CN109174779B - Cleaning method for ALD aluminum product flower basket by PERC process - Google Patents
Cleaning method for ALD aluminum product flower basket by PERC process Download PDFInfo
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- CN109174779B CN109174779B CN201810780979.7A CN201810780979A CN109174779B CN 109174779 B CN109174779 B CN 109174779B CN 201810780979 A CN201810780979 A CN 201810780979A CN 109174779 B CN109174779 B CN 109174779B
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- cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Abstract
The invention discloses a method for cleaning an ALD aluminum product flower basket in a PERC process, which can be used for cleaning the ALD aluminum product flower basket in the PERC process and ALO at a clamping groove, has an excellent cleaning effect, causes little damage to the aluminum product flower basket, and can prevent EL blackening at the clamping groove of the aluminum product flower basket.
Description
Technical Field
The invention discloses a method for cleaning an ALD aluminum product flower basket by a PERC process, and belongs to the field of crystalline silicon solar cell production.
Background
The conventional crystalline silicon solar cell process route is texturing → diffusion → etching → thermal oxidation → PECVD → screen printing, and through the process route, the conversion efficiency of the conventional crystalline silicon solar cell is between 18% and 19%, but with the requirement on a solar cell with high conversion efficiency, the conventional crystalline silicon solar cell process route cannot meet the improvement of the conversion efficiency of the solar cell. In order to improve the conversion efficiency of the crystalline silicon solar Cell, the technology of the PERC Cell (Passivated emitter and reactor Cell) is an innovative technology for a P-type solar Cell, the technological process route is texturing → diffusion → etching → thermal oxidation → PECVD → ALD → PECVD → laser grooving → screen printing, the PERC Cell is most different from a conventional Cell in passivation of a back surface dielectric film, namely ALD atomic layer deposition is increased, and local metal contact is realized during screen printing of a Cell piece by adopting laser etching, so that the back surface recombination speed can be greatly reduced, and meanwhile, the light reflection of the back surface is improved. From the current domestic mass production situation, the efficiency of the current crystalline silicon solar cell can be improved from 18-19% to 20-22% by using the PERC cell technology.
PERC battery technique is when ALD process, what adopt is ALD atomic layer deposition mode, through TMA, H2O reacts, deposit one deck AL2O3 film on silicon chip surface, AL2O3 film contains the fixed negative charge of high density, the electron concentration on surface can effectively be reduced to the electric field that forms, thereby there is fabulous field passivation effect to the p type surface, reduce the surface recombination, improve battery Voc, and simultaneously, the excellent long wave reflection of dielectric layer, the absorption of multiplicable base member to the long wave band, improve battery Isc, realize the promotion of conversion efficiency. When the silicon chip is used in the ALD process, firstly, the silicon chip is inserted into the aluminum flower basket, then the silicon chip inserted into the aluminum flower basket is sent into the ALD device cavity to deposit AL2O3, the aluminum flower basket is increased along with the use times, an ALO film, ALO powder and the like are inevitably deposited on the surface of the aluminum flower basket and at the aluminum flower basket clamping groove, if the aluminum flower basket is not cleaned for a long time, the silicon chip can form a clamping groove mark at the aluminum flower basket clamping groove, when a battery piece finished product is manufactured, the battery piece is subjected to EL test, and the battery piece performance is influenced due to the fact that the silicon chip is displayed in a blackened state due to large recombination. At present, in the ALD process of the domestic PERC process, an aluminum flower basket is adopted as a silicon wafer bearing tool, and an effective cleaning method does not exist, so that how to effectively clean the ALD aluminum flower basket of the PERC process is a difficult problem at present.
Disclosure of Invention
Aiming at the technical problems, the invention provides the method for cleaning the ALD aluminum product flower basket in the PERC process, which can be used for cleaning the ALD aluminum product flower basket in the PERC process and the ALO at the clamping groove, has an excellent cleaning effect, causes little damage to the aluminum product flower basket, and can prevent the EL blackening effect at the clamping groove of the aluminum product flower basket.
