JP7373399B2 - 高精細度で電磁波を解析するための方法および装置 - Google Patents

高精細度で電磁波を解析するための方法および装置 Download PDF

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JP7373399B2
JP7373399B2 JP2019538717A JP2019538717A JP7373399B2 JP 7373399 B2 JP7373399 B2 JP 7373399B2 JP 2019538717 A JP2019538717 A JP 2019538717A JP 2019538717 A JP2019538717 A JP 2019538717A JP 7373399 B2 JP7373399 B2 JP 7373399B2
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matrix array
image sensor
array image
electromagnetic wave
diffractive element
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JP2019533174A5 (enExample
JP2019533174A (ja
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ワトリエ，ブノワ
サントヤン，アナイス
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Phasics SAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/002—Wavefront phase distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0249—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods with modulation
    • G01J2009/0253—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods with modulation of wavelength

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2019538717A 2016-09-30 2017-09-28 高精細度で電磁波を解析するための方法および装置 Active JP7373399B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1659411 2016-09-30
FR1659411A FR3057064B1 (fr) 2016-09-30 2016-09-30 Procede et dispositif d'analyse d'une onde electromagnetique en haute definition
PCT/EP2017/074674 WO2018060359A1 (fr) 2016-09-30 2017-09-28 Procede et dispositif d'analyse d'une onde electromagnetique en haute definition

Publications (3)

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JP2019533174A JP2019533174A (ja) 2019-11-14
JP2019533174A5 JP2019533174A5 (enExample) 2022-12-28
JP7373399B2 true JP7373399B2 (ja) 2023-11-02

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JP2019538717A Active JP7373399B2 (ja) 2016-09-30 2017-09-28 高精細度で電磁波を解析するための方法および装置

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Country Link
US (1) US11029214B2 (enExample)
EP (1) EP3519784A1 (enExample)
JP (1) JP7373399B2 (enExample)
KR (1) KR102617662B1 (enExample)
CN (1) CN109844474B (enExample)
CA (1) CA3037110A1 (enExample)
FR (1) FR3057064B1 (enExample)
WO (1) WO2018060359A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110160663B (zh) * 2019-05-17 2020-12-04 中国科学院上海光学精密机械研究所 一种高分辨率的近场波前测量装置和测量方法
JPWO2024257517A1 (enExample) * 2023-06-12 2024-12-19

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Publication number Priority date Publication date Assignee Title
JP2000105168A (ja) 1998-07-27 2000-04-11 Matsushita Electric Ind Co Ltd 光学装置用光学要素の収差を評価する方法及び装置
JP2005522871A (ja) 2002-04-15 2005-07-28 カール・ツァイス・エスエムティー・アーゲー 干渉計測装置および該計測装置からなる投影露光装置
JP2011142279A (ja) 2010-01-08 2011-07-21 Nikon Corp 波面収差計測方法及び装置、並びに露光方法及び装置
JP2012511728A (ja) 2008-12-09 2012-05-24 ザイゴ コーポレーション 二重グレーチング横方向シアリング波面センサ
JP2013214637A (ja) 2012-04-03 2013-10-17 Nikon Corp 波面計測方法及び装置、並びに露光方法及び装置
JP2016163072A (ja) 2015-02-26 2016-09-05 キヤノン株式会社 画像処理装置、撮像装置、画像処理装置の制御方法およびプログラム

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SG74157A1 (en) * 1998-07-27 2000-07-18 Matsushita Electric Industrial Co Ltd Method and apparatus for evaluating aberrations of optical element for use with optical device
FR2795175B1 (fr) 1999-06-17 2001-07-27 Onera (Off Nat Aerospatiale) Interferometre optique achromatique, du type a sensibilite continument reglable
US6304330B1 (en) * 1999-10-06 2001-10-16 Metrolaser, Inc. Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry
JP2004264347A (ja) * 2003-02-06 2004-09-24 Sumitomo Electric Ind Ltd 回折型光学部品およびそれを用いたレーザ加工装置
US6897961B2 (en) * 2003-03-19 2005-05-24 The Boeing Company Heterodyne lateral grating interferometric encoder
US7919741B1 (en) * 2007-12-18 2011-04-05 Lockheed Martin Corporation Indirect wave front sensing
FR2930336B1 (fr) * 2008-04-22 2010-05-14 Onera (Off Nat Aerospatiale) Procede, reseau de phase et dispositif d'analyse de surface d'onde d'un faisceau de lumiere
WO2010146503A1 (en) * 2009-06-16 2010-12-23 Koninklijke Philips Electronics N. V. Correction method for differential phase contrast imaging
CN103097925B (zh) * 2010-08-06 2016-04-13 旭硝子株式会社 衍射光学元件和计测装置
UA110726C2 (uk) * 2011-07-15 2016-02-10 Ераме Внутрішня камера електролізера марганцю з отворами відводу катодних газів, відповідний електролізер та спосіб
CN102878922B (zh) * 2012-09-12 2014-12-03 哈尔滨工程大学 基于分光棱镜的三窗口共光路干涉检测装置及检测方法
CN102954842B (zh) * 2012-10-30 2014-09-10 哈尔滨工程大学 基于同步载频移相的共光路干涉检测装置与方法
CN104316204B (zh) * 2014-06-23 2017-12-19 西安工业大学 一种高精度的变频干涉的四步相移标定方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000105168A (ja) 1998-07-27 2000-04-11 Matsushita Electric Ind Co Ltd 光学装置用光学要素の収差を評価する方法及び装置
JP2005522871A (ja) 2002-04-15 2005-07-28 カール・ツァイス・エスエムティー・アーゲー 干渉計測装置および該計測装置からなる投影露光装置
JP2012511728A (ja) 2008-12-09 2012-05-24 ザイゴ コーポレーション 二重グレーチング横方向シアリング波面センサ
JP2011142279A (ja) 2010-01-08 2011-07-21 Nikon Corp 波面収差計測方法及び装置、並びに露光方法及び装置
JP2013214637A (ja) 2012-04-03 2013-10-17 Nikon Corp 波面計測方法及び装置、並びに露光方法及び装置
JP2016163072A (ja) 2015-02-26 2016-09-05 キヤノン株式会社 画像処理装置、撮像装置、画像処理装置の制御方法およびプログラム

Also Published As

Publication number Publication date
KR20190053205A (ko) 2019-05-17
FR3057064A1 (fr) 2018-04-06
EP3519784A1 (fr) 2019-08-07
CN109844474B (zh) 2021-10-15
WO2018060359A1 (fr) 2018-04-05
US20190285481A1 (en) 2019-09-19
KR102617662B1 (ko) 2023-12-22
US11029214B2 (en) 2021-06-08
CN109844474A (zh) 2019-06-04
JP2019533174A (ja) 2019-11-14
CA3037110A1 (fr) 2018-04-05
FR3057064B1 (fr) 2021-04-23

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