CN109844474B - 用于分析高清晰度电磁波的方法和设备 - Google Patents

用于分析高清晰度电磁波的方法和设备 Download PDF

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CN109844474B
CN109844474B CN201780060780.0A CN201780060780A CN109844474B CN 109844474 B CN109844474 B CN 109844474B CN 201780060780 A CN201780060780 A CN 201780060780A CN 109844474 B CN109844474 B CN 109844474B
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matrix array
diffractive element
array sensor
sensor
several
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CN109844474A (zh
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伯诺瓦·瓦特利耶
阿奈·圣托扬
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/002—Wavefront phase distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0249—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods with modulation
    • G01J2009/0253—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods with modulation of wavelength

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN201780060780.0A 2016-09-30 2017-09-28 用于分析高清晰度电磁波的方法和设备 Active CN109844474B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1659411 2016-09-30
FR1659411A FR3057064B1 (fr) 2016-09-30 2016-09-30 Procede et dispositif d'analyse d'une onde electromagnetique en haute definition
PCT/EP2017/074674 WO2018060359A1 (fr) 2016-09-30 2017-09-28 Procede et dispositif d'analyse d'une onde electromagnetique en haute definition

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CN109844474B true CN109844474B (zh) 2021-10-15

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US (1) US11029214B2 (enExample)
EP (1) EP3519784A1 (enExample)
JP (1) JP7373399B2 (enExample)
KR (1) KR102617662B1 (enExample)
CN (1) CN109844474B (enExample)
CA (1) CA3037110A1 (enExample)
FR (1) FR3057064B1 (enExample)
WO (1) WO2018060359A1 (enExample)

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Publication number Priority date Publication date Assignee Title
CN110160663B (zh) * 2019-05-17 2020-12-04 中国科学院上海光学精密机械研究所 一种高分辨率的近场波前测量装置和测量方法
JPWO2024257517A1 (enExample) * 2023-06-12 2024-12-19

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CN102954842A (zh) * 2012-10-30 2013-03-06 哈尔滨工程大学 基于同步载频移相的共光路干涉检测装置与方法
CN103857832A (zh) * 2011-07-15 2014-06-11 埃赫曼公司 锰电解池的具有排气口的内箱及相关的电解池和方法
CN104316204A (zh) * 2014-06-23 2015-01-28 西安工业大学 一种高精度的变频干涉的四步相移标定方法

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FR2795175B1 (fr) 1999-06-17 2001-07-27 Onera (Off Nat Aerospatiale) Interferometre optique achromatique, du type a sensibilite continument reglable
US6304330B1 (en) * 1999-10-06 2001-10-16 Metrolaser, Inc. Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry
WO2003087945A2 (de) 2002-04-15 2003-10-23 Carl Zeiss Smt Ag Interferometrische messvorrichtung und projektionsbelichtungsanlage mit derartiger messvorrichtung
JP2004264347A (ja) * 2003-02-06 2004-09-24 Sumitomo Electric Ind Ltd 回折型光学部品およびそれを用いたレーザ加工装置
FR2930336B1 (fr) * 2008-04-22 2010-05-14 Onera (Off Nat Aerospatiale) Procede, reseau de phase et dispositif d'analyse de surface d'onde d'un faisceau de lumiere
US7889356B2 (en) 2008-12-09 2011-02-15 Zygo Corporation Two grating lateral shearing wavefront sensor
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JP2011142279A (ja) 2010-01-08 2011-07-21 Nikon Corp 波面収差計測方法及び装置、並びに露光方法及び装置
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US7919741B1 (en) * 2007-12-18 2011-04-05 Lockheed Martin Corporation Indirect wave front sensing
CN103857832A (zh) * 2011-07-15 2014-06-11 埃赫曼公司 锰电解池的具有排气口的内箱及相关的电解池和方法
CN102878922A (zh) * 2012-09-12 2013-01-16 哈尔滨工程大学 基于分光棱镜的三窗口共光路干涉检测装置及检测方法
CN102954842A (zh) * 2012-10-30 2013-03-06 哈尔滨工程大学 基于同步载频移相的共光路干涉检测装置与方法
CN104316204A (zh) * 2014-06-23 2015-01-28 西安工业大学 一种高精度的变频干涉的四步相移标定方法

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Sokolov, VI.Measurements of small wave-front distortions using a three-wave lateral shearing interferometer.《QUANTUM ELECTRONICS》.2001, *
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Publication number Publication date
KR20190053205A (ko) 2019-05-17
FR3057064A1 (fr) 2018-04-06
EP3519784A1 (fr) 2019-08-07
WO2018060359A1 (fr) 2018-04-05
US20190285481A1 (en) 2019-09-19
JP7373399B2 (ja) 2023-11-02
KR102617662B1 (ko) 2023-12-22
US11029214B2 (en) 2021-06-08
CN109844474A (zh) 2019-06-04
JP2019533174A (ja) 2019-11-14
CA3037110A1 (fr) 2018-04-05
FR3057064B1 (fr) 2021-04-23

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