004A
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block
substrate
processing
carrier
processing apparatus
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桑原丈二
稻垣幸彦
村井征尔
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
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Abstract

本发明是一种基板处理装置，对基板进行处理，所述装置包含以下要素，即为：分度区块，针对每个载具载置部具备分度机器人，所述分度机器人具有用以从所述载具载置部的载具取出基板且将基板收纳于所述载具载置部的载具的臂，且水平方向的位置固定；桥接区块，与所述分度区块邻接配置；及处理区块，具有多个阶层，所述多个阶层积层有具备至少1个以上的处理单元的阶层；且所述桥接区块具备：缓冲部；通路部，从多个阶层的最下层跨及最上层而具备；及两台桥接机械人，具有在与所述通路部之间交接基板的臂。

Description

基板处理装置
技术领域
本发明涉及一种对半导体晶片、液晶显示器用基板、等离子体显示器用基板、有机EL(Electro-Luminescence，电致发光)用基板、FED(Field Emission Display，场致发射显示器)用基板、光显示器用基板、磁盘用基板、磁光盘用基板、光掩膜用基板、太阳电池用基板等各种基板(以下简称为基板)进行特定处理的基板处理装置，尤其涉及一种搬送基板的技术。
背景技术
以往，作为这种装置，有如下装置，具备载具区块、处理区块、接口区块及曝光装置(例如参照日本专利特开2013-69917号公报)。
载具区块具备4个载具载置部，所述4个载具载置部供载置收纳有处理前的基板的载具，或供载置收纳处理后的基板的空载具。另外，载具区块在与载具载置部对向的位置配置有具备交接臂的两台分度机器人，所述交接臂从载置在载具载置部的载具取出基板，或将基板收容到载置在载具载置部的空载具中。在两台分度机器人之间，配置有用以在与处理区块之间交接基板的塔部。该分度机器人可配合于4台载具载置部的位置在水平方向上移动，并且可配合于塔部的高度而跨及相当于处理区块内的阶层中的最下层到最上层的高度的位置升降。
处理区块由6个阶层的区块构成。处理区块在各阶层具备对基板进行处理的液体处理单元等。各阶层在俯视下在中央具备主臂，在主臂搬送路径的一侧具备液体处理单元，在另一侧具备加热单元等。处理区块具备交接臂及从处理区块的最下层跨及至最上层的支架单元。
接口区块负责处理区块与曝光装置之间之基板搬送。
在所述构成的装置中，将基板从载具区块的塔部取入到支架单元，经由支架单元及交接臂将基板分配到处理区块中的6个阶层中进行处理。由此可增加每单位时间能处理的基板的片数。然而，最近，为了进一步提升生产性，期望提升基板处理装置中的处理量。为此，为了在不增大占据面积的情况下提升处理量，提出进一步增加处理区块的阶层的数量。
发明内容
然而，具有这种构成的以往例存在如下问题。
也就是说，以往的装置由于增加处理区块内的阶层数而高度变高，相对应地，在与处理区块之间交接基板的载具区块的塔部的高度也必须变高。然而，载具区块由于在利用无尘室的天花板搬送载具的OHT(Overhead Hoist Transport，也称为高架行驶式无人搬送车)与载具载置部之间进行载具交接，因此，若使载具区块的塔部的高度变高，则担忧会与OHT相干渉。因此，存在如下问题，即无法增高载具区块的塔部的高度，所以即使增加处理区块的阶层数，载具区块与处理区块之间之基板搬送效率也变低，因此就算增加处理区块的阶层数也无法像所期待的那样提升处理量。
本发明是鉴于这种情况而完成的，其目的在于提供一种可对应于增加处理区块的阶层数而提升处理量的基板处理装置。
