CN109273550B - 太阳能电池的制造方法 - Google Patents

太阳能电池的制造方法 Download PDF

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CN109273550B
CN109273550B CN201810617737.6A CN201810617737A CN109273550B CN 109273550 B CN109273550 B CN 109273550B CN 201810617737 A CN201810617737 A CN 201810617737A CN 109273550 B CN109273550 B CN 109273550B
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增田泰造
峯元高志
新泽雄高
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Abstract

本发明提供一种CIS太阳能电池的制造方法,其包括:准备层状构件的工序,所述层状构件是在具有第一温度以上的耐热性的基板上形成第一电极层,在第一温度以上的条件下将CIS层成膜于第一电极层上,并在CIS层上形成第二电极层而成的;使层状构件的温度成为比第一温度低的第二温度的工序;在第二电极层上形成固体状态下的线膨胀系数比基板大的层形成物质的层的工序;和将层状构件冷却的工序,随着由层状构件的冷却实现的层形成物质的层的收缩,使CIS层从第一电极层剥离,得到薄膜状CIS太阳能电池。

Description

太阳能电池的制造方法
技术领域
本发明涉及太阳能电池的制造方法,更详细而言,涉及以高效率制造具有柔软性的薄膜状的CIS太阳能电池的方法。
背景技术
如果太阳能电池能够制造成具有柔软性的薄膜状,则能够设置于例如汽车、飞机等的表面等以往难以设置的任意场所,因此是有利的。作为能够进行上述的薄膜化,并且能够以高效率低成本制造的太阳能电池的一例,CIS太阳能电池(以Cu、In、Se这三种元素为主成分的太阳能电池)、CIGS太阳能电池(以Cu、In、Ga、Se这四种元素为主成分的太阳能电池)或CIGSSe太阳能电池(以Cu、In、Ga、S、Se这五种元素为主成分的太阳能电池)备受关注,成为代替目前主流的硅系的太阳能电池的有力候补。关于上述的CIS太阳能电池,例如在国际公开第2009/116626或A.F.Pianezzi,etal.,Physical Chemistry Chemical Physics 16(2014)8843中,提出将具有柔软性的聚酰亚胺树脂薄膜作为基板,在其上形成CIS薄膜,由此制造薄膜状的太阳能电池。在日本特开2009-049389中,提出在玻璃基板上形成水溶性的剥离层,在其上形成太阳能电池层,然后利用水将剥离层溶解除去,由此制造柔软的太阳能电池的方法。日本特开2013-171876中,提出在熔融Al系镀敷钢板的Al系镀层表层部形成阳极氧化皮膜,将进行了上述表面处理的钢板作为基板,形成CIS太阳能电池层,制造比较柔软的太阳能电池的方法。日本特表2010-532576中,虽然不是针对CIS太阳能电池,但提出了在制造太阳能电池的基板与基板上制造的III-V化合物薄膜太阳能电池之间设置牺牲层,在太阳能电池的制造之后,将太阳能电池浸渍于只将牺牲层化学溶解的特殊溶液中,将III-V化合物薄膜太阳能电池从基板上剥离,由此得到柔软的太阳能电池的方法。日本特开2017-038069中,记载了作为用于将太阳能电池单元密封的片材,使用热收缩的树脂。
发明内容
