CN208705667U - A kind of three wavelength reflection formula digital holographic microscopes - Google Patents
A kind of three wavelength reflection formula digital holographic microscopes Download PDFInfo
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- CN208705667U CN208705667U CN201821701243.8U CN201821701243U CN208705667U CN 208705667 U CN208705667 U CN 208705667U CN 201821701243 U CN201821701243 U CN 201821701243U CN 208705667 U CN208705667 U CN 208705667U
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Abstract
The utility model discloses a kind of three wavelength reflection formula digital holographic microscopes, the linear polarization of middle first light source is parallel to light path plane, and the linear polarization of second light source and third light source is perpendicular to light path plane；The light that first light source issues prism that is split after the first polarization splitting prism and the transmission of the second polarization splitting prism is divided into reference light and object light two-beam；Transmitted light is obtained by camera from sample surfaces retroeflection after lens, object lens and is used as object beam；Reflected light injects camera as reference beam, and the interference fringe of reference beam and object beam will be obtained by camera；As object beam, the interference fringe of reference beam and object beam will be obtained second light source by camera.The light of third light source shares subsequent optical path with second light source after the reflection of the second polarization splitting prism.The utility model has the beneficial effects that it is more more compact than existing multi-wavelength digital holographic microscope and convenient for integrated, it can be used for the real-time topography measurement of three-dimensional of sample.
Description
Technical field
The utility model belongs to microscope technology field, is related to a kind of three wavelength reflection formula digital holographic microscopes.
Background technique
In existing multi-wavelength digital holographic microscope, it is common to use Mach-Zehnder interferometer structure is conveniently adjusted with reaching
Purpose, complex and volume is larger compared with for Michelson's interferometer for interference structure, is unable to reach certain small and high
The application scenarios of integrated level.The utility model has reached three wavelength holographic microscope structures using Michelson's interferometer structure,
Achieve the purpose that dual wavelength is separated adjustment by adjustment using the polarizing prism delayed time system different with two-way.Since three wavelength are clapped
Frequency wavelength is longer, that is, can reach the detection requirement of the big depth of field.
Utility model content
The purpose of this utility model is to provide a kind of three wavelength reflection formula digital holographic microscopes, the utility model has
Beneficial effect is that vertical scanning range and simplified calculating process can be significantly improved compared with existing Single wavelength digital holographic microscope.Than
Existing multi-wavelength digital holographic microscope is more compact and convenient for integrated.The utility model relates to digital holographic microscope field,
It can be used for the real-time topography measurement of three-dimensional of sample.
Technical solution used by the utility model be include first light source, second light source and third light source, first light source,
Second light source and third light source are the differentiated linear polarization light source of three beams wavelength, and wherein the linear polarization of first light source is parallel to
The linear polarization of light path plane, second light source and third light source is perpendicular to light path plane；The light that first light source issues is through first
The prism that is split after polarization splitting prism and the transmission of the second polarization splitting prism is divided into reference light and object light two-beam；Transmitted light warp
Lens are parallel with after object lens to be incident on sample surfaces；Carry the retroreflection light of surface information through after object lens and lens through Amici prism
It is obtained after reflection by camera and is used as object beam；Reflected light carries out 180 by the first delayed time system through after third polarization splitting prism
Degree reflection, through light splitting after the first reflecting mirror and the reflection of the second reflecting mirror after the first half wave plate deflects polarization direction
Prism injects camera as reference beam, and the interference fringe of reference beam and object beam will be obtained by camera；Second light source issues
Light be divided into reference light and object light two through the second polarization splitting prism prism that is split after the refraction of the first polarization splitting prism
Shu Guang；Transmitted light is incident on sample surfaces through lens are parallel after object lens；The retroreflection light of carrying surface information is through object lens and thoroughly
It is obtained after Amici prism reflects by camera after mirror and is used as object beam；Reflected light is after the refraction of third polarization splitting prism through second
Half wave plate deflects polarization direction, carries out 180 degree reflection by the second delayed time system, penetrates and divides after the reflection of third reflecting mirror
Light prism injects camera as reference beam, and the interference fringe of reference beam and object beam will be obtained by camera, third light source
Light shares subsequent optical path with second light source after the reflection of the second polarization splitting prism.
Further, first light source, second light source and third light source are by light source emergent ray through the condenser lens in needle passing hole
Group outgoing is constituted；Light source is semiconductor laser, gas laser, LED, Super LED.
Further, first light source, second light source and third light source are by light by constituting on fiber exit to condenser lens.
