CN106019259B - Laser frequency discrimination device and frequency discrimination method based on Mach-Zehnder interferometer - Google Patents

Laser frequency discrimination device and frequency discrimination method based on Mach-Zehnder interferometer Download PDF

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CN106019259B
CN106019259B CN201610538829.6A CN201610538829A CN106019259B CN 106019259 B CN106019259 B CN 106019259B CN 201610538829 A CN201610538829 A CN 201610538829A CN 106019259 B CN106019259 B CN 106019259B
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CN106019259A (en
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洪光烈
周艳波
舒嵘
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Puguan Visual Technology Shanghai Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/486Receivers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/95Lidar systems specially adapted for specific applications for meteorological use
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4816Constructional features, e.g. arrangements of optical elements of receivers alone
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00Technologies having an indirect contribution to adaptation to climate change
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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract

本发明公开了一种基于马赫曾德干涉仪的激光鉴频装置及鉴频方法。它包括三片反射镜,四块不同形状和大小的特殊棱镜,四分之一波片,三角棱镜,一维压电位移台,两块沃拉斯顿偏振器,两片会聚透镜,四个单元探测器组成,能够将先后两次入射的有微小频率差的单纵模或多纵模平行激光束分成四束相对能量依入射光频率不同而不同的出射光,再用四个单元探测器同时探测每束出射光的能量,把两次入射光对应的四个通道能量探测出来就可以反演出两入射光的频率差。本系统的优点在于:结构紧凑,光程差可粗调也可精细扫描,探测精度高,能够使用多纵模激光入射,对探测器要求较低,特别适合于车载、机载等基于移动平台的各种多普勒激光雷达鉴频系统。

The invention discloses a laser frequency discrimination device and a frequency discrimination method based on a Mach-Zehnder interferometer. It includes three mirrors, four special prisms of different shapes and sizes, a quarter-wave plate, a triangular prism, a one-dimensional piezoelectric stage, two Wollaston polarizers, two converging lenses, four Composed of unit detectors, it can divide the single-longitudinal-mode or multi-longitudinal-mode parallel laser beams incident twice successively with a small frequency difference into four beams of outgoing light whose relative energy varies according to the frequency of the incident light, and then use four unit detectors At the same time, the energy of each beam of outgoing light is detected, and the frequency difference between the two incident lights can be retrieved by detecting the energy of the four channels corresponding to the two incident lights. The advantages of this system are: compact structure, optical path difference can be coarsely adjusted or finely scanned, high detection accuracy, can use multi-longitudinal mode laser incidence, and has low requirements for detectors, especially suitable for vehicle-mounted, airborne and other mobile platforms Various Doppler lidar frequency discrimination systems.

Description

基于马赫曾德干涉仪的激光鉴频装置及鉴频方法Laser frequency discrimination device and frequency discrimination method based on Mach-Zehnder interferometer

技术领域technical field

本发明涉及一种激光频率鉴定系统,具体涉及一种基于马赫曾德干涉仪的激光鉴频装置及鉴频方法。The invention relates to a laser frequency identification system, in particular to a laser frequency identification device and a frequency identification method based on a Mach-Zehnder interferometer.

背景技术Background technique

多普勒激光雷达常被用来测量风速或硬目标的移动速度,在大气物理学、气象遥感、军事武器中都有广泛应用,其中用来测量光的多普勒频移装置是这些应用中必不可少的核心部分。目前世界范围内的多普勒激光雷达所用的探测方法大体分两种,相干探测和非相干探测。非相干探测也叫直接探测,直接探测又分为边沿检测技术和条纹成像技术两种,边沿检测运用窄带滤光片鉴定风速或运动目标引起的激光的频移,条纹成像运用F-P干涉仪、Fizeau干涉仪、Michelson干涉仪或Mach-Zehnder(马赫曾德)干涉仪的干涉条纹与频率的对应关系鉴定发射光与接收回波之间的频率差从而反演出风速或运动目标的移动速度,这两种技术在普通工况下都能正常工作且各有优势,然而一旦要将系统放在移动平台上比如车载甚至星载,这两种技术又均面临过于复杂和庞大,结构不够稳定,要求被检光为单纵模激光,某些器件要求恒温条件等问题。本发明正是针对这种情况设计了一种对激光器稳频精度要求很低,对温度变化不敏感,不要求激光光源一定要单纵模入射,一旦各部件固定激光鉴频装置就十分稳定的一种基于马赫曾德干涉仪的激光鉴频装置。这里的马赫曾德干涉仪并非条纹成像式的马赫曾德干涉仪,而是一种四通道的非条纹成像的马赫曾德干涉仪,它基于Zhao YanLiu和Takao Kobayashi二人于1995年提出的一种用于测风激光雷达中检测频移的装置,是对原装置的改进,相比原装置,结构更紧凑使得机载甚至星载此激光鉴频装置成为可能,光程差可调而利于装调、数据获取和反演激光频率,能够接收多纵模入射激光而拓展了激光鉴频装置的应用范围。由于本激光鉴频装置及鉴频方法没有利用条纹成像技术,可以归类为一种边沿检测技术。Doppler lidar is often used to measure wind speed or the moving speed of hard targets. It is widely used in atmospheric physics, meteorological remote sensing, and military weapons. The Doppler frequency shift device used to measure light is one of the most important applications in these applications. An essential core part. Currently, there are two types of detection methods used by Doppler lidar worldwide, coherent detection and non-coherent detection. Incoherent detection is also called direct detection. Direct detection is divided into edge detection technology and fringe imaging technology. Edge detection uses narrow-band filters to identify the frequency shift of the laser caused by wind speed or moving targets. Fringe imaging uses F-P interferometer, Fizeau Interferometer, Michelson interferometer or Mach-Zehnder (Mach-Zehnder) interferometer's interference fringe and frequency correspondence to identify the frequency difference between the transmitted light and the received echo to invert the wind speed or the moving speed of the moving target. Both technologies can work normally under normal working conditions and each has its own advantages. However, once the system is to be placed on a mobile platform such as a vehicle or even spaceborne, the two technologies are both too complex and bulky, and the structure is not stable enough. Photodetection is a single longitudinal mode laser, and some devices require constant temperature conditions and other issues. In view of this situation, the present invention designs a laser that requires very low frequency stabilization accuracy, is insensitive to temperature changes, does not require the laser light source to be incident in a single longitudinal mode, and once the components are fixed, the laser frequency discrimination device will be very stable. A laser frequency discrimination device based on Mach-Zehnder interferometer. The Mach-Zehnder interferometer here is not a fringe-imaging Mach-Zehnder interferometer, but a four-channel non-stripe-imaging Mach-Zehnder interferometer, which is based on a method proposed by Zhao YanLiu and Takao Kobayashi in 1995. A device for detecting frequency shift in wind laser radar is an improvement on the original device. Compared with the original device, the structure is more compact, which makes it possible for the airborne or even spaceborne laser frequency discrimination device. The optical path difference can be adjusted to facilitate Adjustment, data acquisition and inversion of laser frequency, can receive multi-longitudinal mode incident laser and expand the application range of laser frequency discrimination device. Since the laser frequency discrimination device and frequency discrimination method do not utilize fringe imaging technology, they can be classified as an edge detection technology.

发明内容Contents of the invention

本发明的目的是提供一种可以探测频移的激光雷达鉴频装置及鉴频方法,使得多普勒激光雷达风场探测、硬目标移动速度探测有一种可以接受多纵模入射激光、受温度影响小、对激光器稳频精度要求低又稳定、可靠、紧凑的鉴频装置。The purpose of the present invention is to provide a laser radar frequency discrimination device and a frequency discrimination method that can detect frequency shifts, so that Doppler laser radar wind field detection and hard target moving speed detection have a method that can accept multi-longitudinal mode incident laser light and be affected by temperature. It is a stable, reliable and compact frequency discrimination device with little influence and low requirement on laser frequency stabilization accuracy.

为了达到上述目的,本发明中的激光鉴频装置由第一反射镜1,第二反射镜4,第三反射镜7,第一特殊棱镜2,第二特殊棱镜3,第三特殊棱镜8,第四特殊棱镜9,三角棱镜6,一维压电位移台5,四分之一波片10,第一沃拉斯顿偏振器11,第二沃拉斯顿偏振器12,第一会聚透镜13,第二会聚透镜14,第一单元探测器15,第二单元探测器16,第三单元探测器17,第四单元探测器18共同组成。In order to achieve the above-mentioned purpose, the laser frequency discriminating device among the present invention is by the first reflection mirror 1, the second reflection mirror 4, the third reflection mirror 7, the first special prism 2, the second special prism 3, the third special prism 8, Fourth special prism 9, triangular prism 6, one-dimensional piezoelectric displacement stage 5, quarter wave plate 10, first Wollaston polarizer 11, second Wollaston polarizer 12, first converging lens 13. The second converging lens 14, the first unit detector 15, the second unit detector 16, the third unit detector 17, and the fourth unit detector 18 are jointly composed.

