CN109116708A - A kind of dual wavelength reflective digital holographic microscope - Google Patents
A kind of dual wavelength reflective digital holographic microscope Download PDFInfo
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- CN109116708A CN109116708A CN201811223764.1A CN201811223764A CN109116708A CN 109116708 A CN109116708 A CN 109116708A CN 201811223764 A CN201811223764 A CN 201811223764A CN 109116708 A CN109116708 A CN 109116708A
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- 230000009977 dual effect Effects 0.000 title claims abstract description 14
- 230000010287 polarization Effects 0.000 claims abstract description 47
- 230000003111 delayed effect Effects 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 239000000835 fiber Substances 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000012876 topography Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of dual wavelength reflective digital holographic microscope, the linear polarization of first light source is parallel to light path plane, and the linear polarization of second light source is perpendicular to light path plane；The light that first light source the issues prism that is split after the transmission of the first polarization splitting prism is divided into transmitted light and reflected light, and transmitted light returns to be obtained by camera after lens, object lens from sample surfaces is used as object beam；Reflected light injects camera as reference beam through the second polarization splitting prism, the progress of the first delayed time system, the first half wave plate, the first reflecting mirror, the second reflecting mirror, Amici prism, and the interference fringe of reference beam and object beam will be obtained by camera；The reference beam for the light that second light source issues is same as the interference fringe of object beam to be obtained by camera.The beneficial effects of the invention are as follows holographic microscope is more compact and convenient for integrated.The present invention relates to digital holographic microscope fields, can be used for the real-time topography measurement of three-dimensional of sample.
Description
Technical field
The invention belongs to microscope technology fields, are related to a kind of dual wavelength reflective digital holographic microscope.
Background technique
In existing dual wavelength digital holographic microscope, it is common to use Mach-Zehnder interferometer structure is conveniently adjusted with reaching
Purpose, complex and volume is larger compared with for Michelson's interferometer for interference structure, is unable to reach certain small and high
The application scenarios of integrated level.
Summary of the invention
The purpose of the present invention is to provide a kind of dual wavelength reflective digital holographic microscope, the beneficial effects of the invention are as follows
Vertical scanning range can be significantly improved compared to existing Single wavelength digital holographic microscope and simplifies calculating process.It is more double than existing
Wavelength digital holographic microscope is more compact and convenient for integrated.The present invention relates to digital holographic microscope fields, can be used for sample
The real-time topography measurement of three-dimensional.
The technical scheme adopted by the invention is that including first light source, second light source, first light source, second light source are two beams
The differentiated linear polarization light source of wavelength, the linear polarization of first light source are parallel to light path plane, the linear polarization side of second light source
To perpendicular to light path plane；The light that first light source issues prism that is split after the transmission of the first polarization splitting prism is divided into transmitted light
And reflected light, transmitted light are incident on sample surfaces after lens and object lens, carry the retroreflection light of surface information through object lens and thoroughly
It is obtained after Amici prism reflects by camera after mirror and is used as object beam；Reflected light is prolonged after penetrating the second polarization splitting prism by first
When system carry out 180 degree reflection, through the first half wave plate deflect polarization direction after through the first reflecting mirror and the second reflecting mirror
Through Amici prism as reference beam injection camera after reflection, the interference fringe of reference beam and object beam will be obtained by camera
After be conveyed into exterior computer and handled；The light that second light source issues is after the refraction of the first polarization splitting prism, polarization
Direction is divided into reference light and object light two-beam perpendicular to the light beam of the light path plane prism that is equally split, and transmitted light is through lens and object
Sample surfaces are incident on after mirror in parallel, carry the retroreflection light of surface information through after object lens and lens after Amici prism reflects quilt
Camera, which obtains, is used as object beam, and reflected light deflects polarization side through the second half wave plate after the refraction of the second polarization splitting prism
To by the progress 180 degree reflection of the second delayed time system, through Amici prism as reference beam injection after the reflection of third reflecting mirror
The interference fringe of camera, reference beam and object beam is conveyed into exterior computer and handles after being obtained by camera.
Further, first light source, second light source are emitted by light source emergent ray through the focus lens group in needle passing hole；Light source
For semiconductor laser, He-Ne laser, LED, Super LED.
Further, first light source, second light source are by light by being formed on fiber exit to condenser lens.
Further, first light source, second light source are linear polarization light source.
Further, the first half wave plate and the second half wave plate optical axis and linear polarization angle are 45 degree,
Interference is generated with object light to reach to 90 degree of linear polarization deflections.
Further, the first delayed time system and the second delayed time system can the adjustment position of the direction according to Fig. 1 reach production
Raw high contrast interference fringe target.
Further, the second reflecting mirror, third mirror angle and position can adjust.
Further, camera includes face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera；
The camera sensor type includes CCD and CMOS.
Detailed description of the invention
Fig. 1 is dual wavelength reflective digital holographic microscope structural schematic diagram of the present invention；
Fig. 2 is one scheme of light source；
Fig. 3 is two scheme of light source.
