CN1039745C - Real-time one step double-wavelength holographic interference checking device - Google Patents
Real-time one step double-wavelength holographic interference checking device Download PDFInfo
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- CN1039745C CN1039745C CN92115049A CN92115049A CN1039745C CN 1039745 C CN1039745 C CN 1039745C CN 92115049 A CN92115049 A CN 92115049A CN 92115049 A CN92115049 A CN 92115049A CN 1039745 C CN1039745 C CN 1039745C
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Abstract
The present invention belongs to a dual-wavelength holographic interference detection device in the field of optical wave surface shape detecting technology. The device is composed of a detection light source (1), polarizers (2) and (3), a plane mirror (4), a beam splitter (5), a beam expander (6), a beam splitter (7), a reference plane mirror (8), a transmitting lens (9), polarizing beam splitters (10) and (13), plane mirrors (11) and (12), a spatial light modulator (14), an imaging lens (15), a spatial filter (16), an area array detector (17) and a computer (18). The present invention realizes that the record, the reappearance and the detection of the dual-wavelength holographic interference of the detected surface shape are completed in one step, color difference influence on detection precision is eliminated, and a test result can be arranged in a real time mode. The dual-wavelength holographic interference detection device can be combined with the interferometers of other types and is suitable for the detection of various optical elements.
Description
The invention belongs to a kind of dual wavelength interference checking device in the optical wave-front face shape detection technique field.
Dual wavelength interferes detection technique valuable especially for the detection of optical element (as aspheric surface).Formed three kinds of dual wavelengths at present and interfered detection techniques: 1. double-wavelength holographic art (Appl.Opt.10,2113～2118,1971); 2. dual wavelength interferometry (Appl.Opt.12,2071～2074,1973); 3. dual wavelength phase shift interference art (Appl.Opt.23,4539～4543,1984).Wherein the design feature of (1) as shown in Figure 1: it is made up of LASER Light Source (1), beam splitter (2), level crossing (3) and (4), divergent lens (5), convergent lens (6), beam splitter (7), holographic picture (8), imaging lens (9) and spatial filter (10), its shortcoming is that tested surface shape needs holographic interference film recording and two steps of holographic interference reproduction just can finish detection, in addition, there is aberration in this system, influential to accuracy of detection, therefore precision is not high, use trouble, can not provide testing result in real time, actual application value is little.
For overcoming above-mentioned all shortcomings, the objective of the invention is to propose a kind of easy to use, a step is finished record, reproduction and the detection of tested surface shape, color difference eliminating is to the influence of accuracy of detection, make the accuracy of detection height, and will provide testing result in real time, have the pick-up unit of practical value.
The present invention as shown in Figure 2, adopt beam splitter (7), reference planes mirror (8), divergent lens (9), imaging len (15), spatial filter (16), planar array detector (17), computing machine (18), be characterized in detection light source (1) send simultaneously different wave length two the bundle coherent lights, produce the mutually perpendicular linear polarization coherent light in polarization direction by polarizer (2) and (3), beam expander (6) expands the Shu Chengwei directional light with this two bunch polarization coherent light and is radiated at respectively on level crossing (4) and the beam splitter (5), level crossing (4) and beam splitter (5) synthesize this two bundles directional light the light beam of coaxial co-propagate, on polarization beam apparatus (10) and reflection and transmission arm, place level crossing (11) and (12) respectively, make the reflection and the transmitted light beam of polarization beam apparatus (10) after level crossing (11) and (12) reflection, propagate in opposite directions along coaxial, between level crossing (12) and (11), vertical optical axis is placed polarization beam apparatus (13) and spatial light modulator (14) successively, utilize the amboceptor of spatial light modulator (14) while as holographic interference real time record and reproduction, the polarization transmission direction of polarization beam apparatus (13) is with penetrate the polarisation of light direction from level crossing (12) and eight consistent, beam expander (6) is made up of two beam expanders, is positioned over polarizer (2) and level crossing (4) respectively, between polarizer (3) and the beam splitter (5).Spatial light modulator (14) read face-to-face polarization beam apparatus (13).
