CN108180824A - The orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement apparatus and method - Google Patents
The orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement apparatus and method Download PDFInfo
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- CN108180824A CN108180824A CN201810015493.4A CN201810015493A CN108180824A CN 108180824 A CN108180824 A CN 108180824A CN 201810015493 A CN201810015493 A CN 201810015493A CN 108180824 A CN108180824 A CN 108180824A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The present invention relates to a kind of orthogonal transmission point diffraction-types of dual wavelength carrier frequency to be total to railway digital holographic measurement apparatus and method.The dual wavelength incident light of a branch of polarized orthogonal is merged into, object light and reference light are formed after collimating and beam expanding system, object under test, the first lens, the first unpolarized Amici prism, hole array, the second lens and the second unpolarized Amici prism；Object light irradiates on the first plane mirror and is reflected onto the second unpolarized Amici prism, reference light is again broken down into two-beam by the second polarization splitting prism, the second plane mirror and third plane mirror are irradiated respectively and is reflected, and are again passed by the second polarization splitting prism and are irradiated the second unpolarized Amici prism；Converge to the object light and reference light of the second unpolarized Amici prism, contain the multicarrier orthogonal hologram of two wavelength informations by the second lens, hole array, the first unpolarized Amici prism, third lens forming successively again, computer is collected by imaging sensor and calculates object under test phase.
Description
Technical field
The invention belongs to digital hologram fields of measurement, more particularly to a kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to road
Digital hologram measuring device and method.
Background technology
Digital hologram detection technique is due to particular advantages such as non-contact, the whole audience is quantitative, three-dimensional imagings, being used as extremely
Important test analysis means are widely used in the fields of measurement such as biomedicine, micro-nano device, optics micro Process.But due to complete
Cease the sin cos functions distribution property of figure striped, it is mostly wrapped phase that traditional Single wavelength digital hologram, which obtains phase, need it is complicated,
Time-consuming algorithm realizes Phase- un- wrapping.Dual wavelength digital hologram is more than sample thickness for one using two beams illumination photosynthesis
Effective wavelength, can obtain larger measurement range, and need not be complicated Phase- un- wrapping operation, thus closed extensively in recent years
Note.
(Wang Yujia, Jiang Zhuqing, Gao Zhirui, Cai Wenyuan, 5 river great waves the dual wavelengths number such as Jiang Zhuqing of Beijing University of Technology
Holographic phase unpacking technique study Acta Opticas .2012,38 (10):78-83) recorded respectively using two different wavelength
Digital hologram, numerical reconstruction obtains the corresponding wrapped phase figure of each wavelength respectively, then the phase difference both acquired obtains
The phase diagram of length, and then continuous phase distribution is obtained to eliminate phase package.But since it is desired that two waves are recorded respectively
Long hologram, real-time are poor.Then, open patent of invention " the dual wavelength palarization multiplexing digital holographic imaging systems such as Jiang Zhuqing
And method ", two different wave length light beams are adjusted to have mutually orthogonal polarization state and by two by Publication No. CN104834201A
After a light beam closes beam, it is incident on the off-axis dual wavelength digital hologram palarization multiplexing recording beam path Zhong Gong roads transmission being configured, and profit
The object light and reference light of two pairs of different wave lengths are isolated with polarizer screening, while records two width digital holograms, and then pass through
Dual wavelength forms " synthetic wavelength ", realizes to sample without package observation in real time, but the system structure is complicated, needs grade
Join two Mach Zehnder interferometers, and poor anti jamming capability.
Xi'an ray machine Yao Baoli etc. (J.Min, B.Yao, P.Gao, R.Guo, B.Ma, J.Zheng, M.Lei,
S.Yan,D.Dan,T.Duan,Y.Yang,and T.Ye.Dual-wavelength slightly off-axis digital
holographic microscopy.Applied Optics.2012,51(2):191-196) propose that a kind of dual wavelength is gently off-axis
Digital Holography finely tunes the reference light of two beam cross-polarizations to change the spatial carrier of its interference fringe on hologram respectively
Frequency and direction, it is colored from the orthogonal carrier frequency that once records and using the wavelength selectivity of Bayer colored CCD optical filters
The hologram of two width single wavelengths is isolated in hologram, and then completes object under test and observes in real time.But the device needs to use
Multiple polarizers, simultaneously as using separation light channel structure, antijamming capability is up for further improving.
(Mohammad Reza Jafarfard, Sucbei Moon, the Behnam Tayebi, and such as South Korea D.Y.Kim
Dug Young Kim.Dual-wavelength diffraction phase microscopy for simultaneous
measurement of refractive index and thickness.Optics Letters.2014,39(10):
It 2908-2911) proposes that a kind of dual wavelength is total to road off axis point diffraction holographic technique, grating is placed in the plane of incidence of 4f optical systems,
Dual wavelength Diffraction of light wave to be measured is divided into multiple diffraction times, and in frequency plane placement space pinhole filter array, selection zero
Grade light, which is used as, to be referred to light and chooses+1 grade and+2 grades respectively as object light, and then contain different carrier waves by single exposure acquisition
Color hologram, the technology is because use line structure strong antijamming capability altogether, but the structure not only needs grating, but also luminous energy damages
Losing greatly, need to accurately adjust pinhole filter array center spacing and screen periods and the matching relationship of the focal length of lens, so that object
Light and reference luminous energy are effectively by pinhole filter array, so as to cause device adjustment difficult；Meanwhile because using different diffraction
Level, each wavelength hologram contrast of acquisition differ greatly, and complicated algorithm is needed to be normalized.
The present inventor is also it is proposed that a kind of " dual wavelength is total to the orthogonal carrier frequency digital holographic detection device in road and detection method (Shen
Please number：201510677008.6) ", on the basis of reflective carrier wave point diffraction is total to line structure, dual wavelength lighting engineering and two is introduced
To light splitting technology, the identical orthogonal hologram of dual wavelength carrier frequency of a width contrast is acquired, and pass through frequency domain point by single exposure
From phase recovery to be measured is completed, ensureing antijamming capability and detected simultaneously in real time without package, method is simple and practicable, does not need to light
The special opticals element such as grid, but this method needs corner reflector and dichroscope, simultaneously as using reflective pin hole, not only makes
Make difficulty, and light needs to pass twice through pin hole, optical energy loss is big.
Invention content
It is an object of the invention to be directed to the shortcoming of above-mentioned technology, a kind of simple for structure, optical energy loss is provided
A kind of few orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement apparatus and method.