所述的第一反射镜1、第二反射镜4、第三反射镜7、三角棱镜6、四分之一波片10的高度不超过第一特殊棱镜2、第二特殊棱镜3、第三特殊棱镜8、第四特殊棱镜9中最低高度的一半。The heights of the first reflecting mirror 1, the second reflecting mirror 4, the third reflecting mirror 7, the triangular prism 6 and the quarter wave plate 10 are not higher than the first special prism 2, the second special prism 3, the third special prism Half of the lowest height among the special prism 8 and the fourth special prism 9.

所述的三角棱镜6下方装有用以精确控制和扫描激光鉴频装置光程差的一维压电位移台5。A one-dimensional piezoelectric stage 5 for precisely controlling and scanning the optical path difference of the laser frequency discrimination device is installed under the triangular prism 6 .

平行入射的参考激光或被检激光光束经与入射光轴成45°放置的第一反射镜1反射后垂直入射进入第一特殊棱镜2,在第一特殊棱镜2的紧挨第二特殊棱镜3的且被部分镀以半透半反膜的面上,含有参考激光或被检激光50%光能量的光束透过此面直达四分之一波片10并透过四分之一波片10,而另外含有参考激光或被检激光50%光能量的光在此反射回第一特殊棱镜2内部,并在与被部分镀以半透半反膜的面平行的另一个面再次被反射,反射光再透过第一特殊棱镜2和第二特殊棱镜3,到达与此处光轴成45°角放置的第二反射镜4并被反射到三角棱镜6,在三角棱镜6中经历两次内反射后出射到与此处光轴成45°放置的第三反射镜7,被第三反射镜7反射的光遭遇并透过第三特殊棱镜8到达第四特殊棱镜9,这时从四分之一波片10出射的含有50%参考激光或被检激光能量的光束与从第三特殊棱镜出射的同样含有50%参考激光或被检激光能量的光束相互平行,它们垂直入射到第四特殊棱镜9,被第四特殊棱镜9抬升一定高度后沿入射光轴出射,出射方向与入射方向相反,出射的两束光位置高于四分之一波片10、第一反射镜1、第二反射镜4和第三反射镜7的最高高度而低于第三特殊棱镜8、第二特殊棱镜3、第一特殊棱镜2的最高高度,因此两束光经第四特殊棱镜9出射后其中一束将通过四分之一波片10的上方直接到达第二特殊棱镜3,另一束将经历第三特殊棱镜8到达第二特殊棱镜3;从四分之一波片10上方入射到第二特殊棱镜3的光束穿过第二特殊棱镜3后到达第一特殊棱镜2的被部分镀了半透半反膜的面后被再次分光,含有参考激光或被检激光25%的能量的光透过此面并经历第一特殊棱镜2再到达第二沃拉斯顿偏振器12,被第二沃拉斯顿偏振器12分成两束出射方向不一样的含有不同偏振分量的平行光,一束斜向上另一束斜向下,两平行光经过第二会聚透镜14被聚焦到其焦平面上的两点,以上下对齐的第二单元探测器16和第四单元探测器18接收焦平面上的光斑能量;在第一特殊棱镜2的部分镀有半透半反膜的面上,含有参考光或被检光25%的能量的光从该面反射后,经历第二特殊棱镜3,被其与第一特殊棱镜2紧挨的面平行的另一个面反射并再次经历第二特殊棱镜3,出射到第一沃拉斯顿偏振器11前,被第一沃拉斯顿偏振器11分成两束斜出射的含有不同偏振分量的平行光,这两束光被第一会聚透镜13会聚到达第一会聚透镜13的焦平面上,光斑落在上下对齐放置的第一单元探测器15和第三单元探测器17上;经历第三特殊棱镜8到达第二特殊棱镜3的光束穿过第二特殊棱镜3,在第一特殊棱镜2的与两特殊棱镜接合面平行的另一面处反射一次到达第一特殊棱镜2的部分镀有半透半反膜的面上,在此面上含有参考激光或被检激光25%光能量的光透过此面到达与两棱镜接合面平行的第二特殊棱镜3的一面并被反射,反射光束出射第二特殊棱镜3到达第一沃拉斯顿偏振器11,它也会被分成两束方向不同含有不同偏振光分量的斜出射平行光束并被第一会聚透镜13聚焦到其焦平面的第一单元探测器15和第三单元探测器17上;在第一特殊棱镜2的部分镀有半透半反膜的面处还有含有参考激光或被检激光25%光能量的光被反射并出射第一特殊棱镜2到达第二沃拉斯顿偏振器12,被第二沃拉斯顿偏振器12分成两束方向不同的含有不同偏振分量的斜出射平行光,这两束平行光再经第二会聚透镜14分别到达其焦平面上的第二单元探测器16和第四单元探测器18上。The parallel incident reference laser or the tested laser beam is reflected by the first reflector 1 placed at an angle of 45° to the incident optical axis, and then enters the first special prism 2 perpendicularly, and the second special prism 3 next to the first special prism 2 The light beam containing 50% of the light energy of the reference laser or the detected laser passes through this surface and reaches the quarter-wave plate 10 and passes through the quarter-wave plate 10. , while the light containing 50% light energy of the reference laser or the detected laser is reflected back inside the first special prism 2, and is reflected again on another surface parallel to the surface partially coated with the semi-transparent and semi-reflective film, The reflected light passes through the first special prism 2 and the second special prism 3, reaches the second reflector 4 placed at an angle of 45° with the optical axis here and is reflected to the triangular prism 6, and experiences twice in the triangular prism 6 After internal reflection, it goes out to the third reflector 7 placed at 45° with the optical axis here, and the light reflected by the third reflector 7 encounters and passes through the third special prism 8 to reach the fourth special prism 9. The light beam that contains 50% of the reference laser or the energy of the detected laser emitted by the one-third wave plate 10 is parallel to the beam that also contains 50% of the energy of the reference laser or the energy of the detected laser emitted from the third special prism, and they are perpendicularly incident on the fourth The special prism 9 is lifted by the fourth special prism 9 to a certain height and then emerges along the incident light axis. The exit direction is opposite to the incident direction. The highest height of the second reflecting mirror 4 and the third reflecting mirror 7 is lower than the highest height of the third special prism 8, the second special prism 3, and the first special prism 2, so the two beams of light are emitted through the fourth special prism 9. One beam will directly reach the second special prism 3 through the top of the quarter wave plate 10, and the other beam will pass through the third special prism 8 to reach the second special prism 3; The light beam of the second special prism 3 passes through the second special prism 3 and reaches the surface of the first special prism 2 partially coated with a semi-transparent and semi-reflective film, and then is split again, containing 25% of the energy of the reference laser or the tested laser. After passing through this surface and passing through the first special prism 2, it reaches the second Wollaston polarizer 12, and is divided by the second Wollaston polarizer 12 into two beams of parallel light with different outgoing directions and containing different polarization components. One beam is obliquely upward and the other is obliquely downward. The two parallel lights are focused to two points on the focal plane through the second converging lens 14, and the second unit detector 16 and the fourth unit detector 18 aligned up and down receive the focal plane. Spot energy on the surface; on the surface of the first special prism 2 partially coated with a semi-transparent and semi-reflective film, the light containing 25% of the energy of the reference light or the tested light is reflected from the surface and passes through the second special prism 3, It is reflected by another surface parallel to the surface next to the first special prism 2 and passes through the second special prism 3 again, before it is emitted to the first Wollaston polarizer 11, and is absorbed by the first Wollaston polarizer 11 Divided into two beams of parallel light with different polarization components that exit obliquely, these two beams of light are converged by the first converging lens 13 and reach the focal plane of the first converging lens 13, and the light spot falls on the first unit detector that is aligned up and down 15 and the third unit detector 17; the light beam that reaches the second special prism 3 through the third special prism 8 passes through the second special prism 3, at the other side of the first special prism 2 parallel to the joint surface of the two special prisms Reflect once and reach the surface of the first special prism 2 coated with a semi-transparent and semi-reflective film, on which the light containing 25% of the light energy of the reference laser or the detected laser passes through this surface and reaches the surface parallel to the joint surface of the two prisms. One side of the second special prism 3 is reflected, the reflected light beam exits the second special prism 3 and reaches the first Wollaston polarizer 11, it will also be divided into two oblique outgoing parallel light beams with different directions and containing different polarized light components and On the first unit detector 15 and the third unit detector 17 focused on its focal plane by the first converging lens 13; there is also a reference laser light at the surface of the first special prism 2 coated with a semi-transparent and half-reflective film. Or the light of 25% of the light energy of the detected laser is reflected and exits the first special prism 2 to reach the second Wollaston polarizer 12, and is divided into two beams with different directions and different polarization components by the second Wollaston polarizer 12 The obliquely emitted parallel light beams pass through the second converging lens 14 and respectively reach the second unit detector 16 and the fourth unit detector 18 on the focal plane thereof.

