CN110352431B - 图像处理系统、计算机可读存储介质以及系统 - Google Patents

图像处理系统、计算机可读存储介质以及系统 Download PDF

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CN110352431B
CN110352431B CN201880014768.0A CN201880014768A CN110352431B CN 110352431 B CN110352431 B CN 110352431B CN 201880014768 A CN201880014768 A CN 201880014768A CN 110352431 B CN110352431 B CN 110352431B
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image
recognition
data
failed
difference
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CN110352431A (zh
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筱田伸一
丰田康隆
崎村茂寿
石川昌义
新藤博之
菅原仁志
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/20—Image preprocessing
    • G06V10/30—Noise filtering
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/60—Memory management
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/50—Image enhancement or restoration using two or more images, e.g. averaging or subtraction
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/44—Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/772—Determining representative reference patterns, e.g. averaging or distorting patterns; Generating dictionaries
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774—Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/98—Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/24—Indexing scheme for image data processing or generation, in general involving graphical user interfaces [GUIs]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20212—Image combination
    • G06T2207/20224—Image subtraction
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Software Systems (AREA)
  • Medical Informatics (AREA)
  • Artificial Intelligence (AREA)
  • Computing Systems (AREA)
  • Evolutionary Computation (AREA)
  • Quality & Reliability (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Databases & Information Systems (AREA)
  • Data Mining & Analysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Image Analysis (AREA)
CN201880014768.0A 2017-03-27 2018-03-15 图像处理系统、计算机可读存储介质以及系统 Active CN110352431B (zh)

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JP2017-060351 2017-03-27
JP2017060351A JP6731370B2 (ja) 2017-03-27 2017-03-27 画像処理システム及び画像処理を行うためのコンピュータープログラム
PCT/JP2018/010307 WO2018180562A1 (ja) 2017-03-27 2018-03-15 画像処理システム及び画像処理を行うためのコンピュータープログラム

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JP (1) JP6731370B2 (enExample)
KR (2) KR102435492B1 (enExample)
CN (2) CN110352431B (enExample)
TW (2) TW201835815A (enExample)
WO (1) WO2018180562A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11675053B2 (en) 2018-06-15 2023-06-13 Innovusion, Inc. LiDAR systems and methods for focusing on ranges of interest
JP7472034B2 (ja) 2018-10-31 2024-04-22 住友建機株式会社 ショベル、ショベル支援システム
WO2020234737A1 (en) * 2019-05-18 2020-11-26 Looplearn Pty Ltd Localised, loop-based self-learning for recognising individuals at locations
JP2021117548A (ja) * 2020-01-22 2021-08-10 富士通株式会社 画像処理装置、画像処理方法及び画像処理プログラム
JP7288870B2 (ja) * 2020-02-05 2023-06-08 株式会社日立製作所 画像を生成するシステム
US12131103B2 (en) * 2020-03-30 2024-10-29 Kla Corporation Semiconductor fabrication process parameter determination using a generative adversarial network
WO2021199164A1 (ja) * 2020-03-30 2021-10-07 株式会社日立ハイテク 診断システム
CN111832433B (zh) * 2020-06-24 2023-12-29 奇点微(上海)光电科技有限公司 一种由图像提取物体特性的装置及其工作方法
JP7351812B2 (ja) * 2020-07-27 2023-09-27 株式会社日立製作所 荷電粒子線装置および帯電評価方法
US20220101114A1 (en) * 2020-09-27 2022-03-31 Kla Corporation Interpretable deep learning-based defect detection and classification
CN113505700A (zh) * 2021-07-12 2021-10-15 北京字跳网络技术有限公司 一种图像处理方法、装置、设备及存储介质
JP7743224B2 (ja) 2021-07-30 2025-09-24 株式会社Ｓｃｒｅｅｎホールディングス 画像処理方法および分類モデルの構築方法
WO2024111303A1 (ja) * 2022-11-22 2024-05-30 パナソニックＩｐマネジメント株式会社 学習システム、学習方法およびプログラム
US20240273232A1 (en) * 2023-02-15 2024-08-15 BeeKeeperAI, Inc. Systems and methods for measuring data exfiltration vulnerability and dynamic differential privacy in a zero-trust computing environment
JP2025040724A (ja) * 2023-09-12 2025-03-25 日立Astemo株式会社 Ａｉモデル学習システム、及びａｉモデル学習方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001148012A (ja) * 1999-11-19 2001-05-29 Minolta Co Ltd 対応点探索方法および装置
CN101127119A (zh) * 2006-08-14 2008-02-20 株式会社日立高新技术 图案检查装置以及半导体检查系统
WO2013099367A1 (ja) * 2011-12-27 2013-07-04 Ｎｅｃソフト株式会社 画像認識装置、画像認識方法、補正器、プログラムおよび記録媒体
WO2016182607A1 (en) * 2015-05-14 2016-11-17 Sri International Selecting optimal image from mobile device captures

