CN107449361B - Stable dual-wavelength real-time interference microscopic device and using method thereof - Google Patents
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Abstract
The invention relates to a stable dual-wavelength real-time interference microscopic device and a using method thereof. The technical scheme adopted by the invention comprises a first laser, a first polaroid, a first broadband depolarization beam splitter prism, a beam expanding collimator, a second broadband depolarization beam splitter prism, an achromatic lens, a long working distance microscope objective, a third broadband depolarization beam splitter prism and a sample which are sequentially arranged along the direction of an optical axis, wherein the second laser is vertically arranged on the first broadband depolarization beam splitter prism, and the second polaroid is arranged between the first polaroid and the second broadband depolarization beam splitter prism; the CCD camera is vertically arranged on the broadband depolarization beam splitter prism II, the broadband depolarization beam splitter prism is vertically arranged with the broadband depolarization beam splitter prism III, and the reflector I and the reflector II are arranged on two surfaces, perpendicular to the broadband depolarization beam splitter prism. The device is based on a long working distance microscope objective and a small dual-wavelength light splitting unit, a CCD (charge coupled device) camera can record off-axis interferograms which correspond to two wavelengths and have mutually orthogonal fringes in real time, and the phase distribution of a detected sample is obtained through a Fourier transform algorithm.
Description
Technical Field
The invention relates to a stable dual-wavelength real-time interference microscopic device and a using method thereof.
Background
The interference microscopy technology is an application of the optical interference technology in the microscopy field, and has the advantages of full-field measurement, no need of fluorescent labeling, realization of nanometer precision of axial measurement and the like, so that the interference microscopy technology is widely applied to the fields of optical detection, microscopic imaging, semiconductor processing detection, biomedical imaging and the like. The off-axis interference microscopy technology can reconstruct the phase distribution of an object from an off-axis interference image, and has the advantage of real-time measurement. However, the disadvantages of the single-wavelength off-axis interference technique are: when a step-shaped sample is measured, the maximum optical path of the measurable step must be less than half of the wavelength, otherwise phase ambiguity occurs, and the problem cannot be solved even if a phase unwrapping algorithm is adopted. The detection of the deep step-shaped sample has urgent needs in the fields of MEMS, semiconductor manufacturing and the like. The dual-wavelength interference can effectively measure deep step-shaped samples. In the dual-wavelength interference, a longer wavelength lambda = lambda 1 lambda 2/| lambda 1-lambda 2| can be synthesized by using two shorter wavelengths lambda 1 and lambda 2, and when the interval between the two wavelengths is smaller, a long synthesized wavelength can be obtained, so that the wrapping-free range of phase measurement is expanded, and the measurement of a deep step-shaped sample can be realized.
In Min Junwei et al (Applied Optics, volume 51 issue 2, 2012), the switzerland federal institute of technology, j.kuhn et al (Optics Express, volume 15, issue 12, 2007) and other subject groups of the chinese academy of sciences, the CCD (or CMOS) camera can simultaneously collect off-axis interferograms formed by two different wavelengths λ 1, λ 2 and with interference fringes (approximately) orthogonal to each other, thereby realizing real-time measurement. However, these devices are usually based on an interferometer with an open-circuit structure such as mach-zehnder or taemann-greens, and since object light and reference light in these devices respectively pass through different paths, they are sensitive to vibration and air disturbance, resulting in poor measurement stability.
Disclosure of Invention
The invention provides a stable dual-wavelength real-time interference microscope device and a using method thereof, the device is based on a long working distance microscope objective and a dual-wavelength light splitting unit, a CCD camera can record off-axis interference patterns which correspond to two wavelengths and have mutually orthogonal fringes in real time, the phase distribution of a tested sample is obtained through a Fourier transform algorithm, and the high measuring stability is realized.
