CN109110478A

CN109110478A - A kind of handling equipment of integrated circuit material surface processing equipment

Info

Publication number: CN109110478A
Application number: CN201810614795.3A
Authority: CN
Inventors: 苏骞; 刘全胜; 柳兴森; 彭仕镇
Original assignee: SHENZHEN ALLMERIT TECHNOLOGY Co Ltd
Current assignee: Dongguan Allmerit Technology Co Ltd
Priority date: 2018-06-14
Filing date: 2018-06-14
Publication date: 2019-01-01
Anticipated expiration: 2038-06-14
Also published as: CN109110478B

Abstract

The present invention relates to the handling equipments of integrated circuit material surface processing equipment, including bracket, the first feed device, the first lifting device, material-pulling device and feeding and conveying device；The bracket is equipped with drain hole；First feed device setting is correspondingly arranged on the bracket, and with the drain hole, to convey the magazine with workpiece put into from the drain hole；First lifting device is arranged on the bracket, positioned at one end of first feed device, is gone up and down with the magazine for accepting and driving first feed device to convey；The rear end of first lifting device is arranged in the material-pulling device, is correspondingly arranged with the first lifting device, and the workpiece in the magazine is pushed into the feeding and conveying device；The front end of first lifting device is arranged in the feeding and conveying device, is correspondingly arranged with the material-pulling device, to convey the workpiece released by the material-pulling device.The transfer efficiency in integrated circuit material surface treatment process can be improved in the handling equipment of the integrated circuit material surface processing equipment, improves its automatization level.

Description

A kind of handling equipment of integrated circuit material surface processing equipment

Technical field

The present invention relates to integrated circuit material technical field of surface, more specifically to a kind of integrated circuit material Expect the handling equipment of surface processing equipment.

Background technique

In integrated circuit material surface treatment process, generally requires and manually take out the workpiece being placed in magazine, and Integrated circuit material surface processing equipment is shipped it to, is surface-treated, is transported to shots in original after surface treatment again, will be processed Workpiece afterwards puts back to raw material box, therefore the automatization level of existing surface treatment process is low, and production efficiency is low and spends artificial It is at high cost.

Summary of the invention

The technical problem to be solved in the present invention is that providing a kind of improved integrated circuit material surface processing equipment Handling equipment.

The technical solution adopted by the present invention to solve the technical problems is: constructing a kind of surface treatment of integrated circuit material and sets Spare handling equipment, including bracket, the first feed device, the first lifting device, material-pulling device and feeding conveying dress It sets；

The bracket is equipped with drain hole；First feed device setting on the bracket, and with the drain hole It is correspondingly arranged, to convey the magazine with workpiece put into from the drain hole；

First lifting device is arranged on the bracket, positioned at one end of first feed device, to accept simultaneously The magazine of the first feed device conveying is driven to be gone up and down；

The rear end of first lifting device is arranged in the material-pulling device, is correspondingly arranged with the first lifting device, will Workpiece in the magazine is pushed into the feeding and conveying device；

The front end of first lifting device is arranged in the feeding and conveying device, is correspondingly arranged with the material-pulling device, To convey the workpiece released by the material-pulling device.

Preferably, the bracket includes pedestal, first baffle square on the base is arranged and is arranged at the bottom And the second baffle that is positioned apart from parallel with the first baffle on seat；The drain hole is arranged on the second baffle； First feed device is arranged between the first baffle and the second baffle, and along the first baffle and described the The setting of two baffle length directions.

Preferably, first feed device is connect including the first driving mechanism, with first driving mechanism by described First driving mechanism drives the first transmission mechanism of transmission；

First driving mechanism includes first motor, and first transmission mechanism includes two groups spaced first same Walk wheel assembly；The first synchronous wheel assembly includes along spaced first synchronizing wheel of the first baffle length direction, the Two synchronizing wheels and the first synchronous belt being set in first synchronizing wheel and second synchronizing wheel；The first motor with The second synchronizing wheel connection is to drive second synchronizing wheel to rotate；

The both ends of first feed device are respectively formed the first side and second side；The first synchronous belt direction of transfer is First side is sent to from described second side.

Preferably, first lifting device is arranged in the pedestal, and is located at second feed device First side, the short transverse along second feed device move up and down；First lifting device includes the first splicing Plate connect the first lifting assembly for driving the first splicing plate to go up and down with the first splicing plate, drives first lifting First screw rod of component lifting connect the second motor for driving the first screw rod rotation with first screw rod；

First lifting assembly includes being set in being driven by first screw rod for the first screw rod periphery to go up and down First mounting plate and it is arranged on first mounting plate and first screw rod several first guide rods disposed in parallel；Institute The first guide rod is stated to connect with the first splicing plate and be pierced by setting from the pedestal to drive the first splicing plate to go up and down；

It is additionally provided with the first binder component on first lifting device, the first binder component includes setting described the It is electric with vertically disposed second mounting plate of the first splicing plate, the third being arranged on second mounting plate on one splicing plate The first rotation being connect with the third motor by driving rotation by the third motor is arranged on second mounting plate in machine Arm and the first rotating arm bottom is set with the first briquetting of the fixation magazine.

Preferably, the material-pulling device is arranged on the bracket, and is located at same level with the feeding and conveying device, It includes mounting rack, and the 4th motor, connecting rod, the first guide rail, the first sliding block, push top, position that are arranged in the mounting rack Set sensor；The connecting rod connect to be driven by the 4th motor with the 4th motor and rotate；The first sliding block setting exists It on first guide rail, is connected with the connecting rod and the push top, to be slided on first guide rail in the link rotatable It is dynamic, drive the push top to do elastic movement；The position sensor is arranged on the mounting rack to incude the magazine The position of middle workpiece.

Preferably, the feeding and conveying device includes third mounting plate, is arranged on the third mounting plate and interval is set The third baffle and fourth gear plate set, the second driving mechanism are connect with second driving mechanism by second driving mechanism The second transmission mechanism for driving transmission, two group of first tensioning wheel being separately positioned in the third baffle and the fourth gear plate Component and several first sensors that the fourth gear plate is set；

Second driving mechanism includes the 5th motor；

Second transmission mechanism includes setting between the third baffle and the fourth gear plate and parallel interval is set Two group of first pulley assembly set；The pulley assembly includes along the third baffle length direction and being positioned apart from First belt pulley and the second belt pulley；The first belt being set on first belt pulley and second belt pulley；It is described First belt pulley is driven by the 5th motor and is rotated；

Two group of first tensioning wheel assembly is separately positioned on the third baffle and the third baffle close to described One end of one lifting device；Each first tensioning wheel assembly is correspondingly arranged with first pulley assembly；Described One tensioning wheel assembly includes third belt pulley and combines with the first gear of third belt pulley connection；The third belt Wheel setting is on second belt pulley and opposite with second belt pulley direction of rotation to cooperate with second belt pulley By in the workpiece clamp to first belt, the first gear combination settings are in the third baffle or the fourth gear plate Outside is to drive the third pulley rotation.

