CN108168425A - A kind of Digital holographic microscopy system with novel time-lapse system - Google Patents
A kind of Digital holographic microscopy system with novel time-lapse system Download PDFInfo
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- CN108168425A CN108168425A CN201810041032.4A CN201810041032A CN108168425A CN 108168425 A CN108168425 A CN 108168425A CN 201810041032 A CN201810041032 A CN 201810041032A CN 108168425 A CN108168425 A CN 108168425A
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- 238000009647 digital holographic microscopy Methods 0.000 title claims abstract description 32
- 230000003111 delayed effect Effects 0.000 claims abstract description 20
- 230000010287 polarization Effects 0.000 claims description 64
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
- G01B9/02047—Interferometers characterised by particular imaging or detection techniques using digital holographic imaging, e.g. lensless phase imaging without hologram in the reference path
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/10—Processes or apparatus for producing holograms using modulated reference beam
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/0005—Adaptation of holography to specific applications
- G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
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Abstract
The invention discloses a kind of Digital holographic microscopy system with novel time-lapse system, the technical solution adopted in the present invention is to include Digital holographic microscopy system using prism as delayed time system and using quarter-wave plate and speculum as the Digital holographic microscopy system of delayed time system；Wherein, the Digital holographic microscopy system using prism as delayed time system includes prism delay reflective digital holographic microscope light path and prism delay transmission-type digital holographic microscope light path；Reflective digital holographic microscope light path and transmission-type digital holographic microscope light path are included using quarter-wave plate and speculum as the Digital holographic microscopy system of delayed time system.It is easier to adjust and reach degree of precision the beneficial effects of the invention are as follows system.
Description
Technical field
The invention belongs to technical field of microscopy, are related to a kind of Digital holographic microscopy system with novel time-lapse system.
Background technology
The delayed time system of existing reflective digital holographic microscope is to be delayed using the mode that two vertical reflectors combine,
The optical path difference of reference light and object light is matched by adjusting the position of two speculums, so as to reach the mesh for realizing interference imaging
Mark.This system needs accurate control two-face mirror orthogonal, and mobile two-face mirror changes needs to reach simultaneously
It is higher to adjust difficult and precision prescribed for the purpose of light path.
Invention content
The purpose of the present invention is to provide a kind of Digital holographic microscopy systems with novel time-lapse system, and of the invention has
Beneficial effect is that system is easier to adjust and reach degree of precision.
The technical solution adopted in the present invention be include Digital holographic microscopy system using prism as delayed time system and with
The Digital holographic microscopy system of quarter-wave plate and speculum as delayed time system；Wherein, using prism as delayed time system
Digital holographic microscopy system includes prism delay reflective digital holographic microscope light path and prism delay transmission-type digital hologram
Microscopes optical path；Reflective digital is included using quarter-wave plate and speculum as the Digital holographic microscopy system of delayed time system
Holographic microscope light path and transmission-type digital holographic microscope light path.
Further, in prism delay reflective digital holographic microscope light path, the linearly polarized light that light source is sent out is through the one or two
It is divided into the vertical light wave of two beam polarization states after/mono- wave plate and polarization splitting prism, wherein a branch of reflect by the first speculum
Exiting parallel is in sample surfaces after the first lens, unpolarized Amici prism and object lens successively afterwards, and sample reflected light is by non-
Polarization splitting prism reflection after by third collimated for plane wave incidence camera as object beam；Another beam is through polarization spectro rib
The light beam of mirror refraction is reference beam, this road light passes through the second half wave plate after prism inverts light beam 180 degree, successively
The incident camera after the convergence of the second lens, the reflection of the second speculum, the transmission of unpolarized Amici prism and third collimated, with
The interference fringe containing sample surface information is generated after object light beam interferometer after the conversion of camera number, computer is conveyed into, carries out
Digital reconstruction.