本发明为了达成这种目的而采取如下构成。
本发明是一种基板处理装置，对基板进行处理，所述装置包含以下要素，即为：分度区块，具备至少两台用以在与高架行驶式无人搬送车之间交接收纳基板的载具的载具载置部，且为了从载具载置部的载具取出基板且将基板收纳到载具载置部的载具中，而针对所述每个载具载置部具备分度机器人，所述分度机器人具有可向水平方向进退、在水平面内回转、向垂直方向升降的臂，且水平方向的位置相对于所述各载具载置部固定；桥接区块，与所述分度区块邻接配置；及处理区块，与所述桥接区块邻接配置，具有多个阶层，所述多个阶层积层有具备至少1个以上的处理单元的阶层；且所述分度区块的高度未达所述处理区块的最上层，所述桥接区块具备：缓冲部，配置在所述分度区块侧且可利用所述分度机器人交接基板的位置，在高度方向上具备用以载置基板的多级台；通路部，配置在所述处理区块侧且可在与所述处理区块之间交接基板的位置，在所述处理区块的阶层方向上，从所述处理区块中的多个阶层的最下层跨及至最上层而具备用以载置基板的多级台；及两台桥接机械人，具有在与所述通路部之间交接基板的臂。
根据本发明，桥接区块具备从处理区块中的最下层跨及至最上层而设置的通路部。因此，虽然分度机器人的臂到达不了处理区块的最上层，但桥接区块可将利用分度机器人从载具载置部的载具载置到缓冲部的基板利用两台桥接机械人经由通路部也搬送到处理区块中的最上层的处理单元。其结果，可对应于增加处理区块的阶层数而提升处理量。
另外，在本发明中，优选所述处理区块针对所述多个阶层中的每特定阶层数具备在所述处理单元及所述通路部交接基板的1台搬送机械人，所述通路部由针对所述多个阶层中的每特定阶层数而分离配置的多个分离通路部构成。
由于针对每特定阶层数具备在处理单元间进行基板的搬送的搬送机械人，所以可提升各处理单元间的基板搬送效率。另外，由于通路部由多个分离通路部构成，所以可实现分离通路部的轻量化。
另外，在本发明中，优选所述各分离通路部中配置在上方的分离通路部相对于所述多个阶层配置在靠向下方，配置在中央的分离通路部相对于所述多个阶层配置在中央，配置在下方的分离通路部相对于所述多个阶层配置在靠向上方。
可缩短桥接机械人在与分离通路部之间交接基板时所需的升降移动距离。因此，可提升利用桥接机械人的在与分离通路部之间的搬送效率。
另外，在本发明中，优选所述处理区块省略将针对每所述特定阶层数而配置的所述搬送机械人彼此隔开的隔间。
由于针对每特定阶层数而配置的搬送机械人彼此未利用隔间隔开，所以保养搬送机械人时，作业人员可容易进行作业。
另外，在本发明中，优选所述处理单元具备对基板供给处理液的功能，从配置在下部且贮存所述处理液的处理液箱对所述各阶层的处理单元供给处理液的泵及过滤器配置在较所述多个阶层的最上层更靠下方。
由于泵及过滤器配置在较最上层的处理单元靠下方，所以可抑制从处理液箱往上吸处理液时的负压。因此，可抑制处理液产生发泡，可提升利用处理液进行的处理的品质。
另外，在本发明中，所述分度区块优选在与所述各载具载置部对向的位置配置有所述各分度机器人。
由于在载具载置部的对向的位置配置各分度机器人，所以在分度机器人与载具载置部之间交接基板时，可有效率地进行臂的移动。
另外，在本发明中，优选所述载具载置部至少在垂直方向上具备两台以上，所述缓冲部的高度为载置在最上部的所述载具载置部的载具的上端以下。
由于在利用分度机器人在载具与缓冲部之间搬送基板时，可抑制分度机器人的上升高度，所以可有效率地进行搬送。
另外，在本发明中，优选所述载具载置部至少在垂直方向上具备两台以上，所述缓冲部的高度为配置在最下部的载具载置部上所载置的载具的下端以上。
由于在利用分度机器人在载具与缓冲部之间搬送基板时，可抑制分度机器人的下降高度，所以可有效率地进行搬送。
另外，在本发明中，优选所述缓冲部的高度为最上部的通路部的上端以下且最下部的通路部的下端以上。
由于在利用分度机器人在载具与缓冲部之间搬送基板时，可抑制分度机器人的上升高度及下降高度，所以可有效率地进行搬送。