It preferably, further include the second feed device；The second feed device setting is filled in first feeding

The top set is arranged with the first feed device parallel interval, and with first feed device

Direction of transfer is on the contrary, to accept and convey the empty magazine for driving lifting from first lifting device；

Second feed device includes third driving mechanism, connect with the third driving mechanism and driven by the third Mechanism drives the third transmission mechanism of transmission；

The third driving mechanism includes the 6th motor, and the third transmission mechanism includes spaced two group second same Walk wheel assembly；Described second synchronous wheel assembly includes along the first baffle length direction or along the second baffle length direction Spaced third synchronizing wheel, the 4th synchronizing wheel and be set in the third synchronizing wheel and the 4th synchronizing wheel Two synchronous belts；6th motor is connect to drive the third synchronizing wheel to rotate with the third synchronizing wheel.

It preferably, further include the first reclaimer robot；First reclaimer robot is arranged in second feed device Close to one end of first lifting device taking the empty magazine on first lifting device to second feeding Device；

First reclaimer robot include the first manipulator for being arranged between described two group second synchronous wheel assembly with And the first telescopic component for driving first manipulator flexible；

First telescopic component includes that the first telescopic cylinder connecting with first manipulator and described first are flexible The second sliding block that can be slided on second guide rail on second guide rail is arranged in cylinder the second guide rail disposed in parallel； Second sliding block is connect to drive first manipulator to slide with first manipulator；

The first splicing plate side opposite with first feed device offers a notch；The notch is from described The side of splicing plate extends towards the middle part of the splicing plate so that the first splicing plate is in concave shape, on first manipulator Equipped with the first via hole and the second via hole for being pierced by and being arranged side by side for the first splicing plate.

It preferably, further include the transfer being arranged between described two group second synchronous wheel assembly；The transfer Including placed for the empty magazine turntable, be arranged in and drive the rotary cylinder of the turntable rotation below the turntable and set Set the lifting cylinder that the turntable lift is driven below the turntable.

It preferably, further include lower material conveying device, the second lifting device and the second reclaimer robot；The blanking conveying The one end of the first baffle far from the feeding and conveying device is arranged in device, is arranged in parallel with the feeding and conveying device； The second lifting device setting is on the base and it is located at second feed device far from first lifting device One end；Second reclaimer robot is arranged between the first baffle and the second baffle and takes far from described first Expect one end of manipulator.

Preferably, the lower material conveying device include it is several side by side and spaced 4th mounting plate, be arranged described On 4th mounting plate and spaced fifth gear plate and sixth gear plate, the 4th driving mechanism and the 4th driving mechanism connect It connects and the 4th transmission mechanism of transmission is driven by the 4th driving mechanism, is separately positioned on the fifth gear plate and the sixth gear Two group of second tensioning wheel assembly in the outside of plate and be arranged on the sixth gear plate be arranged side by side several second sensors；

4th driving mechanism includes the 7th motor；

4th transmission mechanism includes setting between the fifth gear plate and the sixth gear plate and parallel interval is set Two group of second pulley assembly set；Second pulley assembly includes along the fifth gear plate length direction or along described Six baffle length directions and the 4th belt pulley being positioned apart from and the 5th belt pulley；It is set in the 4th belt pulley and described The second belt on 5th belt pulley；5th belt pulley is driven by the 7th motor and is rotated；

The second tensioning wheel assembly setting is in the fifth gear plate and the sixth gear plate close to the second lifting dress The one end set；Each second tensioning wheel assembly is correspondingly arranged with second pulley assembly；Each described second Bearing up pulley component includes the 6th belt pulley and combines with the second gear of the 6th belt pulley connection；6th belt pulley It is separately positioned on the 5th belt pulley and opposite with the 5th belt pulley direction of rotation to match with the 5th belt pulley Close by the workpiece clamp to second belt, the second gear combination settings are in the fifth gear plate or the sixth gear To drive the 5th pulley rotation on the outside of plate.

Preferably, second lifting device includes the second splicing plate, connect with the second splicing plate drive described the Second lifting assembly of two splicing plates lifting, the second screw rod and second screw rod for driving the second lifting assembly lifting Connection drives the 8th motor of the second screw rod rotation；

Second lifting assembly includes being set in being driven by second screw rod for the second screw rod periphery to go up and down 5th mounting plate and it is arranged on the 5th mounting plate and second screw rod several second guide rods disposed in parallel；Institute The second guide rod is stated to connect with the second splicing plate and be pierced by setting from the pedestal to drive the second splicing plate to go up and down；

The second binder component is additionally provided on second lifting device, the second binder component includes that setting connects described On flitch with vertically disposed 6th mounting plate of the splicing plate, the 9th motor being arranged on the 6th mounting plate, setting The second rotating arm, the Yi Jishe that rotation is driven by the 9th motor are connect with the 9th motor on the 5th mounting plate It sets in second rotating arm bottom with the second briquetting of the fixation magazine.

Preferably, second reclaimer robot includes the second machine being arranged between described two group second synchronous wheel assembly Tool hand and the second telescopic component for driving second manipulator flexible；

Second telescopic component includes that the second telescopic cylinder connecting with second manipulator and described second are flexible The third sliding block that can be slided on the third guide rail on the third guide rail is arranged in cylinder third guide rail disposed in parallel； The third sliding block and second manipulator are to drive second manipulator to slide.

Preferably, discharge port is additionally provided on the second baffle；

The handling equipment of the integrated circuit material surface processing equipment further includes third feed device, the third Feed device be arranged between the first baffle and the second baffle, positioned at second feed device lower section and with institute It states the first feed device and is located at same level, the magazine for having processed rear workpiece is delivered to from second lifting device The discharge port；The third feed device is connect including the 5th driving mechanism, with the 5th driving mechanism by the described 5th Driving mechanism drives the 5th transmission mechanism of transmission；

5th driving mechanism includes the tenth motor, and the 5th transmission mechanism includes that spaced two groups of thirds are same Walk wheel assembly；The synchronous wheel assembly of the third includes along spaced 5th synchronizing wheel of the first baffle length direction, the Six synchronizing wheels and the third synchronous belt being set in the 5th synchronizing wheel and the 6th synchronizing wheel；Tenth motor with The 5th synchronizing wheel connection is to drive the 5th synchronizing wheel to rotate.

The handling equipment for implementing integrated circuit material surface processing equipment of the invention, has the advantages that The handling equipment of the integrated circuit material surface processing equipment, which will pass through the first feed device being arranged on the bracket, to be put The magazine with workpiece of material mouth is delivered to the first lifting device, is accepted by first lifting device and the magazine is driven to go up and down, The workpiece in the magazine is pushed by feeding and conveying device by the material-pulling device again, it is further by feeding and conveying device that magazine is defeated It send to integrated circuit material surface processing equipment and is processed.The handling equipment of the integrated circuit material surface processing equipment The transfer efficiency in integrated circuit material surface treatment process can be improved, improve its automatization level, and reduce manually at This.