The object of the present invention is achieved like this：
Mode one：A kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement device, is including wavelength
λaLight source and wavelength be λbLight source, which further includes the first linear polarizer, the second linear polarizer, the first polarization spectro rib
Mirror, collimating and beam expanding system, the first lens, the first unpolarized Amici prism, hole array, the second lens, the second unpolarized light splitting rib
Mirror, the first plane mirror, the second polarization splitting prism, the second plane mirror, third plane mirror, third lens, figure
As sensor and computer, wherein λa>λb, the linear polarizer of the first linear polarizer and the second linear polarizer for polarized orthogonal；Wavelength
For λaLight source and wavelength be λbThe light beam that emits respectively of light source distinguish respectively by the first linear polarizer and the second linear polarizer
Modulation forms the two light beams of polarized orthogonal, then merges into light beam through the first polarization splitting prism, and collimated beam-expanding system is accurate
After direct expansion beam, successively by object under test, the first lens, the first unpolarized Amici prism, hole array, the second lens, second non-
Object light and reference light are formed after polarization splitting prism；Object light irradiates on the first plane mirror and is reflected onto second unpolarized point
Light prism, reference light are again broken down into two-beam by the second polarization splitting prism, irradiate the second plane mirror and third respectively
Plane mirror is simultaneously reflected, and is again passed by the second polarization splitting prism and is irradiated the second unpolarized Amici prism；Converge to second
The object light and reference light of unpolarized Amici prism, then successively after the second lens, hole array and the first unpolarized Amici prism,
After the first unpolarized Amici prism reflection, received using third lens by the light receiving surface of imaging sensor, image sensing
The image signal output end connection computer of device；The object under test is located on the front focal plane of the first lens；First lens,
Two lens and third lens form conjugation 4f systems；Macropore A containing orthogonal separation, pin hole B in hole arrayaAnd Bb, and macropore A
Center is located on optical axis, pin hole BaSize and wavelength XaIn the Airy diameter d that frequency spectrum plane generatesaUnanimously, pin hole BbGreatly
Small and wavelength XbIn the Airy diameter d that frequency spectrum plane generatesbUnanimously, wherein da<1.22λaf2/D、db<1.22λbf2/D、
f2Focal length, D for the second lens are the clear aperature of the second lens；First plane mirror, the second plane mirror and third
Plane mirror is located on the conjugation back focal plane of the second lens；And first plane mirror in the second unpolarized Amici prism
On emitting light path, the second polarization splitting prism, the second plane mirror and third plane mirror are in the second unpolarized light splitting rib
On the reflected light path of mirror or the first plane mirror is on the reflected light path of the second unpolarized Amici prism, the second polarization point
Light prism, the second plane mirror and third plane mirror are on the emitting light path of the second unpolarized Amici prism；And second
For plane mirror on the emitting light path of the second polarization splitting prism, third plane mirror is anti-the second polarization splitting prism
It penetrates in light path；Imaging sensor is located on the back focal plane of third lens.
Mode one further includes：
1. the first plane mirror is disposed vertically with optical axis, the second plane mirror is in the horizontal direction with optical axis into θaAngle lapping
It tiltedly places, θaAngle does not include 90 °, and third plane mirror is in vertical direction and optical axis into θbOverturning angle is placed, θbAngle does not include
90°。
2. the pin hole B in hole arrayaIt is matched after being reflected with third plane mirror and by the hot spot of the second lens focus, needle
Hole BbIt is matched after being reflected with the second plane mirror and by the hot spot of the second lens focus.
The orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency based on one invention device of mode is total to railway digital holographic measurement side
Method realizes that process is as follows：
Entire optical system is adjusted, opens light source, it is λ to make two light sources difference launch wavelengthaAnd λbLight beam, by polarizing just
The polarization piece of friendship is modulated respectively, forms the two light beams of 0 ° and 90 ° polarized orthogonal, then is converged through the first polarization splitting prism
Into light beam, then focus on light beam is formed after collimating and beam expanding system, object under test and the first lens successively, then successively by the
Two planar light beams point are formed after one unpolarized Amici prism, the macropore A of hole array, the second lens and the second unpolarized Amici prism
It Zuo Wei not object light and reference light；Object light is irradiated on the first plane mirror and is reflected, then passes through the second unpolarized light splitting successively
The first unpolarized Amici prism is irradiated after the macropore A of prism, the second lens and hole array；Reference light passes through the second polarization spectro rib
Mirror is again broken down into two-beam, irradiates the second plane mirror and third plane mirror respectively and is inclined by modulation reflection, then according to
It is secondary after the second polarization splitting prism, the second unpolarized Amici prism and the second lens, then the pin hole through arrays of vias respectively
BaAnd BbThe first unpolarized Amici prism is irradiated afterwards；Converge to the first unpolarized Amici prism and through its reflection object light and reference
Light after third lens, interference is generated in image sensor plane and forms the orthogonal hologram in direction containing carrier frequency, is used in combination
Imaging sensor acquisition hologram is uploaded in computer；It is three-dimensional that object under test is completed using dual wavelength carrier phase recovery algorithm
Phase recovery.
Mode two：A kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement device, is including wavelength
λaLight source and wavelength be λbLight source, which further includes the first linear polarizer, the second linear polarizer, the first polarization spectro rib
Mirror, microcobjective, correction object lens, the first lens, the first unpolarized Amici prism, hole array, the second lens, second unpolarized point
Light prism, the first plane mirror, the second polarization splitting prism, the second plane mirror, third plane mirror, third are saturating
Mirror, imaging sensor and computer, wherein λa>λb, the linear polarization of the first linear polarizer and the second linear polarizer for polarized orthogonal
Piece；Wavelength is λaLight source and wavelength be λbThe light beam that emits respectively of light source it is inclined by the first linear polarizer and the second line respectively
The piece (4) that shakes is modulated respectively, forms the two light beams of polarized orthogonal, then merge into light beam through the first polarization splitting prism, successively
By object under test, microcobjective, correction object lens, the first lens, the first unpolarized Amici prism, hole array, the second lens, the
Object light and reference light are formed after two unpolarized Amici prisms；Object light irradiate the first plane mirror on and be reflected onto second it is non-partially
Shake Amici prism, and reference light is again broken down into two-beam by the second polarization splitting prism, irradiate respectively the second plane mirror and
Third plane mirror is simultaneously reflected, and is again passed by the second polarization splitting prism and is irradiated the second unpolarized Amici prism；It converges to
The object light and reference light of second unpolarized Amici prism, then pass through the second lens, hole array and the first unpolarized light splitting rib successively
After mirror, after the first unpolarized Amici prism reflection, received using third lens by the light receiving surface of imaging sensor, image
The image signal output end connection computer of sensor；The object under test is located on the front focal plane of the first lens；First thoroughly
Mirror, the second lens and third lens form conjugation 4f systems；Macropore A containing orthogonal separation, pin hole B in hole arrayaAnd Bb, and
Macropore A centers are located on optical axis, pin hole BaSize and wavelength XaIn the Airy diameter d that frequency spectrum plane generatesaUnanimously, needle
Hole BbSize and wavelength XbIn the Airy diameter d that frequency spectrum plane generatesbUnanimously, wherein da<1.22λaf2/D、db<1.22λbf2/D、f2Focal length, D for the second lens are the clear aperature of the second lens；First plane mirror, the second plane mirror and
Third plane mirror is located on the conjugation back focal plane of the second lens, and the first plane mirror is in the second unpolarized light splitting rib
On the emitting light path of mirror, the second polarization splitting prism, the second plane mirror and third plane mirror are at second unpolarized point
On the reflected light path of light prism or the first plane mirror is on the reflected light path of the second unpolarized Amici prism, and second partially
Amici prism, the second plane mirror and third plane mirror shake on the emitting light path of the second unpolarized Amici prism, and
Second plane mirror is on the emitting light path of the second polarization splitting prism, and third plane mirror is in the second polarization splitting prism
Reflected light path on；Imaging sensor is located on the back focal plane of third lens, and microcobjective is micro- with correction object lens composition
System image plane is matched with the front focal plane of the first lens.