附图说明
※为了说明本发明，在附图中示出目前优选的若干种形式，然而，应理解本发明并不严格限定于所示设备和装置。
图1是表示实施例的基板处理装置的整体构成的立体图；
图2是基板处理装置的右侧视图；
图3是基板处理装置的后视图；
图4是基板处理装置的左侧视图；
图5是基板处理装置的俯视图；
图6是表示搬送系统的右侧视图。
具体实施方式
以下，参照附图对本发明的一实施例进行说明。
此外，图1是表示实施例的基板处理装置的整体构成的立体图，图2是基板处理装置的右侧视图，图3是基板处理装置的后视图，图4是基板处理装置的左侧视图，图5是基板处理装置的俯视图，图6是表示搬送系统的右侧视图。
本实施例的基板处理装置1具备分度区块3、桥接区块5、处理区块7及实用区块9。
分度区块3与桥接区块5连结，在与桥接区块5之间交接作为处理对象的基板W。桥接区块5与处理区块7连结，在与处理区块7之间交接基板W。处理区块7对从桥接区块5接收的基板W供给处理液，然后，进行通过加热而在基板W上形成覆膜的处理等，并将结束处理的基板W搬送到桥接区块5。实用区块9与处理区块7连结，具备对处理区块7供给处理液的构成等。另外，实用区块9有在背面侧与未图示的曝光装置等邻接连结的情况。
所述分度区块3、桥接区块5、处理区块7及实用区块9以依该顺序排成一列的方式配置。
在以下说明中，将分度区块3、桥接区块5、处理区块7及实用区块9排列的方向设为“前后方向X”(水平方向)。特别是将从实用区块9朝向分度区块3的方向设为“前方XF”，将前方XF方向的相反方向设为“后方XB”。将与前后方向X在水平方向上正交的方向设为“宽度方向Y”。进而，在自分度区块3的正面观察的情况下，将宽度方向Y的一方向适当地设为“右方YR”，将与右方YR相反的另一方向设为“左方YL”。另外，将垂直的方向设为“上下方向Z”(高度方向、垂直方向)。此外，在简记作“侧方”或“横方向”等时，并不限定于前后方向X及宽度方向Y中的任一方向。
分度区块3具备载具载置部11、搬送空间AID、分度用搬送机械人TID及处理液箱配备部TU。关于载具载置部11，在本实施例中，具备4个载具载置部11。具体来说，在横方向上具备2个载具载置部11，在各自的上下方向Z的上方向具备1个载具载置部11。各载具载置部11供载置载具C。载具C积层并收纳多片(例如50片)基板W，例如在与未图示的OHT(OverheadHoist Transport，也称为高架行驶式无人搬送车)之间进行载具C的交接。OHT利用无尘室的天花板搬送载具C。OHT由于无法在与配置在上下方向Z的下方的载具载置部11之间直接进行载具C的交接，因此，通过使用未图示的载具起重机等在与配置在上下方向Z的下方的载具载置部11之间交接载具C。作为载具C，例如可列举FOUP(Front Opening Unified Pod，前开式晶片传送盒)。
搬送空间AID配置在载具载置部11的后方XB。在搬送空间AID配置有分度用搬送机械人TID。分度用搬送机械人TID在与载具C之间交接基板W，并且在与桥接区块5之间交接基板W。分度用搬送机械人TID配置有两台。各分度用搬送机械人TID的前后方向X及宽度方向Y上的位置固定。各分度用搬送机械人TID配置在相对于配置在上下方向Z的两台载具载置部11在宽度方向Y上对向的位置。换句话说，在配置在上下方向Z的一对载具载置部11的宽度方向Y上的大致中央位置、且在前后方向X上向后方XB分开的对向位置，配置有1台分度用搬送机械人TID。在以下说明中，在必须区分两台分度用搬送机械人TID的情况下，将其中一者设为分度用搬送机械人TID1，将另一者称为分度用搬送机械人TID2。
此外，所述分度用搬送机械人TID相当于本发明中的“分度机器人”。
如上所述，在各载具载置部11的对向的位置配置有各分度用搬送机械人TID1、TID2，因此，在各分度用搬送机械人TID1、TID2与各载具载置部11之间交接基板W时，使臂19相对于载具载置部19进退即可。因此，可有效率地进行基板W的交接。
