CN109174779A - A kind of cleaning method of the PERC technique ALD aluminium gaily decorated basket - Google Patents
A kind of cleaning method of the PERC technique ALD aluminium gaily decorated basket Download PDFInfo
- Publication number
- CN109174779A CN109174779A CN201810780979.7A CN201810780979A CN109174779A CN 109174779 A CN109174779 A CN 109174779A CN 201810780979 A CN201810780979 A CN 201810780979A CN 109174779 A CN109174779 A CN 109174779A
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- China
- Prior art keywords
- decorated basket
- gaily decorated
- aluminium
- cleaning
- pure water
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The invention discloses a kind of cleaning methods of PERC technique ALD aluminium gaily decorated basket, it can be cleaned for the ALO at the PERC technique ALD aluminium gaily decorated basket and card slot, with excellent cleaning effect, damages small to the aluminium gaily decorated basket and the effect that EL blacks at aluminium gaily decorated basket card slot can be prevented.
Description
Technical field
The invention discloses a kind of cleaning methods of PERC technique ALD aluminium gaily decorated basket, belong to crystal silicon solar battery production neck
Domain.
Background technique
Conventional crystal silicon solar battery process route is making herbs into wool → diffusion → etching → thermal oxide → PECVD → silk-screen printing,
Through this process route, conventional crystal silicon solar battery transfer efficiency is between 18%-19%, but with to high conversion efficiency sun electricity
The demand of pond piece, conventional solar cell process route have been unable to meet the promotion of cell piece transfer efficiency.In order to promote crystal silicon too
The transfer efficiency in positive electricity pond, PERC battery (Passivated Emitterand Rear Cell) technology be for the p-type sun
Can one of battery innovate technologies, this technical matters route be making herbs into wool → diffusion → etching → thermal oxide → PECVD → ALD →
PECVD → laser slotting → silk-screen printing, PERC battery and the maximum difference of conventional batteries are passivated in back surface deielectric-coating, that is, are increased
Local metal contacts when having added ALD atomic layer deposition, and having realized cell piece silk-screen printing using laser-induced thermal etching, so as to significantly
Back surface recombination velocity is reduced, while improving the light reflection of back surface.From the point of view of current domestic volume production situation, PERC electricity is used
Pool technology can be such that current crystal silicon solar battery efficiency is promoted between 20-22% from 18-19%.
PERC battery technology, using ALD atomic layer deposition mode, is carried out anti-in ALD process by TMA, H2O
It answers, deposits one layer of AL2O3 film in silicon chip surface, AL2O3 film contains highdensity fixed negative charge, and the electric field of formation can be with
The electron concentration on surface is effectively reduced, to there is fabulous field passivation effect to p-type surface, surface recombination is reduced, improves battery
Voc, meanwhile, the excellent long wave reflection of dielectric layer can increase absorption of the matrix to long-wave band, improve battery Isc, realize conversion effect
The promotion of rate.Silicon wafer is that silicon wafer is inserted into the aluminium gaily decorated basket first in ALD process, then will be inserted into silicon wafer in the aluminium gaily decorated basket
It is sent into ALD equipment cavity and carries out deposition AL2O3, the aluminium gaily decorated basket is with the increase of number of use, aluminium gaily decorated basket surface and aluminium
One layer of ALO film, ALO powder etc. can be inevitably deposited at gaily decorated basket bayonet, if do not cleaned for a long time, will lead to silicon wafer
Card slot print is formed at aluminium gaily decorated basket card slot, when being made into cell piece finished product, is tested through EL, larger is shown as blacking because compound herein
State influences battery piece performance.Currently, when country PERC technique ALD process, using the aluminium gaily decorated basket as silicon wafer carrying tool,
All none effective cleaning methods, therefore how to realize that effective cleaning to the PERC technique ALD aluminum gaily decorated basket is current face
The problem faced.
Summary of the invention
In view of the above technical problems, the present invention provides a kind of cleaning method of PERC technique ALD aluminium gaily decorated basket, can be directed to
ALO at the PERC technique ALD aluminium gaily decorated basket and card slot is cleaned, and has excellent cleaning effect, is damaged to the aluminium gaily decorated basket
Effect small and that EL nigrescence at aluminium gaily decorated basket card slot can be prevented.