Detailed description of the invention

Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:

Fig. 1 is the structural schematic diagram of the handling equipment of integrated circuit material surface processing equipment of the present invention；

Fig. 2 is that the structure of the handling equipment front angle of Fig. 1 integrated circuit material surface processing equipment of the present invention is shown It is intended to；

Fig. 3 is that the structure of another angle of handling equipment of Fig. 1 integrated circuit material surface processing equipment of the present invention is shown It is intended to；

Fig. 4 is the first feed device of handling equipment and second of integrated circuit material surface processing equipment of the present invention The structural schematic diagram of feed device；

Fig. 5 is that the structure of the first lifting device of handling equipment of integrated circuit material surface processing equipment of the present invention is shown It is intended to；

Fig. 6 is the structural representation of the handling equipment material-pulling device of integrated circuit material surface processing equipment of the present invention Figure；

Fig. 7 is that the structure of the handling equipment feeding and conveying device of integrated circuit material surface processing equipment of the present invention is shown It is intended to；

Fig. 8 is the structure of the first reclaimer robot of handling equipment of integrated circuit material surface processing equipment of the present invention Schematic diagram；

Fig. 9 is the structural representation of the handling equipment transfer of integrated circuit material surface processing equipment of the present invention Figure；

Figure 10 be integrated circuit material surface processing equipment of the present invention handling equipment under material conveying device structure Schematic diagram；

Figure 11 is the structure of the second lifting device of handling equipment of integrated circuit material surface processing equipment of the present invention Schematic diagram；

Figure 12 is the knot of the second reclaimer robot of handling equipment of integrated circuit material surface processing equipment of the present invention Structure schematic diagram；

Figure 13 is the structure of the handling equipment third feed device of integrated circuit material surface processing equipment of the present invention Schematic diagram.

Specific embodiment

For a clearer understanding of the technical characteristics, objects and effects of the present invention, now control attached drawing is described in detail A specific embodiment of the invention.In the description of this patent, it is to be understood that term " top ", " lower section ", " front end ", The orientation or positional relationship of the instructions such as " rear end ", " left side ", " right side ", " vertical ", "horizontal", "top", "bottom", "inner", "outside" Orientation or positional relationship shown in the drawings is merely for convenience of description this patent and simplifies description.

Fig. 1 to Figure 13 shows one of the handling equipment of integrated circuit material surface processing equipment of the present invention preferably Embodiment.

The handling equipment of integrated circuit material surface processing equipment of the invention, can be used for integrated circuit material surface Loading and unloading in treatment process, can be improved loading and unloading efficiency, improve integrated circuit material surface treatment automatization level and Reduce manpower production cost.Magazine in the present invention is rectangular-shape, and workpiece lamination is arranged in the magazine.

As shown in Figures 1 to 3, the handling equipment of the integrated circuit material surface processing equipment, including bracket 11, first Feed device 12, the first lifting device 13, material-pulling device 14 and feeding and conveying device 15；The bracket 11 can play support Effect.First feed device 12 is arranged on the bracket 11, the magazine with workpiece can be delivered to first lifting device 13；First lifting device 13 can drive magazine lifting by lifting, push away the workpiece in magazine convenient for the material-pulling device 14 To the feeding and conveying device 15；The feeding and conveying device 15 can be used for for the workpiece being delivered to integrated circuit material surface treatment and set It is standby to be surface-treated or other process equipments are processed.

The bracket 11 includes pedestal 111, first baffle 112 and second baffle 113；The pedestal 111 can be cuboid Shape can be made of steel plate or other sheet metals, can play the role of support.The first baffle 112 setting exists 111 top of pedestal, and it is arranged perpendicular to pedestal 111, which is arranged on the pedestal 111, with the first gear Plate 112 is parallel and is positioned apart from, and the conveying that can transport the magazine is formed between the first baffle 112 and the second baffle 113 Channel.Drain hole 1131 is offered on the second baffle 113, which is oppositely arranged with first feed device 12, It is for staff's blowing.It is additionally provided with discharge port 1132 on the second baffle 113, the discharge port 1132 and the drain hole 1131 It is arranged side by side, and is located at the right side of the drain hole 1131, staff's feeding can be convenient for.

First feed device 12 setting is correspondingly arranged on the bracket 11, and with the drain hole 1131, specifically, is set It sets between the first baffle 112 and the second baffle 113, and along the first baffle 112 and 113 length direction of second baffle Setting, can be used for conveying the magazine with workpiece put into from the drain hole 1131.The both ends of first feed device 12 point The first side and second side are not formed；For staff from 1131 blowing of drain hole, which is left side, which is the right side Side.The conveying direction of first feed device 12 is to be sent to the first side from second side.

As shown in Figures 1 to 4, in the present embodiment, which includes the first driving mechanism 121, first Transmission mechanism 122；First transmission mechanism 122 connect to be driven by first driving mechanism 121 with first driving mechanism 121 and pass It is dynamic.First driving mechanism 121 includes first motor, which can drive first transmission mechanism 122 to pass by rotation It is dynamic.First transmission mechanism 122 includes two groups of spaced first synchronous wheel assemblies.The magazine can be shelved on this two group first On synchronous wheel assembly, is driven and conveyed by it.In some other embodiment, which is not limited to two groups.Every group First synchronous wheel assembly includes spaced along 112 length direction of first baffle or 113 length direction of second baffle First synchronizing wheel 1221, the second synchronizing wheel and the first synchronous belt 1222.First synchronizing wheel 1221 is arranged in first feeding Second side of first feed device 12 is arranged in first side of device 12, second synchronizing wheel, 1222 sets of first synchronous belt It is located in first synchronizing wheel 1221 and second synchronizing wheel, by first synchronizing wheel 1221 and second synchronizing wheel band turn It is dynamic.Second synchronizing wheel is connect with the first motor, is driven and is rotated by the first motor.

As shown in Figure 1, Figure 2 and shown in Fig. 5, which is arranged on the bracket 11, is located at first feeding and fills 12 one end is set, specifically, is arranged in the pedestal 111, and be located at the first side of first feed device 12, it can be along this The short transverse of second feed device 16 moves up and down, and is carried out with the magazine for accepting and driving first feed device 12 to convey Lifting.When the material-pulling device 14 a piece of workpiece of every release, which drives the magazine to ramp up a height, until The workpiece of top and the feeding and conveying device 15 are located at same level in the magazine.

