TWI730194B - 玻璃基板之製造方法 - Google Patents

玻璃基板之製造方法 Download PDF

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Publication number
TWI730194B
TWI730194B TW106138539A TW106138539A TWI730194B TW I730194 B TWI730194 B TW I730194B TW 106138539 A TW106138539 A TW 106138539A TW 106138539 A TW106138539 A TW 106138539A TW I730194 B TWI730194 B TW I730194B
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TW
Taiwan
Prior art keywords
glass substrate
gas
air supply
processing space
conveying direction
Prior art date
Application number
TW106138539A
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English (en)
Chinese (zh)
Other versions
TW201825977A (zh
Inventor
山本好晴
中弘樹
大野和宏
伊澤誠一
Original Assignee
日商日本電氣硝子股份有限公司
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Application filed by 日商日本電氣硝子股份有限公司 filed Critical 日商日本電氣硝子股份有限公司
Publication of TW201825977A publication Critical patent/TW201825977A/zh
Application granted granted Critical
Publication of TWI730194B publication Critical patent/TWI730194B/zh

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
  • Cleaning In General (AREA)
TW106138539A 2016-11-16 2017-11-08 玻璃基板之製造方法 TWI730194B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016223250A JP6700605B2 (ja) 2016-11-16 2016-11-16 ガラス基板の製造方法
JP2016-223250 2016-11-16

Publications (2)

Publication Number Publication Date
TW201825977A TW201825977A (zh) 2018-07-16
TWI730194B true TWI730194B (zh) 2021-06-11

Family

ID=62146297

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106138539A TWI730194B (zh) 2016-11-16 2017-11-08 玻璃基板之製造方法

Country Status (5)

Country Link
JP (1) JP6700605B2 (ja)
KR (1) KR102373643B1 (ja)
CN (1) CN109890772B (ja)
TW (1) TWI730194B (ja)
WO (1) WO2018092557A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014125414A (ja) * 2012-12-27 2014-07-07 Nippon Electric Glass Co Ltd 板状ガラスの表面処理装置及び表面処理方法
WO2015045405A1 (ja) * 2013-09-30 2015-04-02 日本板硝子株式会社 ガラス板の製造方法
JP2016135726A (ja) * 2015-01-23 2016-07-28 旭硝子株式会社 ガラス基板の製造方法
TW201630845A (zh) * 2014-12-19 2016-09-01 德國艾托特克公司 用於大型基板之水平濕式化學處理之裝置的處理模組

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3242145B2 (ja) * 1992-05-18 2001-12-25 ワイエイシイ株式会社 基板搬送装置
US7064089B2 (en) * 2002-12-10 2006-06-20 Semiconductor Energy Laboratory Co., Ltd. Plasma treatment apparatus and method for plasma treatment
JP4558284B2 (ja) * 2003-06-27 2010-10-06 東京エレクトロン株式会社 プラズマ発生方法、クリーニング方法、基板処理方法、およびプラズマ発生装置
JP4312001B2 (ja) * 2003-07-28 2009-08-12 リアライズ・アドバンストテクノロジ株式会社 基板支持装置および基板取り外し方法
JP4398262B2 (ja) * 2004-01-08 2010-01-13 大日本スクリーン製造株式会社 基板処理装置
JP2006128559A (ja) * 2004-11-01 2006-05-18 Tokyo Electron Ltd 基板処理システム
JP4417180B2 (ja) * 2004-06-11 2010-02-17 株式会社フューチャービジョン 基板処理装置
JP4486146B2 (ja) * 2008-09-30 2010-06-23 積水化学工業株式会社 表面処理装置
US20110124144A1 (en) * 2009-03-17 2011-05-26 Roth & Rau Ag Substrate processing system and substrate processing method
US20110265883A1 (en) * 2010-04-30 2011-11-03 Applied Materials, Inc. Methods and apparatus for reducing flow splitting errors using orifice ratio conductance control

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014125414A (ja) * 2012-12-27 2014-07-07 Nippon Electric Glass Co Ltd 板状ガラスの表面処理装置及び表面処理方法
WO2015045405A1 (ja) * 2013-09-30 2015-04-02 日本板硝子株式会社 ガラス板の製造方法
TW201630845A (zh) * 2014-12-19 2016-09-01 德國艾托特克公司 用於大型基板之水平濕式化學處理之裝置的處理模組
TWI598309B (zh) * 2014-12-19 2017-09-11 德國艾托特克公司 用於大型基板之水平濕式化學處理之裝置的處理模組
JP2016135726A (ja) * 2015-01-23 2016-07-28 旭硝子株式会社 ガラス基板の製造方法

Also Published As

Publication number Publication date
TW201825977A (zh) 2018-07-16
JP2018080080A (ja) 2018-05-24
KR102373643B1 (ko) 2022-03-14
CN109890772B (zh) 2021-11-30
KR20190082745A (ko) 2019-07-10
CN109890772A (zh) 2019-06-14
JP6700605B2 (ja) 2020-05-27
WO2018092557A1 (ja) 2018-05-24

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