In order to realize goal of the invention, the present invention adopts the following technical scheme:
A kind of cleaning method of the PERC technique ALD aluminium gaily decorated basket, includes the following steps:
A, the aluminium gaily decorated basket is put into sodium hydroxide groove body, carries out pressure pulse cleaning；
B, the aluminium gaily decorated basket is put into pure water after the completion of the cleaning of step A sodium hydroxide, carries out being bubbled overflow cleaning；
C, the aluminium gaily decorated basket after the completion of step B washing is put into ultrasonic cleaning groove body, is carried out with alcohol and pure water mixed liquor
Ultrasonic cleaning；
D, the aluminum gaily decorated basket that step C ultrasonic cleaning is completed is put into pure water, carries out being bubbled overflow cleaning；
E, the aluminum gaily decorated basket taking-up after the completion of step D is put into baking oven drying, is dried.
Preferably, naoh concentration is 5 ± 2% in step A, 15 ± 3min of pressure pulse cleaning time.It can be with maximum journey
The corrosion to the aluminium gaily decorated basket and aluminium gaily decorated basket bayonet is reduced on degree, and can be reached and be washed off aluminium gaily decorated basket surface and the aluminium gaily decorated basket
ALO film, ALO powder at bayonet.
Preferably, pure water is bubbled 2 ± 1h of overflow cleaning in step B.The pure water is bubbled overflow and cleans 2 ± 1h, makes pure water
It is acted on by bubbling, will effectively can be cleaned at aluminium gaily decorated basket surface and bayonet and show neutrality for PH.
Preferably, 2 ± 1h of ultrasonic cleaning in step C, 40 ± 10 DEG C of temperature.Pass through the cavitation of ultrasonic wave in a liquid
Effect, acceleration effect and direct flow effect directly, indirectly act on liquid and dirt, make aluminium gaily decorated basket bayonet and screw
ALO and sour residue at seam are removed, are broken up, at 2 ± 1h of scavenging period, 40 ± 10 DEG C of temperature, in conjunction with wine
Essence is 1: 20 ± 5 mixed liquors with water proportion, can effectively complete to clean.
As preferential, 1 ± 0.5h of pure water bubbling overflow cleaning in step D.When the pure water is bubbled overflow 1 ± 0.5h of cleaning,
It can be effectively that the alcohol washes on aluminium gaily decorated basket surface in step C are clean.
Preferably, in step E, 150 ± 20 DEG C of drying temperature, drying time 2+1h.100 ± 50 DEG C of the drying temperature,
When 2 ± 1h of drying time, the aluminium gaily decorated basket can be made to reach the aluminum gaily decorated basket in the temperature that baking oven is born with the most fast time
Drying effect.
The beneficial effects of the present invention are: carrying out cleaning side for the ALO at the PERC technique ALD aluminium gaily decorated basket and card slot
Method has excellent cleaning effect, damages small to the aluminium gaily decorated basket and can prevent the aluminium gaily decorated basket as the increase of access times causes
Because the more ALO of the extended residual EL generated blacks at gaily decorated basket card slot.
Specific embodiment
Below in conjunction with specific embodiment, the present invention will be further explained:
Embodiment 1
A kind of cleaning method of the PERC technique ALD aluminium gaily decorated basket, comprising the following steps:
A, the aluminium gaily decorated basket is put into sodium hydroxide groove body, carries out pressure pulse cleaning；Naoh concentration is 5%, the pressure pulse cleaning time
15min；
B, the aluminium gaily decorated basket is put into pure water after the completion of the cleaning of step A sodium hydroxide, carries out being bubbled overflow cleaning；Pure water, which is bubbled, to overflow
Stream cleaning 2h；
C, the aluminium gaily decorated basket after the completion of step B washing is put into ultrasonic cleaning groove body, is carried out with alcohol and pure water mixed liquor
Ultrasonic cleaning；Ultrasonic cleaning 2h, 40 DEG C of temperature；
D, the aluminum gaily decorated basket that step C ultrasonic cleaning is completed is put into pure water, carries out being bubbled overflow cleaning；Pure water is bubbled overflow
Clean 1h；