In order to solve the problems in the prior art, the technical scheme of the invention is as follows: a stable dual-wavelength real-time interference microscopic device is characterized in that: the device comprises a first laser, a first polarizing film, a second laser, a second polarizing film, a first broadband depolarization beam splitter prism, a beam expanding collimator, a second broadband depolarization beam splitter prism, an achromatic lens, a long working distance microobjective, a third broadband depolarization beam splitter prism, a broadband polarization beam splitter prism, a first reflector, a second reflector, a sample and a CCD camera;
the device comprises a laser I, a polarizing plate I, a broadband depolarization beam splitter prism I, a beam expanding collimator, a broadband depolarization beam splitter prism II, an achromatic lens, a long working distance microscope objective, a broadband depolarization beam splitter prism III and a sample, wherein the laser I, the polarizing plate I, the broadband depolarization beam splitter prism I, the beam expanding collimator, the broadband depolarization beam splitter prism II, the achromatic lens, the long working distance microscope objective, the broadband depolarization beam splitter prism III and the sample are sequentially arranged along the optical axis direction; the CCD camera is vertically arranged on the broadband non-polarization beam splitter prism II, the broadband polarization beam splitter prism is vertically arranged with the broadband depolarization beam splitter prism III, and a first reflecting mirror and a second reflecting mirror are respectively arranged on two vertical surfaces of the broadband polarization beam splitter prism.
The length of the working distance of the long working distance microscope objective is larger than that of the broadband depolarization beam splitter prism III.
The achromatic lens and the long working distance microscope objective are placed in a confocal mode.
A method for using a stable dual-wavelength real-time interference microscopy device comprises the following steps:
1) The light wave with the wavelength lambda 1 emitted by the laser passes through the first polarizing film and is converted into polarized light in the horizontal direction, the light wave with the wavelength lambda 2 emitted by the laser passes through the second polarizing film and is converted into polarized light in the vertical direction, the polarized light in the horizontal direction and the polarized light in the vertical direction have the same transmission direction after being combined by the broadband depolarization beam splitter prism, and then the polarized light in the horizontal direction and the polarized light in the vertical direction are converted into parallel light by the beam expanding collimator;
2) Light waves with two wavelengths pass through an achromatic lens and a long working distance microscope objective, and then are subjected to three-beam splitting through a broadband depolarization beam splitter prism to illuminate a sample;
3) After being reflected by the broadband non-polarization beam splitter prism, the light wave passing through the long working distance microscope objective enters the broadband polarization beam splitter prism, and a polarized light lambda 1 light wave in the horizontal direction is transmitted to illuminate the first reflecting mirror; the polarized light lambda 2 light wave in the vertical direction is reflected by the light splitting layer of the broadband polarization light splitting prism and is emitted to a second reflecting mirror;
4) An object light wave path reflected from a sample passes through a broadband depolarization beam splitter prism III, a long working distance microscope objective and an achromatic lens, and then is reflected by a broadband depolarization beam splitter prism II to form two amplified real images corresponding to wavelengths lambda 1 and lambda 2 on a CCD camera light sensing surface;
5) After being reflected by the first reflector, the polarized light lambda 1 light wave in the horizontal direction penetrates through the broadband polarization beam splitter prism, is reflected by the broadband depolarization beam splitter prism, passes through the long working distance microscope objective and the achromatic lens, is reflected by the broadband depolarization beam splitter prism, reaches the photosensitive surface of the CCD camera, and is used as reference light to interfere with the object light wave to form off-axis interference fringes;
6) The density and the trend of off-axis interference fringes formed by the polarized light lambda 1 light waves in the horizontal direction are adjusted by adjusting the pitching of the first reflector;
7) After being reflected by the second reflector, the polarized light lambda 2 light wave in the vertical direction is reflected by the broadband polarization beam splitter prism, reflected by the broadband depolarization beam splitter prism, reflected by the long working distance microscope objective lens and the achromatic lens, reflected by the broadband depolarization beam splitter prism and then reaches the photosensitive surface of the CCD camera to be used as reference light to interfere with the object light wave to form off-axis interference fringes;
8) The density and the trend of off-axis interference fringes formed by the wavelength lambda 2 can be adjusted by adjusting the pitching of the second reflector;
9) Adjusting the first reflector and the second reflector to enable the two wavelengths to form an off-axis interference pattern, wherein interference fringes are (approximately) vertical to each other;
10 The CCD camera records interference patterns with mutually orthogonal fringes, and the height distribution of the sample is obtained through reconstruction by combining the principle of dual-wavelength interference.
