CN110484886B - 一种含微量稀土元素的镍铼合金旋转管状靶材及制备方法 - Google Patents
一种含微量稀土元素的镍铼合金旋转管状靶材及制备方法 Download PDFInfo
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- CN110484886B CN110484886B CN201910869345.3A CN201910869345A CN110484886B CN 110484886 B CN110484886 B CN 110484886B CN 201910869345 A CN201910869345 A CN 201910869345A CN 110484886 B CN110484886 B CN 110484886B
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0433—Nickel- or cobalt-based alloys
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/03—Alloys based on nickel or cobalt based on nickel
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/10—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of nickel or cobalt or alloys based thereon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
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Claims (1)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN201910869345.3A CN110484886B (zh) | 2019-09-12 | 2019-09-12 | 一种含微量稀土元素的镍铼合金旋转管状靶材及制备方法 |
PCT/CN2019/108211 WO2021046927A1 (zh) | 2019-09-12 | 2019-09-26 | 一种含微量稀土元素的镍铼合金旋转管状靶材及制备方法 |
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CN201910869345.3A CN110484886B (zh) | 2019-09-12 | 2019-09-12 | 一种含微量稀土元素的镍铼合金旋转管状靶材及制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN110484886A CN110484886A (zh) | 2019-11-22 |
CN110484886B true CN110484886B (zh) | 2021-09-17 |
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CN201910869345.3A Active CN110484886B (zh) | 2019-09-12 | 2019-09-12 | 一种含微量稀土元素的镍铼合金旋转管状靶材及制备方法 |
Country Status (2)
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CN (1) | CN110484886B (zh) |
WO (1) | WO2021046927A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111996503A (zh) * | 2019-12-30 | 2020-11-27 | 宁夏东方钽业股份有限公司 | 铌旋转靶材的成型方法 |
CN111304606A (zh) * | 2020-03-30 | 2020-06-19 | 宁波江丰电子材料股份有限公司 | 无缺陷高纯镍钒靶坯的制备方法及利用其制备得到的靶材 |
CN111876737A (zh) * | 2020-07-24 | 2020-11-03 | 宁波江丰电子材料股份有限公司 | 一种镍铬合金溅射靶材及其制备方法 |
CN113151760A (zh) * | 2020-12-18 | 2021-07-23 | 贵州航天精工制造有限公司 | 一种保证gh738托板自锁螺母晶粒度的余温热处理方法 |
CN114657345B (zh) * | 2022-03-31 | 2024-04-09 | 先导薄膜材料(广东)有限公司 | 铁靶材、铁镍合金靶材以及靶材的晶粒细化方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1243171A (zh) * | 1999-08-06 | 2000-02-02 | 上海交通大学 | 含混合稀土元素高阻溅射靶材 |
CN102352483A (zh) * | 2011-11-15 | 2012-02-15 | 江苏美特林科特殊合金有限公司 | 一种真空溅射镀膜用硅铝合金中空旋转靶材的制备方法 |
CN104018120A (zh) * | 2014-06-24 | 2014-09-03 | 昆山海普电子材料有限公司 | 镍铂合金靶材及其制备方法 |
CN109423615A (zh) * | 2017-08-30 | 2019-03-05 | 光洋应用材料科技股份有限公司 | 镍铼合金靶材及其制法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5069873A (en) * | 1989-08-14 | 1991-12-03 | Cannon-Muskegon Corporation | Low carbon directional solidification alloy |
US6911063B2 (en) * | 2003-01-13 | 2005-06-28 | Genius Metal, Inc. | Compositions and fabrication methods for hardmetals |
US8123919B2 (en) * | 2005-09-20 | 2012-02-28 | Guardian Industries Corp. | Sputtering target with bonding layer of varying thickness under target material |
CN107130140A (zh) * | 2017-05-08 | 2017-09-05 | 大连理工大学 | 一类镍基单晶高温合金的成分及其应用 |
CN107460419B (zh) * | 2017-06-30 | 2019-08-02 | 江苏大学 | 一种低铼单晶铸件的组织及性能优化新工艺 |
CN107904447A (zh) * | 2017-12-05 | 2018-04-13 | 大连理工大学 | 一种镍基单晶高温合金系列Nideal2合金系列及其应用 |
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2019
- 2019-09-12 CN CN201910869345.3A patent/CN110484886B/zh active Active
- 2019-09-26 WO PCT/CN2019/108211 patent/WO2021046927A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1243171A (zh) * | 1999-08-06 | 2000-02-02 | 上海交通大学 | 含混合稀土元素高阻溅射靶材 |
CN102352483A (zh) * | 2011-11-15 | 2012-02-15 | 江苏美特林科特殊合金有限公司 | 一种真空溅射镀膜用硅铝合金中空旋转靶材的制备方法 |
CN104018120A (zh) * | 2014-06-24 | 2014-09-03 | 昆山海普电子材料有限公司 | 镍铂合金靶材及其制备方法 |
CN109423615A (zh) * | 2017-08-30 | 2019-03-05 | 光洋应用材料科技股份有限公司 | 镍铼合金靶材及其制法 |
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CN110484886A (zh) | 2019-11-22 |
WO2021046927A1 (zh) | 2021-03-18 |
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Address after: 211102 no.379 Pugang street, Jiuzhu Road, Yinxiang, Jiangning Economic Development Zone, Nanjing City, Jiangsu Province Patentee after: Nanjing Damai Technology Industry Co.,Ltd. Patentee after: JIANGSU University Address before: 211102 no.379 Pugang street, Jiuzhu Road, Yinxiang, Jiangning Economic Development Zone, Nanjing City, Jiangsu Province Patentee before: NANJING DAMAI SCIENCE&TECHNOLOGY INDUSTRY Co.,Ltd. Patentee before: JIANGSU University |
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Effective date of registration: 20230404 Address after: 211102 no.379 Pugang street, Jiuzhu Road, Yinxiang, Jiangning Economic Development Zone, Nanjing City, Jiangsu Province Patentee after: Nanjing Damai Technology Industry Co.,Ltd. Address before: 211102 no.379 Pugang street, Jiuzhu Road, Yinxiang, Jiangning Economic Development Zone, Nanjing City, Jiangsu Province Patentee before: Nanjing Damai Technology Industry Co.,Ltd. Patentee before: JIANGSU University |