所述的一种基于马赫曾德干涉仪的激光鉴频装置中,三角棱镜6下方装有一维压电位移台5,用以精确控制或扫描激光鉴频装置的光程差L,此光程差为进入三角棱镜6并两次透过第三特殊棱镜8的一束平行光与经过四分之一波片10一次的一束平行光之间的光程之差,前者光程为第一特殊棱镜2和第二特殊棱镜3接合处的分界面处反射的含有50%入射光能量的光束经历第一特殊棱镜2、第二特殊棱镜3、第二反射镜4、三角棱镜6、第三反射镜7、第三特殊棱镜8、第四特殊棱镜9、第三特殊棱镜8、第二特殊棱镜3、第一特殊棱镜2后再次到达前述分界面处的光程,后者光程为在前述分界面处透射的含有50%入射光能量的一束平行光,经历四分之一波片10、第四特殊棱镜9、第二特殊棱镜3再次到达前述分界面处的光程,上述所有在棱镜中的光程要乘以棱镜材料的折射率计入总光程中。In the described laser frequency discrimination device based on the Mach-Zehnder interferometer, a one-dimensional piezoelectric displacement stage 5 is installed below the triangular prism 6 to accurately control or scan the optical path difference L of the laser frequency discrimination device. The difference is the difference in the optical path between a beam of parallel light that enters the triangular prism 6 and passes through the third special prism 8 twice and a beam of parallel light that passes through the quarter-wave plate 10 once, and the former optical path is the first The light beam containing 50% of the incident light energy reflected at the interface between the special prism 2 and the second special prism 3 goes through the first special prism 2, the second special prism 3, the second reflector 4, the triangular prism 6, and the third special prism. Reflector 7, the 3rd special prism 8, the 4th special prism 9, the 3rd special prism 8, the second special prism 3, the optical path at the aforementioned interface again after the first special prism 2, the latter optical path is in A beam of parallel light transmitted at the aforementioned interface and containing 50% of the energy of the incident light passes through the quarter-wave plate 10, the fourth special prism 9, and the second special prism 3 to reach the optical path of the aforementioned interface again, all of the above The optical distance in the prism is multiplied by the refractive index of the prism material to calculate the total optical distance.

单纵模激光鉴频时,首先向所述的激光鉴频装置发射一束已知频率的参考单纵模激光束,由四个单元探测器获取四个光强对应的电压值,然后向所述的激光鉴频装置发射一束与参考光频率相差不到一个激光鉴频装置自由光谱范围的被检单纵模激光束,其中c为真空中的光速,L为激光鉴频装置光程差,由四个单元探测器获取四个光强对应的电压值。在四个参考光光强检测过程中,扫描参考光频率,这四个参考光光强电压值会形成四条彼此相隔π/2相位的四条正弦曲线,根据四个探测器得到的参考光和被检光对应的8个电压值在四条正弦曲线中的相对位置关系,可以推算出两者间的光频率差,进而获得被检光的频率。多纵模激光鉴频时,当入射的参考激光和被检激光是多纵模激光时,若此多纵模激光的自由光谱范围FSRlaser和本激光鉴频装置的FSRsys相同,则仍然可以用本装置检测多纵模激光的频移。若此多纵模激光的自由光谱范围和本激光鉴频装置的FSRsys不同,则可以通过调节压电位移台来改变激光鉴频装置的光程差,从而使FSRsys变得与FSRlaser相同,这样仍然可以使用本激光鉴频装置鉴频。During single longitudinal mode laser frequency discrimination, a reference single longitudinal mode laser beam of known frequency is first emitted to the laser frequency discrimination device, and the four unit detectors obtain the voltage values corresponding to the four light intensities, and then send The laser frequency discrimination device emits a beam whose frequency differs from that of the reference light by less than one free spectral range of the laser frequency discrimination device The inspected single longitudinal mode laser beam, where c is the speed of light in vacuum, L is the optical path difference of the laser frequency discrimination device, and the voltage values corresponding to the four light intensities are obtained by four unit detectors. During the detection process of the four reference light intensities, the frequency of the reference light is scanned, and the four reference light intensity voltage values will form four sinusoidal curves with a phase interval of π/2 from each other. According to the reference light obtained by the four detectors and the detected The relative positional relationship of the eight voltage values corresponding to the photodetection in the four sinusoidal curves can be used to calculate the light frequency difference between the two, and then the frequency of the photodetected light can be obtained. In multi-longitudinal-mode laser frequency discrimination, when the incident reference laser and the detected laser are multi-longitudinal-mode lasers, if the free spectral range FSR laser of this multi-longitudinal-mode laser is the same as the FSR sys of this laser frequency discrimination device, it can still be This device is used to detect the frequency shift of multi-longitudinal mode laser. If the free spectral range of the multi-longitudinal mode laser is different from the FSR sys of the laser frequency discrimination device, the optical path difference of the laser frequency discrimination device can be changed by adjusting the piezoelectric displacement stage, so that the FSR sys becomes the same as the FSR laser , so that the laser frequency discrimination device can still be used for frequency discrimination.

所述的第一特殊棱镜2是一个直五棱柱,其上下底面是一个五边形,其中两条有光透射或反射的不相邻的边彼此平行,平行的边中较短的一边对应的五棱柱的侧面镀全反射膜,较长的一边中其与第一反射镜1中心和四分之一波片10中心连线相交的位置对应的部分侧面镀半透半反膜,此侧面其余部分镀增透膜,五棱柱的激光入射的侧面镀增透膜。Described first special prism 2 is a straight pentagonal prism, and its upper and lower bases are a pentagon, wherein two non-adjacent sides with light transmission or reflection are parallel to each other, and the shorter one of the parallel sides corresponds to The side of the pentagonal prism is coated with a total reflection film, and in the longer side, the corresponding part of the side where it intersects with the center line of the first reflector 1 and the center of the quarter wave plate 10 is coated with a semi-transparent and semi-reflective film, and the rest of the side Part of the anti-reflection coating is coated, and the side of the pentagonal prism where the laser is incident is coated with an anti-reflection coating.

所述的第二特殊棱镜3是一个直六棱柱,其上下底面是一个六边形,其中与第一特殊棱镜2紧挨的面对应的边和此边的对边是平行关系,与第一特殊棱镜2紧挨的面镀增透膜,其对边镀全反射膜;光入射和出射第二特殊棱镜3的两个侧面镀增透膜,且这两个侧面也是平行关系,这两个平行的面与入射或出射自身的光的方向垂直。Described second special prism 3 is a straight hexagonal prism, and its upper and lower bottom surfaces are a hexagon, wherein the side corresponding to the face close to the first special prism 2 and the opposite side of this side are in parallel relationship, and the second A special prism 2 is coated with an anti-reflection coating on the surface next to it, and its opposite side is coated with a total reflection coating; the two sides of the light incident and outgoing second special prism 3 are coated with an anti-reflection coating, and these two sides are also parallel. A parallel plane is perpendicular to the direction of light incident or exiting itself.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其中所述的第三特殊棱镜8是一个长方体,其与光轴相交的两个侧面镀增透膜,且第三特殊棱镜8只为增加激光鉴频装置的光程差而存在,如果激光鉴频装置不需要很大的光程差,可以去除第三特殊棱镜8。The described laser frequency discrimination device based on Mach-Zehnder interferometer, wherein the third special prism 8 is a cuboid, and its two sides intersecting with the optical axis are coated with an anti-reflection coating, and the third special prism 8 It only exists to increase the optical path difference of the laser frequency discrimination device. If the laser frequency discrimination device does not require a large optical path difference, the third special prism 8 can be removed.

所述的第四特殊棱镜9是一个直五棱柱,此棱柱的上下底面的形状与五角棱镜和三角棱镜拼接的立体的上下底面形状相同,在光入射和出射的侧面镀增透膜,其它侧面镀全反射膜;第四特殊棱镜9可以被一个上下底面中两直角边对应侧面镀全反射膜、斜边对应侧面镀增透膜的三角棱镜替换。The fourth special prism 9 is a straight pentagonal prism. The shape of the upper and lower bottom surfaces of this prism is the same as the shape of the three-dimensional upper and lower bottom surfaces spliced by the pentagonal prism and the triangular prism. Anti-reflection coatings are coated on the sides of light incident and outgoing, and the other sides Coating with total reflection coating; the fourth special prism 9 can be replaced by a triangular prism with two right-angled sides corresponding to side coating with total reflection coating and hypotenuse corresponding side coating anti-reflection coating in the upper and lower bottom surfaces.

