CN109304489B - 被覆切削工具 - Google Patents

被覆切削工具 Download PDF

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Publication number
CN109304489B
CN109304489B CN201810761596.5A CN201810761596A CN109304489B CN 109304489 B CN109304489 B CN 109304489B CN 201810761596 A CN201810761596 A CN 201810761596A CN 109304489 B CN109304489 B CN 109304489B
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China
Prior art keywords
layer
nitride layer
cutting tool
coated cutting
composite nitride
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CN201810761596.5A
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English (en)
Chinese (zh)
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CN109304489A (zh
Inventor
片桐隆雄
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Tungaloy Corp
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Tungaloy Corp
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Publication of CN109304489A publication Critical patent/CN109304489A/zh
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
CN201810761596.5A 2017-07-28 2018-07-12 被覆切削工具 Active CN109304489B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-147143 2017-07-28
JP2017147143A JP6858347B2 (ja) 2017-07-28 2017-07-28 被覆切削工具

Publications (2)

Publication Number Publication Date
CN109304489A CN109304489A (zh) 2019-02-05
CN109304489B true CN109304489B (zh) 2021-04-02

Family

ID=63079761

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810761596.5A Active CN109304489B (zh) 2017-07-28 2018-07-12 被覆切削工具

Country Status (4)

Country Link
US (1) US10786851B2 (enExample)
EP (1) EP3434809B1 (enExample)
JP (1) JP6858347B2 (enExample)
CN (1) CN109304489B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6642836B2 (ja) * 2017-09-19 2020-02-12 株式会社タンガロイ 被覆ドリル
US10941479B2 (en) * 2017-12-29 2021-03-09 Anhui DuojinTuceng Technology Co. Ltd. Ion source enhanced AlCrSiN coating with gradient Si content and gradient grain size
JP7165594B2 (ja) * 2019-02-07 2022-11-04 京セラ株式会社 被覆工具及びこれを備えた切削工具
JP7216914B2 (ja) * 2019-03-12 2023-02-02 三菱マテリアル株式会社 高負荷切削加工においてすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
CN113365768B (zh) * 2019-03-18 2024-07-26 株式会社Moldino 包覆切削工具
JP7247452B2 (ja) * 2019-03-25 2023-03-29 株式会社Moldino 被覆工具
CN113874143B (zh) * 2019-05-09 2024-09-27 株式会社Moldino 包覆切削工具
EP3757252B1 (en) 2019-06-28 2022-03-30 Walter Ag A coated cutting tool
JP6916472B2 (ja) * 2019-08-30 2021-08-11 株式会社タンガロイ 被覆切削工具
JP6825779B1 (ja) * 2019-10-10 2021-02-03 住友電工ハードメタル株式会社 切削工具
US11253929B2 (en) * 2019-10-10 2022-02-22 Sumitomo Electric Hardmetal Corp. Cutting tool
CN114173970B (zh) * 2019-10-10 2024-09-13 住友电工硬质合金株式会社 切削工具
JP7384620B2 (ja) * 2019-10-29 2023-11-21 日進工具株式会社 硬質被膜を備えた切削工具
CN111321381B (zh) * 2020-03-05 2021-01-01 武汉大学 一种硬质合金刀片的AlCrNbSiTiBN基纳米复合涂层及其制备方法
JP7353591B2 (ja) * 2020-05-25 2023-10-02 株式会社タンガロイ 被覆切削工具
JP7108966B2 (ja) * 2020-06-24 2022-07-29 株式会社タンガロイ 被覆切削工具
CN112095079B (zh) * 2020-09-02 2022-02-11 东莞市华升真空镀膜科技有限公司 阴极磁场调制的硬质涂层刀具及其制备方法和应用
KR102497483B1 (ko) * 2020-12-17 2023-02-08 한국야금 주식회사 절삭공구용 경질피막
JP7312382B2 (ja) * 2021-03-18 2023-07-21 株式会社タンガロイ 被覆切削工具
JP7302628B2 (ja) * 2021-06-18 2023-07-04 株式会社タンガロイ 被覆切削工具
CN113817985B (zh) * 2021-11-24 2022-03-18 武汉中维创发工业研究院有限公司 纳米多层复合涂层及其制备方法和应用
CN118475426A (zh) * 2022-10-14 2024-08-09 住友电气工业株式会社 切削工具

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WO2012005275A1 (ja) * 2010-07-06 2012-01-12 株式会社タンガロイ 被覆ｃＢＮ焼結体工具
CN105473261A (zh) * 2014-06-06 2016-04-06 住友电工硬质合金株式会社 表面被覆工具及其制造方法
CN105517738A (zh) * 2013-08-27 2016-04-20 京瓷株式会社 被覆工具

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JP3934136B2 (ja) * 2004-11-11 2007-06-20 日立ツール株式会社 硬質皮膜被覆部材及びその被覆方法
US7348074B2 (en) * 2005-04-01 2008-03-25 Oc Oerlikon Balzers Ag Multilayer hard coating for tools
SE529161C2 (sv) * 2005-06-22 2007-05-22 Seco Tools Ab Skärverktyg med kompositbeläggning för finbearbetning av härdade stål
SE0602814L (sv) * 2006-12-27 2008-06-28 Sandvik Intellectual Property Skärverktyg med multiskiktbeläggning
JP5254552B2 (ja) * 2007-02-01 2013-08-07 住友電工ハードメタル株式会社 表面被覆切削工具
US8784977B2 (en) * 2009-06-22 2014-07-22 Tungaloy Corporation Coated cubic boron nitride sintered body tool
DE102012109254A1 (de) * 2012-09-28 2014-04-03 Walter Ag Werkzeug mit TiAlCrSiN-PVD-Beschichtung
EP3018233A1 (de) 2014-11-05 2016-05-11 Walter Ag Schneidwerkzeug mit mehrlagiger PVD-Beschichtung
CN108368601B (zh) * 2015-12-22 2020-10-30 山特维克知识产权股份有限公司 涂覆的切削工具和方法

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
WO2012005275A1 (ja) * 2010-07-06 2012-01-12 株式会社タンガロイ 被覆ｃＢＮ焼結体工具
CN105517738A (zh) * 2013-08-27 2016-04-20 京瓷株式会社 被覆工具
CN105473261A (zh) * 2014-06-06 2016-04-06 住友电工硬质合金株式会社 表面被覆工具及其制造方法

Also Published As

Publication number Publication date
EP3434809B1 (en) 2023-03-01
JP6858347B2 (ja) 2021-04-14
US10786851B2 (en) 2020-09-29
CN109304489A (zh) 2019-02-05
EP3434809A1 (en) 2019-01-30
JP2019025591A (ja) 2019-02-21
US20190030614A1 (en) 2019-01-31

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