JP6858347B2 - 被覆切削工具 - Google Patents

被覆切削工具 Download PDF

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Publication number
JP6858347B2
JP6858347B2 JP2017147143A JP2017147143A JP6858347B2 JP 6858347 B2 JP6858347 B2 JP 6858347B2 JP 2017147143 A JP2017147143 A JP 2017147143A JP 2017147143 A JP2017147143 A JP 2017147143A JP 6858347 B2 JP6858347 B2 JP 6858347B2
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JP
Japan
Prior art keywords
layer
less
cutting tool
composite nitride
laminated structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2017147143A
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English (en)
Japanese (ja)
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JP2019025591A5 (enExample
JP2019025591A (ja
Inventor
隆雄 片桐
隆雄 片桐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Tungaloy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tungaloy Corp filed Critical Tungaloy Corp
Priority to JP2017147143A priority Critical patent/JP6858347B2/ja
Priority to CN201810761596.5A priority patent/CN109304489B/zh
Priority to US16/046,099 priority patent/US10786851B2/en
Priority to EP18185936.4A priority patent/EP3434809B1/en
Publication of JP2019025591A publication Critical patent/JP2019025591A/ja
Publication of JP2019025591A5 publication Critical patent/JP2019025591A5/ja
Application granted granted Critical
Publication of JP6858347B2 publication Critical patent/JP6858347B2/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148Composition of the cutting inserts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2228/00Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10Coatings

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
JP2017147143A 2017-07-28 2017-07-28 被覆切削工具 Active JP6858347B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017147143A JP6858347B2 (ja) 2017-07-28 2017-07-28 被覆切削工具
CN201810761596.5A CN109304489B (zh) 2017-07-28 2018-07-12 被覆切削工具
US16/046,099 US10786851B2 (en) 2017-07-28 2018-07-26 Coated cutting tool
EP18185936.4A EP3434809B1 (en) 2017-07-28 2018-07-27 Coated cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017147143A JP6858347B2 (ja) 2017-07-28 2017-07-28 被覆切削工具

Publications (3)

Publication Number Publication Date
JP2019025591A JP2019025591A (ja) 2019-02-21
JP2019025591A5 JP2019025591A5 (enExample) 2020-03-12
JP6858347B2 true JP6858347B2 (ja) 2021-04-14

Family

ID=63079761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017147143A Active JP6858347B2 (ja) 2017-07-28 2017-07-28 被覆切削工具

Country Status (4)

Country Link
US (1) US10786851B2 (enExample)
EP (1) EP3434809B1 (enExample)
JP (1) JP6858347B2 (enExample)
CN (1) CN109304489B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6642836B2 (ja) * 2017-09-19 2020-02-12 株式会社タンガロイ 被覆ドリル
US10941479B2 (en) * 2017-12-29 2021-03-09 Anhui DuojinTuceng Technology Co. Ltd. Ion source enhanced AlCrSiN coating with gradient Si content and gradient grain size
JP7165594B2 (ja) * 2019-02-07 2022-11-04 京セラ株式会社 被覆工具及びこれを備えた切削工具
JP7216914B2 (ja) * 2019-03-12 2023-02-02 三菱マテリアル株式会社 高負荷切削加工においてすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
CN113365768B (zh) * 2019-03-18 2024-07-26 株式会社Moldino 包覆切削工具
JP7247452B2 (ja) * 2019-03-25 2023-03-29 株式会社Moldino 被覆工具
CN113874143B (zh) * 2019-05-09 2024-09-27 株式会社Moldino 包覆切削工具
EP3757252B1 (en) 2019-06-28 2022-03-30 Walter Ag A coated cutting tool
JP6916472B2 (ja) * 2019-08-30 2021-08-11 株式会社タンガロイ 被覆切削工具
JP6825779B1 (ja) * 2019-10-10 2021-02-03 住友電工ハードメタル株式会社 切削工具
US11253929B2 (en) * 2019-10-10 2022-02-22 Sumitomo Electric Hardmetal Corp. Cutting tool
CN114173970B (zh) * 2019-10-10 2024-09-13 住友电工硬质合金株式会社 切削工具
JP7384620B2 (ja) * 2019-10-29 2023-11-21 日進工具株式会社 硬質被膜を備えた切削工具
CN111321381B (zh) * 2020-03-05 2021-01-01 武汉大学 一种硬质合金刀片的AlCrNbSiTiBN基纳米复合涂层及其制备方法
JP7353591B2 (ja) * 2020-05-25 2023-10-02 株式会社タンガロイ 被覆切削工具
JP7108966B2 (ja) * 2020-06-24 2022-07-29 株式会社タンガロイ 被覆切削工具
CN112095079B (zh) * 2020-09-02 2022-02-11 东莞市华升真空镀膜科技有限公司 阴极磁场调制的硬质涂层刀具及其制备方法和应用
KR102497483B1 (ko) * 2020-12-17 2023-02-08 한국야금 주식회사 절삭공구용 경질피막
JP7312382B2 (ja) * 2021-03-18 2023-07-21 株式会社タンガロイ 被覆切削工具
JP7302628B2 (ja) * 2021-06-18 2023-07-04 株式会社タンガロイ 被覆切削工具
CN113817985B (zh) * 2021-11-24 2022-03-18 武汉中维创发工业研究院有限公司 纳米多层复合涂层及其制备方法和应用
CN118475426A (zh) * 2022-10-14 2024-08-09 住友电气工业株式会社 切削工具

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3934136B2 (ja) * 2004-11-11 2007-06-20 日立ツール株式会社 硬質皮膜被覆部材及びその被覆方法
US7348074B2 (en) * 2005-04-01 2008-03-25 Oc Oerlikon Balzers Ag Multilayer hard coating for tools
SE529161C2 (sv) * 2005-06-22 2007-05-22 Seco Tools Ab Skärverktyg med kompositbeläggning för finbearbetning av härdade stål
SE0602814L (sv) * 2006-12-27 2008-06-28 Sandvik Intellectual Property Skärverktyg med multiskiktbeläggning
JP5254552B2 (ja) * 2007-02-01 2013-08-07 住友電工ハードメタル株式会社 表面被覆切削工具
US8784977B2 (en) * 2009-06-22 2014-07-22 Tungaloy Corporation Coated cubic boron nitride sintered body tool
JP5392408B2 (ja) 2010-07-06 2014-01-22 株式会社タンガロイ 被覆cBN焼結体工具
DE102012109254A1 (de) * 2012-09-28 2014-04-03 Walter Ag Werkzeug mit TiAlCrSiN-PVD-Beschichtung
WO2015030073A1 (ja) * 2013-08-27 2015-03-05 京セラ株式会社 被覆工具
EP3153259B1 (en) * 2014-06-06 2020-05-06 Sumitomo Electric Hardmetal Corp. Surface-coated tool and method for manufacturing same
EP3018233A1 (de) 2014-11-05 2016-05-11 Walter Ag Schneidwerkzeug mit mehrlagiger PVD-Beschichtung
CN108368601B (zh) * 2015-12-22 2020-10-30 山特维克知识产权股份有限公司 涂覆的切削工具和方法

Also Published As

Publication number Publication date
CN109304489B (zh) 2021-04-02
EP3434809B1 (en) 2023-03-01
US10786851B2 (en) 2020-09-29
CN109304489A (zh) 2019-02-05
EP3434809A1 (en) 2019-01-30
JP2019025591A (ja) 2019-02-21
US20190030614A1 (en) 2019-01-31

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