所述的第一沃拉斯顿偏振器11和第二沃拉斯顿偏振器12的光轴都平行或垂直于四分之一波片10的快轴方向,可以用其它偏振分光元件代替这两个偏振器,只要相应改变各自后端的会聚透镜、单元探测器的位置即可。The optical axes of the first Wollaston polarizer 11 and the second Wollaston polarizer 12 are all parallel or perpendicular to the fast axis direction of the quarter-wave plate 10, which can be replaced by other polarization splitting elements For the two polarizers, it is only necessary to change the positions of the converging lens and the unit detector at the respective rear ends accordingly.

所述的三角棱镜6的三个侧面需镀膜处理,其上下底面中直角边对应的侧面镀全反射膜,斜边对应的侧面镀增透膜。The three sides of the triangular prism 6 need to be coated, the sides corresponding to the right-angled sides in the upper and lower bottom surfaces are coated with a total reflection coating, and the sides corresponding to the hypotenuse are coated with an anti-reflective coating.

所述的三角棱镜6下方装有用以精确控制和扫描激光鉴频装置光程差的一维压电位移台5,其运动方向与入射到一维压电位移台5的光束方向一致,扫描系统光程差可以用来绘制所述的四个单元探测器上的光强随光程差变化的图谱,控制系统光程差则是为了满足一些特定应用中的调节光程差的需求,比如可以用来寻找系统最高信噪比工作点。Described triangular prism 6 below is equipped with in order to accurately control and scan the one-dimensional piezoelectric displacement platform 5 of optical path difference of laser frequency discriminating device, and its movement direction is consistent with the light beam direction incident to one-dimensional piezoelectric displacement platform 5, scanning system The optical path difference can be used to draw the spectrum of the light intensity on the four unit detectors changing with the optical path difference, and the control system optical path difference is to meet the requirements of adjusting the optical path difference in some specific applications, such as It is used to find the operating point with the highest signal-to-noise ratio of the system.

所述的第一反射镜1、第二反射镜4、第三反射镜7、三角棱镜6、四分之一波片10的高度不超过第一特殊棱镜2、第二特殊棱镜3、第三特殊棱镜8、第四特殊棱镜9中最低高度的一半。The heights of the first reflecting mirror 1, the second reflecting mirror 4, the third reflecting mirror 7, the triangular prism 6 and the quarter wave plate 10 are not higher than the first special prism 2, the second special prism 3, the third special prism Half of the lowest height among the special prism 8 and the fourth special prism 9.

所述的一种基于马赫曾德干涉仪的激光鉴频装置可以使用其他偏振分束器件代替沃拉斯顿偏振器来将入射其中的光的水平偏振光分量和垂直偏振光分量分开探测。The laser frequency discrimination device based on the Mach-Zehnder interferometer can use other polarization beam splitters instead of the Wollaston polarizer to separately detect the horizontally polarized light component and the vertically polarized light component of the light incident therein.

所述的第三特殊棱镜8仅为增加激光鉴频装置光程差而存在,如特定应用中不需要较大光程差,可以去除此棱镜。The third special prism 8 exists only to increase the optical path difference of the laser frequency discrimination device. If a large optical path difference is not required in a specific application, this prism can be removed.

激光鉴频装置的鉴频方法步骤如下:The steps of the frequency discrimination method of the laser frequency discrimination device are as follows:

先入射一束参考激光光束到所述的激光鉴频装置,记录四个单元探测器上对应的电压值I15、I16、I17、I18,然后停止入射参考激光光束并再入射一束与参考光频率相差不到一个激光鉴频装置自由光谱范围FSRsys的被检激光光束到所述的激光鉴频装置,再次记录四个单元探测器上对应的电压值I15’、I16’、I17’、I18’,根据下面的余切函数计算参考激光入射时的光程差L,其中c为在真空中的光速,υ为入射光频率:First inject a reference laser beam into the laser frequency discrimination device, record the corresponding voltage values I 15 , I 16 , I 17 , and I 18 on the four unit detectors, then stop injecting the reference laser beam and inject another beam The frequency difference from the reference light is less than one laser frequency discrimination device free spectral range FSR sys The detected laser beam is sent to the laser frequency discrimination device, and the corresponding voltage values I 15 ' and I 16 ' on the four unit detectors are recorded again , I 17 ', I 18 ', calculate the optical path difference L when the reference laser is incident according to the following cotangent function, where c is the speed of light in vacuum, and υ is the frequency of incident light:

求得L后再将L作为已知,将I15’、I16’、I17’、I18’代入上式中I15、I16、I17、I18相应位置,求得被检激光频率υ,从而得到两种激光的频率差;上面公式(1)是在四分之一波片的快轴和沃拉斯顿棱镜光轴的方向平行时适用的求解激光频率的公式,当四分之一波片的快轴和沃拉斯顿棱镜光轴的方向垂直时,使用下面的公式(2)计算激光频率:After obtaining L, take L as known, and substitute I 15 ′, I 16 ′, I 17 ′, and I 18 ′ into the corresponding positions of I 15 , I 16 , I 17 , and I 18 in the above formula to obtain the detected laser frequency υ, thereby obtaining the frequency difference of the two lasers; the above formula (1) is the formula for solving the laser frequency applicable when the fast axis of the quarter wave plate is parallel to the direction of the optical axis of the Wollaston prism. When the fast axis of the one-wave plate is perpendicular to the direction of the optical axis of the Wollaston prism, use the following formula (2) to calculate the laser frequency:

附图说明Description of drawings

图1是本发明装置构成图,图中标号:1-第一反射镜、2-第一特殊棱镜、3-第二特殊棱镜、4-第二反射镜、5-一维压电位移台、6-三角棱镜、7-第三反射镜、8-第三特殊棱镜、9-第四特殊棱镜、10-四分之一波片、11-第一沃拉斯顿偏振器、12-第二沃拉斯顿偏振器、13-第一会聚透镜、14-第二会聚透镜、15-第一单元探测器、16-第二单元探测器、17-第三单元探测器、18-第四单元探测器。Fig. 1 is a diagram of the structure of the device of the present invention, and the labels in the figure are: 1-the first reflector, 2-the first special prism, 3-the second special prism, 4-the second reflector, 5-one-dimensional piezoelectric displacement stage, 6-triangular prism, 7-third mirror, 8-third special prism, 9-fourth special prism, 10-quarter wave plate, 11-first Wollaston polarizer, 12-second Wollaston polarizer, 13-first converging lens, 14-second converging lens, 15-first unit detector, 16-second unit detector, 17-third unit detector, 18-fourth unit detector.

图2是除去一维压电位移台、两个会聚透镜、四个单元探测器的激光鉴频装置三维视图。Fig. 2 is a three-dimensional view of the laser frequency discrimination device without the one-dimensional piezoelectric displacement stage, two converging lenses and four unit detectors.

图3是俯视视角下入射光束在本装置底层入射到第四特殊棱镜9前的部分光路示意图。FIG. 3 is a schematic diagram of part of the optical path of the incident light beam on the bottom layer of the device before it enters the fourth special prism 9 in a top view.

图4是水平视角下光束在第四特殊棱镜9中被“抬升”的光路示意图。FIG. 4 is a schematic diagram of the optical path of the light beam being "lifted" in the fourth special prism 9 at a horizontal viewing angle.

图5是俯视视角下自第四特殊棱镜9出射的光束到达两个沃拉斯顿偏振器11、12前的部分光路示意图。FIG. 5 is a schematic diagram of part of the optical path before the light beam emitted from the fourth special prism 9 reaches the two Wollaston polarizers 11 and 12 in a top view.

图6是三角棱镜6和一维压电位移台5的位置关系三维视图。FIG. 6 is a three-dimensional view of the positional relationship between the triangular prism 6 and the one-dimensional piezoelectric displacement stage 5 .

图7是平视视角下每个沃拉斯顿偏振器及其后端相应的会聚透镜、两个探测器的位置关系示意图。Fig. 7 is a schematic diagram of the positional relationship of each Wollaston polarizer, its corresponding converging lens at the rear end, and two detectors in a flat view.

图8是不考虑各种误差下四个探测器上接收光强随入射光频率变化的关系图。Fig. 8 is a graph showing the relationship between the intensity of received light on the four detectors and the frequency of the incident light without considering various errors.

