CN109890772B - 玻璃基板的制造方法 - Google Patents

玻璃基板的制造方法 Download PDF

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Publication number
CN109890772B
CN109890772B CN201780067500.9A CN201780067500A CN109890772B CN 109890772 B CN109890772 B CN 109890772B CN 201780067500 A CN201780067500 A CN 201780067500A CN 109890772 B CN109890772 B CN 109890772B
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China
Prior art keywords
glass substrate
gas
port
exhaust port
supply port
Prior art date
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Active
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CN201780067500.9A
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English (en)
Chinese (zh)
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CN109890772A (zh
Inventor
山本好晴
中塚弘树
大野和宏
伊泽诚一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Publication date
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Publication of CN109890772A publication Critical patent/CN109890772A/zh
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
  • Cleaning In General (AREA)
CN201780067500.9A 2016-11-16 2017-10-30 玻璃基板的制造方法 Active CN109890772B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016223250A JP6700605B2 (ja) 2016-11-16 2016-11-16 ガラス基板の製造方法
JP2016-223250 2016-11-16
PCT/JP2017/039044 WO2018092557A1 (ja) 2016-11-16 2017-10-30 ガラス基板の製造方法

Publications (2)

Publication Number Publication Date
CN109890772A CN109890772A (zh) 2019-06-14
CN109890772B true CN109890772B (zh) 2021-11-30

Family

ID=62146297

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780067500.9A Active CN109890772B (zh) 2016-11-16 2017-10-30 玻璃基板的制造方法

Country Status (5)

Country Link
JP (1) JP6700605B2 (ja)
KR (1) KR102373643B1 (ja)
CN (1) CN109890772B (ja)
TW (1) TWI730194B (ja)
WO (1) WO2018092557A1 (ja)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040112537A1 (en) * 2002-12-10 2004-06-17 Semiconductor Energy Laboratory Co., Ltd. Plasma treatment apparatus and method for plasma treatment
CN1577762A (zh) * 2003-07-28 2005-02-09 禧沛股份有限公司 基板支持装置及基板取出方法
CN1638033A (zh) * 2004-01-08 2005-07-13 大日本网目版制造株式会社 基板处理装置
JP2005353909A (ja) * 2004-06-11 2005-12-22 Future Vision:Kk 基板処理装置
CN1779905A (zh) * 2004-11-01 2006-05-31 东京毅力科创株式会社 基板处理系统
CN1813342A (zh) * 2003-06-27 2006-08-02 东京毅力科创株式会社 等离子产生方法、清洗方法以及衬底处理方法
CN102007565A (zh) * 2009-03-17 2011-04-06 德国罗特·劳股份有限公司 基片处理系统和基片处理方法
CN102165566A (zh) * 2008-09-30 2011-08-24 积水化学工业株式会社 表面处理装置
CN102870199A (zh) * 2010-04-30 2013-01-09 应用材料公司 利用孔比例传导控制降低分流错误的方法和设备
JP2014125414A (ja) * 2012-12-27 2014-07-07 Nippon Electric Glass Co Ltd 板状ガラスの表面処理装置及び表面処理方法
JP2016135726A (ja) * 2015-01-23 2016-07-28 旭硝子株式会社 ガラス基板の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3242145B2 (ja) * 1992-05-18 2001-12-25 ワイエイシイ株式会社 基板搬送装置
PL3053888T3 (pl) * 2013-09-30 2021-07-19 Nippon Sheet Glass Company, Limited Sposób wytwarzania tafli szkła
EP3035375B1 (en) * 2014-12-19 2017-05-03 ATOTECH Deutschland GmbH Treating module of an apparatus for horizontal wet-chemical treatment of large-scale substrates

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040112537A1 (en) * 2002-12-10 2004-06-17 Semiconductor Energy Laboratory Co., Ltd. Plasma treatment apparatus and method for plasma treatment
CN1813342A (zh) * 2003-06-27 2006-08-02 东京毅力科创株式会社 等离子产生方法、清洗方法以及衬底处理方法
CN1577762A (zh) * 2003-07-28 2005-02-09 禧沛股份有限公司 基板支持装置及基板取出方法
CN1638033A (zh) * 2004-01-08 2005-07-13 大日本网目版制造株式会社 基板处理装置
JP2005353909A (ja) * 2004-06-11 2005-12-22 Future Vision:Kk 基板処理装置
JP4417180B2 (ja) * 2004-06-11 2010-02-17 株式会社フューチャービジョン 基板処理装置
CN1779905A (zh) * 2004-11-01 2006-05-31 东京毅力科创株式会社 基板处理系统
CN102165566A (zh) * 2008-09-30 2011-08-24 积水化学工业株式会社 表面处理装置
CN102007565A (zh) * 2009-03-17 2011-04-06 德国罗特·劳股份有限公司 基片处理系统和基片处理方法
CN102870199A (zh) * 2010-04-30 2013-01-09 应用材料公司 利用孔比例传导控制降低分流错误的方法和设备
JP2014125414A (ja) * 2012-12-27 2014-07-07 Nippon Electric Glass Co Ltd 板状ガラスの表面処理装置及び表面処理方法
JP2016135726A (ja) * 2015-01-23 2016-07-28 旭硝子株式会社 ガラス基板の製造方法

Also Published As

Publication number Publication date
KR102373643B1 (ko) 2022-03-14
JP6700605B2 (ja) 2020-05-27
WO2018092557A1 (ja) 2018-05-24
TWI730194B (zh) 2021-06-11
KR20190082745A (ko) 2019-07-10
CN109890772A (zh) 2019-06-14
TW201825977A (zh) 2018-07-16
JP2018080080A (ja) 2018-05-24

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