Mode two further includes：
1. the first plane mirror is disposed vertically with optical axis, the second plane mirror is in the horizontal direction with optical axis into θaAngle lapping
It tiltedly places, θaAngle does not include 90 °, and third plane mirror is in vertical direction and optical axis into θbOverturning angle is placed, θbAngle does not include
90°。
2. the pin hole B in hole arrayaIt is matched after being reflected with third plane mirror and by the hot spot of the second lens focus, needle
Hole BbIt is matched after being reflected with the second plane mirror and by the hot spot of the second lens focus.
The orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency based on two invention device of mode is total to railway digital holographic measurement side
Method realizes that process is as follows：
Entire optical system is adjusted, opens light source, it is λ to make two light sources difference launch wavelengthaAnd λbLight beam, by polarizing just
The polarization piece of friendship is modulated respectively, forms the two light beams of 0 ° and 90 ° polarized orthogonal, then is converged through the first polarization splitting prism
Into light beam, then successively by object under test, microcobjective, correction object lens, form focus on light beam, then pass through successively after the first lens
Two planar lights are formed after crossing the first unpolarized Amici prism, the macropore A of hole array, the second lens and the second unpolarized Amici prism
Beam is respectively as object light and reference light；Object light is irradiated on the first plane mirror and is reflected, then unpolarized by second successively
The first unpolarized Amici prism is irradiated after the macropore A of Amici prism, the second lens and hole array；Reference light is by the second polarization point
Light prism is again broken down into two-beam, irradiates the second plane mirror and third plane mirror respectively and is inclined by modulation reflection,
Again successively after the second polarization splitting prism, the second unpolarized Amici prism and the second lens, then respectively through arrays of vias
Pin hole BaAnd BbThe first unpolarized Amici prism is irradiated afterwards；Converge to the first unpolarized Amici prism and through its reflection object light and
Reference light after third lens, interference is generated in image sensor plane and forms the orthogonal hologram in direction containing carrier frequency,
And it is uploaded in computer with imaging sensor acquisition hologram；Object under test is completed using dual wavelength carrier phase recovery algorithm
Three dimensional Phase is restored.
A kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency, which is total to railway digital holographic measurement method, has following characteristics and beneficial to effect
Fruit：
1. on the basis of 4f transmission-types point diffraction structure, dual wavelength lighting engineering and polarization spectrum reuse technique are introduced, is led to
Cross the orthogonal hologram of single exposure acquisition dual wavelength carrier frequency complete it is three-dimensional without wrapped phase imaging measurement, it is not only compact-sized, resist
Interference performance is strong, and does not need to the special opticals elements such as grating, reflection pin hole, corner reflector, and method is simple and practicable, luminous energy profit
With rate height, this is to be different from one of innovative point of the prior art；
2. polarization reference light is divided into two orthogonal beams of polarization state by polarization spectro modulation technique, only biplane is needed to reflect
Mirror places different postures can introduce orthogonal carrier frequency by reference to light, not only convenient, flexible, but also can avoid frequency to greatest extent
Crosstalk between spectrum, this is the two of the innovative point for being different from the prior art.
3. realizing the spacial alignment of reference beam and pin hole using common plane speculum, matching relationship is simple, method letter
Single easy, at low cost, this is the three of the innovative point for being different from the prior art.
The device of the invention has following distinguishing feature：
1. apparatus of the present invention are simple and compact for structure, system positioning complexity requirement is low and easy to adjust, is also not required to any light
The special opticals elements such as grid, reflection pin hole, corner reflector, it is at low cost；
2. apparatus of the present invention form light channel structure altogether using transmission-type point diffraction, system rejection to disturbance ability is strong, and stability is good,
The efficiency of light energy utilization is high.
Description of the drawings
Fig. 1 is total to railway digital holographic measurement schematic device for the orthogonal transmission point diffraction-type of dual wavelength carrier frequency；
Fig. 2 is pinhole array structure diagram；
Fig. 3 realizes measuring device schematic diagram of the present invention to introduce microscopic system；
Fig. 4 a are the dual wavelength digital hologram analogous diagram of quadrature carrier；
Fig. 4 b are the phase recovery figure analogous diagram of corresponding wavelength 1；
Fig. 4 c are the phase recovery figure analogous diagram of corresponding wavelength 2；
Phase difference analogous diagrams of Fig. 4 d between wavelength 1 and wavelength 2；
Fig. 4 e are the corresponding phase diagram analogous diagram of synthetic wavelength.
Specific embodiment
Piece number explanation in figure：1 and 2 light sources, 3 first linear polarizers, 4 second linear polarizers, 5 first polarization splitting prisms, 6
Collimating and beam expanding system, 7 objects under test, 8 first lens, 9 first unpolarized Amici prisms, 10 hole arrays, 11 second lens, 12
Two unpolarized Amici prisms, 13 first plane mirrors, 14 second polarization splitting prisms, 15 second plane mirrors, 16 thirds
Plane mirror, 17 third lens, 18 imaging sensors, 19 computers, 20 microcobjectives, 21 correction object lens.