E, the aluminum gaily decorated basket taking-up after the completion of step D is put into baking oven drying, is dried；150 DEG C of drying temperature, drying time
2h。
Embodiment 2
A kind of cleaning method of the PERC technique ALD aluminium gaily decorated basket, comprising the following steps:
A, the aluminium gaily decorated basket is put into sodium hydroxide groove body, carries out pressure pulse cleaning；Naoh concentration is 3%, the pressure pulse cleaning time
12min；B, the aluminium gaily decorated basket is put into pure water after the completion of the cleaning of step A sodium hydroxide, carries out being bubbled overflow cleaning；Pure water is bubbled
1h is cleaned in overflow；
C, the aluminium gaily decorated basket after the completion of step B washing is put into ultrasonic cleaning groove body, is carried out with alcohol and pure water mixed liquor
Ultrasonic cleaning；Ultrasonic cleaning 1h, 30 DEG C of temperature；
D, the aluminum gaily decorated basket that step C ultrasonic cleaning is completed is put into pure water, carries out being bubbled overflow cleaning；Pure water is bubbled overflow
Clean 0.5h；
E, the aluminum gaily decorated basket taking-up after the completion of step D is put into baking oven drying, is dried；130 DEG C of drying temperature, drying time
1h。
Embodiment 3
A kind of cleaning method of the PERC technique ALD aluminium gaily decorated basket, comprising the following steps:
A, the aluminium gaily decorated basket is put into sodium hydroxide groove body, carries out pressure pulse cleaning；Naoh concentration is 7%, the pressure pulse cleaning time
18min；
B, the aluminium gaily decorated basket is put into pure water after the completion of the cleaning of step A sodium hydroxide, carries out being bubbled overflow cleaning；Pure water, which is bubbled, to overflow
Stream cleaning 3h；
C, the aluminium gaily decorated basket after the completion of step B washing is put into ultrasonic cleaning groove body, is carried out with alcohol and pure water mixed liquor
Ultrasonic cleaning；Ultrasonic cleaning 3h, temperature 50 C；
D, the aluminum gaily decorated basket that step C ultrasonic cleaning is completed is put into pure water, carries out being bubbled overflow cleaning；Pure water is bubbled overflow
Clean 1.5h；
E, the aluminum gaily decorated basket taking-up after the completion of step D is put into baking oven drying, is dried；170 DEG C of drying temperature, drying time
3h。
Gaily decorated basket EL nigrescence ratio after the gaily decorated basket being not cleaned for a long time and present invention cleaning compares:
Claims (6)
1. a kind of cleaning method of the PERC technique ALD aluminium gaily decorated basket, which comprises the following steps:
A, the aluminium gaily decorated basket is put into sodium hydroxide groove body, carries out pressure pulse cleaning；
B, the aluminium gaily decorated basket is put into pure water after the completion of the cleaning of step A sodium hydroxide, carries out being bubbled overflow cleaning；
C, the aluminium gaily decorated basket after the completion of step B washing is put into ultrasonic cleaning groove body, is carried out with alcohol and pure water mixed liquor
Ultrasonic cleaning；
D, the aluminum gaily decorated basket that step C ultrasonic cleaning is completed is put into pure water, carries out being bubbled overflow cleaning；
E, the aluminum gaily decorated basket taking-up after the completion of step D is put into baking oven drying, is dried.
2. a kind of cleaning method of PERC technique ALD aluminium gaily decorated basket according to claim 1, which is characterized in that in step A
Naoh concentration is 5 ± 2%, 15 ± 3min of pressure pulse cleaning time.
3. a kind of cleaning method of PERC technique ALD aluminium gaily decorated basket according to claim 1, which is characterized in that in step B
Pure water is bubbled overflow and cleans 2 ± 1h.
4. a kind of cleaning method of PERC technique ALD aluminium gaily decorated basket according to claim 1, which is characterized in that in step C
2 ± 1h of ultrasonic cleaning, 40 ± 10 DEG C of temperature.
5. a kind of cleaning method of PERC technique ALD aluminium gaily decorated basket according to claim 1, which is characterized in that in step D
Pure water is bubbled overflow and cleans 1 ± 0.5h.