如图6所示，分度用搬送机械人TID具备基台部13、伸缩部15、保持部17及2根臂19。基台部13如图5所示与载具载置部11对向配置，且前后方向X及宽度方向Y的位置固定。伸缩部15搭载在基台部13上，构成为可在上下方向Z上伸缩。保持部17配置在伸缩部15的上部，构成为可相对于基台部13及伸缩部15绕上下方向Z轴旋转。2根臂19通过保持部17在上下方向Z上积层并保持为水平姿势，构成为可相对于前后方向X同时进退。分度用搬送机械人TID以2根臂19到达上下方向Z上的上方及下方的载具载置部11并到达下述缓冲部BF的最上级及最下级的方式通过伸缩部15的伸缩而升降。
桥接区块5具备搬送空间ABG、桥接用搬送机械人BT、缓冲部BF及通路部PS。
在搬送空间ABG配置有桥接用搬送机械人BT。具体来说，配置有两台桥接用搬送机械人BT。桥接用搬送机械人BT配置在各分度用搬送机械人TID及缓冲部BF的后方XB。各桥接用搬送机械人BT隔着将缓冲部BF与通路部PS连接的线在右方YR及左方YL对向配置。各桥接用搬送机械人BT在前后方向X及宽度方向Y上位置固定。在以下说明中，在必须区分两台桥接用搬送机械人BT的情况下，将其中一者设为桥接用搬送机械人BT1，将另一者称为桥接用搬送机械人BT2。
此外，所述桥接用搬送机械人BT相当于本发明中的“桥接机械人”。
如图6所示，桥接用搬送机械人BT具备基台部21、伸缩部23、保持部25及1根臂27。基台部21如图5所示对向配置在分度用搬送机械人TID的后方XB，且前后方向X及宽度方向Y上的位置固定。伸缩部23搭载在基台部21上，构成为可在Z方向上伸缩。保持部25配置在伸缩部23的上部，构成为可相对于基台部21及伸缩部23绕上下方向Z轴旋转。1根臂27通过保持部25保持为水平姿势，构成为可相对于前后方向X进退。桥接用搬送机械人BT以臂27到达上下方向Z上的缓冲部BF的最上级及最下级并到达通路部PS的最上级及最下级的方式通过伸缩部23的伸缩而升降。
如图5所示，缓冲部BF配置在分度区块3与桥接区块5的交界处。如图6所示，缓冲部BF在上下方向Z上相隔地具备多级台29。多级台29分别竖立设置有3根销31。3根销31抵接于基板W的下表面，而以水平姿势支撑基板W。3根销31仅具有臂19、27可进入到由3根销31支撑的基板W的下表面的长度。
缓冲部BF配置在可利用所述两台分度区块用搬送机械人TID交接基板W的位置，且配置在可利用两台桥接用搬送机械人BT交接基板W的位置。也就是说，缓冲部BF配置在可利用两台分度区块用搬送机械人TID及两台桥接用搬送机械人BT同时交接到不同的台29的位置。换句话说，缓冲部BF构成为分度区块用搬送机械人TID1的2根臂19、分度区块用搬送机械人TID2的2根臂19及桥接用搬送机械人BT1、BT2的2根臂27这6根臂19、27可同时存取。因此，如图5所示，缓冲部BF例如通过在分度区块3与桥接区块5的交界壁处在上下方向Z上竖立设置并隔着台29对向配置的支撑柱33而相隔支撑各台29。由此，可同时从4个方向存取缓冲部BF。
缓冲部BF的配置优选如下设置。也就是说，缓冲部BF的上下方向Z的位置设定为分度区块3的中间程度的高度。具体来说，为载置在上级的载具载置部11的载具C的上端以下且载置在下级的载具载置部11的载具C的下端以上。载具C的上端为与OHT相接的载具C本身的最上部，载具C的下端为与载具载置部11相接的载具C本身的最下部。另外，缓冲部BF的上下方向Z的位置相对于下述的通路部PS为通路部PS的最上部的上端以下且通路部PS的最下部的下端以上。
通过像这样限制缓冲部BF的上下方向Z的高度，在利用分度用搬送机械人TID在载具C与缓冲部BF之间搬送基板W时，可抑制分度用搬送机械人TID的上升高度及下降高度，因此，可有效率地进行搬送。
此处，在对通路部PS进行说明前，对处理区块7进行说明。