Further, in prism delay transmission-type digital holographic microscope light path, the linearly polarized light that light source is sent out is through the one or two
It is divided into the vertical light wave of two beam polarization states after/mono- wave plate and polarization splitting prism；Wherein transmitted light beam as object beam,
Pass through the first lens successively after the reflection of the first speculum, be irradiated in sample surfaces, after being collected by object lens, by unpolarized point
After light prismatic reflection by third collimated for plane wave incidence camera as object beam, another beam is reflected through polarization splitting prism
Light beam for reference beam, this road light passes through the second half wave plate after prism is by light beam 180 degree reflexed, successively by the
Incident camera after the convergence of two lens, the reflection of the second speculum, the transmission of unpolarized Amici prism and third collimated, with object beam
The interference fringe containing sample surface information is generated after interference after the conversion of camera number, is conveyed into computer, carries out number weight
It builds.
Further, in reflective digital holographic microscope light path, the linearly polarized light that light source is sent out is through the first half wave
It is divided into the vertical light wave of two beam polarization states after piece and polarization splitting prism；Wherein transmitted light beam passes through first as object beam
For exiting parallel in sample surfaces, sample is anti-after the first lens, unpolarized Amici prism and object lens successively after speculum reflection
Penetrate light by unpolarized Amici prism reflection after by third collimated for plane wave incidence camera as object beam；Another Shu Jing
The light beam of polarization splitting prism refraction is reference beam, this road light passes through quarter-wave plate after the reflection of third speculum, then
It is secondary to penetrate quarter-wave plate and polarization splitting prism, it is assembled successively by the reflection of the second speculum, the second lens, unpolarized point
Incident camera after light prism transmission and third collimated, with generating the interference item containing sample surface information after object light beam interferometer
Line is conveyed into computer after the conversion of camera number, carries out digital reconstruction.
Further, in transmission-type digital holographic microscope light path, the linearly polarized light that light source is sent out is through the first half wave
It is divided into the vertical light wave of two beam polarization states after piece and polarization splitting prism；Wherein transmitted light beam passes through first as object beam
Pass through the first lens after speculum reflection successively, be irradiated in sample surfaces, it is anti-by unpolarized Amici prism after being collected by object lens
After penetrating by third collimated for plane wave incidence camera as object beam；The light beam that another beam is reflected through polarization splitting prism is
Reference beam, this road light pass through quarter-wave plate to be again passed through quarter-wave plate and polarization after the reflection of third speculum
Amici prism, successively by the reflection of the second speculum, the convergence of the second lens, the transmission of unpolarized Amici prism and third collimated
Incident camera afterwards, with generating the interference fringe containing sample surface information after object light beam interferometer after the conversion of camera number, transmission
Enter computer, carry out digital reconstruction.
Further, since object light light beam and reference light light beam needs expand suitable dimension and interfered, beam expanding lens is selected
The launching spot of the polarization splitting prism and emergent light spot are expanded.
Further, since object light and reference light need direction of vibration is identical could generate interference, polarization direction is also required to sternly
Lattice control, and the optical axis of quarter-wave plate needs just reach the light for reflecting third speculum in 45 degree with light path plane
Line is completely through the purpose of polarization splitting prism.
Further, light source is linear polarization light source, if light source is random polarization state, laser is allowed to first pass through polarizer, is become
Linear polarization.
Further, camera includes face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera,
Camera sensor type includes CCD and CMOS.
Further, the second half wave plate is positioned over object road light beam or reference arm light beam.
Further, the second mirror angle and position are variable, can make reference beam and object beam formed angle it is variable so as to
Control interference fringe density.
Further, the first beam expanding lens, the second beam expanding lens, third beam expanding lens have following several mounting means：
A) first beam expanding lens is only installed；
B) only it is fitted into any two；
C) three beam expanding lens are all installed.
Description of the drawings
Fig. 1 is reflective digital holographic microscope system, prism time-delay structure schematic diagram；
Fig. 2 is transmission-type Digital holographic microscopy system, prism time-delay structure schematic diagram；
Fig. 3 is reflective digital holographic microscope system, quarter-wave plate and speculum time-delay structure schematic diagram；
Fig. 4 is transmission-type Digital holographic microscopy system, quarter-wave plate and speculum time-delay structure schematic diagram；
Fig. 5 is one schematic diagram of light source package；
Fig. 6 is two schematic diagram of light source package.
In figure, 1. light sources, 2. first half wave plates, 3. polarization splitting prisms, 4. first speculums, 5. first thoroughly
Mirror, 6. unpolarized Amici prisms, 7. object lens, 8. samples, 9. second half wave plates, 10. prisms, 11. second lens, 12.