所述CIS太阳能电池中高品质的制品是在450℃以上的高温条件下将CIS层形成于玻璃基板上而制作的。但是,在为了得到柔软的薄膜状的太阳能电池而使用具有柔软性的树脂薄膜或薄的金板作为基板的情况下,在高温条件下,会发生基板熔化、或钢成分元素向CIS层扩散之类的问题。因此,不得不降低CIS层的成膜时的温度,其结果会导致太阳能电池的性能、例如转换效率降低。例如,国际公开第2009/116626,A.F.Pianezzi,etal.,Physical Chemistry Chemical Physics 16(2014)8843中,使用具有较高耐热性的聚酰亚胺树脂薄膜作为基板,但CIS层的成膜时的温度没有上升到450℃以上,与在450℃以上的条件下在玻璃基板上成膜的情况相比,太阳能电池的转换效率降低。聚酰亚胺树脂薄膜的线膨胀系数比玻璃和金属大,高温时和低温时的变形量大,因此存在以下等问题:在回到室温时太阳能电池破损;透湿性高,在屋外无法作为太阳能电池使用(耐久性低);原料、制造方法特殊,因此造价高;低温条件下的CIS层的成膜的制造时间长,并且需要追加工序,因此成本增高,也无法进行设备的挪用。如日本特开2009-049389、日本特表2010-532576所述,形成剥离层或牺牲层,并在CIS层的成膜后将剥离层或牺牲层溶解的方法中,为了形成上述的剥离层或牺牲层以及为了将剥离层或牺牲层溶解而使制造时间变长,并且成本也增加。日本特开2013-171876中,作为基板使用薄的钢板,因此柔软性受到限制,并且为了制作形成有阳极氧化皮膜的熔融Al系镀敷钢板等也需要花费精力。总而言之,相关技术中制造柔软的薄膜状的CIS太阳能电池的方法,在太阳能电池的效率降低以及制造工序的时间、精力、成本方面存在改善的空间。
本发明提供一种制造薄膜状的CIS太阳能电池的方法,是与相关技术相比进一步减少制造工序的时间、精力、成本的新的方法,该方法得到的太阳能电池的性能与在450℃以上的高温条件下将CIS层形成于玻璃基板上的情况大致相同,并且能够作为足够柔软的薄膜而获得。
如上所述,本发明提供制造薄膜状的CIS太阳能电池的方法,是能够量产薄膜状的CIS太阳能电池的新的方法。
本发明的技术方案涉及CIS太阳能电池的制造方法,包括:准备层状构件的工序,所述层状构件是在具有第一温度以上的耐热性的基板上形成第一电极层,在所述第一温度以上的条件下将CIS层成膜于所述第一电极层上,并在所述CIS层上形成第二电极层而成的;使所述层状构件的温度成为比所述第一温度低的第二温度的工序;在所述第二电极层上形成固体状态下的线膨胀系数比所述基板大的层形成物质的层的工序;和将所述层状构件冷却的工序,随着由所述层状构件的冷却实现的所述层形成物质的层的收缩,使所述CIS层从所述第一电极层剥离,得到薄膜状CIS太阳能电池。
本发明的技术方案中,形成所述层形成物质的层的工序可以包括:将所述层形成物质以液体状态层状地涂布在所述第二电极层上的工序;和使所述液体状态的层形成物质固体化的工序。
本发明的技术方案中,可以还包括:在将所述层状构件冷却的工序之前或之后,在所述层状构件中垂直于层方向地形成缺口,以得到期望尺寸的薄膜状CIS太阳能电池的工序。
本发明的技术方案中,可以还包括:在从所述第一电极层剥离了的所述薄膜状CIS太阳能电池的所述CIS层的表面涂布第三电极层的工序。
本发明的技术方案中,所述第三电极层可以由碳糊形成。
本发明的技术方案中,所述第一温度可以为450℃
本发明的技术方案中,所述基板可以是玻璃。
本发明的技术方案中,所述层形成物质可以是树脂材料。
本发明的技术方案中,所述树脂材料可以是环氧树脂。