如图5所示，处理区块7在俯视下宽度方向Y的大致中央部具备在前后方向X上形成的搬送空间ATB。处理区块7在与桥接区块5的交界处具备通路部PS。处理区块7在搬送空间ATB的左方YL具备4个热处理单元BU，在隔着搬送空间ATB的与4个热处理单元BU为相反侧的右方YR具备3个涂布单元SU。3个涂布单元SU具备喷嘴35。该喷嘴35经由实用区块9供给来自设置在分度区块3的下部的处理液箱配备部TU的处理液。热处理单元BU实施例如将基板W加热的处理及将经加热处理的基板W冷却的处理。
如图3及图4所示，处理区块7将配置在前后方向X上的4个热处理单元BU在上下方向Z上配置5层。另外，与所述5层热处理单元BU的上下方向Z的下方相隔地，具备5层热处理单元BU。进而，与所述5层热处理单元BU的上下方向Z的下方相隔地，具备5层热处理单元BU。此处，将包括最上层的5层的热处理单元BU设为第1热处理单元群GBU1，将包括中间层的5层的热处理单元BU设为第2热处理单元群GBU2，将包括最下层的5层的热处理单元BU设为第3热处理单元群GBU3。
如图2及图3所示，处理区块7将配置在前后方向X上的3个涂布单元SU在上下方向Z上配置6层。此处，将其中包括最上层的2层的涂布单元SU设为第1涂布单元群GSU1，将包括中间层的2层的涂布单元SU设为第2涂布单元群GSU2，将包括最下层的2层的涂布单元SU设为第3涂布单元群GSU3。
如上所述，处理区块7由热处理单元BU为15个阶层、涂布单元SU为6个阶层的多个阶层构成。本实施例的处理区块7中的阶层数与以往例中的处理区块相比将单元数设为约1.5倍以较以往例提高处理量。因此，相较于为了OHT在上方往返而限制高度的分度区块3，处理区块7的高度变高。
处理用搬送机械人TBS以在处理区块7的多个阶层中的第1热处理单元群GBU1、第1涂布单元群GSU1与通路部PS之间、第2热处理单元群GBU2、第2涂布单元群GSU2与通路部PS之间、第3热处理单元群GBU3、及第3涂布单元群GSU3与通路部PS之间搬送基板W的方式配置在搬送空间ATB。具体来说，处理用搬送机械人TBS1进行第1热处理单元群GBU1等中的搬送，处理用搬送机械人TBS2进行第2热处理单元群GBU2等中的搬送，处理用搬送机械人TBS3进行第3热处理单元群GBU3等中的搬送。
如图5及图6所示，处理用搬送机械人TBS具备移动机构37、通过移动机构37移动的移动基台39、搭载在移动基台上的伸缩部41、保持部43、及2根臂45。移动机构37使移动基台39在前后方向X上移动。搭载在移动基台39上的伸缩部41通过在上下方向Z上伸缩使保持部43在上下方向Z上移动。2根臂45积层配置在上下方向Z上，以可在包含前后方向X或宽度方向Y的水平面内进退的方式安装在保持部43上。此外，2根臂45被交替地进退驱动，因此，成为无法同时进出或退出的构成。
如图5及图6所示，所述通路部PS具备与所述缓冲部BF相同的构成。
也就是说，通路部PS配置在桥接区块5与处理区块7的交界处。通路部PS在上下方向Z上相隔地具备多级台47。多级台47分别竖立设置有3根销49。3根销49抵接于基板W的下表面，而以水平姿势支撑基板W。3根销49仅具有臂27、45可进入到由3根销支撑的基板W的下表面的长度。
通路部PS配置在可利用所述两台桥接用搬送机械人BT交接基板W的位置，且配置在可利用3台处理用搬送机械人TBS交接基板W的位置。也就是说，通路部PS配置在可利用两台桥接用搬送机械人BT及3台处理用搬送机械人TBS同时交接到不同的台47的位置。换句话说，通路部PS构成为2根臂27、3根臂45这5根臂27、45可同时存取。为此，如图5所示，通路部PS例如通过在桥接区块5与处理区块7的交界壁处在上下方向Z上竖立设置并隔着台47在宽度方向Y上对向配置的支撑柱51而相隔支撑各台47。由此，可从3个方向存取通路部PS。
