CN107449361A - A kind of dual wavelength of stabilization interferes microscope equipment and its application method in real time - Google Patents
A kind of dual wavelength of stabilization interferes microscope equipment and its application method in real time Download PDFInfo
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- CN107449361A CN107449361A CN201710609551.1A CN201710609551A CN107449361A CN 107449361 A CN107449361 A CN 107449361A CN 201710609551 A CN201710609551 A CN 201710609551A CN 107449361 A CN107449361 A CN 107449361A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
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Abstract
The present invention relates to a kind of dual wavelength of stabilization to interfere microscope equipment and its application method in real time.The technical solution adopted by the present invention includes laser one, polarizer one, broadband depolarization Amici prism one, beam-expanding collimation device, broadband depolarization Amici prism two, achromatic lens, long reach microcobjective, broadband depolarization Amici prism three and the sample set successively along optical axis direction, laser two is vertically installed on broadband depolarization Amici prism one, between be provided with polarizer two；CCD camera is vertically installed on broadband depolarization Amici prism two, and wideband polarization Amici prism is vertically arranged with broadband depolarization Amici prism three, and speculum one and speculum two are arranged on two perpendicular faces of wideband polarization Amici prism.Based on long reach microcobjective and small-sized dual wave length spectrophotometry unit, CCD camera can be recorded corresponding to two wavelength the device in real time, the off-axis interference pattern that striped is mutually orthogonal, and the phase distribution of sample is obtained by fourier transform algorithm.
Description
Technical field
The present invention relates to a kind of dual wavelength of stabilization to interfere microscope equipment and its application method in real time.
Background technology
It is application of the optical interference techniques in micro- field to interfere microtechnic, can the whole audience due to interfering microtechnic to have
Measure, without fluorescence labeling and axially measured the advantages that can reach nano-precision, in optical detection, micro-imaging, semiconductor
The field such as processing detection and biomedical imaging obtains a wide range of applications.Off-axis interference microtechnic can be done off axis from a width
The phase distribution that object is reconstructed in figure is related to, there is the advantages of can measuring in real time.But the off-axis interference technique of Single wavelength is scarce
Putting is：When measuring step-like sample, can the maximum light path of scaffold tower rank be necessarily less than the half of wavelength, phase otherwise just occurs
It is fuzzy, even if can not solve this problem using phase unwrapping algorithm.And the detection of deep step-like sample, in MEMS, half
There is urgent demand in the fields such as conductor manufacture.Dual wavelength interference can effectively measure deep step-like sample.Interfere in dual wavelength
In, can be synthesized to obtain a longer λ 2/ of wavelength Λ=λ 1 with two shorter wavelength Xs 1, λ 2 | λ 1- λ 2 |, when two wavelength
Interval it is smaller when, long synthetic wavelength can be obtained, so as to extend phase measurement without parcel scope, it is possible to achieve to depth
The measurement of step-like sample.
Chinese Academy of Sciences's Xi'an ray machine Min Junwei et al. (issue 2 of Applied Optics, volume 51,
2012), J.Kuhn of Swiss Federal Institute of Technology etc. (Optics Express, volume 15, issue 12,2007) and
Other seminars propose a variety of dual wavelength interference microscopies in real time respectively, and in these methods, CCD (or CMOS) camera can
To gather off-axis interference pattern that two width different wave length λ 1, λ 2 are formed, that interference fringe (approximation) is mutually orthogonal simultaneously, so as to realize
Measurement in real time.But these devices are normally based on the interferometer of the open-circuit structures such as Mach-Zehnder, Tai Man-Green, due to these
Object light, reference light pass through different paths respectively in device, and the disturbance to vibration, air is more sensitive, cause to measure stability
Difference.
The content of the invention
The present invention is to solve the above problems, provide a kind of dual wavelength of stabilization interferes microscope equipment and its user in real time
Method, the device are based on long reach microcobjective and dual wave length spectrophotometry unit, and CCD camera can record two wavelength pair in real time
Off-axis interference pattern answering, striped is mutually orthogonal, the phase distribution of sample is obtained by fourier transform algorithm, realizes and surveys
It is high to measure stability.