Embodiment one：As shown in Figure 1, a kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement dress
It puts, is λ including wavelengthaLight source and wavelength be λbLight source, which further includes the first linear polarizer, the second linear polarizer,
One polarization splitting prism, collimating and beam expanding system, the first lens, the first unpolarized Amici prism, hole array, the second lens, second
Unpolarized Amici prism, the first plane mirror, the second polarization splitting prism, the second plane mirror, third plane mirror,
Third lens, imaging sensor and computer, wherein λa>λb, the line of the first linear polarizer and the second linear polarizer for polarized orthogonal
Polarizer；Wavelength is λaLight source and wavelength be λbThe light beam that emits respectively of light source pass through the first linear polarizer and second respectively
Linear polarizer is modulated respectively, the two light beams of polarized orthogonal is formed, then merge into light beam through the first polarization splitting prism, through standard
After direct expansion beam system collimator and extender, successively by object under test, the first lens, the first unpolarized Amici prism, hole array, second
Object light and reference light are formed after lens, the second unpolarized Amici prism；Object light is irradiated on the first plane mirror and is reflected onto
Second unpolarized Amici prism, reference light are again broken down into two-beam by the second polarization splitting prism, irradiate the second plane respectively
Speculum and third plane mirror are simultaneously reflected, and are again passed by the second polarization splitting prism and are irradiated the second unpolarized light splitting rib
Mirror；The object light and reference light of the second unpolarized Amici prism are converged to, then non-inclined by the second lens, hole array and first successively
It shakes after Amici prism, after the first unpolarized Amici prism reflection, using third lens by the light receiving surface of imaging sensor
It receives, the image signal output end connection computer of imaging sensor；The object under test is located at the front focal plane of the first lens
On；First lens, the second lens and third lens form conjugation 4f systems；As shown in Fig. 2, contain orthogonal separation in hole array
Macropore A, pin hole BaAnd Bb, and macropore A centers are located on optical axis, pin hole BaSize and wavelength XaIn the Airy that frequency spectrum plane generates
Spot diameter size daUnanimously, pin hole BbSize and wavelength XbIn the Airy diameter d that frequency spectrum plane generatesbUnanimously, wherein da<
1.22λaf2/D、db<1.22λbf2/D、f2Focal length, D for the second lens are the clear aperature of the second lens；First plane reflection
Mirror, the second plane mirror and third plane mirror are located on the conjugation back focal plane of the second lens；And first plane reflection
Mirror is on the emitting light path of the second unpolarized Amici prism, the second polarization splitting prism, the second plane mirror and third plane
Speculum is on the reflected light path of the second unpolarized Amici prism or the first plane mirror is in the second unpolarized Amici prism
Reflected light path on, the second polarization splitting prism, the second plane mirror and third plane mirror are in the second unpolarized light splitting
On the emitting light path of prism；And second plane mirror on the emitting light path of the second polarization splitting prism, third plane reflection
Mirror is on the reflected light path of the second polarization splitting prism；Imaging sensor is located on the back focal plane of third lens.
Embodiment two：On the basis of embodiment one, the first plane mirror is disposed vertically with optical axis, and the second plane is anti-
Mirror is penetrated in the horizontal direction with optical axis into θaOverturning angle is placed, θaAngle does not include 90 °, and third plane mirror is in vertical direction and light
Axis is into θbOverturning angle is placed, θbAngle does not include 90 °.
Embodiment three：On the basis of embodiment two or three, the pin hole B in hole arrayaIt is anti-with third plane mirror
It penetrates rear and is matched by the hot spot of the second lens focus, pin hole BbAfter being reflected with the second plane mirror and by the second lens focus
Hot spot matches.
The orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency based on embodiment one or two or three is total to railway digital holography survey
Amount method realizes that process is as follows：
Entire optical system is adjusted, opens light source, it is λ to make two light sources difference launch wavelengthaAnd λbLight beam, by polarizing just
The polarization piece of friendship is modulated respectively, forms the two light beams of 0 ° and 90 ° polarized orthogonal, then is converged through the first polarization splitting prism
Into light beam, then focus on light beam is formed after collimating and beam expanding system, object under test and the first lens successively, then successively by the
Two planar light beams point are formed after one unpolarized Amici prism, the macropore A of hole array, the second lens and the second unpolarized Amici prism
It Zuo Wei not object light and reference light；Object light is irradiated on the first plane mirror and is reflected, then passes through the second unpolarized light splitting successively
The first unpolarized Amici prism is irradiated after the macropore A of prism, the second lens and hole array；Reference light passes through the second polarization spectro rib
Mirror is again broken down into two-beam, irradiates the second plane mirror and third plane mirror respectively and is inclined by modulation reflection, then according to
It is secondary after the second polarization splitting prism, the second unpolarized Amici prism and the second lens, then the pin hole through arrays of vias respectively
BaAnd BbThe first unpolarized Amici prism is irradiated afterwards；Converge to the first unpolarized Amici prism and through its reflection object light and reference
Light after third lens, interference is generated in image sensor plane and forms the orthogonal hologram in direction containing carrier frequency, is used in combination
Imaging sensor acquisition hologram is uploaded in computer；It is three-dimensional that object under test is completed using dual wavelength carrier phase recovery algorithm
Phase recovery.
Embodiment four：As shown in figure 3, a kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement dress
It puts, is λ including wavelengthaLight source and wavelength be λbLight source, which further includes the first linear polarizer, the second linear polarizer,
One polarization splitting prism, microcobjective, correction object lens, the first lens, the first unpolarized Amici prism, hole array, the second lens,
Second unpolarized Amici prism, the first plane mirror, the second polarization splitting prism, the second plane mirror, third plane are anti-
Penetrate mirror, third lens, imaging sensor and computer, wherein λa>λb, the first linear polarizer and the second linear polarizer is polarize just
The linear polarizer of friendship；Wavelength is λaLight source and wavelength be λbThe light beam that emits respectively of light source pass through the first linear polarizer respectively
It is modulated respectively with the second linear polarizer (4), forms the two light beams of polarized orthogonal, then one is merged into through the first polarization splitting prism
Shu Guang, successively by object under test, microcobjective, correction object lens, the first lens, the first unpolarized Amici prism, hole array, the
Object light and reference light are formed after two lens, the second unpolarized Amici prism；Object light is irradiated on the first plane mirror and is reflected
To the second unpolarized Amici prism, reference light is again broken down into two-beam by the second polarization splitting prism, and it is flat to irradiate second respectively
Face speculum and third plane mirror are simultaneously reflected, and are again passed by the second polarization splitting prism and are irradiated the second unpolarized light splitting rib
Mirror；The object light and reference light of the second unpolarized Amici prism are converged to, then non-inclined by the second lens, hole array and first successively
It shakes after Amici prism, after the first unpolarized Amici prism reflection, using third lens by the light receiving surface of imaging sensor
It receives, the image signal output end connection computer of imaging sensor；The object under test is located at the front focal plane of the first lens
On；First lens, the second lens and third lens form conjugation 4f systems；As shown in Fig. 2, contain orthogonal separation in hole array
Macropore A, pin hole BaAnd Bb, and macropore A centers are located on optical axis, pin hole BaSize and wavelength XaIn the Airy that frequency spectrum plane generates
Spot diameter size daUnanimously, pin hole BbSize and wavelength XbIn the Airy diameter d that frequency spectrum plane generatesbUnanimously, wherein da<
1.22λaf2/D、db<1.22λbf2/D、f2Focal length, D for the second lens are the clear aperature of the second lens；First plane reflection
Mirror, the second plane mirror and third plane mirror are located on the conjugation back focal plane of the second lens, and the first plane reflection
Mirror is on the emitting light path of the second unpolarized Amici prism, the second polarization splitting prism, the second plane mirror and third plane
Speculum is on the reflected light path of the second unpolarized Amici prism or the first plane mirror is in the second unpolarized Amici prism
Reflected light path on, the second polarization splitting prism, the second plane mirror and third plane mirror are in the second unpolarized light splitting
On the emitting light path of prism, and the second plane mirror is on the emitting light path of the second polarization splitting prism, third plane reflection
Mirror is on the reflected light path of the second polarization splitting prism；Imaging sensor is located on the back focal plane of third lens, microcobjective
It is matched with the microscopic system image plane of correction object lens composition with the front focal plane of the first lens.