Second speculum, 13. third lens, 14. cameras, 15. computers, 16. quarter-wave plates, 17. third speculums, 18.
One beam expanding lens, 19. second beam expanding lens, 20. third beam expanding lens, 21. light emitting sources, 22. first condenser lenses, 23. pin holes, 24.
Two condenser lenses, 25. optical fiber, 26. tertiary focusing lens.
Specific embodiment
The present invention is described in detail With reference to embodiment.
Digital holographic microscopy system of the present invention using prism as delayed time system is as depicted in figs. 1 and 2.Prism delay reflection
Formula digital holographic microscope light path is as shown in Figure 1, the linearly polarized light that light source 1 is sent out divides through the first half wave plate 2 and polarization
It is divided into the vertical light wave of two beam polarization states after light prism 3, wherein a branch of saturating by first successively after the reflection of the first speculum 4
Exiting parallel passes through unpolarized Amici prism in 8 surface of sample, 8 reflected light of sample after mirror 5, unpolarized Amici prism 6 and object lens 7
It is collimated after 6 reflections by third lens 13 and is used as object beam for plane wave incidence camera 14；Another beam is reflected through polarization splitting prism 3
Light beam for reference beam, this road light passes through the second half wave plate 9 to be passed through successively after prism 10 inverts light beam 180 degree
Cross that the second lens 11 are assembled, the second speculum 12 reflects, unpolarized Amici prism 6 transmits and third lens 13 collimate after incident phase
The interference fringe containing sample surface information is generated after machine 14, with object light beam interferometer after 14 number conversion of camera, is conveyed into meter
Calculation machine 15 carries out digital reconstruction.
Prism be delayed transmission-type digital holographic microscope light path as shown in Fig. 2, the linearly polarized light that sends out of light source 1 through the one or two
The light wave that be divided into two beam polarization states after/mono- wave plate 2 and polarization splitting prism 3 vertical.Wherein transmitted light beam as object beam,
It after the reflection of the first speculum 4 passes through the first lens 5, is irradiated in 8 surface of sample successively, and after being collected by object lens 7, process is non-
Polarization splitting prism 6 is collimated by third lens 13 after reflecting and is used as object beam for plane wave incidence camera 14.Another beam is through polarization
For the light beam that Amici prism 3 reflects for reference beam, this road light passes through the second half wave plate 9 through prism 10 by light beam 180 degree
It after reflexed, is assembled successively by the second lens 11, the second speculum 12 reflects, unpolarized Amici prism 6 transmits and third lens
Incident camera 14 after 13 collimations turns with generating the interference fringe containing sample surface information after object light beam interferometer through 14 number of camera
After change, computer 15 is conveyed into, carries out digital reconstruction.
Using quarter-wave plate and speculum as the Digital holographic microscopy system of delayed time system as shown in Figure 3 and Figure 4.Instead
Formula digital holographic microscope light path is penetrated as shown in figure 3, the linearly polarized light that sends out of light source 1 is through the first half wave plate 2 and polarization
It is divided into the vertical light wave of two beam polarization states after Amici prism 3.Wherein transmitted light beam passes through the first speculum 4 as object beam
Exiting parallel is reflected in 8 surface of sample, sample 8 after the first lens 5, unpolarized Amici prism 6 and object lens 7 successively after reflection
Light is collimated by third lens 13 after the reflection of unpolarized Amici prism 6 and is used as object beam for plane wave incidence camera 14.It is another
The light beam that beam is reflected through polarization splitting prism 3 is reference beam, this road light passes through quarter-wave plate 16 through third speculum 17
After reflection, be again passed through quarter-wave plate 16 and polarization splitting prism 3, reflected successively by the second speculum 12, second thoroughly
Mirror 11 is assembled, unpolarized Amici prism 6 transmits and third lens 13 collimate after incident camera 14, contain with being generated after object light beam interferometer
There is the interference fringe of sample surface information after 14 number conversion of camera, be conveyed into computer 15, carry out digital reconstruction.