本发明的技术方案中,“CIS太阳能电池”如上所述,是本技术领域中公知的将CIS层(以Cu、In、Se这三种元素为主成分的层)、CIGS层(以Cu、In、Ga、Se这四种元素为主成分的层)或CIGSSe层(以Cu、In、Ga、S、Se这五种元素为主成分的层)作为光电转换层的太阳能电池(以下在提到“CIS层”的情况下,也包括CIGS层和CIGSSe层)。“层状构件”与相关技术中制造CIS太阳能电池的情况同样地是指以基板、第一电极层、CIS层、第二电极层的顺序层叠而成的构件。严格来讲,在CIS层与第二电极层之间,形成缓冲层(硫化镉(CdS)层等)、窗口层(高电阻氧化锌层等)。“第二电极层”通常是指可透过阳光的透明的电极。“层形成物质”只要是能够形成固体状态下的线膨胀系数比基板大的层的物质,可以是任意物质。具体而言,层形成物质例如可以是环氧树脂等树脂材料,但并不限定于此。
根据本发明的技术方案,首先,层状构件可以与相关技术的CIS太阳能电池的制造方法同样地调制。即、可以在能够形成高品质的CIS层的条件下,调制作为太阳能电池的元件的层状构件。如上所述,高品质的CIS层是在450℃以上的温度条件下成膜的,因此本发明的技术方案中,形成CIS层时的第一温度以上的条件为450℃以上,例如为450℃~650℃之间,基板是由具有第一温度以上的耐热性的任意材料制成的基板,典型地可以利用耐热性的玻璃制基板或金属制基板。在相关技术的可得到高品质的CIS层的CIS太阳能电池的制造方法中,在层状构件上层叠第二电极层之后,在其上应用保护用的玻璃层,而在本发明的技术方案涉及的方法中,如上所述,在将层状构件加热至低于第一温度的第二温度的状态下,形成层形成物质的层。层形成物质如上所述,选择固体状态下的线膨胀系数大于基板的物质,因此如果在形成层形成物质的层之后执行将层状构件冷却的工序,则如之后的实施方式中说明的那样,层形成物质的层与基板相比更大程度地收缩,由此在层形成物质的层产生内部应力,通过所述内部应力,在远离基板的方向上翘曲的力也会作用于CIS层。这样,第一电极层典型地是由钼制成的层,在第一电极层与CIS层之间通常接合强度低,因此第一电极层与CIS层的界面自然剥离,层形成物质层-第二电极层-CIS层作为一体的薄膜,从第一电极层-基板分离,由此得到薄膜状的CIS太阳能电池。即、达成在450℃以上的温度条件下形成高品质的CIS层并且不与玻璃制基板或金属制基板等硬质基板接合的状态的薄膜状CIS太阳能电池的制造。在层形成物质为环氧树脂,基板为玻璃基板的情况下,第二温度可以为100℃~150℃左右,在层状构件的冷却工序中,例如层状构件可以冷却至室温。但是,应该理解为所述第二温度和冷却后的层状构件的温度可以通过将作为层形成物质选择的材料与作为基板选择的材料的线膨胀系数进行比较而适当设定。
本发明的技术方案中,层形成物质可以是最初为熔融状态或液体状态,在涂布于第二电极层上之后通过任意方法凝固或固体化从而形成层状结构的物质。作为层形成物质的一例,可以是在高于第二温度的温度下为熔融状态,在第二温度凝固的物质,或者作为另一例,可以是最初为将两种液体混合而得到的液状,当加热至第二温度时发生固体化的树脂等(环氧树脂等)物质。层形成物质最初在第二电极层上以熔融状态或液体状态应用,由此在将层形成物质的层载置于第二电极层上的阶段中,在层形成物质的层内不会产生应力,由此在稳定地形成层形成物质的固定层之前,能够防止由第二电极层使应力在非预期方向上作用于下方的结构等,在层状构件的冷却工序中,能够更好地达成第一电极层与CIS层之间的剥离。因此,层形成物质的层的形成工序,更详细而言,可以通过将层形成物质以液体状态层状涂布于第二电极层上的工序、和使液体状态的层形成物质固体化的工序来达成。
根据本发明的技术方案涉及的太阳能电池的制造方法,在从第一电极层剥离的CIS层的薄膜上,只有一侧的面残留有电极,因此可以进一步执行将第三电极层涂布于从第一电极层剥离的薄膜状CIS太阳能电池的CIS层的面的工序,从而完成薄膜状CIS太阳能电池。作为第三电极层,可以采用任意的具有导电性和柔软性的物质,例如可以由碳糊形成。