具体实施方式detailed description

图1为俯视视角下所述的一种基于马赫曾德干涉仪的激光鉴频装置的实例。图2是除会聚透镜13、14,单元探测器15、16、17、18,一维压电位移台5外的所有元件的空间三维视图,清楚地反映了主要元件的相对大小和位置关系。以第一反射镜1所在层为底层,底层还有第二反射镜2、第三反射镜3、三角棱镜6、四分之一波片10,以第一沃拉斯顿偏振器11、第二沃拉斯顿偏振器12、第一会聚透镜13、第二会聚透镜14所在的层为顶层,第一单元探测器15、第二单元探测器16在顶层中较高的位置,第三单元探测器17、第四单元探测器18在顶层中较低的位置。俯视图观察时第一单元探测器15和第三单元探测器17位置重合,第二单元探测器16和第四单元探测器18位置重合;第一特殊棱镜2、第二特殊棱镜3、第三特殊棱镜8、第四特殊棱镜9的高度覆盖底层和顶层,即它们的高度约为反射镜1、2、3,三角棱镜6,四分之一波片10的两倍。Fig. 1 is an example of a laser frequency discrimination device based on a Mach-Zehnder interferometer described in a top view. Fig. 2 is the spatial three-dimensional view of all components except the converging lens 13,14, the unit detectors 15,16,17,18, and the one-dimensional piezoelectric displacement stage 5, which clearly reflects the relative size and positional relationship of the main components. With the layer where the first reflector 1 is located as the bottom layer, the bottom layer also has a second reflector 2, a third reflector 3, a triangular prism 6, and a quarter-wave plate 10, with the first Wollaston polarizer 11, the second The layer where two Wollaston polarizers 12, the first converging lens 13, and the second converging lens 14 are located is the top layer, and the first unit detector 15 and the second unit detector 16 are at a higher position in the top layer, and the third unit The detector 17 and the fourth unit detector 18 are at the lower positions in the top floor. When observed from a top view, the positions of the first unit detector 15 and the third unit detector 17 are coincident, and the positions of the second unit detector 16 and the fourth unit detector 18 are coincident; the first special prism 2, the second special prism 3, the third special prism The heights of the prism 8 and the fourth special prism 9 cover the bottom layer and the top layer, that is, their height is about twice that of the mirrors 1, 2, 3, the triangular prism 6, and the quarter wave plate 10.

一束参考激光或被检激光在底层45°入射第一反射镜1,前进方向由图1中的向上方向改为向右方向,垂直入射第一特殊棱镜2,在第一特殊棱镜2和第二特殊棱镜3中的底层的传输如图3中所示,两棱镜的侧面都经过镀膜处理而使入射光在分界面处被分光(具体被接合面中第一特殊棱镜2上的被镀以半透半反膜的一部分分光),含有参考激光或被检激光50%光能量的光透射接合面和第二特殊棱镜3,另外含有参考激光或被检激光50%光能量的光能量的光反射该接合面并在第一特殊棱镜2的另一个侧面被反射,再透过第一特殊棱镜2和第二特殊棱镜3。此后从第二特殊棱镜3出射的含有最初入射参考激光或被检激光50%能量的两束光在底层平行向右前进,其中一束光直达快轴在系统水平方向(俯视图中的竖直方向)的四分之一波片10,此光束的慢轴方向上的偏振分量得到的相位延迟,经过四分之一波片10到达第四特殊棱镜9;令一束光向右前进被与此处光轴成45°斜置的第二反射镜4反射到三角棱镜6,此三角棱镜6上下底面中直角边对应的侧面被镀全反射膜,斜边镀增透膜,将向上入射的光反射使其向下前进,到达与光前进方向成45°斜置的第三反射镜7,被转折为向右前进,垂直入射并出射长方体形的第三特殊棱镜8,到达第四特殊棱镜9。这里从第一特殊棱镜2和第二特殊棱镜3分界面透射和反射的两束光走过不同的光程都会到达第四特殊棱镜9的下层,两束光在系统水平方向观察时在第四特殊棱镜9中光路如图4所示。第四特殊棱镜的上半部分为一个标准的五角棱镜,下半部分为一个三角棱镜,它们组合在一起形成的第四特殊棱镜9的各侧面的角度使得在底层水平入射的光能够在顶层水平出射。在系统俯视图图1中,自第四特殊棱镜9向左出射的两束光,上面一束直接到达第二特殊棱镜3,下面一束经过第三特殊棱镜8到达第二特殊棱镜3,之后两束光在第一特殊棱镜2和第二特殊棱镜3中的光路如图5所示,二者都在两棱镜的接合面处再次被分光,最后从两棱镜出射了四束光,然而这四束光两两重合,在空间分布上仍然是两束光。这两束光分别再经过第一沃拉斯顿偏振器11和第二沃拉斯顿偏振器12,其中各自的P偏振分量和S偏振分量被第一会聚透镜13、第二会聚透镜14会聚到第一单元探测器15、第三单元探测器17和第二单元探测器16、第四单元探测器18,如图7所示。A beam of reference laser light or the laser light to be inspected is incident on the first reflector 1 at 45° on the bottom layer, the forward direction is changed from the upward direction in Fig. 1 to the right direction, and it is vertically incident on the first special prism 2. The transmission of the bottom layer in the two special prisms 3 is as shown in Figure 3, and the sides of the two prisms are all processed through coating so that the incident light is split at the interface (specifically, the first special prism 2 in the joint surface is coated with A part of the semi-transparent and semi-reflective film for light splitting), the light transmission joint surface containing 50% of the light energy of the reference laser or the tested laser and the second special prism 3, and the light containing 50% of the light energy of the reference laser or the tested laser It is reflected on the joint surface and is reflected on the other side of the first special prism 2, and then passes through the first special prism 2 and the second special prism 3. Thereafter, two beams of light containing 50% of the energy of the first incident reference laser or the detected laser that are emitted from the second special prism 3 advance in parallel to the right at the bottom, and one beam of light reaches the fast axis in the horizontal direction of the system (vertical direction in the top view) ) of the quarter-wave plate 10, the polarization component in the direction of the slow axis of the light beam is obtained The phase retardation, arrives at the 4th special prism 9 through the quarter-wave plate 10; Make a beam of light advance to the right and be reflected to the triangular prism 6 by the second reflector 4 that becomes 45 ° obliquely with the optical axis here, this The sides corresponding to the right-angle sides in the upper and lower bottom surfaces of the triangular prism 6 are coated with a total reflection coating, and the hypotenuse is coated with an anti-reflection coating, so that the upwardly incident light is reflected to make it advance downwards, reaching the third reflection at an angle of 45° to the direction of light advancement. The mirror 7 is turned to advance to the right, is vertically incident and exits the third special prism 8 in the shape of a cuboid, and reaches the fourth special prism 9 . Here, the two beams of light transmitted and reflected from the interface of the first special prism 2 and the second special prism 3 will reach the lower layer of the fourth special prism 9 through different optical paths. The optical path in the special prism 9 is shown in Fig. 4 . The upper part of the fourth special prism is a standard pentagonal prism, and the lower part is a triangular prism. The angles of the sides of the fourth special prism 9 that they form together make the light incident at the bottom level can be at the top level. shoot. In the top view of the system in Fig. 1, of the two beams of light emitted from the fourth special prism 9 to the left, the upper beam directly reaches the second special prism 3, and the lower beam passes through the third special prism 8 to reach the second special prism 3, and then the two beams The optical paths of the beam light in the first special prism 2 and the second special prism 3 are shown in Figure 5, both of which are split again at the junction of the two prisms, and finally four beams of light are emitted from the two prisms, but these four The beams of light overlap in pairs, and the spatial distribution is still two beams of light. These two beams of light pass through the first Wollaston polarizer 11 and the second Wollaston polarizer 12 respectively, wherein the respective P polarization component and S polarization component are converged by the first converging lens 13 and the second converging lens 14 To the first unit detector 15, the third unit detector 17, the second unit detector 16, and the fourth unit detector 18, as shown in FIG. 7 .