To solve the problems, such as that prior art is present, the technical scheme is that：A kind of dual wavelength of stabilization is interfered in real time
Microscope equipment, it is characterised in that：Including laser one, polarizer one, laser two, polarizer two, broadband depolarization light splitting rib
Mirror one, beam-expanding collimation device, broadband depolarization Amici prism two, achromatic lens, long reach microcobjective, broadband depolarization
Amici prism three, wideband polarization Amici prism, speculum one, speculum two, sample and CCD camera；
Described laser one, polarizer one, broadband depolarization Amici prism one, beam-expanding collimation device, broadband depolarization point
Light prism two, achromatic lens, long reach microcobjective, broadband depolarization Amici prism three and sample are successively along optical axis side
To setting, described laser two is vertically installed on broadband depolarization Amici prism one, and described polarizer two is arranged at
Between laser two and broadband depolarization Amici prism one；CCD camera is vertically installed on the unpolarized Amici prism two in broadband,
Wideband polarization Amici prism is vertically arranged with broadband depolarization Amici prism three, two perpendicular faces of wideband polarization Amici prism
On be respectively arranged with speculum one and speculum two.
The length of the operating distance of described long reach microcobjective is more than the length of broadband depolarization Amici prism three
Degree.
Described achromatic lens, the confocal placement of long reach microcobjective.
A kind of dual wavelength of stabilization interferes the application method of microscope equipment in real time, comprises the steps：
1) light wave for the wavelength X 1 that laser one is sent passes through polarizer one, is changed into the polarised light of horizontal direction, laser
The light wave of two wavelength Xs 2 sent passes through polarizer two, is changed into the polarised light of vertical direction, the polarised light of horizontal direction and vertical
The polarised light in direction direction of propagation after broadband depolarization Amici prism one closes beam is consistent, is then changed into parallel through beam-expanding collimation device
Light；
2) light wave of two wavelength is by achromatic lens, long reach microcobjective, then by broadband depolarization
Amici prism three is divided back lighting sample；
3) by the light wave of long reach microcobjective after the unpolarized Amici prism three in broadband reflects, into broadband
Transillumination speculum one occurs for polarization splitting prism, the light waves of polarised light λ 1 of horizontal direction；The light of polarised light λ 2 of vertical direction
Ripple is reflected by the beam splitter layer of wideband polarization Amici prism, directive speculum two；
4) from sample reflection Object light wave original road by broadband depolarization Amici prism three, long reach microcobjective,
Achromatic lens, then after the reflection of broadband depolarization Amici prism two, in CCD camera photosurface into two wavelength Xs 1, λ 2
Corresponding amplification real image；
5) light waves of polarised light λ 1 of horizontal direction are after the reflection of speculum one, through wideband polarization Amici prism, through broadband
Depolarization Amici prism three reflects, and through long reach microcobjective, achromatic lens, is then divided rib by broadband depolarization
After mirror two reflects, CCD camera photosurface is reached, is interfered as reference light and Object light wave, forms off-axis interference fringe；
6) density for the off-axis interference fringe that the light waves of polarised light λ 1 of horizontal direction are formed, trend are by adjusting speculum one
Pitching be adjusted；
7) light waves of polarised light λ 2 of vertical direction reflect, through width after the reflection of speculum two through wideband polarization Amici prism
Band depolarization Amici prism three reflects, and through long reach microcobjective, achromatic lens, is then divided by broadband depolarization
After prism two reflects, CCD camera photosurface is reached, is interfered as reference light and Object light wave, forms off-axis interference fringe；
8) density for the off-axis interference fringe that wavelength X 2 is formed, trend can be adjusted by adjusting the pitching of speculum two
It is whole；
9) adjusting speculum one and speculum two makes two wavelength form off-axis interference pattern, and interference fringe (approximation) is mutual
Vertically；
10) the mutually orthogonal interference pattern of CCD camera recorded fringe, undergo reconstruction to obtain sample with reference to the principle that dual wavelength is interfered
The height distribution of product.