6. a kind of cleaning method of PERC technique ALD aluminium gaily decorated basket according to claim 1, which is characterized in that step E
In, 150 ± 20 DEG C of drying temperature, 2 ± 1h of drying time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810780979.7A CN109174779B (en) | 2018-07-16 | 2018-07-16 | Cleaning method for ALD aluminum product flower basket by PERC process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810780979.7A CN109174779B (en) | 2018-07-16 | 2018-07-16 | Cleaning method for ALD aluminum product flower basket by PERC process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109174779A true CN109174779A (en) | 2019-01-11 |
| CN109174779B CN109174779B (en) | 2020-06-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810780979.7A Active CN109174779B (en) | 2018-07-16 | 2018-07-16 | Cleaning method for ALD aluminum product flower basket by PERC process |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110479691A (en) * | 2019-07-29 | 2019-11-22 | 江苏顺风新能源科技有限公司 | A kind of cleaning method of solar battery dried flower basket |
| CN111282915A (en) * | 2020-03-06 | 2020-06-16 | 南京埃克斯密封技术有限公司 | Unmanned workpiece surface treatment production line |
| CN112271234A (en) * | 2020-09-26 | 2021-01-26 | 江苏润阳悦达光伏科技有限公司 | Pretreatment process for solving problem of flower basket mark generated by alkali flower throwing basket |
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| JPH0350847A (en) * | 1989-07-19 | 1991-03-05 | Polyplastics Co | Holding tool for wafer handling |
| US5908042A (en) * | 1996-06-29 | 1999-06-01 | Komatsu Electronic Metals Co., Ltd. | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same |
| CN202155333U (en) * | 2011-07-07 | 2012-03-07 | 苏州赤诚洗净科技有限公司 | Ultrasonic cleaning device of solar battery silicon chip with throwing device |
| CN102527676A (en) * | 2011-12-14 | 2012-07-04 | 青岛吉阳新能源有限公司 | Cleaning process method for etching resistant mask slurry |
| CN102881620A (en) * | 2012-08-31 | 2013-01-16 | 宁波尤利卡太阳能科技发展有限公司 | Method for cleaning and saturating quartz boat |
| CN102332501B (en) * | 2011-09-28 | 2013-08-14 | 桂林吉阳新能源有限公司 | Washing method for removing flower basket mark in process of producing solar cell |
| CN207042969U (en) * | 2017-07-25 | 2018-02-27 | 西安黄河光伏科技股份有限公司 | A kind of burnisher for being used to wipe the gaily decorated basket for loading crystal silicon solar batteries |
-
2018
- 2018-07-16 CN CN201810780979.7A patent/CN109174779B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0350847A (en) * | 1989-07-19 | 1991-03-05 | Polyplastics Co | Holding tool for wafer handling |
| US5908042A (en) * | 1996-06-29 | 1999-06-01 | Komatsu Electronic Metals Co., Ltd. | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same |
| CN202155333U (en) * | 2011-07-07 | 2012-03-07 | 苏州赤诚洗净科技有限公司 | Ultrasonic cleaning device of solar battery silicon chip with throwing device |
| CN102332501B (en) * | 2011-09-28 | 2013-08-14 | 桂林吉阳新能源有限公司 | Washing method for removing flower basket mark in process of producing solar cell |
| CN102527676A (en) * | 2011-12-14 | 2012-07-04 | 青岛吉阳新能源有限公司 | Cleaning process method for etching resistant mask slurry |
| CN102881620A (en) * | 2012-08-31 | 2013-01-16 | 宁波尤利卡太阳能科技发展有限公司 | Method for cleaning and saturating quartz boat |
| CN207042969U (en) * | 2017-07-25 | 2018-02-27 | 西安黄河光伏科技股份有限公司 | A kind of burnisher for being used to wipe the gaily decorated basket for loading crystal silicon solar batteries |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110479691A (en) * | 2019-07-29 | 2019-11-22 | 江苏顺风新能源科技有限公司 | A kind of cleaning method of solar battery dried flower basket |
| CN111282915A (en) * | 2020-03-06 | 2020-06-16 | 南京埃克斯密封技术有限公司 | Unmanned workpiece surface treatment production line |
| CN112271234A (en) * | 2020-09-26 | 2021-01-26 | 江苏润阳悦达光伏科技有限公司 | Pretreatment process for solving problem of flower basket mark generated by alkali flower throwing basket |
| CN112271234B (en) * | 2020-09-26 | 2022-08-19 | 江苏润阳悦达光伏科技有限公司 | Pretreatment process for solving problem of flower basket mark generated by alkali flower throwing basket |
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| Publication number | Publication date |
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| CN109174779B (en) | 2020-06-09 |
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