Compared with the prior art, the invention has the following advantages:
(1) The device is based on a long working distance microscope objective, the object light and the reference light experience almost the same path, and the device has an optical structure which is close to the common path of the object light and the reference light, is insensitive to the disturbance of the environment during measurement, and has high stability;
(2) The device is based on a long working distance microobjective and a small dual-wavelength polarization light splitting unit, and has simple and compact structure and convenient adjustment;
(3) The use method is simple, the propagation directions of the reference lights corresponding to the two wavelengths can be conveniently and quickly adjusted, off-axis interferograms with mutually vertical fringes can be obtained, and the dynamic change process can be measured in real time through recording of a black-and-white CCD.
(4) Two laser wavelengths can be flexibly selected to form a longer composite wavelength.
Drawings
FIG. 1 is a schematic diagram of a stable dual wavelength real-time interference microscopy apparatus;
FIG. 2 is a two-wavelength interferogram recorded with a CCD camera;
FIG. 3 is a height profile of a reconstructed sample;
in the figure: the device comprises a 1-laser I, a 2-polarizing plate I, a 3-laser II, a 4-polarizing plate II, a 5-broadband depolarization beam splitter prism I, a 6-beam expanding collimator, a 7-broadband depolarization beam splitter prism II, an 8-achromatism lens, a 9-long working distance microscope objective, a 10-broadband depolarization beam splitter prism III, an 11-broadband depolarization beam splitter prism, a 12-reflector I, a 13-reflector II, a 14-sample and a 15-CCD camera.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The function of the elements of the invention is as follows:
1) The output of the first laser 1 and the output of the second laser 3 are randomly polarized, the wavelength is within the visible light range, and the output power is stable;
2) The polarizing plates I2 and II 4 convert the illumination light waves into polarized light with mutually vertical vibration directions;
3) The broadband depolarization beam splitter prism I5 is used for beam combination; the broadband depolarization beam splitter prism II 7 is used for changing the propagation direction of the imaging light wave;
4) A beam expanding collimator 6 for expanding and collimating the laser beam into parallel light;
5) The achromatic lens 8 and the long working distance microscope objective 9 form a telescope system;
6) A long working distance microobjective 9 for magnifying the microscopic object;
7) The broadband depolarization beam splitter prism III 10 is used for unpolarized beam splitting of the illumination light waves and beam combination of the reflection light waves;
8) The broadband polarization beam splitter prism 11 is used for splitting the wave of two linearly polarized light beams with mutually vertical vibration directions and combining the two beams of reference light beams reflected by the first reflector 12 and the second reflector 13;
9) The first reflector 12 and the second reflector 13 reflect the returned light as reference light;