Compared with prior art, advantages of the present invention is as follows：
(1) device is based on a long reach microcobjective, and object light and reference light undergo almost duplicate road
Footpath, there is proximity object, the optical texture on Can Guanggong roads, disturbance during measurement to environment is insensitive, and stability is high；
(2) device is simple in construction, tight based on long reach microcobjective and small-sized dual wavelength polarization spectro unit
Gather, it is easy to adjust；
(3) application method is simple, and the direction of propagation of reference light can conveniently adjust corresponding to two wavelength, can obtain
To the orthogonal off-axis interference pattern of striped, recorded by black-white CCD, dynamic changing process can be measured in real time.
(4) two optical maser wavelengths can be selected flexibly, form longer synthetic wavelength.
Brief description of the drawings
A kind of dual wavelengths of stabilization of Fig. 1 interfere the structural representation of microscope equipment in real time；
Fig. 2 utilizes the dual wavelength interference pattern of CCD camera record；
Fig. 3 rebuilds the height distribution map of sample；
In figure：1- lasers one, 2- polarizers one, 3- lasers two, 4- polarizers two, 5- broadbands depolarization Amici prism
One, 6- beam-expanding collimation device, 7- broadbands depolarization Amici prism two, 8- achromatic lens, 9- long reach microcobjectives, 10-
Broadband depolarization Amici prism three, 11- wideband polarization Amici prisms, 12- speculums one, 13- speculums two, 14- samples, 15-
CCD camera.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The function of of the invention element is as follows：
1) laser 1, laser 23, export as random polarization, wavelength is in visible-range, stable output power；
2) polarizer 1, polarizer 24, lighting light wave is made to be changed into the orthogonal polarised light of direction of vibration；
3) broadband depolarization Amici prism 1, for closing beam；Broadband depolarization Amici prism 27, is changed over as light wave
The direction of propagation；
4) beam-expanding collimation device 6, it is directional light for laser beam to be expanded, collimated；
5) achromatic lens 8 and long reach microcobjective 9 form telescopic system；
6) long reach microcobjective 9, for amplifying micro-object；
7) broadband depolarization Amici prism 3 10, for the unpolarized light splitting of lighting light wave and the conjunction beam of reflecting light；
8) wideband polarization Amici prism 11, the orthogonal linear polarized beams of two direction of vibration are divided, and to by anti-
Penetrate mirror 1, two beams that speculum 2 13 reflects back refer to combiner；
9) speculum 1, speculum 2 13, the light reflected back is as reference light；
10) CCD camera 15, interference pattern is recorded.
The principle of the invention：The present invention enters on the basis of long reach microcobjective to the light wave of two different wave lengths
Row Polarization Modulation, by adding broadband depolarization Amici prism between the front end face and speculum of long reach microcobjective
Three and wideband polarization Amici prism, construct stable dual wavelength micro-interference device, the light reflected back by two speculums
Interfered as reference light, and Object light wave on CCD photosurfaces, by adjusting two speculums, thus it is possible to vary two wavelength
The density and trend of the interference fringe of formation.Monochromatic CCD camera can record the corresponding of two wavelength, striped simultaneously mutually just
The interference pattern of friendship., can be in frequency plane using fourier transform algorithm due to being the mutually orthogonal off-axis interference pattern of striped (approximation)
It is upper to filter out two wavelength Xs 1, λ 2 corresponding+1 grade of frequency spectrum respectively respectively, after inverse fourier transform, it can obtain corresponding parcel
PhaseThe principle interfered according to dual wavelength, the depth of step-like sample can be obtained：
Interfere microscope equipment (referring to Fig. 1) in real time the present invention relates to a kind of dual wavelength of stabilization, including laser 1, partially
Shake piece 1, laser 23, polarizer 24, broadband depolarization Amici prism 1, beam-expanding collimation device 6, broadband depolarization light splitting
Prism 27, achromatic lens 8, long reach microcobjective 9, broadband depolarization Amici prism 3 10, wideband polarization light splitting rib
Mirror 11, speculum 1, speculum 2 13, sample 14 and CCD camera 15；
Described laser 1, polarizer 1, broadband depolarization Amici prism 1, beam-expanding collimation device 6, broadband are depolarized
Shake Amici prism 27, achromatic lens 8, long reach microcobjective 9, broadband depolarization Amici prism 3 10 and sample 14
Set successively along optical axis direction, described laser 23 is vertically installed on broadband depolarization Amici prism 1, described
Polarizer 24 is arranged between laser 23 and broadband depolarization Amici prism 1；CCD camera 15 is vertically installed in broadband and disappeared
On polarization splitting prism 27；Wideband polarization Amici prism 11 is vertically arranged with broadband depolarization Amici prism 3 10, and broadband is inclined
The Amici prism 11 that shakes is respectively arranged with speculum 1 and speculum 2 13 on two perpendicular faces.