Further, light source is linear polarization light source.
Further, the first half wave plate and the second half wave plate optical axis and linear polarization angle are 45 degree,
Interference is generated with object light to reach to 90 degree of linear polarization deflections.
Further, the first delayed time system and the equal adjustable position of the second delayed time system, which reach, generates high contrast interference fringe
Target.
Further, the second reflecting mirror, third mirror angle and position are variable.
Further, camera includes face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera；
Camera sensor type includes CCD and CMOS.
Detailed description of the invention
Fig. 1 is utility model diagram；
Fig. 2 is one scheme of light source；
Fig. 3 is two scheme of light source.
In figure, 101. first light sources, 102. second light sources, 103. third light sources, 201. first polarization splitting prisms, 202.
Second polarization splitting prism, 3. Amici prisms, 4. lens, 5. object lens, 6. samples, 7. third polarization splitting prisms, 8. first prolong
When system, 9. first half wave plates, 10. first reflecting mirrors, 11. second reflecting mirrors, 12. second half wave plates, 13.
Second delayed time system, 14. third reflecting mirrors, 15. cameras, 16. computers, 17. light sources, 18. pin holes, 19. focus lens groups,
20. optical fiber, 21. condenser lenses.
Specific embodiment
The utility model is described in detail With reference to embodiment.
Three wavelength digital holographic microscope of the utility model is as shown in Figure 1, include first light source 101,102 and of second light source
Third light source 103, first light source 101, second light source 102 and third light source 103 are the differentiated linear polarization light source of three beams wavelength,
Wherein the linear polarization of first light source 101 is parallel to light path plane, the linear polarization side of second light source 102 and third light source 103
To perpendicular to light path plane.The light that first light source 101 issues is through the first polarization splitting prism 201 and the second polarization splitting prism
The prism 3 that is split after 202 transmissions divides for reference light and object light two-beam.Transmitted light is incident on sample through lens 4 are parallel after object lens 5
6 surface of product.The retroreflection light of carrying surface information obtains work by camera 15 after the reflection of Amici prism 3 after penetrating object lens 5 and lens 4
For object beam.Reflected light carries out 180 degree reflection by the first delayed time system 8 through after third polarization splitting prism 7, through the one or two point
One of wave plate 9 deflect polarization direction after through the first reflecting mirror 10 and the second reflecting mirror 11 reflection after through Amici prism 3 as ginseng
It examines light beam and injects camera 15, the interference fringe of reference beam and object beam is conveyed into computer 16 after being obtained by camera 15 and carry out
Processing.The light that second light source 102 issues penetrates 202 quilt of the second polarization splitting prism after the refraction of the first polarization splitting prism 201
Amici prism 3 divides for reference light and object light two-beam.Transmitted light is incident on 6 surface of sample through lens 4 are parallel after object lens 5.It takes
The retroreflection light of belt surface information is obtained by camera 15 as object beam after the reflection of Amici prism 3 after penetrating object lens 5 and lens 4.
Reflected light deflects polarization direction through the second half wave plate 12 after the refraction of third polarization splitting prism 7, is by the second delay
System 13 carries out 180 degree reflection, injects camera 15, ginseng as reference beam through Amici prism 3 after the reflection of third reflecting mirror 14
The interference fringe for examining light beam and object beam will be handled by exterior computer 16 is conveyed into after the acquisition of camera 15.Third light
The light in source 103 shares subsequent optical path with second light source 102 after the reflection of the second polarization splitting prism 202.Second light source 102 and
Three light sources, 103 wavelength is close, and the two beat wavelength isThe recordable range for being far longer than single wavelength, increases and sees
Survey the depth of field.
Wherein first light source 101, second light source 102 and third light source 103 can be by lasers after spatial filter filters
It is made of collimated, as shown in Fig. 2, 17 emergent ray of light source is emitted through the focus lens group 19 in needle passing hole 18.Light source 17
It can be semiconductor laser, gas laser (He-Ne laser), LED, Super LED etc..First light source 101, second light source
102 and third light source 103 output can also be coupled by laser fiber after export after collimated to suitable spot size, such as
Shown in Fig. 3, light is emitted on condenser lens 21 by optical fiber 20.Mentioned light source is all linear polarization light source in the utility model, if
Light source is random polarization state, then laser can be allowed to first pass through polarizing film, become linear polarization.