Detailed content of the present invention and embodiment be as shown in Figure 2: rotation polarizer (2) and (3), a folk prescription that makes polarizer (2) and (3) is to reflection of polarization and the polarization transmission direction with polarization beam apparatus (10) is consistent respectively.Wavelength from detection light source 1 is respectively λ
1And λ
2(λ
1≠ λ
2) two bundle coherent lights, behind polarizer (2) and (3), become the mutually perpendicular linearly polarized light in polarization direction, be two to restraint directional lights through beam expander (6) collimation, through catoptron (4) and beam splitter (5) with λ
1And λ
2Synthesize the parallel beam of coaxial co-propagate, beam splitter (7) is divided into two bundles with this directional light, transmitted light beam impinges upon on the tested aspheric surface behind diversing lens (9), folded light beam impinges upon on the reference planes mirror (8), and detection that is reflected by tested aspheric surface and reference planes mirror (8) and reference light are through beam splitting
Be radiated at behind the device (7) on the polarization beam apparatus (10), polarization beam apparatus (10) is λ with wavelength
1And λ
2Detection and reference light press λ
1And λ
2Separately, make wavelength X
1Detection and the whole reflection of polarizations of reference light, be incident upon writing on the face of spatial light modulator (14) through level crossing (11), form with wavelength X writing on the face of spatial light modulator (14)
1The tested aspheric surface holographic interference pattern that characterizes, and be recorded in real time on the spatial light modulator (14); Wavelength is λ
2Detection and the whole polarizations of reference light see through, behind plane (12) and polarization beam apparatus (13), be incident upon the reading on the face of spatial light modulator (14), as the light of reading of spatial light modulator (14), so constitute one and use wavelength X jointly
2The holographic real-time interferogram that detects aspheric surface and obtain is used wavelength X
1Detect the reproduction that tested aspheric surface obtains and be recorded in real time at the real-time one step double-wavelength holographic interference art that spatial light modulator (14) goes up the holographic real-time interferogram.Spatial filter (16) is positioned on the focal plane of imaging lens (15), with spatial filter (16) to being λ by wavelength
1Detection and the image read jointly of reference light carry out suitable filtering,
On the receiving plane of planar array detector (17), just obtain with effective wavelength λ
1λ
2/ | λ
1-λ
2| the tested aspheric interferogram of sign, computing machine (18) interferogram is in view of the above obtained tested aspheric surface, thereby reaches the purpose that detects tested aspheric surface.
Advantage of the present invention is: owing to use spatial light modulator (14) as the amboceptor of the tested aspheric holographic interference pattern of real time record, use again tested aspheric holographic interference light beam as the light of reading of spatial light modulator (14), so that double-wavelength holographic interference checking device is easy to use, recording and reconstruction one stepization is finished, detect real time implementation, because beam expander (6) adopts two beam expanders respectively with wavelength X1And λ2Linearly polarized light expand, tested aspheric surface wavelength is λ1And λ2Holographic interference pattern be imaged on respectively spatial light modulator (14) Write and read face, make this device no color differnece, then to testing result No color differnece impact, so accuracy of detection height. The present invention is simple in structure easily In realization, practical value is big, not only can with Twywan-Green The type interferometer is used in combination, also can with other types (such as the Fizeau type) Interferometer is used in combination; Not only can be used for reflection measurement, can also use Measure in transmittance.
Claims (3)
1. the double-wavelength holographic interference checking device in the optical wave-front face shape detection technique field, adopt beam splitter (7), reference planes mirror (8), divergent lens (9), imaging len (15), spatial filter (16), planar array detector (17), computing machine (18), it is characterized in that: the two bundle coherent lights that detection light source (1) is sent different wave length simultaneously produce the mutually perpendicular coherent light in polarization direction by polarizer (2) and (3), beam expander (6) expands the surface that the Shu Chengwei directional light is radiated at level crossing (4) and beam splitter (5) respectively with two bundle polarization coherent lights, level crossing (4) and beam splitter (5) are combined in the light beam that becomes coaxial co-propagate with two bundle directional lights, on the reflection of polarization beam apparatus (10) and transmission arm, place level crossing (11) and (12) respectively, make the reflection of polarization beam apparatus (10) and transmitted light beam through the coaxial propagation in opposite directions of level crossing (11) and (12) reflection back, vertical optical axis is placed polarization beam apparatus (13) and spatial light modulator (14) successively between level crossing (12) and (11), utilize spatial light modulator (14) simultaneously as the amboceptor of holographic interference real time record and reproduction, the polarization transmission direction of polarization beam apparatus (13) is with consistent from the polarization of incident light direction of level crossing (12).