The length of the operating distance of described long reach microcobjective 9 is more than the unpolarized Amici prism 3 10 in broadband
Length.
Described broadband depolarization Amici prism 27 is positioned over before long reach microcobjective 9, is played and is changed over picture
The effect of beam direction；
Described speculum 1, speculum 2 13, are placed on after wideband polarization Amici prism 11, both arrive long work
Distance apart from the front end face of object lens 9 is equal to the operating distance of object lens, and its pitching is adjustable, to change the direction of propagation of reference light；
Described its photosurface of CCD camera 15 is placed in the image plane of sample 14；
Described achromatic lens 8, the 9 confocal placement of long reach microcobjective.
A kind of dual wavelength of stabilization interferes the application method or operation principle of microscope equipment in real time：
In measurement, sample 14 is arranged at the operating distance of long reach microcobjective 9, photosensitive with CCD camera 15
Face position meets thing, image conjugate relation.
After placing sample, in the following manner：
1) light wave for the wavelength X 1 that laser 1 is sent passes through polarizer 1, is changed into the polarised light of horizontal direction, laser
The light wave for the wavelength X 2 that device 23 is sent passes through polarizer 24, is changed into the polarised light of vertical direction, the polarised light of horizontal direction and
The polarised light of vertical direction direction of propagation after broadband depolarization Amici prism 1 closes beam is consistent, then becomes through beam-expanding collimation device 6
For directional light；
2) light wave of two wavelength is then depolarized by broadband by achromatic lens 8, long reach microcobjective 9
The Amici prism 3 10 that shakes light splitting back lighting sample 14；
3) entered by the light wave of long reach microcobjective 9 after the reflection of broadband depolarization Amici prism 3 10
Transillumination speculum 1 occurs for wideband polarization Amici prism 11, the light waves of polarised light λ 1 of horizontal direction；Vertical direction it is inclined
The light waves of light λ 2 that shake are reflected by the beam splitter layer of wideband polarization Amici prism 11, directive speculum 2 13；
4) from the Object light wave original road that sample 14 reflects by broadband depolarization Amici prism 3 10, the micro- thing of long reach
Mirror 9, achromatic lens 8, then after the reflection of broadband depolarization Amici prism 27, in the photosurface position of CCD camera 15 into two
Amplification real image corresponding to individual wavelength X 1, λ 2；
5) light waves of polarised light λ 1 of horizontal direction are after the reflection of speculum 1, through wideband polarization Amici prism 11, warp
Broadband depolarization Amici prism 3 10 reflects, then depolarized by broadband through long reach microcobjective 9, achromatic lens 8
After the Amici prism 27 that shakes reflection, the focal plane of CCD camera 15 is reached, is interfered as reference light and Object light wave, formed off-axis dry
Relate to striped；
6) density for the off-axis interference fringe that the light waves of polarised light λ 1 of horizontal direction are formed, trend are by adjusting speculum one
12 pitching is adjusted；
7) light waves of polarised light λ 2 of vertical direction reflect after the reflection of speculum 2 13 through wideband polarization Amici prism 11,
Reflect through broadband depolarization Amici prism 3 10, through long reach microcobjective 9, achromatic lens 8, then disappear by broadband
After polarization splitting prism 27 reflects, the photosurface of CCD camera 15 is reached, is interfered as reference light and Object light wave, formed off-axis
Interference fringe；
8) density for the off-axis interference fringe that wavelength X 2 is formed, trend can be carried out by adjusting the pitching of speculum 2 13
Adjustment；
9) adjusting speculum 1 and speculum 2 13 makes two wavelength form off-axis interference pattern, and interference fringe is mutually hung down
Directly (referring to Fig. 2)；
10) CCD camera 15 records interference pattern, and the phase height distribution (ginseng of sample is obtained with reference to the principle that dual wavelength is interfered
See Fig. 3).