另外，如图6所示，通路部PS未一体构成，例如在上下方向Z上分离为3个而构成。此处，在与第1热处理单元群GBU1及第1涂布单元群GSU1对应的位置配置有第1通路部PS1，在与第2热处理单元群GBU2及第2涂布单元群GSU2对应的位置配置有第2通路部PS2，在与第3热处理单元群GBU3及第3涂布单元群GSU3对应的位置配置有第3通路部PS3。进而，如图2、图4、图6所示，第1通路部PS1相对于处理区块7中的第1热处理单元群GBU1及第1涂布单元群GSU1的各阶层配置在上下方向Z上的靠向下方。另外，第2通路部PS2相对于处理区块7中的第2热处理单元群GBU2及第2涂布单元群GSU2的各阶层配置在上下方向Z上的大致中央。进而，第3通路部PS3相对于处理区块7中的第3热处理单元群GBU3及第3涂布单元群GSU3的各阶层配置在上下方向Z上的靠向上方。
由于像这样将通路部PS分离为通路部PS1～PS3并以所述上下方向Z上的位置关系进行配置，所以可缩短桥接用搬送机械人BT在与各通路部PS1～PS3之间交接基板W时所需的升降移动距离。因此，可提升桥接用搬送机械人BT与通路部PS之间之搬送效率。另外，由于通路部PS由多个通路部PS1～PS3构成，所以可实现通路部PS的轻量化。
此外，所述通路部PS1～PS3相当于本发明中的“分离通路部”。
如图3所示，在自处理区块7的背面侧观察所述各处理用搬送机械人TBS1～TBS3的情况下，搬送空间ATB未被分隔。也就是说，省略了跨及热处理单元BU及涂布单元SU而安装的隔间。由此，在保养各处理用搬送机械人TBS1～TBS3时，作业人员可容易进行作业。
如图2所示，所述处理区块7从处理液箱配备部TU对涂布单元SU供给处理液。为此，使用实用区块9的泵及过滤器61。在本实施例中，对第1涂布单元群GSU1中的2个阶层的各阶层的涂布单元SU、第2涂布单元群GSU2中的2个阶层的各阶层的涂布单元SU、及第3涂布单元群GSU3中的2个阶层的各阶层的涂布单元SU供给处理液的泵及过滤器61配置在实用区块9。
具体来说，各泵及过滤器61从处理区块7中较最上层靠下方的位置依序朝向下方配置。也就是说，最上层是位于第1涂布单元群GSU1的上层的涂布单元SU，但用以对其供给处理液的泵及过滤器61配置在第1涂布单元群GSU1的下层的涂布单元SU的后方XB，用以对第1涂布单元群GSU1的下层供给处理液的泵及过滤器61配置在第2涂布单元群GSU2的上层的涂布单元SU的后方XB。另外，用以对第2涂布单元群GSU2的上层供给处理液的泵及过滤器61配置在第2涂布单元群GSU2的下层的涂布单元SU的后方XB，用以对第2涂布单元群GSU2的下层供给处理液的泵及过滤器61配置在第3涂布单元群GSU3的上层的涂布单元SU的后方XB。另外，用以对第3涂布单元群GSU3的上层供给处理液的泵及过滤器61配置在第3涂布单元群GSU3的下层的涂布单元SU的后方XB，用以对第3涂布单元群GSU3的下层供给处理液的泵及过滤器61配置在较第3涂布单元群GSU3的下层的涂布单元SU更靠下方的后方XB。
在本实施例中，由于将泵及过滤器61设为所述配置，所以可使从泵及过滤器61到喷嘴35的距离分别相等，并且抑制从配备在分度区块3的下部的处理液箱配备部TU的处理液箱往上吸处理液时的负压。因此，可抑制处理液产生发泡，可提升利用处理液进行的处理的品质。
以所述方式构成的基板处理装置例如以如下方式对基板W进行处理。处理例如为对基板W进行烘烤(以下称为脱水烘烤)后，对基板W供给处理液而形成覆膜，然后，进行烘烤(以下称为预烘烤)。
首先，将收容有未处理的基板W的4个载具C载置在4台载具载置部11上。然后，分度区块3的分度用搬送机械人TID1、TID2分别对1个载具C存取，将载具C内的基板W以2片为单位取出，并且将基板W先载置在缓冲部BF的空台29上。分度用搬送机械人TID1、TID2反复进行该取入动作直到全部载具C变空为止。