Embodiment five：On the basis of embodiment four, the first plane mirror is disposed vertically with optical axis, and the second plane is anti-
Mirror is penetrated in the horizontal direction with optical axis into θaOverturning angle is placed, θaAngle does not include 90 °, and third plane mirror is in vertical direction and light
Axis is into θbOverturning angle is placed, θbAngle does not include 90 °.
Embodiment six：On the basis of embodiment four or five, the pin hole B in hole arrayaIt is anti-with third plane mirror
It penetrates rear and is matched by the hot spot of the second lens focus, pin hole BbAfter being reflected with the second plane mirror and by the second lens focus
Hot spot matches.
The orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency based on embodiment four or five or six is total to railway digital holography survey
Amount method realizes that process is as follows：
Entire optical system is adjusted, opens light source, it is λ to make two light sources difference launch wavelengthaAnd λbLight beam, by polarizing just
The polarization piece of friendship is modulated respectively, forms the two light beams of 0 ° and 90 ° polarized orthogonal, then is converged through the first polarization splitting prism
Into light beam, then successively by object under test, microcobjective, correction object lens, form focus on light beam, then pass through successively after the first lens
Two planar lights are formed after crossing the first unpolarized Amici prism, the macropore A of hole array, the second lens and the second unpolarized Amici prism
Beam is respectively as object light and reference light；Object light is irradiated on the first plane mirror and is reflected, then unpolarized by second successively
The first unpolarized Amici prism is irradiated after the macropore A of Amici prism, the second lens and hole array；Reference light is by the second polarization point
Light prism is again broken down into two-beam, irradiates the second plane mirror and third plane mirror respectively and is inclined by modulation reflection,
Again successively after the second polarization splitting prism, the second unpolarized Amici prism and the second lens, then respectively through arrays of vias
Pin hole BaAnd BbThe first unpolarized Amici prism is irradiated afterwards；Converge to the first unpolarized Amici prism and through its reflection object light and
Reference light after third lens, interference is generated in image sensor plane and forms the orthogonal hologram in direction containing carrier frequency,
And it is uploaded in computer with imaging sensor acquisition hologram；Object under test is completed using dual wavelength carrier phase recovery algorithm
Three dimensional Phase is restored.
As shown in Figure 1, the orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement device, it is λ including wavelengtha
Light source and wavelength be λbLight source, further include the first linear polarizer, the second linear polarizer, the first polarization splitting prism, collimation
Beam-expanding system, object under test, the first lens, the first unpolarized Amici prism, hole array, the second lens, the second unpolarized light splitting
Prism, the first plane mirror, the second polarization splitting prism, the second plane mirror, third plane mirror, third lens,
Imaging sensor and computer, wherein λa>λb, the linear polarizer of the first linear polarizer and the second linear polarizer for polarized orthogonal.Wave
A length of λaLight source and wavelength be λbThe light beam that emits respectively of light source adjusted respectively by the first linear polarizer and the second linear polarizer
System forms the two light beams of polarized orthogonal, then merges into light beam, collimated beam-expanding system collimation through the first polarization splitting prism
After expanding, successively by object under test, the first lens, the first unpolarized Amici prism, hole array, the second lens, second it is non-partially
It shakes and object light and reference light is formed after Amici prism；Object light irradiates on the first plane mirror and is reflected onto the second unpolarized light splitting
Prism, reference light are again broken down into two-beam by the second polarization splitting prism, irradiate the second plane mirror respectively and third is put down
Face speculum is simultaneously reflected, and is again passed by the second polarization splitting prism and is irradiated the second unpolarized Amici prism；It is non-to converge to second
The object light and reference light of polarization splitting prism, then successively after the second lens, hole array and the first unpolarized Amici prism, warp
After first unpolarized Amici prism reflection, received using third lens by the light receiving surface of imaging sensor, imaging sensor
Image signal output end connection computer；The object under test is located on the front focal plane of the first lens；First lens, second
Lens and third lens form conjugation 4f systems；Macropore A containing orthogonal separation, pin hole B in hole array as shown in Figure 2aAnd Bb,
And macropore A centers are located on optical axis, pin hole BaSize and wavelength XaIn the Airy diameter d that frequency spectrum plane generatesaUnanimously,
Pin hole BbSize and wavelength XbIn the Airy diameter d that frequency spectrum plane generatesbUnanimously, wherein da<1.22λaf2/D、db<
1.22λbf2/D、f2Focal length, D for the second lens are the clear aperature of the second lens；First plane mirror, the second plane are anti-
It penetrates mirror and third plane mirror is located on the conjugation back focal plane of the second lens, and the first plane mirror is unpolarized second
On the emitting light path of Amici prism, the second polarization splitting prism, the second plane mirror and third plane mirror are non-second
On the reflected light path of polarization splitting prism or the first plane mirror is on the reflected light path of the second unpolarized Amici prism,
Second polarization splitting prism, the second plane mirror and third plane mirror are in the emitting light path of the second unpolarized Amici prism
On, and the second plane mirror, on the emitting light path of the second polarization splitting prism, third plane mirror is in the second polarization point
On the reflected light path of light prism or the second plane mirror is on the reflected light path of the second polarization splitting prism, third plane
Speculum is on the emitting light path of the second polarization splitting prism；Imaging sensor is located on the back focal plane of third lens.