Embodiment：
Laser 1, wavelength 633nm He-Ne lasers, is exported as random polarization；Laser 23, wavelength 680nm's
Semiconductor laser, export as random polarization；The synthetic wavelength of formation is Λ=9158nm：Polarizer 1, extinction ratio 100:1,
Shaking thoroughly, axle in the horizontal direction place by (horizontal optical vibration direction)；Polarizer 24, extinction ratio 100:1, axle is shaken thoroughly vertically
(vertical optical vibration direction) is placed；Broadband depolarization Amici prism 1, broadband depolarization Amici prism 27, length of side 25.4mm,
Service band 450-680nm, transflector is than 50:50；Beam-expanding collimation device 6, it is diameter 30mm the laser beam expanding after conjunction beam, collimation
Collimated light beam；Achromatic lens 8, diameter 40mm, focal length 150mm；Long reach microcobjective 9, numerical aperture 0.28, puts
Big multiple 10 ×, operating distance 33.5mm；Broadband depolarization Amici prism 3 10, size 12.7mm × 12.7mm × 12.7mm,
Service band 450-680nm, transflector is than 50:50；Wideband polarization Amici prism 11, size 12.7mm × 12.7mm ×
12.7mm, service band 450-680nm, transflector is than 50:50；Speculum 1, speculum 2 13, size 10mm × 10mm；
Sample 14, it is the reflective step that a nominal depth is 1.8 μm, the light reflected back is as Object light wave, and and reference
Light interferes generation interference pattern；By adjusting speculum 1, speculum 2 13 obtain appropriate spacing (corresponding to two wavelength
Fringe period is respectively 32 μm and 45 μm, both can accurately be sampled by CCD camera) and striped trend interference pattern, be used in combination
CCD camera record (referring to Fig. 2, Fig. 2 is that the amplification of sub-fraction interference pattern is shown)；CCD camera 15, black and white camera, pixel chi
Very little 6.45 μm of 6.45 μ m, resolution ratio 1388 × 1040, record interference pattern；Interference pattern after record obtains sample by numerical reconstruction
The depth information of product, it is 1.805 μm (referring to Fig. 3) to measure depth, is matched with nominal value.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.
Claims (4)
1. a kind of dual wavelength of stabilization interferes microscope equipment in real time, it is characterised in that：Including laser one (1), polarizer one
(2), laser two (3), polarizer two (4), broadband depolarization Amici prism one (5), beam-expanding collimation device (6), broadband depolarization
Amici prism two (7), achromatic lens (8), long reach microcobjective (9), broadband depolarization Amici prism three (10), width
Band polarization splitting prism (11), speculum one (12), speculum two (13), sample (14) and CCD camera (15)；
Described laser one (1), polarizer one (2), broadband depolarization Amici prism one (5), beam-expanding collimation device (6), broadband
Depolarization Amici prism two (7), achromatic lens (8), long reach microcobjective (9), broadband depolarization Amici prism three
(10) set successively along optical axis direction with sample (14), described laser two (3) is vertically installed in broadband depolarization light splitting rib
On mirror one (5), described polarizer two (4) is arranged between laser two (3) and broadband depolarization Amici prism one (5)；
CCD camera (15) is vertically installed on broadband depolarization Amici prism two (7), and wideband polarization Amici prism (11) disappears with broadband
Polarization splitting prism three (10) is vertically arranged, and wideband polarization Amici prism (11) is respectively arranged with reflection on two perpendicular faces
Mirror one (12) and speculum two (13).
2. a kind of dual wavelength of stabilization according to claim 1 interferes microscope equipment in real time, it is characterised in that：Described length
The length of the operating distance of operating distance microcobjective (9) is more than the length of broadband depolarization Amici prism three (10).