In the present embodiment, which includes the first splicing plate 131, the first lifting assembly 132, first Bar 133 and the second motor 134；The upper of the pedestal 111 is arranged in the first splicing plate 131, can be used for accepting the magazine, should First splicing plate 131 can be in concave shape, and the side opposite with first feed device 12 offer a notch, and notch is from institute The side for stating splicing plate extends towards the middle part of the splicing plate, in order to send magazine to the second feed device 16；This first liter Part 132 of coming down to a lower group is arranged in the pedestal 111, can rise from the pedestal 111 and connect with the first splicing plate 131, this can be driven first to connect Flitch 131 is gone up and down.First screw rod 133 is connect with first lifting assembly 132, can drive the first lifting group by rotation Part 132 is gone up and down.Second motor 134 is connect with first screw rod 133, to drive first screw rod 133 to rotate.First lifting Component 132 includes the first mounting plate 1321 and several first guide rods 1322 being arranged on first mounting plate 1321.This One mounting plate 1321 is set in the periphery of first screw rod 133, is equipped with a perforation among it, wears for first screw rod 133, It can be driven by first screw rod 133 and be gone up and down.Several first guide rods 1322 be arranged on first mounting plate 1321 with this One screw rod 133 is arranged in parallel, and its from the pedestal 111 be pierced by setting with connect with the first splicing plate 131 with drive this first Splicing plate 131 is gone up and down.In this embodiment, it is preferred that several first guide rods 1322 include four guide rods.Second motor 134 are arranged in the side of first screw rod 133, are connect by the way that connecting rod is arranged with first screw rod 133, can be somebody's turn to do by driving Link rotatable drives first screw rod 133 to rotate in turn.

In the present embodiment, it is additionally provided with the first binder component 135 on first lifting device 13, the first binder component 135 can be used for pushing down magazine, and magazine is avoided to shake.The first pressure component 135 includes the second mounting plate 1351, third motor 1352, first rotating arm 1353, the first briquetting 1354；Second mounting plate 1351 be arranged on the first splicing plate 131 and with The first splicing plate 131 is vertically arranged, and can be used for installing the third motor 1352, and third motor setting is in second installation On plate 1351, the first rotating arm 1353 can be driven to rotate, which is arranged in second mounting plate 1351 It above and with the third motor 1352 connect, is driven and rotated by the third motor, first briquetting 1354 setting is in first rotation 1353 bottom of arm, can be used for fixing magazine.

As shown in Fig. 1, Fig. 3 and Fig. 6, in the present embodiment, which is arranged on the bracket 11, certainly, can To understand ground, in some other embodiment, which is not limited to be arranged on the bracket 11.Specifically, the pusher The rear end of first lifting device is arranged in device 14, is correspondingly arranged with first lifting device 13, and it is defeated with the feeding It send device 15 to be located at same level, can be used for for the workpiece in the magazine being pushed into the feeding and conveying device 15.

Further, in the present embodiment, which includes mounting rack 141, and is arranged in the mounting rack 141 In the 4th motor 142, connecting rod 143, the first guide rail 144, the first sliding block 145, push top 146, position sensor 147；The installation Frame 141 can play a supporting role comprising may be provided at the support portion on pedestal 111 and the installation above the support portion Portion；The mounting portion is rectangular-shape.The bottom of the mounting portion is arranged in 4th motor and its motor output shaft is from the mounting portion The connection of the connecting rod 143 in the mounting portion is protruded into and be arranged in bottom surface, to drive the connecting rod 143 to rotate.The connecting rod 143 is arranged at this In mounting portion, one end is connect with the 4th motor 142, and the other end is connect with first sliding block 145.The connecting rod 143 can be by this 4th motor 142 drives rotation, and then realizes flexible.First guide rail 144 is arranged along the length direction of the mounting portion, setting In the mounting portion bottom surface, which is set on first guide rail 144 and connect with the connecting rod 143 and the push top 146, It can be slided, and then the push top 146 is driven to do elastic movement when the connecting rod 143 is rotated on first guide rail 144. The push top 146 is oppositely arranged with first lifting device 13, is located in same level with the feeding and conveying device 15, can be led to It crosses elastic movement and the workpiece in magazine is pushed into the feeding and conveying device 15.The position sensor 147 is arranged in the peace It shelves on 141, is oppositely arranged with first lifting device 13, can incude the position of workpiece in the magazine, and by the material Work position information is transmitted to control system in box, by control system first lifting device 13 lifting top into the magazine The location of workpiece and the push top 146 be located at same level.

As shown in Fig. 1 and Fig. 7, its front end that first lifting device 13 is set of the feeding and conveying device 15, with this Material-pulling device 14 is correspondingly arranged, and specifically, the feeding and conveying device 15 and the material-pulling device 14 are located at same level, with convey by The workpiece that the material-pulling device 14 is released.The feeding and conveying device 15 includes third mounting plate 151, is arranged in third mounting plate 151 Upper and spaced third baffle 152 and fourth gear plate 153, the second driving mechanism 154, the second transmission mechanism 155, two groups the One tensioning wheel assembly 156 and several first sensors 157.The third mounting plate 151 be located at the third baffle 152 and this The lower section of four baffles 153, to be connected and fixed the third baffle 152 and the fourth gear plate 153.The third baffle 152 and the 4th Baffle 153 is parallel and is arranged at intervals on the third mounting plate 151, and between the third baffle 152 and the fourth gear plate 153 Interval forms the guide channel exported for workpiece.Second driving mechanism 154 is arranged on the fourth gear plate 153, can drive Second transmission mechanism 155 is driven.The transmission mechanism 155 setting the third baffle 152 and the fourth gear plate 153 it Between, it can be used for conveying workpieces.Two groups of tensioning wheel assemblies are separately positioned on the third baffle 152 and the fourth gear plate 153, It can produce a tensile force will be in workpiece clamp to second transport mechanism 155.Several first sensors 157 setting this Whether on four baffles 153, can incude in second transport mechanism 155 has workpiece transmission.

Further, which can be the 5th motor that 153 outside of fourth gear plate is arranged in, should The outside of third baffle 152 and the fourth gear plate 153 is additionally provided with two groups of wheel set assemblies connecting with the motor, every group of wheel set assembly Including the first runner and the second runner and the belt being set on first runner and second runner.The fourth gear plate 153 First runner in outside is connect with first runner in 152 outside of the third baffle by the way that shaft is arranged, first runner with this The connection of five motor output shafts, is driven by the 5th motor and is rotated, and the 5th motor, which drives, is arranged in 153 outside of fourth gear plate The rotation of first runner, and then second runner is driven to rotate and drive the first runner that 152 outside of third baffle is set First runner of rotation, 152 outside of third baffle rotates and then the second runner for being located at 152 outside of third baffle is driven to turn It is dynamic.In some other embodiment, which can be saved.