Transmission-type digital holographic microscope light path as shown in figure 4, the linearly polarized light that sends out of light source 1 through the first half wave
The light wave that be divided into two beam polarization states after piece 2 and polarization splitting prism 3 vertical.Wherein transmitted light beam is as object beam, by the
Pass through the first lens 5 after the reflection of one speculum 4 successively, be irradiated in 8 surface of sample, after being collected by object lens 7, by unpolarized light splitting
Prism 6 is collimated by third lens 13 after reflecting and is used as object beam for plane wave incidence camera 14.Another beam is through polarization splitting prism 3
The light beam of refraction is reference beam, this road light passes through quarter-wave plate 16 to be again passed through four after the reflection of third speculum 17
/ mono- wave plate 16 and polarization splitting prism 3 reflect successively by the second speculum 12, the second lens 11 are assembled, unpolarized point
The transmission of light prism 6 and third lens 13 incident camera 14 after collimating, contain sample surface information with being generated after object light beam interferometer
Interference fringe is conveyed into computer 15, carries out digital reconstruction after 14 number conversion of camera.Due to object light light beam and reference light light
Beam needs, which expand suitable dimension, is interfered, and can select beam expanding lens by the launching spot and emergent light of polarization splitting prism 3
Spot is expanded, and the first beam expanding lens 18, the second beam expanding lens 19,20 installation site of third beam expanding lens are as shown in Figures 1 to 4.In number
In word holographic microphotography technology, object light needs stringent control polarization direction so as to generate interference with reference light.Generate the object light of interference
It needs to be strict controlled within coherent ranges with reference light optical path difference, the position of prism 10 and third speculum 17 can in the present invention
To match reference light light path and object light light path in y-axis direction accurate movement.
Since object light and reference light need direction of vibration is identical could generate interference, polarization direction is also required to strictly control,
The optical axis of quarter-wave plate 16 needs just reach the light for reflecting third speculum 17 in 45 degree with light path plane
Completely through the purpose of polarization splitting prism.Light source 1 can be made of (such as laser after spatial filter filters collimated
Shown in Fig. 5), it is exported after collimated to suitable spot size (such as Fig. 6 institutes after output can also be coupled by laser fiber
Show).It is all linear polarization light source that light source is carried in the present invention, if light source is random polarization state, laser can be allowed to first pass through polarizer,
Become linear polarization.Fig. 5 is light source package one.Wherein semiconductor laser can be used in light emitting source 21, and (He-Ne swashs gas laser
Light device), LED, Super LED etc..Light emitting source 21 is injected in pin hole 23, across the first condenser lens 22 and the second condenser lens 24
After project, pin hole 23, the first condenser lens 22 and the second condenser lens 24 form a spatial filter.The side of Fig. 6 positions light source
Case two, incident light are projected by optical fiber 25, across tertiary focusing lens 26.
The present invention proposes the mesh that adjustment reference arm light path is realized using the mode of quarter-wave plate and arrangement of mirrors
's.In addition it is also proposed that being achieved the purpose that using a prism by light beam deflection 180 degree so as to fulfill adjustment light path.It is proposed this two
Kind delayed time system is easier to adjust and reach degree of precision compared to the delayed time system of two speculums.The present invention is by the collection of system
The adjusting difficulty of delayed time system is improved and simplified into degree.It is used as and is delayed different from traditional two-face mirror, in this patent
By the use of prism or quarter-wave plate as the main devices of delay.Belong to digital hologram technical field of imaging, available for three-dimensional real
When topography measurement.
The above is only the better embodiment to the present invention, not makees limit in any form to the present invention
System, any simple modification that every technical spirit according to the present invention makes embodiment of above, equivalent variations and modification,
Belong in the range of technical solution of the present invention.
Claims (12)
1. a kind of Digital holographic microscopy system with novel time-lapse system, it is characterised in that：Including being using prism as delay
The Digital holographic microscopy system of system and using quarter-wave plate and speculum as the Digital holographic microscopy system of delayed time system；Its
In, Digital holographic microscopy system using prism as delayed time system include prism delay reflective digital holographic microscope light path and
Prism delay transmission-type digital holographic microscope light path；Using quarter-wave plate and speculum as the digital hologram of delayed time system
Microscopic system includes reflective digital holographic microscope light path and transmission-type digital holographic microscope light path.