First plane mirror is disposed vertically with optical axis, and the second plane mirror is in the horizontal direction with optical axis into θaIt puts at angle
It puts, third plane mirror is in vertical direction and optical axis into θbAngle is placed or the first plane mirror is disposed vertically with optical axis, the
Two plane mirrors are in vertical direction and optical axis into θaAngle is placed, and third plane mirror is in the horizontal direction with optical axis into θbIt puts at angle
It puts.
Pin hole B in hole arrayaIt is matched after being reflected with the second plane mirror and by the hot spot of the second lens focus, pin hole
BbIt is matched or pin hole B after being reflected with third plane mirror and by the hot spot of the second lens focusaIt is anti-with third plane mirror
It penetrates rear and is matched by the hot spot of the second lens focus, pin hole BbAfter being reflected with the second plane mirror and by the second lens focus
Hot spot matches.
Microcobjective and correction object lens, and microcobjective can be also introduced between object under test and the first lens as shown in Figure 3
It is matched with the microscopic system image plane of correction object lens composition with the front focal plane of the first lens.
A kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement method, its realization process is as follows：
Entire optical system is adjusted, opens light source, it is λ to make two light sources difference launch wavelengthaAnd λbLight beam, by the two-wire of polarized orthogonal
Polarizer is modulated respectively, forms the two light beams of 0 ° and 90 ° polarized orthogonal, then is merged into through the first polarization splitting prism a branch of
Light, then focus on light beam is formed after collimating and beam expanding system, object under test and the first lens successively, then non-inclined by first successively
Shake formed after Amici prism, the macropore A of hole array, the second lens and the second unpolarized Amici prism two planar light beams respectively as
Object light and reference light；Object light is irradiated on the first plane mirror and is reflected, then successively by the second unpolarized Amici prism, the
The first unpolarized Amici prism is irradiated after two lens and the macropore A of hole array；Reference light passes through the second polarization splitting prism again
It is divided into two-beam, irradiate the second plane mirror and third plane mirror respectively and is inclined by modulation reflection, then pass through successively
After second polarization splitting prism, the second unpolarized Amici prism and the second lens, then the pin hole B through arrays of vias respectivelyaAnd BbAfterwards
Irradiate the first unpolarized Amici prism；The first unpolarized Amici prism and object light and reference light through its reflection are converged to, then is passed through
After crossing third lens, interference is generated in image sensor plane and forms the orthogonal hologram in direction containing carrier frequency, and passed with image
Sensor acquisition hologram is uploaded in computer；It is extensive that object under test three dimensional Phase is completed using dual wavelength carrier phase recovery algorithm
It is multiple.
It elaborates with reference to Fig. 1 to the embodiment of the present invention.
Apparatus of the present invention include：Light source 1, light source 2, the first linear polarizer 3, the second linear polarizer 4, the first polarization spectro rib
Mirror 5, collimating and beam expanding system 6, object under test 7, the first lens 8, the first unpolarized Amici prism 9, hole array 10, the second lens
11st, the second unpolarized Amici prism 12, the first plane mirror 13, the second polarization splitting prism 14, the second plane mirror 15,
Third plane mirror 16, third lens 17, imaging sensor 18, computer 19, light source 1 are wavelength Xa=632.8nm laser
Device, light source 2 are wavelength Xb=514nm lasers；First linear polarizer 3 is 0 ° of linear polarizer, and the second linear polarizer 4 is 90 ° of lines
Polarizer；Object under test 7 is located on the front focal plane of the first lens 8；The coke of first lens 8, the second lens 11 and third lens 17
Away from being f=200mm, conjugation 4f systems are formed；Hole array 10 is located in the frequency spectrum plane of conjugation 4f systems, contains in hole array 10
There are the macropore A and B of orthogonal separationaWith Bb, and macropore A centers are located on optical axis, pin hole BaWith BbSize is 30 μm, hole array
10 macropore A and BaWith BbCenter spacing be 1.9mm；First plane mirror 13, the second plane mirror 15 and third plane
Speculum 16 is located on the conjugation back focal plane of the second lens 11, and the first plane mirror 13 is in the second unpolarized Amici prism
It is disposed vertically on 12 emitting light path with optical axis, the second polarization splitting prism 14, the second plane mirror 15 and third plane are anti-
Mirror 16 is penetrated on the reflected light path of the second unpolarized Amici prism 12, and the second plane mirror 15 is in the second polarization splitting prism
In the horizontal direction with optical axis into θ on 14 emitting light pathaAngle is placed, and after the reflection of the second plane mirror 15 and by the second lens
11 hot spots focused on and the pin hole B in hole array 10aMatching, third plane mirror 16 are anti-the second polarization splitting prism 14
It penetrates in light path in the horizontal direction with optical axis into θbIt is focused on after angle is placed, and third plane mirror 16 reflects and by the second lens 11
Hot spot and hole array 10 on pin hole BbMatching；Imaging sensor 18 is located on the back focal plane of third lens 17.
The operating path of the device light is：
The light beam that double light sources 1 and 2 emit respectively is modulated respectively by the first linear polarizer 3 and the second linear polarizer 4, is formed
The two light beams of 0 ° and 90 ° polarized orthogonal, then light beam is merged into, then expand successively by collimation through the first polarization splitting prism 5
Focus on light beam is formed after beam system 6,7 and first lens 8 of object under test, then successively by the first unpolarized Amici prism 9, Kong Zhen
Two planar light beams are formed after the macropore A of row 10, the second lens 11 and the second unpolarized Amici prism 12, respectively as object light and ginseng
Examine light；Object light is irradiated on the first plane mirror 13 and is reflected, then saturating by the second unpolarized Amici prism 12, second successively
The first unpolarized Amici prism 9 is irradiated after mirror 11 and the macropore A of hole array 10；Reference light passes through the second polarization splitting prism 14 again
It is secondary to be divided into two-beam, the second plane mirror 15 and third plane mirror 16 are irradiated respectively and are inclined by modulation reflection, then according to
It is secondary after the second polarization splitting prism 14, the second unpolarized 12 and second lens 11 of Amici prism, then respectively through arrays of vias
10 pin hole BaAnd BbThe first unpolarized Amici prism 9 is irradiated afterwards；Converge to the first unpolarized Amici prism 9 and through its reflection
Object light and reference light after third lens 17, are generating interference formation direction containing carrier frequency just in image sensor plane 18
The hologram I of friendship, and acquire hologram I with imaging sensor 18 and upload in computer 19；
The complex amplitude of object under test 7 is obtained respectively：
ci(x, y)=IFT { C { FT [I (x, y)] Fi}}
Wherein, i=a, b, FiRepresent wave filter, FT represents Fourier transformation, and IFT represents inverse Fourier transform, and C represents frequency
Spectrum puts middle operation.