In order to realize the purpose of the invention, the invention adopts the following technical scheme:
a cleaning method of an ALD aluminum flower basket by a PERC process comprises the following steps:
A. placing the aluminum flower basket into a sodium hydroxide tank, and carrying out bubbling cleaning;
B. step A, after the sodium hydroxide cleaning is finished, putting the aluminum flower basket into pure water, and carrying out bubbling overflow cleaning;
C. b, placing the aluminum flower basket after the water washing in the step B into an ultrasonic washing tank body, and carrying out ultrasonic washing by using a mixed solution of alcohol and pure water;
D. c, placing the aluminum flower basket subjected to ultrasonic cleaning in the step C into pure water, and carrying out bubbling overflow cleaning;
E. and D, taking out the aluminum flower basket after the step D is finished, putting the aluminum flower basket into an oven for drying, and drying.
Preferably, the concentration of sodium hydroxide in the step A is 5 +/-2%, and the bubbling cleaning time is 15 +/-3 min. Can reduce the corrosion to the aluminum product basket of flowers and aluminum product basket of flowers bayonet socket to the at utmost to can reach and wash ALO film, ALO powder on aluminum product basket of flowers surface and aluminum product basket of flowers bayonet socket department.
Preferably, the pure water bubbling overflow cleaning in the step B is carried out for 2 +/-1 h. The pure water bubbling overflow washing device is used for washing 2 +/-1 h, so that pure water can be effectively washed to be neutral in PH display on the surface of the aluminum flower basket and at a bayonet under the bubbling effect.
Preferably, in the step C, ultrasonic cleaning is carried out for 2 +/-1 h at the temperature of 40 +/-10 ℃. The ALO and acid residues at the bayonets of the aluminum flower basket and the screw joint are stripped and differentiated under the direct and indirect action of the cavitation action, the acceleration action and the direct current action of the ultrasonic waves in the liquid on the liquid, and the cleaning can be effectively finished by combining a mixed solution of alcohol and water in a ratio of 1: 20 +/-5 at the cleaning time of 2 +/-1 h and the temperature of 40 +/-10 ℃.
Preferably, the pure water bubbling overflow cleaning in the step D is carried out for 1 +/-0.5 h. And C, when the pure water is bubbled, overflowed and cleaned for 1 +/-0.5 h, the alcohol on the surface of the aluminum flower basket in the step C can be effectively cleaned.
Preferably, in the step E, the drying temperature is 150 +/-20 ℃, and the drying time is 2+1 h. The drying temperature is 100 +/-50 ℃, and the drying time is 2 +/-1 h, so that the aluminum flower basket can be dried at the highest temperature in the drying oven.
The invention has the beneficial effects that: the cleaning method for the ALD aluminum product flower basket and the ALO at the clamping groove of the PERC process has an excellent cleaning effect, is small in damage to the aluminum product flower basket, and can prevent EL blacking caused by the fact that a large amount of ALO is left in the clamping groove of the flower basket for a long time due to the increase of the using times of the aluminum product flower basket.
Detailed Description
The invention is further explained below with reference to specific examples:
example 1
A cleaning method of an ALD aluminum flower basket in a PERC process comprises the following steps:
A. placing the aluminum flower basket into a sodium hydroxide tank, and carrying out bubbling cleaning; the concentration of sodium hydroxide is 5%, and the bubbling cleaning time is 15 min;
B. step A, after the sodium hydroxide cleaning is finished, putting the aluminum flower basket into pure water, and carrying out bubbling overflow cleaning; pure water bubbling overflow cleaning for 2 h;
C. b, placing the aluminum flower basket after the water washing in the step B into an ultrasonic washing tank body, and carrying out ultrasonic washing by using a mixed solution of alcohol and pure water; ultrasonic cleaning for 2h at 40 ℃;
D. c, placing the aluminum flower basket subjected to ultrasonic cleaning in the step C into pure water, and carrying out bubbling overflow cleaning; pure water bubbling overflow cleaning for 1 h;
E. d, taking out the aluminum flower basket after the step D is finished, putting the aluminum flower basket into an oven for drying, and drying; the drying temperature is 150 ℃, and the drying time is 2 h.