另外,为了以期望的方式达成所述层形成物质层-第二电极层-CIS层从第一电极层-基板的剥离,可以在冷却层状构件的工序之前或之后,执行在层状构件中与层方向垂直地插入切口,以得到期望尺寸的薄膜状CIS太阳能电池的工序。通过如上所述在层状构件中插入切口,能够促进CIS层与第一电极层的自然剥离,并且由分离的层形成物质层-第二电极层-CIS层制成的薄膜的后续处理变得容易。
在本发明的技术方案涉及的CIS太阳能电池的制造方法中,直到形成第二电极层为止,都执行与使用能够承受高温条件的基板的相关技术的CIS太阳能电池的制造方法同样的工序,在此之后,将线膨胀系数大于基板的层形成物质层应用于第二电极层上,利用基板与层形成物质层的收缩程度的差异,使CIS层与第一电极层之间剥离,从而得到薄膜状CIS太阳能电池。根据上述的技术构成,CIS层在450℃以上的温度条件下成膜,因此可得到高品质的CIS层,并且与硬质基板分离,因此太阳能电池能够作为具有充分的柔软性的薄膜的构件而得到。实际如之后说明的那样,关于按照本发明的技术方案涉及的太阳能电池的制造方法由剥离的CIS层制成的太阳能电池的性能,与没有从基板剥离的状态下的太阳能电池相比,没有观察到短路电流和开放电压的降低。本发明的技术方案涉及的太阳能电池的制造方法的工序中,在执行了与相关技术的使用硬质基板的CIS太阳能电池的制造方法同样的工序之后,仅通过形成环氧树脂等层形成物质层并进行冷却,就能够得到薄膜状CIS太阳能电池,因此不需要特殊的树脂、钢板、工序,制造工序所需的时间、精力、成本与相关技术的薄膜状CIS太阳能电池的制造方法相比得到减少,也能够量产薄膜状的CIS太阳能电池。
本发明的其它目的和优点,可通过以下本发明的优选实施方式的说明来明确。
附图说明
下面,参照附图对本发明的示例性实施例的特征、优点、技术和工业意义进行说明,其中相同的附图标记表示相同的元件。
图1是示意性地表示本发明的实施方式涉及的在玻璃基板上形成电极层、CIS层而得到层状构件,再由该层状构件制成CIS太阳能电池从而得到薄膜(CIS太阳能电池薄膜)的工序的图。第一工序是在将层状构件加热成为温度T=Th的状态下,在层状构件上进一步形成树脂层的工序,第二工序是在形成树脂层之后,将层状构件冷却成为温度T<Th的工序,第三工序是CIS太阳能电池薄膜从玻璃基板剥离的状态。第四工序是在层状构件中,与层方向垂直地插入切口的工序,第五工序是CIS太阳能电池薄膜从玻璃基板剥离的状态。
图2A是在层状构件上形成透明的树脂层11的状态的例子的照片。
图2B是贴附了电极面的玻璃基板、与从该玻璃基板剥离的CIS太阳能电池薄膜的例子的照片。
图2C是表示在玻璃基板上形成的CIS太阳能电池(剥离前)、和从玻璃基板剥离而得到的薄膜构成的CIS太阳能电池(剥离后)的电压-电流特性的例子的图表。
图3是与图1同样示意性地表示由形成在玻璃基板上的CIS太阳能电池得到CIS太阳能电池薄膜,在剥离的CIS层面形成具有柔软性的电极(碳糊)的实施方式的工序的图。
图4A是图3的第一工序的状态的实施例的照片。
图4B是图3的第四工序的状态的玻璃基板(左)和CIS太阳能电池薄膜(右)的例子的照片。
图4C是图3的第五工序的状态的薄膜状CIS太阳能电池的例子的照片。
图5是示意性地表示本发明的实施方式涉及的量产薄膜状CIS太阳能电池的情况下的一系列工序的图。
图6的左侧图是在一般的硬质基板上形成的CIS太阳能电池的示意立体图,图6的右侧图是示意性地表示在一般的硬质基板上形成的CIS太阳能电池的截面的图。
具体实施方式
以下,参照附图对本发明的几个优选实施方式进行详细说明。图中相同的附图标记表示相同的部位。
一般的CIS太阳能电池的结构