10 CCD camera 15 which records the interferogram.
The principle of the invention is as follows: the invention carries out polarization modulation on two light waves with different wavelengths on the basis of a long working distance microobjective, a broadband depolarization beam splitter prism III and a broadband polarization beam splitter prism are added between the front end surface of the long working distance microobjective and a reflector, a stable dual-wavelength microinterference device is constructed, light reflected back by the two reflectors is used as reference light, and object light waves interfere on a CCD light sensing surface, and the density and the trend of interference fringes formed by the two wavelengths can be changed by adjusting the two reflectors. A monochromatic CCD camera can simultaneously record corresponding, fringe-orthogonal interferograms of two wavelengths. Because of the fringe (approximate) mutually orthogonal off-axis interferogram, the +1 level frequency spectrums corresponding to two wavelengths lambda 1 and lambda 2 can be respectively filtered out on the frequency spectrum surface by adopting a Fourier transform algorithm, and the corresponding wrapping phase can be obtained after inverse Fourier transform
According to the principle of dual-wavelength interference, the depth of the step-shaped sample can be obtained:
the invention relates to a stable dual-wavelength real-time interference microscopic device (see figure 1), which comprises a laser I1, a polaroid I2, a laser II 3, a polaroid II 4, a broadband depolarization beam splitter prism I5, a beam expanding collimator 6, a broadband depolarization beam splitter prism II 7, an achromatic lens 8, a long working distance microobjective 9, a broadband depolarization beam splitter prism III 10, a broadband polarization beam splitter prism 11, a reflector I12, a reflector II 13, a sample 14 and a CCD camera 15, wherein the long working distance microobjective is arranged on the laser I1;
the device comprises a laser I1, a polaroid I2, a broadband depolarization beam splitting prism I5, a beam expanding collimator 6, a broadband depolarization beam splitting prism II 7, an achromatic lens 8, a long working distance microscope objective 9, a broadband depolarization beam splitting prism III 10 and a sample 14 which are sequentially arranged along the direction of an optical axis, wherein the laser II 3 is vertically arranged on the broadband depolarization beam splitting prism I5, and a polaroid II 4 is arranged between the laser II 3 and the broadband depolarization beam splitting prism I5; the CCD camera 15 is vertically arranged on the broadband depolarization beam splitter prism II 7; the broadband polarization beam splitter prism 11 and the broadband depolarization beam splitter prism three 10 are arranged perpendicularly, and a first reflecting mirror 12 and a second reflecting mirror 13 are respectively arranged on two perpendicular surfaces of the broadband polarization beam splitter prism 11.
The length of the working distance of the long working distance microscope objective 9 is longer than that of the broadband non-polarization beam splitter prism III 10.
The second broadband depolarization beam splitter prism 7 is placed in front of the long working distance microscope objective 9 and plays a role in changing the direction of an imaging light beam;
the first reflecting mirror 12 and the second reflecting mirror 13 are arranged behind the broadband polarization beam splitter prism 11, the distance between the first reflecting mirror and the broadband polarization beam splitter prism 11 and the front end surface of the long working distance objective lens 9 is equal to the working distance of the objective lens, and the pitching of the first reflecting mirror and the long working distance objective lens is adjustable and used for changing the propagation direction of the reference light;
the light sensing surface of the CCD camera 15 is arranged on the image plane of the sample 14;
the achromatic lens 8 and the long working distance microscope objective 9 are arranged in a confocal mode.
A use method or a working principle of a stable dual-wavelength real-time interference microscopic device comprises the following steps:
during measurement, the sample 14 is arranged at the working distance of the microscope objective 9 with long working distance, and the position of the light-sensitive surface of the CCD camera 15 meets the object-image conjugate relation.
