CN109305816B - 一种常压烧结制备高热导率氮化硅陶瓷的方法 - Google Patents
一种常压烧结制备高热导率氮化硅陶瓷的方法 Download PDFInfo
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- CN109305816B CN109305816B CN201710623307.0A CN201710623307A CN109305816B CN 109305816 B CN109305816 B CN 109305816B CN 201710623307 A CN201710623307 A CN 201710623307A CN 109305816 B CN109305816 B CN 109305816B
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- 238000005245 sintering Methods 0.000 title claims abstract description 129
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 71
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 71
- 239000000919 ceramic Substances 0.000 title claims abstract description 69
- 238000000034 method Methods 0.000 title claims abstract description 40
- 239000000843 powder Substances 0.000 claims abstract description 41
- 235000015895 biscuits Nutrition 0.000 claims abstract description 34
- 238000000465 moulding Methods 0.000 claims abstract description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000011812 mixed powder Substances 0.000 claims abstract description 12
- 238000002156 mixing Methods 0.000 claims abstract description 11
- 239000004615 ingredient Substances 0.000 claims abstract description 6
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium(III) oxide Inorganic materials O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims abstract description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- 238000000498 ball milling Methods 0.000 claims description 28
- 238000003825 pressing Methods 0.000 claims description 22
- 239000012298 atmosphere Substances 0.000 claims description 19
- 238000009694 cold isostatic pressing Methods 0.000 claims description 19
- 230000001681 protective effect Effects 0.000 claims description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 238000001035 drying Methods 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 238000004321 preservation Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 238000007873 sieving Methods 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 238000002390 rotary evaporation Methods 0.000 claims description 3
- 238000001291 vacuum drying Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 abstract description 20
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(III) oxide Inorganic materials O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 abstract description 6
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 abstract description 6
- 229910003443 lutetium oxide Inorganic materials 0.000 abstract description 5
- 229910019752 Mg2Si Inorganic materials 0.000 abstract description 4
- 239000002994 raw material Substances 0.000 description 27
- 239000000463 material Substances 0.000 description 23
- 239000007791 liquid phase Substances 0.000 description 20
- 239000002131 composite material Substances 0.000 description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 14
- 239000002904 solvent Substances 0.000 description 13
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 10
- 229910010293 ceramic material Inorganic materials 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 239000002002 slurry Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000005496 eutectics Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000007373 indentation Methods 0.000 description 3
- 238000009766 low-temperature sintering Methods 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 101100365384 Mus musculus Eefsec gene Proteins 0.000 description 1
- 238000006463 Yamaguchi esterification reaction Methods 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
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- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
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Abstract
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CN201710623307.0A CN109305816B (zh) | 2017-07-27 | 2017-07-27 | 一种常压烧结制备高热导率氮化硅陶瓷的方法 |
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CN110240132B (zh) * | 2019-05-31 | 2022-12-02 | 武汉科技大学 | 一种基于熔盐法的氮化硅镁粉体及其制备方法 |
CN112441838B (zh) * | 2019-08-29 | 2022-05-13 | 中国科学院上海硅酸盐研究所苏州研究院 | 一种表面晶粒定向生长的氮化硅陶瓷及其制备方法 |
CN112142476B (zh) * | 2020-09-28 | 2021-10-01 | 中国科学院上海硅酸盐研究所 | 一种提高氮化硅陶瓷基板材料热导率和力学性能的硅热还原方法 |
CN112960984B (zh) * | 2021-02-23 | 2022-11-18 | 北京中材人工晶体研究院有限公司 | 氮化硅陶瓷热辐射保护管及其制造方法 |
CN113929468A (zh) * | 2021-05-20 | 2022-01-14 | 中国科学院上海硅酸盐研究所 | 一种粉色氮化硅陶瓷及其制备方法和应用 |
CN114605155B (zh) * | 2022-01-21 | 2022-11-15 | 浙江多面体新材料有限公司 | 一种氮化硅镁超长纳米线和纳米带的制备方法 |
CN116217239A (zh) * | 2023-03-22 | 2023-06-06 | 中国科学院上海硅酸盐研究所 | 一种高热导率低电阻率氮化硅陶瓷的制备方法 |
CN117550900A (zh) * | 2023-11-13 | 2024-02-13 | 中国人民解放军国防科技大学 | 采用基于熔盐法制备的Si3N4/MgSiN2复合粉体制备高导热氮化硅陶瓷的方法 |
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CN105541341A (zh) * | 2016-01-12 | 2016-05-04 | 河北高富氮化硅材料有限公司 | 一种添加复合助剂制备高致密度氮化硅陶瓷的方法 |
CN105819867A (zh) * | 2016-04-15 | 2016-08-03 | 广东工业大学 | 一种可电火花加工和机械加工的Si3N4-ZrSi2-BN复相陶瓷材料及制备方法 |
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JP4346151B2 (ja) * | 1998-05-12 | 2009-10-21 | 株式会社東芝 | 高熱伝導性窒化けい素焼結体およびそれを用いた回路基板並びに集積回路 |
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