参照图6,确立量产工序的CIS太阳能电池1,一般以图示的薄板状的形态制造。在所述薄板状形态的截面中,其结构为:将玻璃板、金属板作为基板2,在其上方典型地层叠钼制的电极层3(第一电极层)、以铜(Cu)、铟(In)(或包含镓Ga)、硒(Se)为主元素的化合物半导体层(CIS层)4、缓冲层5(典型地是由CdS构成的层)、窗口层6(典型地是由氧化锌构成的层)、透明电极层7(典型地是由氧化铟锡、氧化锌系材料等制成的导电性物质构成的层)(第二电极层)、防反射膜8,在透明电极层7的一部分载置栅极9。如果从图中上侧(防反射膜8侧)照射阳光,则在CIS层4中发电,从分别安装于电极层3和透明电极层7的端子得到电压和电流。关于上述层叠结构的CIS太阳能电池1的制造,已知如果在450℃以上、典型地为450~650℃的范围的温度条件下进行CIS层的成膜工序,则能够得到高品质的、具体而言为转换效率高的太阳能电池。因此,作为CIS层4的基板2的材料,如上所述,选择在450℃以上的高温下具有耐热性的玻璃或金属。所以,如发明概要所述,相关技术中高品质的CIS层本身虽然能够以薄膜状成膜,但是作为太阳能电池,只能在硬质基板上形成。
本实施方式中的薄膜状CIS太阳能电池的形成
本发明涉及的实施方式中,简而言之,与所述相关技术的CIS太阳能电池的制造方法同样地,作为用于形成CIS层4的基板2,使用玻璃板、金属板,采用在450℃以上的高温条件下执行CIS层4的成膜工序的方法,从电极层3开始形成CIS层4并且直到形成透明电极层7,之后,如果是相关技术,会执行应用防反射膜8并进一步贴附保护玻璃的工序,而本发明代替上述,执行将CIS层4以上的层从电极层3剥离,形成薄膜状的CIS太阳能电池的工序。
参照图1,本实施方式涉及的CIS太阳能电池的制造方法中,更具体而言,如上所述,首先,作为基板2使用玻璃板或金属板,采用在450℃以上的高温条件下执行CIS层4的成膜工序的方法,制作在基板2上形成有电极层3~透明电极层7的层状构件1。如图1的第一工序所示,上述的层状构件1通过热板、烤箱HP等加热为温度T=Th、例如100~150℃,在该状态下,形成线膨胀系数大于基板2的透明树脂材料等物质(层形成物质)的层11(以下称为“树脂层”)。图2A表示实际形成至树脂层11的状态的层状物质的照片。优选树脂层11以液体状态涂布,然后进行固体化而形成固体层。之后,如图1的第二工序,以成为温度T<Th的方式,例如将层状构件1冷却至室温,则由于线膨胀系数的差异,树脂层11与基板2相比收缩作用更大,因此在树脂层11内,在面积收缩的方向上会产生内部应力τ。这样,由于电极层3与CIS层4的界面的接合强度较低,因此如图1的第三工序,通过内部应力τ,CIS层4以上的层在图中向上的方向上产生翘曲作用uf,电极层3从基板2自然剥离(Pe),由此得到不固定于基板2的CIS层4~透明电极层7的薄膜。
如图1的第二~第三工序,即使是在基板2上的大致整个区域形成有电极层3~透明电极层7以及树脂层11的状态,也会发生电极层3与CIS层4之间的剥离,如图1的第四工序,在基板2上,如果在垂直于层的延伸方向的方向上从树脂层11到CIS层4插入切口Ct,则如图1的第五工序,能够容易地使电极层3与CIS层4之间剥离,是有利的(如果插入切口Ct,则被切口Ct包围的区域的电极层3与CIS层4之间的总结合力降低,因此容易发生剥离)。切口Ct可以以剥离的CIS层4~树脂层11的薄膜的形状和尺寸成为期望的形状和尺寸的方式被插入。图2B表示在基板2上形成至树脂层11的状态下,通过以2cm见方插入切口,使CIS层4~树脂层11的薄膜自然剥离的状态的例子的照片。切口Ct可以在层状构件1被加热为温度T=Th的状态下被插入,也可以在层状构件1被冷却为温度T<Th的状态下被插入。