After the sample is placed, the following procedure is followed:
1) The light wave with the wavelength lambda 1 emitted by the first laser 1 passes through the first polarizing film 2 and is converted into polarized light in the horizontal direction, the light wave with the wavelength lambda 2 emitted by the second laser 3 passes through the second polarizing film 4 and is converted into polarized light in the vertical direction, the polarized light in the horizontal direction and the polarized light in the vertical direction are converged by the first broadband depolarization beam splitter prism 5 and have the same transmission direction, and then the polarized light in the horizontal direction and the polarized light in the vertical direction are converted into parallel light by the beam expanding collimator 6;
2) Light waves with two wavelengths pass through an achromatic lens 8 and a long working distance microobjective 9, are split through a broadband depolarization beam splitter prism III 10, and then illuminate a sample 14;
3) The light wave passing through the long working distance microscope objective 9 is reflected by the broadband depolarization beam splitter prism three 10 and enters the broadband depolarization beam splitter prism 11, and the polarized light lambda 1 light wave in the horizontal direction is transmitted to the illumination reflector one 12; the polarized light lambda 2 light wave in the vertical direction is reflected by the light splitting layer of the broadband polarization light splitting prism 11 and is emitted to the second reflecting mirror 13;
4) An object light wave path reflected from a sample 14 passes through a broadband depolarization beam splitter prism III 10, a long working distance microscope objective 9 and an achromatic lens 8, and then is reflected by a broadband depolarization beam splitter prism II 7 to form two amplified real images corresponding to wavelengths lambda 1 and lambda 2 at the position of a light sensing surface of a CCD camera 15;
5) After being reflected by a first reflector 12, a polarized light lambda 1 light wave in the horizontal direction penetrates through a broadband polarization beam splitter prism 11, is reflected by a broadband depolarization beam splitter prism III 10, passes through a long working distance microscope objective 9 and an achromatic lens 8, is reflected by a broadband depolarization beam splitter prism II 7, reaches a focal plane of a CCD camera 15, and is used as a reference light to interfere with an object light wave to form an off-axis interference fringe;
6) The density and the trend of off-axis interference fringes formed by the polarized light lambda 1 light waves in the horizontal direction are adjusted by adjusting the pitching of the first reflector 12;
7) After being reflected by a second reflector 13, the polarized light lambda 2 light wave in the vertical direction is reflected by a broadband polarization beam splitter prism 11, reflected by a third broadband depolarization beam splitter prism 10, reflected by a long working distance microscope objective 9 and an achromatic lens 8, reflected by a second broadband depolarization beam splitter prism 7, and reaches a photosensitive surface of a CCD camera 15 to be used as reference light to interfere with the object light wave to form off-axis interference fringes;
8) The density and the trend of off-axis interference fringes formed by the wavelength lambda 2 can be adjusted by adjusting the pitching of the second reflector 13;
9) Adjusting the first reflector 12 and the second reflector 13 to make the two wavelengths form an off-axis interference pattern, and the interference fringes are perpendicular to each other (see fig. 2);
10 CCD camera 15 records the interferogram and the phase height distribution of the sample is obtained in combination with the principle of two-wavelength interference (see fig. 3).
The embodiment is as follows:
the laser 1 is a He-Ne laser with the wavelength of 633nm, and the output is random polarization; a second laser 3, a semiconductor laser with the wavelength of 680nm, outputs random polarization; the resulting wavelength was Λ =9158nm: polarizer one 2, extinction ratio 100, with the axis of transmission placed along the horizontal direction (horizontal light vibration direction); polarizer two 4, extinction ratio 100, with the transmission axis placed in the vertical direction (vertical light vibration direction); the broadband depolarization beam splitter prism I5 and the broadband depolarization beam splitter prism II 7 are respectively provided with the side length of 25.4mm, the working wavelength band of 450-680nm and the transmittance-reflectance ratio of 50; the beam expanding collimator 6 expands and collimates the combined laser into a parallel beam with the diameter of 30 mm; an achromatic lens 8 with a diameter of 40mm and a focal length of 150mm; a long working distance microscope objective 9, the numerical aperture of which is 0.28, the magnification factor of which is 10 x and the working distance of which is 33.5mm; a broadband depolarization beam splitter prism III 10 with the size of 12.7mm multiplied by 12.7mm, the working wavelength band of 450-680nm and the transflective ratio of 50; the broadband polarization beam splitter prism 11 has the size of 12.7mm multiplied by 12.7mm, the working wavelength band of 450-680nm and the transflective ratio of 50; a first reflector 12 and a second reflector 13, the size of which is 10mm multiplied by 10mm; the measured sample 14 is a reflective step with a nominal depth of 1.8 μm, the reflected light is used as object light wave, and generates interference pattern with the reference light; obtaining interference patterns of proper spacing (fringe periods corresponding to two wavelengths are respectively 32 μm and 45 μm, both of which can be accurately sampled by a CCD camera) and fringe trend by adjusting the first reflecting mirror 12 and the second reflecting mirror 13, and recording the interference patterns by the CCD camera (see FIG. 2, FIG. 2 is an enlarged display of a small part of the interference patterns); a CCD camera 15, a black and white camera, a pixel size of 6.45 Mum multiplied by 6.45 Mum, a resolution of 1388 multiplied by 1040, and an interference pattern recording; the recorded interferogram is numerically reconstructed to obtain depth information of the sample, and the depth is measured to be 1.805 μm (see fig. 3), which is consistent with a nominal value.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention.