Second transmission mechanism 155 is arranged between the third baffle 152 and the fourth gear plate 153 comprising setting exists Between the third baffle 152 and the fourth gear plate 153 and parallel interval setting two group of first pulley assembly；Every group of first skin Pulley assemblies are correspondingly arranged with every group of wheel set assembly, are separately positioned on the third baffle 152 and the fourth gear plate 153, and point It does not connect with second runner, is rotated respectively by second driven by rotating wheel.Specifically, first pulley assembly include along this Three baffle length directions or along 153 transmission direction of fourth gear plate and spaced first belt pulley and the second belt pulley 1511, and the first belt 1512 being set on first belt pulley and second belt pulley 1511.First belt pulley with Second runner connection, is driven by the motor and is rotated, and then second belt pulley 1511 is driven to rotate, to drive first skin Band 1512 transmits.

In the present embodiment, which is separately positioned on the first baffle 152 and the fourth gear One end on plate 153 and close to first lifting device 13；Wherein, one group of setting is on the first baffle 152, another group of setting On the fourth gear plate 153, each group of the first tensioning wheel assembly 156 is correspondingly arranged with one first pulley assembly.Every one first Tensioning wheel assembly 156 includes third belt pulley 1561 and combines 1562 with the first gear of the third belt pulley 1561 connection, The third belt pulley is arranged on second belt pulley 1511, with 1511 direction of rotation of the second belt pulley on the contrary, it can be with Second belt pulley 1511 cooperation, output tensile force will be in the workpiece clamp to first belt 1512.First gear combination 1562 are arranged in the third baffle 152 or the outside of the fourth gear plate 153 comprising two mutually ratcheting gears, wherein One connect with second belt pulley 1511, is driven and is rotated by second belt pulley 1511, and then another gear is driven to rotate, And another gear is connect with the third belt pulley 1561 and then the third belt pulley 1561 is driven to rotate.

Again as shown in Figures 1 to 4, in the present embodiment, the loading and unloading of the integrated circuit material surface processing equipment fill Set, further include the second feed device 16, second feed device 16 setting the first baffle 112 and the second baffle 113 it Between, and it is located at the top of first feed device 12, and be arranged with 12 parallel interval of the first feed device.Its with this first Feed device 12 transmits contrary, can be used for accepting and conveying the empty magazine that first lifting device 13 drives lifting, And it is delivered to second side from the first side.

Further, which connect including third driving mechanism 161, with the third driving mechanism 161 The third transmission mechanism 162 of transmission is driven by the third driving mechanism 161.The third driving mechanism 161 is arranged in the pedestal 111 On, it can be the 6th motor, the third transmission mechanism 162 can be driven to be transmitted.Between the third transmission mechanism 162 includes Every two group of second synchronous wheel assembly of setting；Wherein it is arranged close to the first baffle 112 for one group, another group close to the second baffle 113 settings.The sky magazine can be shelved on this two group second synchronous wheel assembly, by its transmission.It is to be appreciated that some other In embodiment, the quantity of the second synchronous wheel assembly is not limited to two groups.Each group second synchronous wheel assembly includes third synchronizing wheel 1621, the 4th synchronizing wheel and the second synchronous belt 1622.The third synchronizing wheel 1621 is located at the first side, the setting of the 4th synchronizing wheel In second side, which is set in the third synchronizing wheel 162 and the 4th synchronizing wheel, the 6th motor with should Third synchronizing wheel 1621 connects, and specifically, the output shaft of the 6th motor is equipped with a runner, the third synchronizing wheel 1621 with should It is connected between runner by the second synchronous belt 1621, the 6th motor is by driving runner rotation to drive the third synchronous 1621 rotation of wheel, and then the 4th synchronizing wheel is driven to rotate.Second synchronous belt 1622 is from the runner around to the third synchronizing wheel 1621, further around the 4th synchronizing wheel is located at, return the runner.

As shown in Fig. 1 and Fig. 8, in the present embodiment, the handling equipment of the integrated circuit material surface processing equipment, It further include the first reclaimer robot 17, first reclaimer robot 17 setting is in second feed device 16 close to first lifting One end of device 13 can be used for taking the empty magazine on the first lifting device 13 to second feed device 16.Specifically, should First reclaimer robot 17 is arranged between the first baffle 112 and the second baffle 113, and is located at the first side, can be from this First lifting device 13 is extend out between first baffle 112 and the third baffle 113, to realize feeding.

Further, which includes the first manipulator 171 and the first telescopic component 172；This One manipulator 171 is arranged between two group of second synchronous wheel assembly, can be used for feeding；It which is provided with for the second splicing plate 201 the first via holes 1711 and the second via hole 1712 for being pierced by and being arranged side by side are in E font, the second splicing with the concave shape Plate 201 is adapted, which can drive the second splicing plate 201 from first via hole 1711 and second via hole 1712 pass through so that the magazine shelve on first manipulator 171, in order to 171 feeding of the first manipulator.First is mechanical The block that hand 171 also stops the magazine to fall close to one end of first lifting device 13.First telescopic component 172 its with First manipulator 171 connection can drive first manipulator 171 flexible.First telescopic component 172 includes the first flexible gas Cylinder 1721, the second guide rail 1722 and the second sliding block 1723.Its setting of first telescopic cylinder 1721 is in first manipulator 171 Lower section is connect with first manipulator 171, can drive first manipulator 171 flexible by stretching motion；Second guide rail 1722 are arranged in parallel with first telescopic cylinder 1721, can be used for being oriented to first manipulator 171.Second sliding block with should The connection of first manipulator 171, and it is arranged on second guide rail 1722, can slide on second guide rail 1722, in turn So that first manipulator 171 is slided along the length direction of second guide rail 1722.

As shown in Fig. 1 and Fig. 9, in the present embodiment, the handling equipment of the integrated circuit material surface processing equipment, It further include transfer 18, which is arranged between first baffle 112 and second baffle 113, and is located at two groups the Between two synchronous wheel assemblies；It is disposed adjacent with first reclaimer robot 17 comprising turntable 181, rises rotary cylinder 182 Sending down abnormally ascending cylinder 183；The turntable 181 can be used for placing for the sky magazine, the sky magazine can be carried out 180 degree steering, so that The workpiece still can put into magazine according to the direction of original-pack charging box, and workpiece is avoided to put into magazine from reversed.The rotary cylinder 182 It is arranged below the turntable 181 to drive the turntable to rotate, which is arranged below the turntable 181, with the turntable 181 connections, can drive the turntable 181 to go up and down, and after it drives turntable 181 to rise, rotary cylinder 182 drives the turntable 181 Rotation, to realize that the empty magazine of drive turns to；When needing empty magazine continuing transmission, which drives the turntable 181 are decreased below second feed device 16, so as to make turn to after empty magazine shelve on second feed device 16, Continuation is transmitted by the second feed device 16.