2. according to the Digital holographic microscopy system with novel time-lapse system a kind of described in claim 1, it is characterised in that：It is described
In prism delay reflective digital holographic microscope light path, the linearly polarized light that light source (1) is sent out is through the first half wave plate (2)
The light wave vertical with two beam polarization states are divided into after polarization splitting prism (3), wherein it is a branch of by the first speculum (4) reflection after according to
The secondary exiting parallel after the first lens (5), unpolarized Amici prism (6) and object lens (7) is in sample (8) surface, and sample (8) is instead
Penetrate light by unpolarized Amici prism (6) reflection after by third lens (13) collimation for plane wave incidence camera (14) as object light
Beam；The light beam that another beam is reflected through polarization splitting prism (3) is reference beam, this road light passes through the second half wave plate (9)
After prism (10) inverts light beam 180 degree, assembled successively by the second lens (11), the second speculum (12) reflects, non-inclined
Incident camera (14) after the Amici prism (6) that shakes transmission and third lens (13) collimation, contains sample with being generated after object light beam interferometer
The interference fringe of surface information is conveyed into computer (15), carries out digital reconstruction after camera (14) number conversion.
3. according to the Digital holographic microscopy system with novel time-lapse system a kind of described in claim 1, it is characterised in that：It is described
In prism delay transmission-type digital holographic microscope light path, the linearly polarized light that light source (1) is sent out is through the first half wave plate (2)
The light wave vertical with two beam polarization states are divided into after polarization splitting prism (3)；Wherein transmitted light beam passes through first as object beam
Pass through the first lens (5) after speculum (4) reflection successively, be irradiated in sample (8) surface, after being collected by object lens (7), by non-inclined
The Amici prism (6) that shakes reflection after by third lens (13) collimation for plane wave incidence camera (14) as object beam, another Shu Jing
The light beam of polarization splitting prism (3) refraction is reference beam, this road light passes through the second half wave plate (9) will through prism (10)
It after light beam 180 degree reflexed, is assembled successively by the second lens (11), the second speculum (12) reflects, unpolarized Amici prism (6)
Incident camera (14) after transmission and third lens (13) collimation, with generating the interference containing sample surface information after object light beam interferometer
Striped is conveyed into computer (15), carries out digital reconstruction after camera (14) number conversion.
4. according to the Digital holographic microscopy system with novel time-lapse system a kind of described in claim 1, it is characterised in that：It is described
In reflective digital holographic microscope light path, the linearly polarized light that light source (1) is sent out is through the first half wave plate (2) and polarization point
It is divided into the vertical light wave of two beam polarization states after light prism (3)；Wherein transmitted light beam passes through the first speculum as object beam
(4) reflect after successively after the first lens (5), unpolarized Amici prism (6) and object lens (7) exiting parallel in sample (8) table
Face, sample (8) reflected light are plane wave incidence camera by third lens (13) collimation after unpolarized Amici prism (6) reflection
(14) as object beam；The light beam that another beam is reflected through polarization splitting prism (3) is reference beam, this road light passes through a quarter
Wave plate (16) is again passed through quarter-wave plate (16) and polarization splitting prism (3), successively after third speculum (17) reflection
By the second speculum (12) reflection, the second lens (11) are assembled, unpolarized Amici prism (6) transmits and third lens (13) are accurate
Incident camera (14) after straight turns with generating the interference fringe containing sample surface information after object light beam interferometer through camera (14) number
After change, computer (15) is conveyed into, carries out digital reconstruction.
5. according to the Digital holographic microscopy system with novel time-lapse system a kind of described in claim 1, it is characterised in that：It is described
In transmission-type digital holographic microscope light path, the linearly polarized light that light source (1) is sent out is through the first half wave plate (2) and polarization point
It is divided into the vertical light wave of two beam polarization states after light prism (3)；Wherein transmitted light beam passes through the first speculum as object beam
(4) pass through the first lens (5) after reflecting successively, be irradiated in sample (8) surface, after being collected by object lens (7), by unpolarized light splitting
Prism (6) reflection after by third lens (13) collimation for plane wave incidence camera (14) as object beam；Another beam is through polarization point
The light beam of light prism (3) refraction is reference beam, this road light passes through quarter-wave plate (16) to be reflected through third speculum (17)
Afterwards, quarter-wave plate (16) and polarization splitting prism (3) are again passed through, successively by the second speculum (12) reflection, second
Incidence camera (14) after lens (11) are assembled, unpolarized Amici prism (6) transmission is collimated with third lens (13), does with object beam
The interference fringe containing sample surface information is generated after relating to after camera (14) number conversion, computer (15) is conveyed into, carries out
Digital reconstruction.