至此,一束被检激光或参考激光入射后第一次在第一特殊棱镜2和第二特殊棱镜3的接合面处分光,两束光经历不同路径的传输后在前述两棱镜的接合面处再次相遇(空间上的会和),这两束光走过的光程(包含空气中和棱镜材料中)之差即为系统的光程差L。So far, a beam of tested laser light or reference laser light is split at the joint surface of the first special prism 2 and the second special prism 3 for the first time after it is incident, and the two beams of light are transmitted through different paths at the joint surface of the aforementioned two prisms. When they meet again (spatial meeting), the difference in the optical path (including in the air and in the prism material) traveled by the two beams of light is the optical path difference L of the system.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其特征在于:所述的第一特殊棱镜2是一个直五棱柱,其上下底面是一个五边形,其中两条有光透射或反射的不相邻的边彼此平行,平行的边中较短的一边对应的五棱柱的侧面镀全反射膜,较长的一边中其与第一反射镜1中心和四分之一波片10中心连线相交的位置对应的部分侧面镀半透半反膜,此侧面其余部分镀增透膜,五棱柱的激光入射的侧面镀增透膜。The described laser frequency discrimination device based on Mach-Zehnder interferometer is characterized in that: the first special prism 2 is a straight pentagonal prism, and its upper and lower bases are a pentagon, two of which have light transmission Or the non-adjacent sides of the reflection are parallel to each other, the side of the corresponding pentagonal prism corresponding to the shorter side in the parallel sides is coated with a total reflection film, and the longer side is connected to the center of the first reflector 1 and the quarter wave plate 10. The side of the part corresponding to the intersecting position of the center line is coated with a semi-transparent and semi-reflective film, the rest of the side is coated with an anti-reflective coating, and the side of the pentagonal prism where the laser is incident is coated with an anti-reflective coating.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其特征在于:所述的第二特殊棱镜3是一个直六棱柱,其上下底面是一个六边形,其中与第一特殊棱镜2紧挨的面对应的边和此边的对边是平行关系,与第一特殊棱镜2紧挨的面镀增透膜,其对边镀全反射膜;光入射和出射第二特殊棱镜3的两个侧面镀增透膜,且这两个侧面也是平行关系,这两个平行的面与入射或出射自身的光的方向垂直。The described laser frequency discrimination device based on Mach-Zehnder interferometer is characterized in that: the second special prism 3 is a straight hexagonal prism, and its upper and lower bases are hexagonal, and the first special prism 3 is 2. The side corresponding to the adjacent surface is parallel to the opposite side of this side. The surface adjacent to the first special prism 2 is coated with an anti-reflection coating, and the opposite side is coated with a total reflection coating; light incident and exit the second special prism The two sides of 3 are coated with anti-reflection coating, and these two sides are also in parallel relationship, and these two parallel surfaces are perpendicular to the direction of incident or outgoing light.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其特征在于:所述的第三特殊棱镜8是一个长方体,其与光轴相交的两个侧面镀增透膜,且第三特殊棱镜8只为增加激光鉴频装置的光程差而存在,如果激光鉴频装置不需要很大的光程差,可以去除第三特殊棱镜8。The described laser frequency discrimination device based on Mach-Zehnder interferometer is characterized in that: the third special prism 8 is a cuboid, and its two sides intersecting with the optical axis are plated with an anti-reflection coating, and the third The special prism 8 only exists to increase the optical path difference of the laser frequency discrimination device, if the laser frequency discrimination device does not require a large optical path difference, the third special prism 8 can be removed.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其特征在于:所述的第四特殊棱镜9是一个直五棱柱,此棱柱的上下底面的形状与五角棱镜和三角棱镜拼接的立体的上下底面形状相同,在光入射和出射的侧面镀增透膜,其它侧面镀全反射膜;第四特殊棱镜9可以被一个上下底面中两直角边对应侧面镀全反射膜、斜边对应侧面镀增透膜的三角棱镜替换。The described laser frequency discrimination device based on Mach-Zehnder interferometer is characterized in that: the fourth special prism 9 is a straight pentagonal prism, the shape of the upper and lower bottom surfaces of this prism is spliced with a pentagonal prism and a triangular prism The shape of the three-dimensional upper and lower bottom surfaces is the same, and anti-reflection coatings are coated on the sides of light incident and outgoing, and total reflection coatings are coated on other sides; the fourth special prism 9 can be coated with total reflection coatings on the sides corresponding to two right-angled sides in a bottom surface, and the hypotenuses correspond to Triangular prism replacement with AR-coated sides.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其特征在于:所述的第一沃拉斯顿偏振器11和第二沃拉斯顿偏振器12的光轴都平行或垂直于四分之一波片10的快轴方向,可以用其它偏振分光元件代替这两个偏振器,只要相应改变各自后端的会聚透镜、单元探测器的位置即可。The described laser frequency discrimination device based on Mach-Zehnder interferometer is characterized in that: the optical axes of the first Wollaston polarizer 11 and the second Wollaston polarizer 12 are all parallel or vertical In the direction of the fast axis of the quarter-wave plate 10, the two polarizers can be replaced by other polarization splitting elements, as long as the positions of the converging lens and the unit detector at the respective rear ends are changed correspondingly.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其特征在于:所述的三角棱镜6的三个侧面需镀膜处理,其上下底面中直角边对应的侧面镀全反射膜,斜边对应的侧面镀增透膜。Described a kind of laser frequency discriminating device based on Mach-Zehnder interferometer is characterized in that: the three sides of described triangular prism 6 need to be coated with film processing, and the side corresponding to right-angled side in its upper and lower bottom surfaces is coated with total reflection film, oblique The side corresponding to the edge is coated with anti-reflection coating.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其特征在于:所述的三角棱镜6下方装有用以精确控制和扫描激光鉴频装置光程差的一维压电位移台5,其运动方向与入射到一维压电位移台5的光束方向一致,扫描系统光程差可以用来绘制所述的四个单元探测器上的光强随光程差变化的图谱,控制系统光程差则是为了满足一些特定应用中的调节光程差的需求,比如可以用来寻找系统最高信噪比工作点。The described laser frequency discrimination device based on Mach-Zehnder interferometer is characterized in that: a one-dimensional piezoelectric stage 5 for precisely controlling and scanning the optical path difference of the laser frequency discrimination device is installed under the triangular prism 6 , its motion direction is consistent with the light beam direction incident to the one-dimensional piezoelectric displacement stage 5, and the optical path difference of the scanning system can be used to draw the spectrum of the light intensity on the four unit detectors changing with the optical path difference, and the control system The optical path difference is to meet the requirements of adjusting the optical path difference in some specific applications, for example, it can be used to find the operating point with the highest signal-to-noise ratio of the system.

所述的一种基于马赫曾德干涉仪的激光鉴频装置可以使用其他偏振分束器件代替沃拉斯顿偏振器来将入射其中的光的水平偏振光分量和垂直偏振光分量分开探测。The laser frequency discrimination device based on the Mach-Zehnder interferometer can use other polarization beam splitters instead of the Wollaston polarizer to separately detect the horizontally polarized light component and the vertically polarized light component of the light incident therein.

所述的一种基于马赫曾德干涉仪的激光鉴频装置,其中的第三特殊棱镜8仅为增加激光鉴频装置光程差而存在,如特定应用中不需要较大光程差,可以去除此棱镜。In the described laser frequency discrimination device based on Mach-Zehnder interferometer, the third special prism 8 exists only to increase the optical path difference of the laser frequency discrimination device. Remove this prism.

在图5中由右侧入射第一特殊棱镜2和第二特殊棱镜3的接合面的光由于经过两棱镜之间很薄的空气间隙,其中的反射光实际是被第一特殊棱镜的一部分镀了半透半反介质膜的面反射,这是一个外反射,反射光有π的相位损失,再加上四分之一波片10给波片慢轴方向的光分量引入相位损失,这两种附加的相位延迟最终使得四个单元探测器上探测到的光强信号可以用下式表示:In Fig. 5, the light incident on the bonding surface of the first special prism 2 and the second special prism 3 from the right is due to the thin air gap between the two prisms, and the reflected light is actually coated by a part of the first special prism. The surface reflection of the semi-transparent and semi-reflective medium film is an external reflection, and the reflected light has a phase loss of π, and the quarter-wave plate 10 introduces the light component in the direction of the slow axis of the wave plate Phase loss, these two additional phase delays finally make the light intensity signals detected on the four unit detectors can be expressed by the following formula:

其中I0为入射的光束光强,λ为入射光波长,L为系统的光程差,c为真空中的光速。这四个强度信号随Δ变化的示意图如图8(四个信号的顺序与四分之一波片的快轴方向和沃拉斯顿偏振器光轴方向有关,这里两种轴互相平行)所示。图中周期性的强度信号关于频率的周期为这也是系统的自由光谱范围FSRsys。先后两次入射的频率差相差不到一个FSRsys的不同频率的光经过本装置探测到的四个强度信号是不同的,根据强度与频率的对应关系,可以反演出两次入射的光的频率差,而根据频率差可以反演出激光雷达探测的风速、硬目标的移动速度等。反演方法可以用查找表法,也可以用已有的一些文献中提出的数学方法,即令:where I 0 is the incident beam intensity, λ is the wavelength of incident light, L is the optical path difference of the system, and c is the speed of light in vacuum. The schematic diagram of these four intensity signals changing with Δ is shown in Figure 8 (the sequence of the four signals is related to the fast axis direction of the quarter-wave plate and the optical axis direction of the Wollaston polarizer, where the two axes are parallel to each other) Show. The period of the periodic intensity signal in the figure with respect to the frequency is This is also the free spectral range FSR sys of the system. The difference between the two incident frequencies is less than one FSR sys . The four intensity signals detected by this device are different. According to the corresponding relationship between intensity and frequency, the frequency of the two incident lights can be retrieved. According to the frequency difference, the wind speed detected by the lidar and the moving speed of the hard target can be retrieved. The inversion method can use the look-up table method, or the mathematical method proposed in some existing literature, that is:

则有then there is

从而可以得到入射光波长(频率)与四个探测器检测到的信号的一一映射关系,将参考激光对应的四个通道上探测器探测到的信号(电信号代表光强信号)代入(9)式得到光程差L,再将被检激光对应的四个通道上探测器探测到的信号和计算的L代入(9)式就可以得到被检激光的波长(频率)。上面公式(9)和公式(1)一致,是在四分之一波片的快轴和沃拉斯顿棱镜光轴的方向平行时适用的求解激光频率的公式,当四分之一波片的快轴和沃拉斯顿棱镜光轴的方向垂直时,使用公式(2)计算激光频率。Thus, the one-to-one mapping relationship between the incident light wavelength (frequency) and the signals detected by the four detectors can be obtained, and the signals detected by the detectors on the four channels corresponding to the reference laser (the electrical signal represents the light intensity signal) are substituted into (9 ) formula to obtain the optical path difference L, and then substitute the signals detected by the detectors on the four channels corresponding to the tested laser light and the calculated L into the formula (9) to obtain the wavelength (frequency) of the tested laser light. The above formula (9) is consistent with formula (1), and it is the formula for solving the laser frequency when the fast axis of the quarter wave plate is parallel to the direction of the optical axis of the Wollaston prism. When the quarter wave plate When the fast axis of the prism is perpendicular to the direction of the optical axis of the Wollaston prism, use formula (2) to calculate the laser frequency.

实际中任何激光都有展宽,这时探测器探测到的信号强度是入射光光谱展宽和Ii,i=15,16,17,18的卷积,这会影响本系统的探测精度,光谱展宽越小,探测精度越高。In practice, any laser has broadening. At this time, the signal intensity detected by the detector is the convolution of the incident light spectrum broadening and I i , i=15, 16, 17, 18, which will affect the detection accuracy of the system, and the spectral broadening The smaller the value, the higher the detection accuracy.

对于风速探测,本装置探测器探测到的信号是入射光的光谱与各个通道理论光强透过率Ii/I0,i=15,16,17,18的卷积。先后两次入射光为激光器未出射到大气中的激光和望远镜接收的大气回波,而入射光如果是大气散射回波,则其经过瑞利散射和米散射的展宽,这会影响探测到的光强的对比度(即I15、I16、I17、I18相对强度),由于瑞利散射的展宽远比米散射的展宽大,它和各通道光强透过率卷积后为一常数,给各个通道信号带来一个相同的直流偏置,这时各通道探测器得到的光强信号的相对强度仅与米散射相关,即此时本装置检测激光频移时仅利用了大气米散射光信号。For wind speed detection, the signal detected by the detector of the device is the convolution of the spectrum of the incident light and the theoretical light intensity transmittance I i /I 0 of each channel, i=15, 16, 17, 18. The incident light twice successively is the laser light not emitted into the atmosphere and the atmospheric echo received by the telescope, and if the incident light is the atmospheric scattering echo, it will be broadened by Rayleigh scattering and Meter scattering, which will affect the detected The contrast of light intensity (ie, the relative intensity of I 15 , I 16 , I 17 , and I 18 ), because the spread of Rayleigh scattering is much larger than that of meter scattering, it is a constant after convolution with the light intensity transmittance of each channel , to bring the same DC bias to each channel signal, at this time the relative intensity of the light intensity signal obtained by each channel detector is only related to the meter scattering, that is, the device only uses the atmospheric meter scattering when detecting the laser frequency shift light signal.

三角棱镜6下方放置一维压电位移台如图6所示,此压电位移台的振动方向与三角棱镜入射光方向相同,其四角用螺丝固定,螺孔为“U”形,这允许使用者粗调系统的光程差。压电位移台底部有控制电缆,连接其控制电路。压电位移台的引入能够使本装置具备光程差控制和扫描的能力,这能够更容易地得到四个单元探测器上的强度谱,反演出频率差,也有助于找到系统的最高信噪比工作点。A one-dimensional piezoelectric displacement stage is placed under the triangular prism 6 as shown in Figure 6. The vibration direction of the piezoelectric displacement stage is the same as the incident light direction of the triangular prism, and its four corners are fixed with screws. The screw holes are "U" shaped, which allows Or roughly adjust the optical path difference of the system. There is a control cable at the bottom of the piezoelectric stage, which is connected to its control circuit. The introduction of the piezoelectric displacement stage can make this device have the ability of optical path difference control and scanning, which can more easily obtain the intensity spectrum on the four unit detectors, invert the frequency difference, and also help to find the highest signal-to-noise of the system than work.

在多纵模激光入射条件下,只要调节压电位移台的位置从而调节系统光程差L,使本装置自由光谱范围FSRsys和入射的多纵模激光的自由光谱范围FSRlaser相同,就能够让所有纵模光的如图8中的强度谱重合(而相邻纵模强度谱“级次”相差1),这样各纵模的合强度谱仍然和单纵模的强度谱谱线形态相同,不影响我们反演频率差。Under the condition of multi-longitudinal-mode laser incidence, as long as the position of the piezoelectric displacement stage is adjusted to adjust the optical path difference L of the system, the free spectral range FSR sys of the device is the same as the free spectral range FSR laser of the incident multi-longitudinal-mode laser. Let the intensity spectra of all longitudinal modes overlap as shown in Figure 8 (and the "order" difference of adjacent longitudinal mode intensity spectra is 1), so that the combined intensity spectrum of each longitudinal mode is still the same as the intensity spectrum line shape of a single longitudinal mode , does not affect our inversion frequency difference.

Claims (8)