As shown in Figures 1 to 3, in the present embodiment, the handling equipment of the integrated circuit material surface processing equipment, also Including lower material conveying device 19, the second lifting device 20 and the second reclaimer robot 21；The lower setting of material conveying device 19 exists The one end of first baffle 112 far from the feeding and conveying device 15 is arranged in parallel with the feeding and conveying device 15, be located at this second The front end of lifting device 20, can be used for conveying processing after workpiece, and the workpiece put by second feed device 16 conveying and The empty magazine come.Second lifting device 20 be arranged on the pedestal 111 and be located at second feed device 16 far from this first One end of lifting device 13 is able to drive sky magazine lifting, the workpiece which is come Put into the corresponding position in magazine.Second reclaimer robot 21 is arranged between the first baffle 112 and the second baffle 113 And one end far from first reclaimer robot 17, the empty magazine that can convey second feed device 16 take to this second liter Falling unit 20.

As shown in Fig. 3 and Figure 10, its front end that second lifting device 20 is set of lower material conveying device 19.The blanking Conveying device 19 includes the 4th mounting plate 191, is arranged on the 4th mounting plate 191 and spaced fifth gear plate 192 and the Six baffles 193, the 4th driving mechanism, 194, two group of second tensioning wheel assembly 195 of the 4th transmission mechanism and several first sensings Device 157.4th mounting plate 191 is located at the lower section of the fifth gear plate 192 and the sixth gear plate 193, may include several pieces 4th mounting plate 191, several pieces of the 4th mounting plates 191 are side by side and interval is arranged, to be connected and fixed the fifth gear plate 192 and be somebody's turn to do Sixth gear plate 193.The fifth gear plate 192 is parallel with the sixth gear plate 193 and is arranged at intervals on the 4th mounting plate 191, and Interval between the fifth gear plate 192 and the sixth gear plate 193 forms the guide channel exported for workpiece.4th driving mechanism It is arranged on the sixth gear plate 193, the 4th transmission mechanism 194 can be driven to be driven.Transmission mechanism setting this Between five baffles 192 and the sixth gear plate 193, it can be used for conveying workpieces.Two groups of tensioning wheel assemblies be separately positioned on this On five baffles 192 and the sixth gear plate 193, it can produce a tensile force and expect the sky of workpiece clamp to second lifting device 20 On box.Several first sensors 157 are arranged on the sixth gear plate 193, and can incude in the 4th transport mechanism 194 is It is no to have workpiece transmission.

Further, the 4th driving mechanism can be the 7th motor that 193 outside of the sixth gear plate is arranged in, the 5th The outside of baffle 192 and the sixth gear plate 193 is additionally provided with two groups of wheel set assemblies connecting with the motor, and every group of wheel set assembly includes First runner and the second runner and the belt being set on first runner and second runner.193 outside of sixth gear plate The first runner connect with first runner in 192 outside of the fifth gear plate by the way that shaft is arranged, first runner and the 7th electric Machine exports axis connection, is driven and is rotated by the 7th motor, and the 7th motor, which drives, is arranged in the first of 193 outside of sixth gear plate Runner rotation, and then second runner is driven to rotate and drive the first runner rotation that 192 outside of fifth gear plate is set, First runner in 192 outside of fifth gear plate rotates and then drives the second runner rotation for being located at 192 outside of fifth gear plate.? In some other embodiment, which can be saved.

4th transmission mechanism 194 is arranged between the fifth gear plate 192 and the sixth gear plate 193 comprising setting exists Between the fifth gear plate 192 and the sixth gear plate 193 and parallel interval setting two group of second pulley assembly；Every group of second skin Pulley assemblies are correspondingly arranged with every group of wheel set assembly, are separately positioned on the fifth gear plate 192 and the sixth gear plate 193, and point It does not connect with second runner, is rotated respectively by second driven by rotating wheel.Specifically, second pulley assembly include along this Three baffle length directions or along 193 transmission direction of sixth gear plate and spaced 4th belt pulley 1941 and the 5th belt pulley 1943, and the second belt 1942 being set on the 4th belt pulley 1941 and the 5th belt pulley 1943.4th belt Wheel 1941 is connect with second runner, is driven and is rotated by the motor, and then the 5th belt pulley 1943 is driven to rotate, to drive Second belt 1942 transmission.

In the present embodiment, which is separately positioned on the first baffle 152 and the sixth gear One end on plate 193 and close to second lifting device 20；Wherein, one group of setting is on the first baffle 152, another group of setting On the sixth gear plate 193, each group of the second tensioning wheel assembly 195 is correspondingly arranged with one second pulley assembly.Every one second Tensioning wheel assembly 195 includes the 6th belt pulley and combines 1951 with the second gear of the 6th belt pulley connection, the 6th skin Belt wheel is arranged on the 5th belt pulley 1943, with 1943 direction of rotation of the 5th belt pulley on the contrary, it can be with the 5th skin Belt wheel 1943 cooperates, output tensile force, by the workpiece clamp into the sky magazine.Second gear combination 1951 is arranged the 5th The outside of baffle 192 or the sixth gear plate 193 comprising mutually ratcheting two gears, one of them and the 5th belt Wheel 1943 connection, by the 5th belt pulley 1943 drive rotate, and then drive another gear rotate, and another gear with should 6th belt pulley connects and then drives the 6th pulley rotation.

As shown in Fig. 2 and Figure 11, which can go up and down along the short transverse of second feed device 16 Movement can rise in 16 equal height of the second feed device to accept the empty material from second feed device 16 conveying Box drives the sky magazine to decline, and workpiece can be put into from top to bottom in the sky magazine, one workpiece of every threading, the second lifting dress A height can be declined by setting 20.

Further, which includes including the second splicing plate 201, the second lifting assembly 202, second Bar 203 and the 8th motor 204；The upper of the pedestal 111 is arranged in the second splicing plate 201, can be used for accepting the magazine, should Second splicing plate 201 can be in concave shape, and the side opposite with second feed device 12 offer a notch, and notch is from institute The side for stating splicing plate extends towards the middle part of the splicing plate, in order to send magazine to the second feed device 16；This second liter Part 202 of coming down to a lower group is arranged in the pedestal 111, can rise from the pedestal 111 and connect with the second splicing plate 201, this can be driven second to connect Flitch 201 is gone up and down.Second screw rod 203 is connect with second lifting assembly 202, can drive the second lifting group by rotation Part 202 is gone up and down.8th motor 204 is connect with second screw rod 203, to drive second screw rod 203 to rotate.Second lifting Component 202 includes the second mounting plate 2021 and several second guide rods 2022 being arranged on second mounting plate 2021.This Two mounting plates 2021 are set in the periphery of second screw rod 203, are equipped with a perforation among it, wear for second screw rod 203, It can be driven by second screw rod 203 and be gone up and down.Several second guide rods 2022 be arranged on second mounting plate 2021 with this Two screw rods 203 are arranged in parallel, and its from the pedestal 111 be pierced by setting with connect with the second splicing plate 201 with drive this second Splicing plate 201 is gone up and down.In this embodiment, it is preferred that several second guide rods 2022 include four guide rods.8th motor 204 are arranged in the side of second screw rod 203, are connect by the way that connecting rod is arranged with second screw rod 203, can be somebody's turn to do by driving Link rotatable drives second screw rod 203 to rotate in turn.