In figure, 101. first light sources, 102. second light sources, 2. first polarization splitting prisms, 3. Amici prisms, 4. lens,
5. object lens, 6. samples, 7. second polarization splitting prisms, 8. first delayed time systems, 9. first half wave plates, 10. first is anti-
Penetrate mirror, 11. second reflecting mirrors, 12. second half wave plates, 13. second delayed time systems, 14. third reflecting mirrors, 15. phases
Machine, 16. computers, 17. light sources, 18. pin holes, 19. focus lens groups, 20. optical fiber, 21. condenser lenses.
Specific embodiment
The present invention is described in detail With reference to embodiment.
Dual wavelength digital holographic microscope of the present invention as shown in Figure 1, include first light source 101, second light source 102, first
Light source 101, second light source 102 are the differentiated linear polarization light source of two beam wavelength, and wherein the linear polarization of first light source 101 is flat
Row is in light path plane, and the linear polarization of second light source 102 is perpendicular to light path plane.
The light that first light source 101 issues be split after the transmission of the first polarization splitting prism 2 prism 3 divide for transmitted light and
Reflected light.Transmitted light is incident on 6 surface of sample after lens 4 and object lens 5, carries the retroreflection light of surface information through 5 He of object lens
It is obtained after the reflection of Amici prism 3 by camera 15 after lens 4 and is used as object beam.After reflected light penetrates the second polarization splitting prism 7
180 degree reflection is carried out by the first delayed time system 8, through the first reflecting mirror 10 after the first half wave plate 9 deflects polarization direction
Inject camera 15 as reference beam through Amici prism 3 with after the reflection of the second reflecting mirror 11, reference beam and object beam it is dry
Relating to striped will be handled by computer 16 is conveyed into after the acquisition of camera 15.
The light that second light source 102 issues is after the refraction of the first polarization splitting prism 2, and polarization direction is perpendicular to light path plane
The light beam prism 3 that is equally split divides for reference light and object light two-beam.Transmitted light is incident on sample through lens 4 are parallel after object lens 5
6 surface of product.The retroreflection light of carrying surface information obtains work by camera 15 after the reflection of Amici prism 3 after penetrating object lens 5 and lens 4
For object beam.Reflected light deflects polarization direction, quilt through the second half wave plate 12 after the refraction of the second polarization splitting prism 7
Second delayed time system 13 carries out 180 degree reflection, injects through Amici prism 3 as reference beam after the reflection of third reflecting mirror 14
The interference fringe of camera 15, reference beam and object beam is conveyed into computer 16 after being obtained by camera 15 and handles.
Wherein first light source 101, second light source 102 can by laser after spatial filter filters by collimated group
At as shown in Fig. 2, 17 emergent ray of light source is emitted through the focus lens group 19 in needle passing hole 18.Light emitting source 17 can be semiconductor
Laser, gas laser (He-Ne laser), LED, Super LED etc..First light source 101, second light source 102 can also be by
It is exported after collimated to suitable spot size after laser fiber coupling output, as shown in figure 3, light goes out by optical fiber 20
It is incident upon on condenser lens 21.Mentioned light source is all linear polarization light source in the present invention, if light source is random polarization state, can allow laser
Polarizing film is first passed through, linear polarization is become.
First half wave plate and the second half wave plate optical axis and linear polarization angle are 45 degree, to reach
Interference is generated with object light to 90 degree of linear polarization deflections.
First delayed time system and the second delayed time system can to reach generation high right the adjustment position of the direction according to figure one
Than degree interference fringe target.
Second reflecting mirror 11,14 angles and positions of third reflecting mirror are variable, and reference beam and object beam can be made to form angle
It can be changed to control interference fringe density.
Camera 15 includes that face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera, camera pass
Sensor type includes CCD and CMOS.
The above is only not to make limit in any form to the present invention to better embodiment of the invention
System, any simple modification that embodiment of above is made according to the technical essence of the invention, equivalent variations and modification,
Belong in the range of technical solution of the present invention.
Claims (6)
1. a kind of dual wavelength reflective digital holographic microscope, it is characterised in that: including first light source, second light source, the first light
Source, second light source are the differentiated linear polarization light source of two beam wavelength, and the linear polarization of first light source is parallel to light path plane, the
The linear polarization of two light sources is perpendicular to light path plane；The light that first light source issues is divided after the transmission of the first polarization splitting prism
Light prism is divided into transmitted light and reflected light, and transmitted light is incident on sample surfaces after lens and object lens, carries returning for surface information
Light is penetrated to be obtained by camera as object beam after Amici prism reflects through after object lens and lens；Reflected light is through the second polarization point
180 degree reflection is carried out by the first delayed time system after light prism, it is anti-through first after the first half wave plate deflects polarization direction
It penetrates after mirror and the reflection of the second reflecting mirror and injects camera, the interference of reference beam and object beam as reference beam through Amici prism
Striped is conveyed into exterior computer and handles after being obtained by camera；The light that second light source issues is through the first polarization spectro
After refraction by prism, polarization direction is divided into reference light and object light two-beam perpendicular to the light beam of the light path plane prism that is equally split,
Transmitted light is incident on sample surfaces through lens are parallel after object lens, carries the retroreflection light of surface information through passing through after object lens and lens
Obtained after Amici prism reflection by camera and be used as object beam, reflected light after the refraction of the second polarization splitting prism through the second two/
One wave plate deflects polarization direction, carries out 180 degree reflection by the second delayed time system, penetrates Amici prism after the reflection of third reflecting mirror
As reference beam injection camera, the interference fringe of reference beam and object beam is conveyed into exterior meter after being obtained by camera
Calculation machine is handled.