Example 2
A cleaning method of an ALD aluminum flower basket in a PERC process comprises the following steps:
A. placing the aluminum flower basket into a sodium hydroxide tank, and carrying out bubbling cleaning; the concentration of sodium hydroxide is 3%, and the bubbling cleaning time is 12 min; B. step A, after the sodium hydroxide cleaning is finished, putting the aluminum flower basket into pure water, and carrying out bubbling overflow cleaning; pure water bubbling overflow cleaning for 1 h;
C. b, placing the aluminum flower basket after the water washing in the step B into an ultrasonic washing tank body, and carrying out ultrasonic washing by using a mixed solution of alcohol and pure water; ultrasonic cleaning for 1h at 30 ℃;
D. c, placing the aluminum flower basket subjected to ultrasonic cleaning in the step C into pure water, and carrying out bubbling overflow cleaning; pure water bubbling overflow cleaning for 0.5 h;
E. d, taking out the aluminum flower basket after the step D is finished, putting the aluminum flower basket into an oven for drying, and drying; the drying temperature is 130 ℃, and the drying time is 1 h.
Example 3
A cleaning method of an ALD aluminum flower basket in a PERC process comprises the following steps:
A. placing the aluminum flower basket into a sodium hydroxide tank, and carrying out bubbling cleaning; the concentration of sodium hydroxide is 7%, and the bubbling cleaning time is 18 min;
B. step A, after the sodium hydroxide cleaning is finished, putting the aluminum flower basket into pure water, and carrying out bubbling overflow cleaning; pure water bubbling overflow cleaning for 3 h;
C. b, placing the aluminum flower basket after the water washing in the step B into an ultrasonic washing tank body, and carrying out ultrasonic washing by using a mixed solution of alcohol and pure water; ultrasonic cleaning for 3h at 50 ℃;
D. c, placing the aluminum flower basket subjected to ultrasonic cleaning in the step C into pure water, and carrying out bubbling overflow cleaning; pure water bubbling overflow cleaning for 1.5 h;
E. d, taking out the aluminum flower basket after the step D is finished, putting the aluminum flower basket into an oven for drying, and drying; the drying temperature is 170 ℃, and the drying time is 3 h.
The EL blackening ratio of the flower basket which is not cleaned for a long time to the cleaned flower basket is compared:
Claims (6)
1. a cleaning method for an ALD aluminum flower basket by a PERC process is characterized by comprising the following steps:
A. placing the aluminum flower basket into a sodium hydroxide tank, and carrying out bubbling cleaning;
B. step A, after the sodium hydroxide cleaning is finished, putting the aluminum flower basket into pure water, and carrying out bubbling overflow cleaning;
C. b, placing the aluminum flower basket after the water washing in the step B into an ultrasonic washing tank body, and carrying out ultrasonic washing by using a mixed solution of alcohol and pure water;
D. c, placing the aluminum flower basket subjected to ultrasonic cleaning in the step C into pure water, and carrying out bubbling overflow cleaning;
E. and D, taking out the aluminum product flower basket after the step D is finished, putting the aluminum product flower basket into an oven for drying, and drying.
2. The method for cleaning ALD aluminum product baskets of claim 1, wherein in step A, the concentration of sodium hydroxide is 5 +/-2%, and the bubbling cleaning time is 15 +/-3 min.
3. The method for cleaning an ALD aluminum flower basket in the PERC process as claimed in claim 1, wherein the pure water bubbling overflow cleaning in the step B is carried out for 2 +/-1 h.