1. a kind of laser frequency discrimination device based on Mach-Zehnder interferometer, including the first speculum (1), the second speculum (4), the Three speculums (7), the first special prism (2), the second special prism (3), the 3rd special prism (8), the 4th special prism (9), Triangular prism (6), one-dimensional piezoelectric position moving stage (5), quarter-wave plate (10), the first Wollaston polarizer (11), second is fertile Lars polarizer (12), the first convergent lens (13), the second convergent lens (14), first module detector (15), second is single First detector (16), third unit detector (17) and the 4th single-element detector (18);It is characterized in that:
Described the first speculum (1), the second speculum (4), the 3rd speculum (7), triangular prism (6), quarter-wave plate (10) height is no more than the first special prism (2), the second special prism (3), the 3rd special prism (8), the 4th special prism (9) half of minimum altitude in;
One-dimensional piezoelectric position to accurate control and scanning laser frequency discrimination device optical path difference is housed below described triangular prism (6) Moving stage (5);
Parallel incident reference laser or tested laser beam pass through to be reflected with the first speculum (1) of incident light axis placement at 45 ° Vertical incidence enters the first special prism (2) afterwards, in the adjacent second special prism (3) of the first special prism (2) and by portion Divide and be plated with the face of semi-transparent semi-reflecting film, the light beam containing reference laser or the light energy of tested laser 50% is through four points through this face One of wave plate (10) and through quarter-wave plate (10), and the light containing reference laser or the light energy of tested laser 50% in addition It is reflected back that the first special prism (2) is internal herein, and in parallel another face in the face with being partly plated with semi-transparent semi-reflecting film again Secondary to be reflected, reflected light passes through the first special prism (2) and the second special prism (3) again, and arrival is put with the angle at 45 ° of optical axis herein The second speculum (4) for putting simultaneously is reflected to triangular prism (6), is emitted in triangular prism (6) after experience internal reflection twice With the 3rd speculum (7) of the placement at 45 ° of optical axis herein, met with by the light that the 3rd speculum (7) reflects and to pass through the 3rd special Prism (8) reaches the 4th special prism (9), at this moment contains 50% reference laser or tested from quarter-wave plate (10) outgoing The light beam of laser energy and the same light beam containing 50% reference laser or tested laser energy from the 3rd special prism outgoing Be parallel to each other, they impinge perpendicularly on the 4th special prism (9), by after the 4th special prism (9) lifting certain altitude along incidence Optical axis is emitted, and exit direction is with incident direction on the contrary, the two-beam position of outgoing is higher than quarter-wave plate (10), the first reflection Mirror (1), the second speculum (4) and the 3rd speculum (7) maximum height and less than the 3rd special prism (8), the second special edge Mirror (3), the maximum height of the first special prism (2), thus two-beam is wherein a branch of after the 4th special prism (9) outgoing will be logical The top for crossing quarter-wave plate (10) directly reaches the second special prism (3), and another beam will undergo the 3rd special prism (8) and arrive Up to the second special prism (3);The light beam that the second special prism (3) is incided above from quarter-wave plate (10) is special through second The quilt that different prism (3) reaches the first special prism (2) afterwards is divided again after partly having plated the face of semi-transparent semi-reflecting film, contains reference The light of the energy of laser or tested laser 25% is through this face and undergoes the first special prism (2) to reach the second Wollaston again inclined Shake device (12), and it is different flat containing different polarization component to be divided into two beam-emergence directions by the second Wollaston polarizer (12) Row light, obliquely, two directional lights are focused onto on its focal plane a branch of beam another obliquely by the second convergent lens (14) , the hot spot energy on focal plane is received with the second unit detector (16) of consistency from top to bottom and the 4th single-element detector (18) at 2 points Amount;It is coated with the part of the first special prism (2) on the face of semi-transparent semi-reflecting film, the energy containing reference light or tested light 25% After light reflects from the face, the second special prism (3) is undergone, by its another parallel with the face that the first special prism (2) is adjacent Face is reflected and undergoes the second special prism (3) again, before being emitted to the first Wollaston polarizer (11), by the first Wollaston Polarizer (11) is divided into the directional light containing different polarization component that two beams are tiltedly emitted, and this two-beam is by the first convergent lens (13) Converge on the focal plane up to the first convergent lens (13), hot spot fall consistency from top to bottom place first module detector (15) and On third unit detector (17);The light beam for undergoing the 3rd the second special prism (3) of special prism (8) arrival is special through second Prism (3), once arrival first is special for reflection at the another side parallel with two special prism composition surfaces of the first special prism (2) The part of different prism (2) is coated with the face of semi-transparent semi-reflecting film, and reference laser or the light energy of tested laser 25% are contained on this face Light reach the one side of the second special prism (3) parallel with two prisms composition surface through this face and reflected, the reflected beams go out Penetrate the second special prism (3) and reach the first Wollaston polarizer (11), it is different containing difference that it can also be divided into two beam directions The oblique outgoing collimated light beam of polarized light component and the first module detector that its focal plane is focused on by the first convergent lens (13) (15) and on third unit detector (17);It is coated with to also have at the face of semi-transparent semi-reflecting film in the part of the first special prism (2) and contains There are reference laser or the light of the light energy of tested laser 25% to be reflected and be emitted the first special prism (2) and reach the second Wollaston Polarizer (12), the different oblique outgoing containing different polarization component in two beam directions are divided into by the second Wollaston polarizer (12) Directional light, this two beams directional light arrive separately at the second unit detector (16) on its focal plane through the second convergent lens (14) again On the 4th single-element detector (18);
The optical path difference L of laser frequency discrimination device be into triangular prism (6) and transmit twice the light beam of the 3rd special prism (8) with By the optical path difference between the light beam of quarter-wave plate (10) once, the former light path is the first special prism (2) and second The light beam containing 50% incident light energy reflected at special prism (3) composition surface undergoes the first special prism (2), second successively It is special prism (3), the second speculum (4), triangular prism (6), the 3rd speculum (7), the 3rd special prism (8), the 4th special Arrived again at after prism (9), the 3rd special prism (8), the second special prism (3), the first special prism (2) at foregoing composition surface Light path, the latter's light path at foregoing interface transmit a branch of directional light containing 50% incident light energy, undergo four points One of wave plate (10), the 4th special prism (9), the second special prism (3) arrive again at light path at foregoing composition surface, above-mentioned institute The refractive index that the light path for having in the prism will be multiplied by prism material is included in total optical path;
During single longitudinal mode laser frequency discrimination, launch the reference single longitudinal mode laser of a branch of given frequency to described laser frequency discrimination device first Beam, the magnitude of voltage as corresponding to four single-element detectors obtain four light intensity;Then it is a branch of to described laser frequency discrimination device transmitting With less than one laser frequency discrimination device Free Spectral Range of reference light frequency phase-differenceTested single longitudinal mode laser beam, Wherein c is the light velocity in vacuum, the magnitude of voltage as corresponding to four single-element detectors four light intensity of acquisition;In four reference light light intensity In detection process, scanning refers to light frequency, and this four reference light light intensity magnitudes of voltage can form four and be separated by the four of pi/2 phase 8 magnitudes of voltage are in four sine curves corresponding to bar sine curve, the reference light obtained according to four detectors and tested light Relative position relation, the light frequency that can be extrapolated between the two is poor, and then obtains the frequency of tested light;Multilongitudianl-mode laser frequency discrimination When, when incidence reference laser and tested laser be multilongitudianl-mode laser when, if the Free Spectral Range of this multilongitudianl-mode laser FSRlaserWith the FSR of this laser frequency discrimination devicesysIt is identical, then the frequency displacement of multilongitudianl-mode laser, frequency discrimination still can be detected with the present apparatus Method is constant, if the FSR of the Free Spectral Range of this multilongitudianl-mode laser and this laser frequency discrimination devicesysDifference, then it can pass through tune Piezoelectric position moving stage is saved to change the optical path difference L of laser frequency discrimination device, so that FSRsysBecome and FSRlaserIt is identical, so still This laser frequency discrimination device frequency discrimination can be used.
A kind of 2. laser frequency discrimination device based on Mach-Zehnder interferometer according to claim 1, it is characterised in that:It is described The first special prism (2) be a straight pentagonal prism, bottom surface is a pentagon thereon, and two of which has light transmission or reflection Non-conterminous side it is parallel to each other, the side plating total reflection film of pentagonal prism corresponding to shorter one side, longer in parallel side The surface for the position correspondence that its in one side intersects with the first speculum (1) center and quarter-wave plate (10) line of centres Semi-transparent semi-reflecting film is plated, this side remainder plating anti-reflection film, the side plating anti-reflection film of the laser light incident of pentagonal prism.
A kind of 3. laser frequency discrimination device based on Mach-Zehnder interferometer according to claim 1, it is characterised in that:It is described The second special prism (3) be straight six prism, bottom surface is a hexagon thereon, wherein with the first special prism (2) Opposite side corresponding to adjacent face while with this is parallel relation, plates anti-reflection film with the adjacent face of the first special prism (2), its is right Side plating total reflection film corresponding to side;Light is incident and anti-reflection film, and the two are plated in two sides of the second special prism (3) of outgoing Side is also parallel relation, the two parallel faces with it is incident or be emitted the light of itself direction it is vertical.
A kind of 4. laser frequency discrimination device based on Mach-Zehnder interferometer according to claim 1, it is characterised in that:It is described The 3rd special prism (8) be a cuboid, its two side intersected with optical axis plating anti-reflection film, when laser frequency discrimination device not When needing very big optical path difference, the 3rd special prism (8) can be removed.
A kind of 5. laser frequency discrimination device based on Mach-Zehnder interferometer according to claim 1, it is characterised in that:It is described The 4th special prism (9) be a straight pentagonal prism, shape and the pentagonal prism and triangular prism of the upper bottom surface of this prism are spelled The three-dimensional bottom shape up and down connect is identical, and anti-reflection film, other side plating total reflection films are plated in the side that light is incident and is emitted;Or The special prism (9) of person the 4th is that two right-angle side corresponding side surface plating total reflection films, the plating of hypotenuse corresponding side surface increase in a upper bottom surface The triangular prism of permeable membrane.
A kind of 6. laser frequency discrimination device based on Mach-Zehnder interferometer according to claim 1, it is characterised in that:It is described The first Wollaston polarizer (11) and the second Wollaston polarizer (12) can be substituted with polarization beam splitter.
A kind of 7. laser frequency discrimination device based on Mach-Zehnder interferometer according to claim 1, it is characterised in that:It is described Triangular prism (6) two right-angle sides corresponding to side plating total reflection film, corresponding to hypotenuse side plate anti-reflection film.
A kind of a kind of 8. laser frequency mirror of laser frequency discrimination device based on Mach-Zehnder interferometer based on described in claim 1 Frequency method, it is characterised in that method and step is as follows:First incident a branch of reference laser light beam records to described laser frequency discrimination device Corresponding magnitude of voltage I on four single-element detectors15、I16、I17、I18, then stop incident reference laser beam and re-shoot a branch of With less than one laser frequency discrimination device Free Spectral Range FSR of reference light frequency phase-differencesysTested laser beam swash to described Light frequency discrimination device, corresponding magnitude of voltage I on four single-element detectors is recorded again15’、I16’、I17’、I18', more than following Optical path difference L when function calculates reference laser incidence is cut, wherein c is the light velocity in a vacuum, and υ is incident light frequency:
Try to achieve after L again using L as, it is known that by I15’、I16’、I17’、I18' substitute into I in above formula15、I16、I17、I18Relevant position, ask Laser frequency υ must be detected, so as to obtain the difference on the frequency of two kinds of laser;Above formula (1) be quarter-wave plate fast axle and When the direction of Wollaston prism optical axis is parallel be applicable solutions laser frequency formula, when quarter-wave plate fast axle and irrigate When the direction of Lars prism optical axis is vertical, laser frequency is calculated using following formula (2):
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