Wherein, the first half wave plate and the second half wave plate optical axis and linear polarization angle are 45 degree, from
And reaches to 90 degree of linear polarization deflections and generate interference with object light.First delayed time system and the second delayed time system can bases
The adjustment position of direction shown in Fig. 1, which reaches, generates high contrast interference fringe target.
Second reflecting mirror 11,14 angles and positions of third reflecting mirror are variable, and reference beam and object beam can be made to form angle
It can be changed to control interference fringe density.
Camera 15 includes that face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera, camera pass
Sensor type includes CCD and CMOS.
The above is only the better embodiment to the utility model, not makees any form to the utility model
On limitation, all any simple modifications made to embodiment of above according to the technical essence of the utility model are equivalent to become
Change and modify, is all within the scope of the technical scheme of the utility model.
Claims (8)
1. a kind of three wavelength reflection formula digital holographic microscopes, it is characterised in that: including first light source, second light source and third light
Source, first light source, second light source and third light source are the differentiated linear polarization light source of three beams wavelength, and wherein the line of first light source is inclined
It shakes and is oriented parallel to light path plane, the linear polarization of second light source and third light source is perpendicular to light path plane；First light source hair
The prism that is split after the first polarization splitting prism and the transmission of the second polarization splitting prism of light out is divided into reference light and object light two
Shu Guang；Transmitted light is incident on sample surfaces through lens are parallel after object lens；The retroreflection light of carrying surface information is through object lens and thoroughly
It is obtained after Amici prism reflects by camera after mirror and is used as object beam；Reflected light is prolonged after penetrating third polarization splitting prism by first
When system carry out 180 degree reflection, through the first half wave plate deflect polarization direction after through the first reflecting mirror and the second reflecting mirror
Through Amici prism as reference beam injection camera after reflection, the interference fringe of reference beam and object beam will be obtained by camera
It takes；The light that second light source issues is divided into after the refraction of the first polarization splitting prism through the second polarization splitting prism prism that is split
Reference light and object light two-beam；Transmitted light is incident on sample surfaces through lens are parallel after object lens；Carry the retroeflection of surface information
Light is obtained by camera as object beam after Amici prism reflects through after object lens and lens；Reflected light is through third polarization spectro rib
Polarization direction is deflected through the second half wave plate after mirror refraction, 180 degree reflection is carried out by the second delayed time system, is reflected through third
Through Amici prism as reference beam injection camera after mirror reflection, the interference fringe of reference beam and object beam will be obtained by camera
It takes；The light of third light source shares subsequent optical path with second light source after the reflection of the second polarization splitting prism.
2. according to three wavelength reflection formula digital holographic microscope of one kind described in claim 1, it is characterised in that: first light
Source, second light source and third light source are made of light source emergent ray through the focus lens group outgoing in needle passing hole；Light source is partly to lead
Body laser, gas laser, LED, Super LED.
3. according to three wavelength reflection formula digital holographic microscope of one kind described in claim 1, it is characterised in that: first light
Source, second light source and third light source are by light by constituting on fiber exit to condenser lens.
4. according to three wavelength reflection formula digital holographic microscope of one kind described in claim 1, it is characterised in that: the light source is line
Polarized light source.
5. according to three wavelength reflection formula digital holographic microscope of one kind described in claim 1, it is characterised in that: described one or two point
One of wave plate and the second half wave plate optical axis and linear polarization angle be 45 degree, to reach to 90 degree of linear polarization
It deflects and generates interference with object light.
6. according to three wavelength reflection formula digital holographic microscope of one kind described in claim 1, it is characterised in that: first delay
System and the equal adjustable position of the second delayed time system, which reach, generates high contrast interference fringe target.
7. according to three wavelength reflection formula digital holographic microscope of one kind described in claim 1, it is characterised in that: second reflection
Mirror, third mirror angle and position are variable.
8. according to three wavelength reflection formula digital holographic microscope of one kind described in claim 1, it is characterised in that: the camera includes
Face battle array color camera, linear array color camera, face battle array black and white camera and linear array black and white camera；Camera sensor type include CCD and
CMOS。
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| CN201821701243.8U CN208705667U (en) | 2018-10-19 | 2018-10-19 | A kind of three wavelength reflection formula digital holographic microscopes |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109062018A (en) * | 2018-10-19 | 2018-12-21 | 许之敏 | A kind of three wavelength reflection formula digital holographic microscopes |
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2018
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109062018A (en) * | 2018-10-19 | 2018-12-21 | 许之敏 | A kind of three wavelength reflection formula digital holographic microscopes |
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