CN109243947B - 用于x射线生成的薄片状靶 - Google Patents

用于x射线生成的薄片状靶 Download PDF

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Publication number
CN109243947B
CN109243947B CN201810781507.3A CN201810781507A CN109243947B CN 109243947 B CN109243947 B CN 109243947B CN 201810781507 A CN201810781507 A CN 201810781507A CN 109243947 B CN109243947 B CN 109243947B
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target
axis
electron beam
sample
laminar
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CN109243947A (zh
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J.菲列维奇
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FEI Co
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FEI Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/20—Sources of radiation
    • G01N2223/204—Sources of radiation source created from radiated target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/401—Imaging image processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/419—Imaging computed tomograph
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Biochemistry (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pulmonology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201810781507.3A 2017-07-11 2018-07-10 用于x射线生成的薄片状靶 Active CN109243947B (zh)

Applications Claiming Priority (2)

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US201762531097P 2017-07-11 2017-07-11
US62/531097 2017-07-11

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Publication Number Publication Date
CN109243947A CN109243947A (zh) 2019-01-18
CN109243947B true CN109243947B (zh) 2023-05-02

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US (1) US10746672B2 (https=)
EP (1) EP3428928A1 (https=)
JP (1) JP7046746B2 (https=)
CN (1) CN109243947B (https=)

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US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
WO2020051061A1 (en) 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
WO2021011209A1 (en) 2019-07-15 2021-01-21 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
EP4111235A4 (en) 2020-02-26 2023-11-01 Shenzhen Xpectvision Technology Co., Ltd. IMAGING SYSTEMS AND METHODS OF USE
CN113764246B (zh) * 2020-06-03 2025-04-18 宁波伯锐锶电子束科技有限公司 一种显微镜
CN112213343B (zh) * 2020-12-03 2021-03-16 中国科学院自动化研究所 塑料条带承载生物超薄切片快速成像方法、系统、装置
DE112023000574B4 (de) 2022-01-13 2026-02-26 Sigray, Inc. Mikrofokus-röntgenquelle zur erzeugung von röntgenstrahlen mit hohem fluss und niedriger energie
WO2023168204A1 (en) 2022-03-02 2023-09-07 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
CN117062289A (zh) * 2023-08-09 2023-11-14 深圳综合粒子设施研究院 基于金属丝靶的射线源
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
WO2026009290A1 (ja) * 2024-07-01 2026-01-08 株式会社日立ハイテク 電子線応用装置とその制御方法
CN121114108B (zh) * 2025-11-13 2026-01-23 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) 一种在双束电镜内实现微区xrf的分析方法与系统

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JPH03273200A (ja) * 1990-03-23 1991-12-04 Elionix Kk 端部放出型ｘ線顕微鏡
WO2010134282A1 (ja) * 2009-05-22 2010-11-25 独立行政法人産業技術総合研究所 Ｘ線顕微鏡用試料支持部材、試料収容セル、ｘ線顕微鏡、およびｘ線顕微鏡像の観察方法

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US5044001A (en) * 1987-12-07 1991-08-27 Nanod Ynamics, Inc. Method and apparatus for investigating materials with X-rays
US5148462A (en) * 1991-04-08 1992-09-15 Moltech Corporation High efficiency X-ray anode sources
AUPQ831200A0 (en) * 2000-06-22 2000-07-13 X-Ray Technologies Pty Ltd X-ray micro-target source
FR2882886B1 (fr) * 2005-03-02 2007-11-23 Commissariat Energie Atomique Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source
JP4954526B2 (ja) * 2005-10-07 2012-06-20 浜松ホトニクス株式会社 Ｘ線管
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JP4826632B2 (ja) * 2006-06-02 2011-11-30 株式会社日立製作所 Ｘ線顕微鏡およびｘ線顕微方法
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JPH03273200A (ja) * 1990-03-23 1991-12-04 Elionix Kk 端部放出型ｘ線顕微鏡
WO2010134282A1 (ja) * 2009-05-22 2010-11-25 独立行政法人産業技術総合研究所 Ｘ線顕微鏡用試料支持部材、試料収容セル、ｘ線顕微鏡、およびｘ線顕微鏡像の観察方法

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Publication number Publication date
JP2019021625A (ja) 2019-02-07
EP3428928A1 (en) 2019-01-16
US10746672B2 (en) 2020-08-18
US20190017942A1 (en) 2019-01-17
CN109243947A (zh) 2019-01-18
JP7046746B2 (ja) 2022-04-04

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