2. according to a kind of dual wavelength reflective digital holographic microscope described in claim 1, it is characterised in that: first light
Source, second light source are emitted by light source emergent ray through the focus lens group in needle passing hole；Light source is semiconductor laser, He-Ne swashs
Light device, LED, Super LED.
3. according to a kind of dual wavelength reflective digital holographic microscope described in claim 1, it is characterised in that: first light
Source, second light source are by light by being formed on fiber exit to condenser lens.
4. according to a kind of dual wavelength reflective digital holographic microscope described in claim 1, it is characterised in that: first light
Source, second light source are linear polarization light source.
5. according to a kind of dual wavelength reflective digital holographic microscope described in claim 1, it is characterised in that: described one or two point
One of wave plate and the second half wave plate optical axis and linear polarization angle be 45 degree, to reach to 90 degree of linear polarization
It deflects and generates interference with object light.
6. according to a kind of dual wavelength reflective digital holographic microscope described in claim 1, it is characterised in that: the camera includes
Face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera；The camera sensor type includes
CCD and CMOS.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811223764.1A CN109116708A (en) | 2018-10-19 | 2018-10-19 | A kind of dual wavelength reflective digital holographic microscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811223764.1A CN109116708A (en) | 2018-10-19 | 2018-10-19 | A kind of dual wavelength reflective digital holographic microscope |
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| CN109116708A true CN109116708A (en) | 2019-01-01 |
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| CN201811223764.1A Pending CN109116708A (en) | 2018-10-19 | 2018-10-19 | A kind of dual wavelength reflective digital holographic microscope |
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Citations (9)
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|---|---|---|---|---|
| JPH09297004A (en) * | 1996-05-01 | 1997-11-18 | Olympus Optical Co Ltd | Microscope apparatus |
| JP2006078263A (en) * | 2004-09-08 | 2006-03-23 | Toppan Printing Co Ltd | Wiring pattern inspecting apparatus and wiring pattern inspecting method |
| CN1826518A (en) * | 2003-06-19 | 2006-08-30 | 麻省理工学院 | System and method for measuring phase |
| CN102012216A (en) * | 2010-09-26 | 2011-04-13 | 首都师范大学 | Terahertz multi-wavelength phase imaging method |
| CN205384407U (en) * | 2016-03-10 | 2016-07-13 | 暨南大学 | Reflective digital holographic microscope of dual wavelength |
| CN107449361A (en) * | 2017-07-25 | 2017-12-08 | 西安工业大学 | A kind of dual wavelength of stabilization interferes microscope equipment and its application method in real time |
| CN107991242A (en) * | 2017-11-20 | 2018-05-04 | 西北工业大学 | A kind of method and system of the measurement sample polarization state based on polarization splitting prism |
| CN108168425A (en) * | 2018-01-16 | 2018-06-15 | 许之敏 | A kind of Digital holographic microscopy system with novel time-lapse system |
| CN108180824A (en) * | 2018-01-08 | 2018-06-19 | 哈尔滨工程大学 | The orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement apparatus and method |
-
2018
- 2018-10-19 CN CN201811223764.1A patent/CN109116708A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09297004A (en) * | 1996-05-01 | 1997-11-18 | Olympus Optical Co Ltd | Microscope apparatus |
| CN1826518A (en) * | 2003-06-19 | 2006-08-30 | 麻省理工学院 | System and method for measuring phase |
| JP2006078263A (en) * | 2004-09-08 | 2006-03-23 | Toppan Printing Co Ltd | Wiring pattern inspecting apparatus and wiring pattern inspecting method |
| CN102012216A (en) * | 2010-09-26 | 2011-04-13 | 首都师范大学 | Terahertz multi-wavelength phase imaging method |
| CN205384407U (en) * | 2016-03-10 | 2016-07-13 | 暨南大学 | Reflective digital holographic microscope of dual wavelength |
| CN107449361A (en) * | 2017-07-25 | 2017-12-08 | 西安工业大学 | A kind of dual wavelength of stabilization interferes microscope equipment and its application method in real time |
| CN107991242A (en) * | 2017-11-20 | 2018-05-04 | 西北工业大学 | A kind of method and system of the measurement sample polarization state based on polarization splitting prism |
| CN108180824A (en) * | 2018-01-08 | 2018-06-19 | 哈尔滨工程大学 | The orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement apparatus and method |
| CN108168425A (en) * | 2018-01-16 | 2018-06-15 | 许之敏 | A kind of Digital holographic microscopy system with novel time-lapse system |
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