如上所述,在CIS层4~树脂层11的薄膜中,不存在相当于电极层3的背面电极,因此在CIS层4的剥离面形成新的电极层,由此完成薄膜状的CIS太阳能电池。作为新的电极层,例如选择碳糊等具有柔软性的导电性的物质的层。这样得到的薄膜状的CIS太阳能电池,如图2C所示,在薄膜状的CIS太阳能电池的电压-电流特性方面,开放电压Voc和短路电流Isc与固定在基板2上的CIS太阳能电池大致相等,因此确认具有与固定在基板2上的CIS太阳能电池大致同样的性能。
薄膜状CIS太阳能电池的制造的实施方式
参照图3、图4A~图4C,在薄膜状CIS太阳能电池的制造的实施方式中,如图3的第一工序和图4A所示,准备了在玻璃板、金属板等硬质固体基板上层叠有由钼制成的背面电极、CIS发电层(CIS层)~透明电极的状态的CIS太阳能电池(层状构件)。基板上的CIS太阳能电池例如加热至150℃(图3的第二工序),固化前的透明的热固化性环氧树脂(透明接合剂)例如以0.5mm的厚度涂布,在其上方应用了保护表面的树脂薄膜(代替基板)。该状态下,保持15分钟加热状态,由此使树脂固化(图3的第三工序)。之后,将该状态的CIS太阳能电池整体冷却至室温,以期望的大小插入切口,由于环氧树脂层的线膨胀系数大于基板,在环氧树脂层产生“向上翘曲的应力”,因此如图3的第四工序、图4B所示,CIS发电层与背面电极之间自然剥离。通过对CIS发电层的剥离面涂布碳糊作为电极,如图3的第五工序和图4C所示,得到薄膜状CIS太阳能电池。
薄膜状CIS太阳能电池的量产
在量产薄膜状CIS太阳能电池的情况下,如上所述,在玻璃等硬质基板2上层叠背面电极层3~透明电极层7的一系列工序,与相关技术的在450℃以上的高温条件下执行CIS层4的成膜工序的方法同样地执行,然后,在太阳能电池的表面应用透明树脂材料等物质形成的层来代替用于保护的玻璃层,使背面电极层3与CIS层4之间剥离,得到薄膜状CIS太阳能电池。
具体而言,参照图5,首先,进行玻璃基板2的切断和清洗(图5的第一工序),通过钼等形成背面电极层3(图5的第二工序)。在此,通过激光划线,执行最初的太阳能电池单元的图案化(图5的第三工序),在其上方,在450℃以上的高温条件下形成作为发电层的CIS层4(图5的第四工序)。在其上方,形成缓冲层5、窗口层6(图5的第五工序),通过机械划线,再次执行太阳能电池单元的图案化(图5的第六工序),进而,形成透明电极层7(图5的第七工序),通过机械划线执行太阳能电池单元的图案化(图5的第八工序)。取出透明电极层7,形成电极9(图5的第九工序),到此为止的工序与相关技术在基板上形成CIS太阳能电池的方法相同。之后,一边加热一边在透明电极层7上形成树脂层11作为表面保护薄膜(图5的第十工序),然后进行冷却,如上所述通过在树脂层11内产生的内部应力的作用,如图5的第十一工序所示,CIS层4与背面电极层3之间发生剥离,因此在CIS层4的剥离面形成新的背面电极层12,由此形成薄膜状CIS太阳能电池(图5的第十二工序)。背面电极层12也能够使用柔软的材料,因此能够使薄膜状CIS太阳能电池整体都具有柔软性。
如上所述,本实施方式涉及的薄膜状CIS太阳能电池的制造方法中,在基板2上层叠背面电极层3~透明电极层7的工序,与相关技术用于制造高品质的CIS太阳能电池的工序相同,之后仅执行树脂层11的应用、CIS层4的剥离、背面电极层12的应用各工序,因此可期待用于制造CIS太阳能电池所需的时间、精力、成本与相关技术的高品质的CIS太阳能电池的制造方法大致相同。
根据所述本实施方式涉及的薄膜状CIS太阳能电池的制造方法,能够再次利用CIS层剥离后的基板,由此能够减少太阳能电池整体的费用。用于树脂层11的树脂材料,只要比基板、CIS层的线膨胀系数大,则能够利用任意材料,树脂材料的选择范围非常大,可以根据用途、成本等状况来变更(不需要变更制造工序)。在将CIS层4~透明电极层7从基板2~背面电极层3剥离而得到薄膜状的CIS太阳能电池时,CIS太阳能电池的薄膜能够成为期望的大小、形状。因此,能够根据设置场所的范围、大小来自由定制太阳能电池模块的大小、形状,这是有利的。