与所述取入动作并行地，桥接区块的桥接用搬送机械人BT1、BT2从缓冲部BF搬送基板W到通路部PS的空着的台47且与处理区块7中的搬送目的地的阶层对应的通路部PS1、PS2、PS3中的任一者。搬送到通路部PS的基板W由处理用搬送机械人TBS1～TBS3搬送到任一热处理单元BU，进行用于脱水烘烤的热处理。结束热处理的基板W由处理用搬送机械人TBS1～TBS3搬送到任一涂布单元SU形成覆膜。然后，利用处理用搬送机械人TBS1～TBS3将基板W搬送到任一热处理单元BU，进行预烘烤。结束全部处理的基板W经由通路部PS、桥接区块5、分度区块3返回到载置在载具载置台11的在处理前收容该基板W的载具C。
如此，根据本实施例，桥接区块5具备从处理区块7中的最下层跨及至最上层而设置的通道PS。因此，虽然分度用搬送机械人TID的臂19到达不了处理区块7的最上层，但桥接区块5可将从载具载置部11的载具C利用分度用搬送机械人TID载置到缓冲部BF的基板W利用两台桥接用搬送机械人BT1、BT2经由通路部PS也搬送到处理区块7中的最上层的热处理单元BU及涂布单元SU。其结果，可通过增加处理区块7的阶层数来提升处理量。
本发明并不限定于所述实施方式，可如下那样变化实施。
(1)在所述实施例中，将载具载置部11设为4个的构成，但本发明并不限定于这种构成。例如，载具载置部11可设为2个，也可设为超过4个的个数。
(2)在所述实施例中，使分度用搬送机械人TID1、TID2与载具载置部11的正面对向配置，但本发明并不限定于这种构成。也就是说，分度用搬送机械人TID1、TID2只要为可对载具载置部11存取且可对缓冲部BF存取的位置，则也可不为与载具载置部11的正面对向的位置。另外，分度用搬送机械人TID具备2根臂19，但本发明并不限定于这种构成，也可为具备1根臂或3根以上的臂的构成。
(3)在所述实施例中，使两台分度用搬送机械人TID1、TID2与载具载置部11的正面对向配置，但本发明并不限定于这种构成。也就是说，分度用搬送机械人TID1、TID2只要为可对载具载置部11存取且可对缓冲部BF存取的位置，则也可使两台分度用搬送机械人TID1、TID2由1台分度用搬送机械人TID构成。
(4)在所述实施例中，分度用搬送机械人TID设为具备基台部13、伸缩部15、保持部17及臂19的构成，但本发明并不限定于这种构成。也就是说，只要分度用搬送机械人TID不在水平方向上移动地固定并可对载具载置部11及缓冲部BF存取，则可为任意构成。
(5)在所述实施例中，缓冲部BF设为以支柱33保持多个台29而可从4个方向存取的构成，但只要可从4个方向存取缓冲部BF即可，本发明并不限定于这种构成。
(6)在所述实施例中，桥接用搬送机械人BT设为具备基台部21、伸缩部23、保持部25及臂27的构成，但本发明并不限定于这种构成。也就是说，只要桥接用搬送机械人BT不在水平方向上移动地固定并可对缓冲部BF及通路部PS存取，则可为任意构成。
(7)在所述实施例中，通路部PS设为以支柱51保持多个台49而可从3个方向存取，但只要可从3个方向存取通路部PS即可，并不限定于这种构成。另外，在实施例中，采用分割成通路部PS1～PS3的构成，但也可将通路部PS一体构成。
(8)在所述实施例中，设为将泵及过滤器61配置在较最上层靠下方的构成，但本发明并不限定于这种构成。
(9)在所述实施例中，作为载具C列举FOUP进行了说明，但本发明并不限定于FOUP。
本发明可在不脱离其精神或本质属性的情况下以其他特定形式实施。因此，应参照随附权利要求而非以上说明来指示本发明的范围。

Claims (20)

1.一种基板处理装置，对基板进行处理，所述装置包含以下要素，即为：分度区块，具备至少两台用以在与高架行驶式无人搬送车之间交接收纳基板的载具的载具载置部，为了从载具载置部的载具取出基板且将基板收纳到载具载置部的载具中，而针对所述每个载具载置部具备分度机器人，所述分度机器人具有可向水平方向进退、在水平面内回转、向垂直方向升降的臂，且水平方向的位置相对于所述各载具载置部固定；
桥接区块，与所述分度区块邻接配置；及
处理区块，与所述桥接区块邻接配置，具有多个阶层，所述多个阶层积层有具备至少1个以上的处理单元的阶层；且
所述分度区块的高度未达所述处理区块的最上层，