In the present embodiment, it is additionally provided with the second binder component 205 on second lifting device 20, the second binder component 205 can be used for pushing down magazine, and magazine is avoided to shake.The second pressure component 205 includes the 6th mounting plate 2051, the 9th motor 2052, the second rotating arm 2053, the second briquetting 2054；6th mounting plate 2051 be arranged on the second splicing plate 201 and with The second splicing plate 201 is vertically arranged, and can be used for installing the 9th motor 2052, and third motor setting is in the 6th installation On plate 2051, second rotating arm 2053 can be driven to rotate, which is arranged in the 6th mounting plate 2051 It is upper and connect with the 9th motor 2052, driven and rotated by the 9th motor 2052, second briquetting 2054 be arranged this second 2053 bottom of rotating arm, can be used for fixing magazine.

As shown in figs. 3 and 12, which includes the second manipulator 211 and the second telescopic component 212；Second manipulator 211 is arranged between two group of second synchronous wheel assembly, is in E font, connects with the second of the concave shape Flitch 201 is adapted, which can drive the second splicing plate 201 to rise to the top of second manipulator 211, So that the magazine on second manipulator 211 is held on the second splicing plate 201.Second manipulator 211 is close to this second liter The block that one end of falling unit 20 also stops the magazine to fall.Second telescopic component 212 its connect with second manipulator 211 It connects, second manipulator 211 can be driven flexible.Second telescopic component 212 includes the second telescopic cylinder 2121, third guide rail 2122 and third sliding block 2123.It is arranged below second manipulator 211 second telescopic cylinder 2121, with second machine Tool hand 211 connects, and can drive second manipulator 211 flexible by stretching motion；The third guide rail 2,122 second is stretched with this Contracting cylinder 2121 is arranged in parallel, and can be used for being oriented to second manipulator 211.The third sliding block 2123 and second manipulator 211 connection, and its be arranged on the third guide rail 2122, can be slided on the third guide rail 2122 so that this second Manipulator 211 is slided along the length direction of the third guide rail 2122.

The handling equipment of the integrated circuit material surface processing equipment further includes third feed device 22, which send Expect that device 22 is arranged between the first baffle 112 and the second baffle 113, and be located at the lower section of second feed device 16, It is located at same level with first feed device 12, can be used for will the magazine with the workpiece after processed from the second lifting Device 20 is delivered to discharge port 1132.

Further, which includes the 5th driving mechanism 221 and the 5th transmission mechanism 222.This Five driving mechanisms 221 are arranged on the pedestal 111, connect with the 5th transmission mechanism 222 to drive the 5th transmission mechanism 222 transmissions.It specifically, can be the tenth motor being arranged on the pedestal 111.5th transmission mechanism 222 can by this The driving rotation of five driving mechanisms 221.5th transmission mechanism includes the synchronous wheel assembly of two groups of thirds；This two groups of third synchronizing wheel groups The setting of part interval, one of them is arranged close to the first baffle 112, another is arranged close to the second baffle 113.Specifically, Every group of synchronous wheel assembly includes spaced along 112 length direction of first baffle or along 113 length direction of second baffle 5th synchronizing wheel 2221, the 6th synchronizing wheel 2222 and third synchronizing wheel 2223, the 5th synchronizing wheel 2221 are arranged far from this One end of second lifting device 20, the 6th synchronizing wheel 2222 are positioned close to one end of second lifting device 20, and the 5th Synchronizing wheel 2221 is connect with the tenth motor, is driven and is rotated by the tenth motor, and then the 6th synchronizing wheel 2222 is driven to rotate, The third synchronous belt 2223 is set in the 5th synchronizing wheel 2221 and the 6th synchronizing wheel 2222, can be by the 5th synchronizing wheel 2221 drive transmission.

The working principle of the handling equipment of the present embodiment integrated circuit material surface processing equipment: firstly, by working Personnel put into from the drain hole 1131 equipped with workpiece and unprocessed magazine, are sent to this first liter by first feed device 12 Falling unit 13；Then, which drives magazine to do ascending motion, which releases workpiece to the feeding Conveying device 115 is delivered to the enterprising line integrated circuit material of integrated circuit material surface processing equipment by the feeding and conveying device 15 Material surface treatment；The material-pulling device 14 one workpiece of every release, first lifting device 13 rise in first lifting device most The workpiece on top and the material-pulling device 14 are located at same level；Followed by, when the workpiece in the magazine is pushed out entirely, this first liter Falling unit 13 drives the magazine to rise to 16 top of the second feed device, which, which stretches out, accepts sky material Box, and by shrinking, it is transmitted so that the sky magazine is shelved on second feed device 16 by second feed device 16, when this Empty magazine is located on the transfer 18, which carries out 180 degree steering to the sky magazine, second is sent after steering by this Material device 16 continues to be sent to the second reclaimer robot 22, is taken by second reclaimer robot 22 to second lifting device 20. Workpiece after processing is delivered to second lifting device 20 into the lower material conveying device 19, and is conveyed by the lower material conveying device 19 Into empty magazine, one workpiece of every feeding, second lifting device 20 decline one into empty magazine the idle station of top with should Lower material conveying device 19 is located at same level, when the sky magazine fills workpiece, after this is had processing by the third feed device The magazine of workpiece be delivered to drain hole 1132, staff takes out workpiece from the drain hole 1132.The integrated circuit material table The handling equipment of surface treatment equipment has the advantages that automatization level is high, can be used for improving the transfer efficiency of workpiece.

It should be understood that above embodiments only express the preferred embodiment of the present invention, description is more specific and detailed Carefully, but it cannot be understood as limitations on the scope of the patent of the present invention；It should be pointed out that for the common skill of this field For art personnel, without departing from the inventive concept of the premise, above-mentioned technical characterstic can be freely combined, can also be done Several modifications and improvements out, these are all within the scope of protection of the present invention；Therefore, all to be done with scope of the invention as claimed Equivalents and modification, should belong to the covering scope of the claims in the present invention.

Claims

1. a kind of handling equipment of integrated circuit material surface processing equipment, which is characterized in that including bracket (11), first Feed device (12), the first lifting device (13), material-pulling device (14) and feeding and conveying device (15)；

The bracket (11) is equipped with drain hole (1131)；First feed device (12) is arranged on the bracket (11), And be correspondingly arranged with the drain hole (1131), to convey the magazine with workpiece put into from the drain hole (1131)；

First lifting device (13) is arranged on the bracket (11), is located at one end of first feed device (12), To accept and drive the magazine of the first feed device (12) conveying to be gone up and down；

The material-pulling device (14) setting is corresponding with the first lifting device (13) to set in the rear end of first lifting device (13) It sets, the workpiece in the magazine is pushed into the feeding and conveying device (15)；

The feeding and conveying device (15) setting is right with the material-pulling device (14) in the front end of first lifting device (13) It should be arranged, to convey the workpiece released by the material-pulling device (14).