Claims (1)
1. A use method of a stable dual-wavelength real-time interference microscopic device is characterized by comprising the following steps: the method comprises the following steps:
1) a light wave with a wavelength lambda 1 emitted by a first laser (1) passes through a first polarizing film (2) and is changed into polarized light in the horizontal direction, a light wave with a wavelength lambda 2 emitted by a second laser (3) passes through a second polarizing film (4) and is changed into polarized light in the vertical direction, the polarized light in the horizontal direction and the polarized light in the vertical direction have the same transmission direction after being combined by a first broadband depolarization beam splitter prism (5), and then the polarized light in the horizontal direction and the polarized light in the vertical direction are changed into parallel light by a beam expanding collimator (6);
2) Light waves with two wavelengths pass through an achromatic lens (8) and a long working distance microscope objective (9), are split through a broadband depolarization beam splitter prism (10) and illuminate a sample (14);
3) After being reflected by a broadband non-polarization beam splitter prism III (10), the light wave passing through the long working distance microscope objective (9) enters a broadband polarization beam splitter prism (11), and a polarized light lambda 1 light wave in the horizontal direction is transmitted to illuminate a first reflector (12); the polarized light lambda 2 light wave in the vertical direction is reflected by the light splitting layer of the broadband polarization light splitting prism (11) and is emitted to a second reflecting mirror (13);
4) An object light wave path reflected from a sample (14) passes through a broadband depolarization beam splitter prism III (10), a long working distance microscope objective (9) and an achromatic lens (8), and then is reflected by a broadband depolarization beam splitter prism II (7) to form two amplified real images corresponding to wavelengths lambda 1 and lambda 2 on a photosensitive surface of a CCD camera (15);
5) After being reflected by a first reflector (12), a polarized light lambda 1 light wave in the horizontal direction penetrates through a broadband polarization beam splitter prism (11), is reflected by a broadband depolarization beam splitter prism (10), passes through a long working distance microscope objective (9) and an achromatic lens (8), is reflected by a second broadband depolarization beam splitter prism (7), reaches a photosensitive surface of a CCD camera (12), and is used as a reference light to interfere with an object light wave to form an off-axis interference fringe;
6) The density and the trend of off-axis interference fringes formed by the polarized light lambda 1 light waves in the horizontal direction are adjusted through an adjusting reflector I (12);
7) After being reflected by a second reflector (13), the polarized light lambda 2 light wave in the vertical direction is reflected by a broadband polarization beam splitter prism (11), reflected by a third broadband depolarization beam splitter prism (10), reflected by a long working distance microscope objective (9) and an achromatic lens (8), then reflected by a second broadband depolarization beam splitter prism (7), reaches a photosensitive surface of a CCD camera (12) and is used as reference light to interfere with object light waves to form off-axis interference fringes;
8) The density and the trend of off-axis interference fringes formed by the wavelength lambda 2 can be adjusted by adjusting the pitching of the second reflector (13);
9) Adjusting a first reflector (12) and a second reflector (13) to enable the two wavelengths to form an off-axis interference pattern, wherein interference fringes are vertical to each other;
10 CCD camera (15) records the interferogram, and the height distribution of the sample is obtained by combining the principle of two-wavelength interference.
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