Fig. 4 a are the dual wavelength digital hologram analogous diagram of quadrature carrier；Fig. 4 b are that the phase recovery figure of corresponding wavelength 1 is imitated
True figure；Fig. 4 c are the phase recovery figure analogous diagram of corresponding wavelength 2；Phase difference analogous diagrams of Fig. 4 d between wavelength 1 and wavelength 2；
Fig. 4 e are the corresponding phase diagram analogous diagram of synthetic wavelength.
Apparatus of the present invention are simple in structure, at low cost, are not required to the special opticals members such as any grating, reflection pin hole, corner reflector
Part；Apparatus of the present invention form light channel structure altogether using transmission-type point diffraction, and system rejection to disturbance ability is strong, and stability is good.
Claims (8)
- It is λ including wavelength 1. a kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement deviceaLight source (1) It is λ with wavelengthbLight source (2), it is characterised in that：The device further includes the first linear polarizer (3), the second linear polarizer (4), One polarization splitting prism (5), collimating and beam expanding system (6), the first lens (8), the first unpolarized Amici prism (9), hole array (10), the second lens (11), the second unpolarized Amici prism (12), the first plane mirror (13), the second polarization splitting prism (14), the second plane mirror (15), third plane mirror (16), third lens (17), imaging sensor (18) and calculating Machine (19), wherein λa>λb, the linear polarizer of the first linear polarizer (3) and the second linear polarizer (4) for polarized orthogonal；Wavelength is λa Light source (1) and wavelength be λbThe light beam that emits respectively of light source (2) pass through the first linear polarizer (3) and the second linear polarization respectively Piece (4) is modulated respectively, the two light beams of polarized orthogonal is formed, then merge into light beam through the first polarization splitting prism (5), through standard After direct expansion beam system (6) collimator and extender, successively by object under test (7), the first lens (8), the first unpolarized Amici prism (9), hole array (10), the second lens (11), the second unpolarized Amici prism (12) form object light and reference light afterwards；Object light is irradiated On first plane mirror (13) and the second unpolarized Amici prism (12) is reflected onto, reference light passes through the second polarization spectro rib Mirror (14) is again broken down into two-beam, irradiates the second plane mirror (15) and third plane mirror (16) respectively and is reflected, It again passes by the second polarization splitting prism (14) and irradiates the second unpolarized Amici prism (12)；Converge to the second unpolarized light splitting rib The object light and reference light of mirror (12), then pass through the second lens (11), hole array (10) and the first unpolarized Amici prism (9) successively Afterwards, after the first unpolarized Amici prism (9) reflection, using third lens (17) by the light receiving surface of imaging sensor (18) It receives, the image signal output end connection computer (19) of imaging sensor (18)；The object under test (7) is saturating positioned at first On the front focal plane of mirror (8)；First lens (8), the second lens (11) and third lens (17) form conjugation 4f systems；Hole array (10) the macropore A containing orthogonal separation, pin hole B onaAnd Bb, and macropore A centers are located on optical axis, pin hole BaSize and wavelength Xa In the Airy diameter d that frequency spectrum plane generatesaUnanimously, pin hole BbSize and wavelength XbIn the Airy that frequency spectrum plane generates Diameter dbUnanimously, wherein da<1.22λaf2/D、db<1.22λbf2/D、f2Focal length, D for the second lens (11) is saturating for second The clear aperature of mirror (11)；First plane mirror (13), the second plane mirror (15) and third plane mirror (16) position In on the conjugation back focal plane of the second lens (11)；And first plane mirror (13) in the second unpolarized Amici prism (12) On emitting light path, the second polarization splitting prism (14), the second plane mirror (15) and third plane mirror (16) are second On the reflected light path of unpolarized Amici prism (12) or the first plane mirror (13) is in the second unpolarized Amici prism (12) Reflected light path on, the second polarization splitting prism (14), the second plane mirror (15) and third plane mirror (16) are On the emitting light path of two unpolarized Amici prisms (12)；And second plane mirror (15) in the second polarization splitting prism (14) On emitting light path, third plane mirror (16) is on the reflected light path of the second polarization splitting prism (14)；Imaging sensor (18) on the back focal plane of third lens (17).
- 2. the orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency according to claim 1 is total to railway digital holographic measurement device, It is characterized in that：First plane mirror (13) is disposed vertically with optical axis, and the second plane mirror (15) is in level side To with optical axis into θaOverturning angle is placed, θaAngle does not include 90 °, and third plane mirror (16) is in vertical direction and optical axis into θbAngle Slant setting, θbAngle does not include 90 °.
- 3. the orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency according to claim 1 or 2 is total to railway digital holographic measurement dress It puts, it is characterised in that：Pin hole B in the hole array (10)aAfter being reflected with third plane mirror (16) and by second thoroughly The hot spot matching that mirror (11) focuses on, pin hole BbThe light focused on after being reflected with the second plane mirror (15) and by the second lens (11) Spot matches.
- 4. a kind of a kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency based on described in claims 1 or 2 is total to railway digital holography survey Measure the measuring method of device, it is characterised in that：Realization process is as follows：Entire optical system is adjusted, opens light source, it is λ to make two light sources difference launch wavelengthaAnd λbLight beam, by polarized orthogonal Polarization piece is modulated respectively, forms the two light beams of 0 ° and 90 ° polarized orthogonal, then merges into one through the first polarization splitting prism Shu Guang, then focus on light beam is formed after collimating and beam expanding system, object under test and the first lens successively, then non-by first successively Two planar light beams are formed after polarization splitting prism, the macropore A of hole array, the second lens and the second unpolarized Amici prism respectively to make For object light and reference light；Object light irradiate the first plane mirror on and reflected, then successively by the second unpolarized Amici prism, The first unpolarized Amici prism is irradiated after second lens and the macropore A of hole array；Reference light passes through the second polarization splitting prism again It is secondary to be divided into two-beam, the second plane mirror and third plane mirror are irradiated respectively and are inclined by modulation reflection, then pass through successively After crossing the second polarization splitting prism, the second unpolarized Amici prism and the second lens, then the pin hole B through arrays of vias respectivelyaAnd Bb The first unpolarized Amici prism is irradiated afterwards；The first unpolarized Amici prism and object light and reference light through its reflection are converged to, then After third lens, interference is generated in image sensor plane and forms the orthogonal hologram in direction containing carrier frequency, and use image Sensor acquisition hologram is uploaded in computer；Object under test three dimensional Phase is completed using dual wavelength carrier phase recovery algorithm Restore.