2. device according to claim 1 is characterized in that: beam expander (6) is made up of two beam expanders, is positioned over respectively between polarizer (2) and level crossing (4), polarizer (3) and the beam splitter (5).
3. device according to claim 1 is characterized in that: the face of reading of spatial light modulator (14) is in the face of polarization beam apparatus (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92115049A CN1039745C (en) | 1992-12-25 | 1992-12-25 | Real-time one step double-wavelength holographic interference checking device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN92115049A CN1039745C (en) | 1992-12-25 | 1992-12-25 | Real-time one step double-wavelength holographic interference checking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1088681A CN1088681A (en) | 1994-06-29 |
| CN1039745C true CN1039745C (en) | 1998-09-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN92115049A Expired - Fee Related CN1039745C (en) | 1992-12-25 | 1992-12-25 | Real-time one step double-wavelength holographic interference checking device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100427934C (en) * | 2004-06-08 | 2008-10-22 | 中国科学院上海光学精密机械研究所 | Quasi-isorange atomic beam holographic interferometer |
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| US7715100B2 (en) * | 2004-07-16 | 2010-05-11 | Koninklijke Philips Electronics N.V. | Method and apparatus for generating radically and/or azimuthally polarized light beams |
| CN101109703B (en) * | 2007-08-06 | 2010-04-07 | 苏州大学 | Pumping detecting method based on 4f phase coherent imaging |
| CN101275818B (en) * | 2008-05-09 | 2011-04-20 | 厦门大学 | Holographic gun aiming light path system |
| CN101788273B (en) * | 2010-02-05 | 2011-10-26 | 北京航空航天大学 | Digital holographic three-dimensional microscopic observation device based on multi-polarization state synthesis |
| CN101788263B (en) * | 2010-03-09 | 2014-01-29 | 北京理工大学 | Coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination |
| CN112147630B (en) * | 2020-09-27 | 2022-03-01 | 中国工程物理研究院激光聚变研究中心 | Imaging Doppler velocimeter |
| CN113124819B (en) * | 2021-06-17 | 2021-09-10 | 中国空气动力研究与发展中心低速空气动力研究所 | Monocular distance measuring method based on plane mirror |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85101621A (en) * | 1985-04-01 | 1986-08-20 | 中国科学院长春光学精密机械研究所 | Photo-electric centering and measurement mechanism |
| EP0274921A1 (en) * | 1986-11-26 | 1988-07-20 | ESSILOR INTERNATIONAL Compagnie Générale d'Optique | Centering apparatus for an ophthalmic lens |
-
1992
- 1992-12-25 CN CN92115049A patent/CN1039745C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85101621A (en) * | 1985-04-01 | 1986-08-20 | 中国科学院长春光学精密机械研究所 | Photo-electric centering and measurement mechanism |
| EP0274921A1 (en) * | 1986-11-26 | 1988-07-20 | ESSILOR INTERNATIONAL Compagnie Générale d'Optique | Centering apparatus for an ophthalmic lens |
Non-Patent Citations (3)
| Title |
|---|
| 光弹性原理及测量技术 1980.1.1 天津大学材料力学教研室光弹组/科学出版社 * |
| 光弹性原理及测量技术 1980.1.1 天津大学材料力学教研室光弹组/科学出版社;物理光学 1980.1.1 浙江大学 梁铨廷主编/机械工业出版社 * |
| 物理光学 1980.1.1 浙江大学 梁铨廷主编/机械工业出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100427934C (en) * | 2004-06-08 | 2008-10-22 | 中国科学院上海光学精密机械研究所 | Quasi-isorange atomic beam holographic interferometer |
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| Publication number | Publication date |
|---|---|
| CN1088681A (en) | 1994-06-29 |
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