3. a kind of dual wavelength of stabilization according to claim 1 or 2 interferes microscope equipment in real time, it is characterised in that：It is described
Achromatic lens (8), long reach microcobjective (9) confocal placement.
4. a kind of dual wavelength of stabilization according to claim 1 interferes the application method of microscope equipment in real time, its feature exists
In：Comprise the steps：
1) light wave for the wavelength X 1 that laser one (1) is sent passes through polarizer one (2), is changed into the polarised light of horizontal direction, laser
The light wave for the wavelength X 2 that device two (3) is sent passes through polarizer two (4), is changed into the polarised light of vertical direction, the polarization of horizontal direction
The direction of propagation after broadband depolarization Amici prism one (5) closes beam is consistent with the polarised light of vertical direction for light, then through expanding standard
Straight device (6) is changed into directional light；
2) light wave of two wavelength is then depolarized by broadband by achromatic lens (8), long reach microcobjective (9)
The Amici prism three (10) that shakes light splitting back lighting sample (14)；
3) entered by the light wave of long reach microcobjective (9) after unpolarized Amici prism three (10) reflection in broadband
Transillumination speculum one (12) occurs for wideband polarization Amici prism (11), the light waves of polarised light λ 1 of horizontal direction；Vertical direction
The light waves of polarised light λ 2 by wideband polarization Amici prism (11) beam splitter layer reflect, directive speculum two (13)；
4) from the Object light wave original road of sample (14) reflection by broadband depolarization Amici prism three (10), the micro- thing of long reach
Mirror (9), achromatic lens (8), then after broadband depolarization Amici prism two (7) reflection, in CCD camera (15) photosurface
Into amplification real image corresponding to two wavelength Xs 1, λ 2；
5) light waves of polarised light λ 1 of horizontal direction are after speculum one (12) reflection, through wideband polarization Amici prism (11), warp
Broadband depolarization Amici prism three (10) reflects, through long reach microcobjective (9), achromatic lens (8), then through wide
After band depolarization Amici prism two (7) reflection, CCD camera (12) photosurface is reached, is interfered as reference light and Object light wave,
Form off-axis interference fringe；
6) density for the off-axis interference fringe that the light waves of polarised light λ 1 of horizontal direction are formed, trend are by adjusting speculum one (12)
It is adjusted；
7) light waves of polarised light λ 2 of vertical direction reflect after speculum two (13) reflection through wideband polarization Amici prism (11),
Reflect through broadband depolarization Amici prism three (10), through long reach microcobjective (9), achromatic lens (8), then pass through
After broadband depolarization Amici prism two (7) reflection, CCD camera (12) photosurface is reached, is occurred as reference light and Object light wave dry
Relate to, form off-axis interference fringe；
8) density for the off-axis interference fringe that wavelength X 2 is formed, trend can be adjusted by adjusting the pitching of speculum two (13)
It is whole；
9) adjusting speculum one (12) and speculum two (13) makes two wavelength form off-axis interference pattern, and interference fringe is mutually hung down
Directly；
10) CCD camera (15) record interference pattern, the height distribution of sample is obtained with reference to the principle that dual wavelength is interfered.
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| CN109116708A (en) * | 2018-10-19 | 2019-01-01 | 许之敏 | A kind of dual wavelength reflective digital holographic microscope |
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| CN112833781A (en) * | 2020-12-31 | 2021-05-25 | 佛山英智莱科技有限公司 | Double light source line structure light sensor |
| CN115113410A (en) * | 2022-06-17 | 2022-09-27 | 中国科学院上海光学精密机械研究所 | Multi-wavelength prism type space optical bridge |
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| CN112833781A (en) * | 2020-12-31 | 2021-05-25 | 佛山英智莱科技有限公司 | Double light source line structure light sensor |
| CN115113410A (en) * | 2022-06-17 | 2022-09-27 | 中国科学院上海光学精密机械研究所 | Multi-wavelength prism type space optical bridge |
| CN115113410B (en) * | 2022-06-17 | 2023-10-10 | 中国科学院上海光学精密机械研究所 | Multi-wavelength prism type space optical bridge |
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