CN110654115B - 液体喷射头、液体喷射装置及其制造方法 - Google Patents

液体喷射头、液体喷射装置及其制造方法 Download PDF

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Publication number
CN110654115B
CN110654115B CN201910561561.1A CN201910561561A CN110654115B CN 110654115 B CN110654115 B CN 110654115B CN 201910561561 A CN201910561561 A CN 201910561561A CN 110654115 B CN110654115 B CN 110654115B
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China
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recovery
flow channel
channel
liquid
substrate
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Chinese (zh)
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CN110654115A (zh
Inventor
福泽祐马
高部本规
渡边峻介
宫岸晓良
福田俊也
佐野纯一
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Seiko Epson Corp
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Seiko Epson Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
CN201910561561.1A 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法 Active CN110654115B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110783081.7A CN113524911B (zh) 2018-06-29 2019-06-26 液体喷射头、液体喷射装置及其制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018124367A JP7102980B2 (ja) 2018-06-29 2018-06-29 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法
JP2018-124367 2018-06-29

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CN110654115A CN110654115A (zh) 2020-01-07
CN110654115B true CN110654115B (zh) 2021-07-20

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US (1) US10906311B2 (https=)
EP (1) EP3587116B1 (https=)
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113524911A (zh) * 2018-06-29 2021-10-22 精工爱普生株式会社 液体喷射头、液体喷射装置及其制造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7434997B2 (ja) * 2020-02-14 2024-02-21 セイコーエプソン株式会社 液体吐出ヘッドおよび液体吐出装置
JP7707707B2 (ja) * 2021-07-14 2025-07-15 セイコーエプソン株式会社 液体吐出ヘッド、液体吐出装置
CN117087334A (zh) * 2023-10-19 2023-11-21 季华实验室 打印喷头、喷墨打印设备及其控制方法、设备与存储介质

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CN102481789A (zh) * 2009-07-10 2012-05-30 富士胶卷迪马蒂克斯股份有限公司 用于密集封装的微机电系统喷射结构
JP5171534B2 (ja) * 2008-10-15 2013-03-27 富士フイルム株式会社 インクジェット記録方法
CN104339860A (zh) * 2013-08-09 2015-02-11 精工爱普生株式会社 液体喷射头以及液体喷射装置
JP2016107495A (ja) * 2014-12-05 2016-06-20 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
JP2016153240A (ja) * 2016-04-19 2016-08-25 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置並びに液体吐出方法
JP2017087708A (ja) * 2015-11-04 2017-05-25 株式会社リコー 液滴吐出ヘッド及び画像形成装置
CN107107618A (zh) * 2015-01-16 2017-08-29 柯尼卡美能达株式会社 喷墨头以及喷墨记录装置
CN108025551A (zh) * 2015-09-18 2018-05-11 柯尼卡美能达株式会社 喷墨头以及喷墨记录装置

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JP4366217B2 (ja) * 2004-03-11 2009-11-18 株式会社リコー 液体吐出ヘッド、液体吐出カートリッジ及び画像形成装置
US7347533B2 (en) * 2004-12-20 2008-03-25 Palo Alto Research Center Incorporated Low cost piezo printhead based on microfluidics in printed circuit board and screen-printed piezoelectrics
KR101101653B1 (ko) * 2006-12-12 2011-12-30 삼성전기주식회사 압전방식 페이지 폭 잉크젯프린트헤드
JP5544690B2 (ja) * 2008-07-23 2014-07-09 セイコーエプソン株式会社 液体供給装置、液体噴射装置及び液体供給方法
JP2012061717A (ja) * 2010-09-16 2012-03-29 Ricoh Co Ltd 液滴吐出ヘッド及びインクジェット記録装置
JP5750753B2 (ja) 2011-01-11 2015-07-22 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6217217B2 (ja) * 2013-08-01 2017-10-25 セイコーエプソン株式会社 液体吐出ヘッド、及び、液体吐出装置
JP6488807B2 (ja) * 2015-03-24 2019-03-27 セイコーエプソン株式会社 液体吐出装置および信号供給装置
US9694581B2 (en) * 2015-04-09 2017-07-04 Ricoh Company, Ltd. Liquid discharge head, liquid discharge device, liquid discharge apparatus, and image forming apparatus
JP6760049B2 (ja) 2016-12-26 2020-09-23 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、液体循環方法及び液体吐出方法
JP6957885B2 (ja) 2017-01-31 2021-11-02 東レ株式会社 有機エレクトロルミネッセンス表示装置用フィルムおよび積層シート
JP7102980B2 (ja) * 2018-06-29 2022-07-20 セイコーエプソン株式会社 液体噴射ヘッドと液体噴射装置と液体噴射ヘッドの製造方法

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Publication number Priority date Publication date Assignee Title
JP5171534B2 (ja) * 2008-10-15 2013-03-27 富士フイルム株式会社 インクジェット記録方法
CN102481789A (zh) * 2009-07-10 2012-05-30 富士胶卷迪马蒂克斯股份有限公司 用于密集封装的微机电系统喷射结构
CN104339860A (zh) * 2013-08-09 2015-02-11 精工爱普生株式会社 液体喷射头以及液体喷射装置
JP2016107495A (ja) * 2014-12-05 2016-06-20 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
CN107107618A (zh) * 2015-01-16 2017-08-29 柯尼卡美能达株式会社 喷墨头以及喷墨记录装置
CN108025551A (zh) * 2015-09-18 2018-05-11 柯尼卡美能达株式会社 喷墨头以及喷墨记录装置
JP2017087708A (ja) * 2015-11-04 2017-05-25 株式会社リコー 液滴吐出ヘッド及び画像形成装置
JP2016153240A (ja) * 2016-04-19 2016-08-25 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置並びに液体吐出方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113524911A (zh) * 2018-06-29 2021-10-22 精工爱普生株式会社 液体喷射头、液体喷射装置及其制造方法
CN113524911B (zh) * 2018-06-29 2023-05-05 精工爱普生株式会社 液体喷射头、液体喷射装置及其制造方法

Also Published As

Publication number Publication date
JP7102980B2 (ja) 2022-07-20
EP3587116B1 (en) 2023-10-18
US10906311B2 (en) 2021-02-02
EP3587116A1 (en) 2020-01-01
JP2020001316A (ja) 2020-01-09
CN113524911B (zh) 2023-05-05
CN110654115A (zh) 2020-01-07
CN113524911A (zh) 2021-10-22
US20200001601A1 (en) 2020-01-02

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