4. The method for cleaning ALD aluminum flower basket adopting PERC process as claimed in claim 1, wherein in the step C, ultrasonic cleaning is carried out for 2 +/-1 h at the temperature of 40 +/-10 ℃.
5. The method for cleaning an ALD aluminum flower basket by the PERC process as claimed in claim 1, wherein the pure water bubbling overflow cleaning in the step D is performed for 1 +/-0.5 hours.
6. The method for cleaning the ALD aluminum flower basket adopting the PERC process as claimed in claim 1, wherein in the step E, the drying temperature is 150 +/-20 ℃ and the drying time is 2 +/-1 h.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810780979.7A CN109174779B (en) | 2018-07-16 | 2018-07-16 | Cleaning method for ALD aluminum product flower basket by PERC process |
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| CN201810780979.7A CN109174779B (en) | 2018-07-16 | 2018-07-16 | Cleaning method for ALD aluminum product flower basket by PERC process |
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| CN109174779B true CN109174779B (en) | 2020-06-09 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110479691A (en) * | 2019-07-29 | 2019-11-22 | 江苏顺风新能源科技有限公司 | A kind of cleaning method of solar battery dried flower basket |
| CN111282915A (en) * | 2020-03-06 | 2020-06-16 | 南京埃克斯密封技术有限公司 | Unmanned workpiece surface treatment production line |
| CN112271234B (en) * | 2020-09-26 | 2022-08-19 | 江苏润阳悦达光伏科技有限公司 | Pretreatment process for solving problem of flower basket mark generated by alkali flower throwing basket |
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| JPH0350847A (en) * | 1989-07-19 | 1991-03-05 | Polyplastics Co | Holding tool for wafer handling |
| US5908042A (en) * | 1996-06-29 | 1999-06-01 | Komatsu Electronic Metals Co., Ltd. | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same |
| CN202155333U (en) * | 2011-07-07 | 2012-03-07 | 苏州赤诚洗净科技有限公司 | Ultrasonic cleaning device of solar battery silicon chip with throwing device |
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| CN102332501B (en) * | 2011-09-28 | 2013-08-14 | 桂林吉阳新能源有限公司 | Washing method for removing flower basket mark in process of producing solar cell |
| CN207042969U (en) * | 2017-07-25 | 2018-02-27 | 西安黄河光伏科技股份有限公司 | A kind of burnisher for being used to wipe the gaily decorated basket for loading crystal silicon solar batteries |
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2018
- 2018-07-16 CN CN201810780979.7A patent/CN109174779B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0350847A (en) * | 1989-07-19 | 1991-03-05 | Polyplastics Co | Holding tool for wafer handling |
| US5908042A (en) * | 1996-06-29 | 1999-06-01 | Komatsu Electronic Metals Co., Ltd. | Basket for cleaning semiconductor wafers and method of cleaning semiconductor wafers using the same |
| CN202155333U (en) * | 2011-07-07 | 2012-03-07 | 苏州赤诚洗净科技有限公司 | Ultrasonic cleaning device of solar battery silicon chip with throwing device |
| CN102332501B (en) * | 2011-09-28 | 2013-08-14 | 桂林吉阳新能源有限公司 | Washing method for removing flower basket mark in process of producing solar cell |
| CN102527676A (en) * | 2011-12-14 | 2012-07-04 | 青岛吉阳新能源有限公司 | Cleaning process method for etching resistant mask slurry |
| CN102881620A (en) * | 2012-08-31 | 2013-01-16 | 宁波尤利卡太阳能科技发展有限公司 | Method for cleaning and saturating quartz boat |
| CN207042969U (en) * | 2017-07-25 | 2018-02-27 | 西安黄河光伏科技股份有限公司 | A kind of burnisher for being used to wipe the gaily decorated basket for loading crystal silicon solar batteries |
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