- 5. a kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency is total to railway digital holographic measurement device, it is characterised in that：Including wavelength For λaLight source (1) and wavelength be λbLight source (2), it is characterised in that：The device further includes the first linear polarizer (3), the second line Polarizer (4), the first polarization splitting prism (5), microcobjective (20), correction object lens (21), the first lens (8), first it is non-partially Shake Amici prism (9), hole array (10), the second lens (11), the second unpolarized Amici prism (12), the first plane mirror (13), the second polarization splitting prism (14), the second plane mirror (15), third plane mirror (16), third lens (17), Imaging sensor (18) and computer (19), wherein λa>λb, the first linear polarizer (3) and the second linear polarizer (4) is polarize just The linear polarizer of friendship；Wavelength is λaLight source (1) and wavelength be λbThe light beam that emits respectively of light source (2) pass through First Line respectively Polarizer (3) and the second linear polarizer (4) are modulated respectively, form the two light beams of polarized orthogonal, then through the first polarization spectro rib Mirror (5) merges into light beam, successively by object under test (7), microcobjective (20), correction object lens (21), the first lens (8), First unpolarized Amici prism (9), hole array (10), the second lens (11), the second unpolarized Amici prism (12) formation afterwards Light and reference light；Object light irradiates on the first plane mirror (13) and is reflected onto the second unpolarized Amici prism (12), refers to Light is again broken down into two-beam by the second polarization splitting prism (14), irradiates the second plane mirror (15) and third plane respectively Speculum (16) is simultaneously reflected, and is again passed by the second polarization splitting prism (14) and is irradiated the second unpolarized Amici prism (12)；It converges Be bonded to the object light and reference light of the second unpolarized Amici prism (12), then successively by the second lens (11), hole array (10) and After first unpolarized Amici prism (9), after the first unpolarized Amici prism (9) reflection, using third lens (17) by scheming As the light receiving surface reception of sensor (18), the image signal output end connection computer (19) of imaging sensor (18)；It is described Object under test (7) on the front focal plane of the first lens (8)；First lens (8), the second lens (11) and third lens (17) Form conjugation 4f systems；Macropore A containing orthogonal separation, pin hole B in hole array (10)aAnd Bb, and macropore A centers are located at optical axis On, pin hole BaSize and wavelength XaIn the Airy diameter d that frequency spectrum plane generatesaUnanimously, pin hole BbSize and wavelength Xb The Airy diameter d that frequency spectrum plane generatesbUnanimously, wherein da<1.22λaf2/D、db<1.22λbf2/D、f2For the second lens (11) focal length, the clear aperature that D is the second lens (11)；First plane mirror (13), the second plane mirror (15) and Third plane mirror (16) is on the conjugation back focal plane of the second lens (11), and the first plane mirror (13) is second On the emitting light path of unpolarized Amici prism (12), the second polarization splitting prism (14), the second plane mirror (15) and third Plane mirror (16) is on the reflected light path of the second unpolarized Amici prism (12) or the first plane mirror (13) is On the reflected light path of two unpolarized Amici prisms (12), the second polarization splitting prism (14), the second plane mirror (15) and Three plane mirrors (16) are on the emitting light path of the second unpolarized Amici prism (12), and the second plane mirror (15) is On the emitting light path of two polarization splitting prisms (14), third plane mirror (16) is in the reflection of the second polarization splitting prism (14) In light path；Imaging sensor (18) is on the back focal plane of third lens (17), microcobjective (20) and correction object lens (21) The microscopic system image plane of composition is matched with the front focal plane of the first lens (8).
- 6. the orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency according to claim 5 is total to railway digital holographic measurement device, It is characterized in that：First plane mirror (13) is disposed vertically with optical axis, and the second plane mirror (15) is in level side To with optical axis into θaOverturning angle is placed, θaAngle does not include 90 °, and third plane mirror (16) is in vertical direction and optical axis into θbAngle Slant setting, θbAngle does not include 90 °.
- 7. the orthogonal transmission point diffraction-type of a kind of dual wavelength carrier frequency according to claim 5 or 6 is total to railway digital holographic measurement dress It puts, it is characterised in that：Pin hole B in the hole array (10)aAfter being reflected with third plane mirror (16) and by second thoroughly The hot spot matching that mirror (11) focuses on, pin hole BbThe light focused on after being reflected with the second plane mirror (15) and by the second lens (11) Spot matches.
- 8. a kind of be total to railway digital holography survey based on a kind of orthogonal transmission point diffraction-type of dual wavelength carrier frequency described in claim 5 or 6 Measure the measuring method of device, it is characterised in that：Realization process is as follows：Entire optical system is adjusted, opens light source, it is λ to make two light sources difference launch wavelengthaAnd λbLight beam, by polarized orthogonal Polarization piece is modulated respectively, forms the two light beams of 0 ° and 90 ° polarized orthogonal, then merges into one through the first polarization splitting prism Shu Guang, then successively by object under test, microcobjective, correction object lens, form focus on light beam after the first lens, then successively by the Two planar light beams point are formed after one unpolarized Amici prism, the macropore A of hole array, the second lens and the second unpolarized Amici prism It Zuo Wei not object light and reference light；Object light is irradiated on the first plane mirror and is reflected, then passes through the second unpolarized light splitting successively The first unpolarized Amici prism is irradiated after the macropore A of prism, the second lens and hole array；Reference light passes through the second polarization spectro rib Mirror is again broken down into two-beam, irradiates the second plane mirror and third plane mirror respectively and is inclined by modulation reflection, then according to It is secondary after the second polarization splitting prism, the second unpolarized Amici prism and the second lens, then the pin hole through arrays of vias respectively BaAnd BbThe first unpolarized Amici prism is irradiated afterwards；Converge to the first unpolarized Amici prism and through its reflection object light and reference Light after third lens, interference is generated in image sensor plane and forms the orthogonal hologram in direction containing carrier frequency, is used in combination Imaging sensor acquisition hologram is uploaded in computer；It is three-dimensional that object under test is completed using dual wavelength carrier phase recovery algorithm Phase recovery.
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| CN109116708A (en) * | 2018-10-19 | 2019-01-01 | 许之敏 | A kind of dual wavelength reflective digital holographic microscope |
| CN110017794A (en) * | 2019-04-10 | 2019-07-16 | 南京理工大学 | A kind of dynamic phasing deformation interferometric measuring means and method |
| CN113960776A (en) * | 2021-11-03 | 2022-01-21 | 熵智科技(深圳)有限公司 | Large-view-field laser interference system and method based on spatial light modulator |
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Application publication date: 20180619 |