以上的说明与本发明的实施方式相关,但本领域技术人员能够容易地进行许多修正和变更,本发明并不仅限定于所述例示的实施方式,在不脱离本发明的概念的情况下,能够应用于各种装置。

Claims (23)

1.一种CIS太阳能电池的制造方法,其特征在于,包括:
准备层状构件的工序,所述层状构件是在具有第一温度以上的耐热性的基板上形成第一电极层,在所述第一温度以上的条件下将CIS层成膜于所述第一电极层上,并在所述CIS层上形成第二电极层而成的;
使所述层状构件的温度成为比所述第一温度低的第二温度的工序;
在所述第二电极层上形成层形成物质层的工序,其中,形成所述层形成物质层的层形成物质在固体状态下的线膨胀系数比所述基板大;和
将所述层状构件冷却的工序,
随着由所述层状构件的冷却实现的所述层形成物质层的收缩,使所述CIS层从所述第一电极层剥离,得到薄膜状CIS太阳能电池。
2.根据权利要求1所述的方法,其特征在于,
形成所述层形成物质层的工序包括:
将所述层形成物质以液体状态层状地涂布在所述第二电极层上的工序;和
使所述液体状态的层形成物质固体化的工序。
3.根据权利要求1所述的方法,其特征在于,还包括:
在将所述层状构件冷却的工序之前或之后,在所述层状构件中垂直于层方向地形成缺口,以得到期望尺寸的薄膜状CIS太阳能电池的工序。
4.根据权利要求2所述的方法,其特征在于,还包括:
在将所述层状构件冷却的工序之前或之后,在所述层状构件中垂直于层方向地形成缺口,以得到期望尺寸的薄膜状CIS太阳能电池的工序。
5.根据权利要求1所述的方法,其特征在于,还包括:
在从所述第一电极层剥离了的所述薄膜状CIS太阳能电池的所述CIS层的表面涂布第三电极层的工序。
6.根据权利要求2所述的方法,其特征在于,还包括:
在从所述第一电极层剥离了的所述薄膜状CIS太阳能电池的所述CIS层的表面涂布第三电极层的工序。
7.根据权利要求3所述的方法,其特征在于,还包括:
在从所述第一电极层剥离了的所述薄膜状CIS太阳能电池的所述CIS层的表面涂布第三电极层的工序。
8.根据权利要求4所述的方法,其特征在于,还包括:
在从所述第一电极层剥离了的所述薄膜状CIS太阳能电池的所述CIS层的表面涂布第三电极层的工序。
9.根据权利要求5所述的方法,其特征在于,
所述第三电极层由碳糊形成。
10.根据权利要求6所述的方法,其特征在于,
所述第三电极层由碳糊形成。
11.根据权利要求7所述的方法,其特征在于,
所述第三电极层由碳糊形成。
12.根据权利要求8所述的方法,其特征在于,
所述第三电极层由碳糊形成。
13.根据权利要求1~12的任一项所述的方法,其特征在于,
所述第一温度为450℃。
14.根据权利要求1~12的任一项所述的方法,其特征在于,
所述基板是玻璃。
15.根据权利要求13所述的方法,其特征在于,
所述基板是玻璃。
16.根据权利要求1~12的任一项所述的方法,其特征在于,
所述层形成物质是树脂材料。
17.根据权利要求13所述的方法,其特征在于,
所述层形成物质是树脂材料。
18.根据权利要求14所述的方法,其特征在于,
所述层形成物质是树脂材料。
19.根据权利要求15所述的方法,其特征在于,
所述层形成物质是树脂材料。
20.根据权利要求16所述的方法,其特征在于,
所述树脂材料是环氧树脂。
21.根据权利要求17所述的方法,其特征在于,
所述树脂材料是环氧树脂。
22.根据权利要求18所述的方法,其特征在于,
所述树脂材料是环氧树脂。
23.根据权利要求19所述的方法,其特征在于,
所述树脂材料是环氧树脂。
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