所述桥接区块具备：缓冲部，配置在所述分度区块侧且可利用所述分度机器人交接基板的位置，在高度方向上具备用以载置基板的多级台；通路部，配置在所述处理区块侧且可在与所述处理区块之间交接基板的位置，在所述处理区块的阶层方向上，从所述处理区块中的多个阶层的最下层跨及至最上层而具备用以载置基板的多级台；及两台桥接机械人，具有在与所述通路部之间交接基板的臂。
2.根据权利要求1所述的基板处理装置，其中
所述处理区块针对所述多个阶层中的每特定阶层数具备在所述处理单元及所述通路部交接基板的1台搬送机械人，
所述通路部由针对所述多个阶层中的每特定阶层数而分离配置的多个分离通路部构成。
3.根据权利要求2所述的基板处理装置，其中
所述各分离通路部中配置在上方的分离通路部相对于所述多个阶层配置在靠向下方，配置在中央的分离通路部相对于所述多个阶层配置在中央，配置在下方的分离通路部相对于所述多个阶层配置在靠向上方。
4.根据权利要求2所述的基板处理装置，其中
所述处理区块省略将针对每所述特定阶层数而配置的所述搬送机械人彼此隔开的隔间。
5.根据权利要求3所述的基板处理装置，其中
所述处理区块省略将针对每所述特定阶层数而配置的所述搬送机械人彼此隔开的隔间。
6.根据权利要求1所述的基板处理装置，其中
所述处理单元具备对基板供给处理液的功能，从配置在下部且贮存所述处理液的处理液箱对所述各阶层的处理单元供给处理液的泵及过滤器，配置在较所述多个阶层的最上层更靠下方。
7.根据权利要求2所述的基板处理装置，其中
所述处理单元具备对基板供给处理液的功能，从配置在下部且贮存所述处理液的处理液箱对所述各阶层的处理单元供给处理液的泵及过滤器，配置在较所述多个阶层的最上层更靠下方。
8.根据权利要求3所述的基板处理装置，其中
所述处理单元具备对基板供给处理液的功能，从配置在下部且贮存所述处理液的处理液箱对所述各阶层的处理单元供给处理液的泵及过滤器，配置在较所述多个阶层的最上层更靠下方。
9.根据权利要求4所述的基板处理装置，其中
所述处理单元具备对基板供给处理液的功能，从配置在下部且贮存所述处理液的处理液箱对所述各阶层的处理单元供给处理液的泵及过滤器，配置在较所述多个阶层的最上层更靠下方。
10.根据权利要求1所述的基板处理装置，其中
所述分度区块在与所述各载具载置部对向的位置配置有所述各分度机器人。
11.根据权利要求2所述的基板处理装置，其中
所述分度区块在与所述各载具载置部对向的位置配置有所述各分度机器人。
12.根据权利要求3所述的基板处理装置，其中
所述分度区块在与所述各载具载置部对向的位置配置有所述各分度机器人。
13.根据权利要求4所述的基板处理装置，其中
所述分度区块在与所述各载具载置部对向的位置配置有所述各分度机器人。
14.根据权利要求6所述的基板处理装置，其中
所述分度区块在与所述各载具载置部对向的位置配置有所述各分度机器人。
15.根据权利要求1所述的基板处理装置，其中
所述载具载置部至少在垂直方向上具备两台以上，所述缓冲部的高度为载置在最上部的所述载具载置部的载具的上端以下。
16.根据权利要求2所述的基板处理装置，其中
所述载具载置部至少在垂直方向上具备两台以上，所述缓冲部的高度为载置在最上部的所述载具载置部的载具的上端以下。
17.根据权利要求1所述的基板处理装置，其中
所述载具载置部至少在垂直方向上具备两台以上，所述缓冲部的高度为载置在配置在最下部的载具载置部的载具的下端以上。
18.根据权利要求2所述的基板处理装置，其中
所述载具载置部至少在垂直方向上具备两台以上，所述缓冲部的高度为载置在配置在最下部的载具载置部的载具的下端以上。
19.根据权利要求1所述的基板处理装置，其中
所述缓冲部的高度为最上部的通路部的上端以下且最下部的通路部的下端以上。
20.根据权利要求2所述的基板处理装置，其中
所述缓冲部的高度为最上部的通路部的上端以下且最下部的通路部的下端以上。
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