6. according to a kind of any Digital holographic microscopy system with novel time-lapse system of claim 2 to 5, feature exists
In：Since object light light beam and reference light light beam needs expand suitable dimension and interfered, beam expanding lens is selected by the polarization point
The launching spot and emergent light spot of light prism (3) are expanded.
7. according to a kind of any Digital holographic microscopy system with novel time-lapse system of claim 2 to 5, feature exists
In：Since object light and reference light need direction of vibration is identical could generate interference, polarization direction is also required to strictly control, four/
The optical axis of one wave plate (16) needs to be in 45 degree with light path plane that can just to reach the light for reflecting third speculum (17) complete
Full impregnated crosses the purpose of polarization splitting prism.
8. according to a kind of any Digital holographic microscopy system with novel time-lapse system of claim 2 to 5, feature exists
In：The light source (1) is linear polarization light source, if light source (1) is random polarization state, laser is allowed to first pass through polarizer, becomes line
Polarization state.
9. according to a kind of any Digital holographic microscopy system with novel time-lapse system of claim 2 to 5, feature exists
In：The camera (14) includes face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera, camera
Sensor type includes CCD and CMOS.
10. according to a kind of any Digital holographic microscopy system with novel time-lapse system of claim 2 to 5, feature
It is：The second half wave plate (9) is positioned over object road light beam or reference arm light beam.
11. according to a kind of any Digital holographic microscopy system with novel time-lapse system of claim 2 to 5, feature
It is：Second speculum (12) angles and positions are variable, and reference beam and object beam formation angle can be made variable so as to control
Interference fringe density processed.
12. according to a kind of any Digital holographic microscopy system with novel time-lapse system of claim 2 to 5, feature
It is：First beam expanding lens (18), the second beam expanding lens (19), third beam expanding lens (20) have following several mounting means：
First beam expanding lens (18) a) is only installed；
B) only it is fitted into any two；
C) three beam expanding lens are all installed.
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| CN108931207A (en) * | 2018-08-16 | 2018-12-04 | 西安工业大学 | The interference microscope equipment and method of LED illumination |
| CN109085139A (en) * | 2018-08-23 | 2018-12-25 | 天津大学 | Infrared transmission formula off-axis digital holography micrometering system |
| CN109116708A (en) * | 2018-10-19 | 2019-01-01 | 许之敏 | A kind of dual wavelength reflective digital holographic microscope |
| CN109856943A (en) * | 2017-11-30 | 2019-06-07 | 青岛全维医疗科技有限公司 | Phase shift interference striped generates system and its generation method |
| CN110631510A (en) * | 2019-09-12 | 2019-12-31 | 中国科学院西安光学精密机械研究所 | High-precision angle measuring device and method based on Michelson structure |
| WO2022241875A1 (en) * | 2021-05-21 | 2022-11-24 | 深圳技术大学 | Transmissive and reflective digital holographic microscopy system |
| WO2023084322A1 (en) * | 2021-11-12 | 2023-05-19 | Ap Infosense Limited | Broadband profiler system and method for constructing a three-dimensional profile of a target |
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| CN109856943A (en) * | 2017-11-30 | 2019-06-07 | 青岛全维医疗科技有限公司 | Phase shift interference striped generates system and its generation method |
| CN109856943B (en) * | 2017-11-30 | 2024-02-27 | 深圳市新先迈科技有限公司 | Phase shift interference fringe generation system and generation method thereof |
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| CN109116708A (en) * | 2018-10-19 | 2019-01-01 | 许之敏 | A kind of dual wavelength reflective digital holographic microscope |
| CN110631510A (en) * | 2019-09-12 | 2019-12-31 | 中国科学院西安光学精密机械研究所 | High-precision angle measuring device and method based on Michelson structure |
| WO2022241875A1 (en) * | 2021-05-21 | 2022-11-24 | 深圳技术大学 | Transmissive and reflective digital holographic microscopy system |
| WO2023084322A1 (en) * | 2021-11-12 | 2023-05-19 | Ap Infosense Limited | Broadband profiler system and method for constructing a three-dimensional profile of a target |
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