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0554195A (ja) 1991-08-29 1993-03-05 Matsushita Electric Ind Co Ltd 文字認識装置
JPH0650738A (ja) 1992-07-31 1994-02-25 Toyota Motor Corp 画像輪郭線検出装置
JPH06333008A (ja) 1993-05-19 1994-12-02 Fujitsu General Ltd 画像輪郭指定用入力装置
JP3434976B2 (ja) * 1996-06-28 2003-08-11 三菱電機株式会社 画像処理装置
JP3449392B2 (ja) 1996-08-27 2003-09-22 日本電信電話株式会社 識別関数学習方法
JP2005149455A (ja) * 2003-10-21 2005-06-09 Sharp Corp 画像照合装置、画像照合方法、画像照合プログラムおよび画像照合プログラムを記録したコンピュータ読取り可能な記録媒体
JP2007052575A (ja) * 2005-08-17 2007-03-01 Konica Minolta Holdings Inc メタデータ付与装置およびメタデータ付与方法
US20110106734A1 (en) 2009-04-24 2011-05-05 Terrance Boult System and appartus for failure prediction and fusion in classification and recognition
KR101034117B1 (ko) 2009-11-13 2011-05-13 성균관대학교산학협력단 영상에서 관심 영역 지정 및 윤곽선 영상을 이용한 객체 인식 방법 및 장치
JP5546317B2 (ja) * 2010-03-31 2014-07-09 株式会社デンソーアイティーラボラトリ 外観検査装置、外観検査用識別器の生成装置及び外観検査用識別器生成方法ならびに外観検査用識別器生成用コンピュータプログラム
EP2682913A4 (en) * 2011-03-04 2014-08-27 Nec Corp INDIVIDUAL PRODUCT IDENTIFICATION SYSTEM, INDIVIDUAL PRODUCT IDENTIFICATION METHOD AND DEVICE AND PROGRAM THEREWITH
JP2013084074A (ja) * 2011-10-07 2013-05-09 Sony Corp 情報処理装置、情報処理サーバ、情報処理方法、情報抽出方法及びプログラム
US9053595B2 (en) * 2012-02-02 2015-06-09 Jared Grove Coin identification system and method using image processing
JP5808371B2 (ja) 2013-08-28 2015-11-10 ヤフー株式会社 画像認識装置、画像認識方法及び画像認識プログラム
JP2015176272A (ja) * 2014-03-14 2015-10-05 オムロン株式会社 画像処理装置、画像処理方法、および画像処理プログラム
US9518934B2 (en) 2014-11-04 2016-12-13 Kla-Tencor Corp. Wafer defect discovery
JP2016099668A (ja) 2014-11-18 2016-05-30 キヤノン株式会社 学習方法、学習装置、画像認識方法、画像認識装置及びプログラム
CN105844202A (zh) * 2015-01-12 2016-08-10 芋头科技（杭州）有限公司 一种影像识别系统及方法
US10339422B2 (en) 2015-03-19 2019-07-02 Nec Corporation Object detection device, object detection method, and recording medium
US10659766B2 (en) * 2015-10-30 2020-05-19 Canon Kabushiki Kaisha Confidence generation apparatus, confidence generation method, and imaging apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001148012A (ja) * 1999-11-19 2001-05-29 Minolta Co Ltd 対応点探索方法および装置
CN101127119A (zh) * 2006-08-14 2008-02-20 株式会社日立高新技术 图案检查装置以及半导体检查系统
WO2013099367A1 (ja) * 2011-12-27 2013-07-04 Ｎｅｃソフト株式会社 画像認識装置、画像認識方法、補正器、プログラムおよび記録媒体
WO2016182607A1 (en) * 2015-05-14 2016-11-17 Sri International Selecting optimal image from mobile device captures

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Publication number Publication date
US11836906B2 (en) 2023-12-05
TW201945982A (zh) 2019-12-01
CN116152507A (zh) 2023-05-23
KR20190103283A (ko) 2019-09-04
KR102435492B1 (ko) 2022-08-24
CN110352431A (zh) 2019-10-18
TWI697849B (zh) 2020-07-01
WO2018180562A1 (ja) 2018-10-04
JP2018163524A (ja) 2018-10-18
TW201835815A (zh) 2018-10-01
KR102336431B1 (ko) 2021-12-08
US20220036116A1 (en) 2022-02-03
KR20210111335A (ko) 2021-09-10
JP6731370B2 (ja) 2020-07-29
US20200134355A1 (en) 2020-04-30
US11176405B2 (en) 2021-11-16

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