2. the handling equipment of integrated circuit material surface processing equipment according to claim 1, which is characterized in that institute Bracket (11) is stated to include pedestal (111), the first baffle (112) being arranged above the pedestal (111) and be arranged described And the second baffle (113) that is positioned apart from parallel with the first baffle (112) on pedestal (111)；The drain hole (1131) it is arranged on the second baffle (113)；First feed device (12) setting in the first baffle (112) and Between the second baffle (113), and it is arranged along the first baffle (112) and the second baffle (113) length direction.

3. the handling equipment of integrated circuit material surface processing equipment according to claim 2, which is characterized in that institute The first feed device (12) are stated to connect including the first driving mechanism (121), with first driving mechanism (121) by described first Driving mechanism (121) drives the first transmission mechanism (122) of transmission；

First driving mechanism (121) includes first motor, and first transmission mechanism (122) includes two groups spaced First synchronous wheel assembly；The first synchronous wheel assembly includes along the first baffle (112) length direction spaced the One synchronizing wheel (1221), the second synchronizing wheel and be set on first synchronizing wheel (1221) and second synchronizing wheel One synchronous belt (1222)；The first motor is connect to drive second synchronizing wheel to rotate with second synchronizing wheel；

The both ends of first feed device (12) are respectively formed the first side and second side；First synchronous belt (1222) transmission Direction is to be sent to first side from described second side.

4. the handling equipment of integrated circuit material surface processing equipment according to claim 3, which is characterized in that institute It states the first lifting device (13) to be arranged in the pedestal (111), and is located at the first of second feed device (16) Side, the short transverse along second feed device (16) move up and down；First lifting device (13) includes first Splicing plate (131) connect the first lifting group for driving the first splicing plate (131) lifting with the first splicing plate (131) Part (132), the first screw rod (133) for driving the first lifting assembly (132) lifting are connect with first screw rod (133) Drive the second motor (134) of the first screw rod (133) rotation；

First lifting assembly (132) include be set in first screw rod (133) periphery by first screw rod (133) It drives the first mounting plate (1321) of lifting and is arranged on first mounting plate (1321) and first screw rod (133) several first guide rods (1322) disposed in parallel；First guide rod (1322) connect with the first splicing plate (131) And setting is pierced by drive the first splicing plate (131) to go up and down from the pedestal (111)；

The first binder component (135) is additionally provided on first lifting device (13), the first binder component (135) includes setting Set on the first splicing plate (131) with vertically disposed second mounting plate (1351) of the first splicing plate (131), setting On second mounting plate (1351) third motor (1352), be arranged on second mounting plate (1351) and described the Three motors (1352) connection is by being driven the first rotating arm (1353) of rotation by the third motor (1352) and being arranged in institute First rotating arm (1353) bottom is stated with the first briquetting (1354) of the fixation magazine.

5. the handling equipment of integrated circuit material surface processing equipment according to claim 1, which is characterized in that institute It states material-pulling device (14) setting and is located at same level on the bracket (11), and with the feeding and conveying device (15), wrap It includes mounting rack (141), and the 4th motor (142), the connecting rod (143), the first guide rail that are arranged in the mounting rack (141) (144), the first sliding block (145), push top (146), position sensor (147)；The connecting rod (143) and the 4th motor (142) connection is driven by the 4th motor (142) and is rotated；First sliding block (145) is arranged in first guide rail (144) On, connect with the connecting rod (143) and the push top (146), with the connecting rod (143) rotate when in first guide rail (144) it is slided on, the push top (146) is driven to do elastic movement；The position sensor (147) is arranged in the installation The position of workpiece in the magazine is incuded on frame (141).

6. the handling equipment of integrated circuit material surface processing equipment according to claim 1, which is characterized in that institute State feeding and conveying device (15) include third mounting plate (151), setting it is on the third mounting plate (151) and spaced Third baffle (152) and fourth gear plate (153), the second driving mechanism (154), connect with second driving mechanism (154) by Second driving mechanism (154) drives the second transmission mechanism (155) of transmission, is separately positioned on the third baffle (152) With on the fourth gear plate (153) two group of first tensioning wheel assembly (156) and be arranged in the fourth gear plate (153) if Dry first sensor (157)；

Second driving mechanism (154) includes the 5th motor；

Second transmission mechanism (155) include be arranged between the third baffle (152) and the fourth gear plate (153) and Two group of first pulley assembly of parallel interval setting；First pulley assembly includes long along the third baffle (152) Spend direction or along fourth gear plate (153) length direction and spaced first belt pulley and the second belt pulley (1511)； And it is set in the first belt (1512) on first belt pulley and second belt pulley (1511)；First belt Wheel is driven by the 5th motor and is rotated；

Two group of first tensioning wheel assembly (156) is separately positioned on the third baffle (152) and the fourth gear plate (153) One end upper and close to first lifting device (13)；Each first tensioning wheel assembly (156) and first skin Pulley assemblies are correspondingly arranged；Each first tensioning wheel assembly (156) includes third belt pulley (1561) and with described The first gear of three belt pulleys (1561) connection combines (1562)；The third belt pulley (1561) is arranged in second belt It takes turns on (1511) and opposite with the second belt pulley (1511) direction of rotation to be incited somebody to action with second belt pulley (1511) cooperation In the workpiece clamp to first belt (1512)；The first gear combination (1562) is arranged in the third baffle (152) or the fourth gear plate (153) outside is to drive the third belt pulley (1561) to rotate.

7. the handling equipment of integrated circuit material surface processing equipment according to claim 4, which is characterized in that also Including the second feed device (16)；Second feed device (16) setting in the top of first feed device (12), with First feed device (12) parallel interval it is arranged, and with the first feed device (12) direction of transfer on the contrary, to hold It connects and conveys the empty magazine for driving lifting from first lifting device (13)；

Second feed device (16) includes third driving mechanism (161), connect by institute with the third driving mechanism (161) State the third transmission mechanism (162) that third driving mechanism (161) drive transmission；

The third driving mechanism (161) includes the 6th motor, and the third transmission mechanism (162) includes spaced two groups Second synchronous wheel assembly；Described second synchronous wheel assembly includes along the first baffle (112) length direction or along described second The spaced third synchronizing wheel (1621) of baffle (113) length direction, the 4th synchronizing wheel and to be set in the third synchronous Take turns the second synchronous belt (1622) in (1621) and the 4th synchronizing wheel；6th motor and the third synchronizing wheel (1621) it connects to drive the third synchronizing wheel (1621) to rotate.

8. the handling equipment of integrated circuit material surface processing equipment according to claim 7, which is characterized in that also Including the first reclaimer robot (17)；First reclaimer robot (17) setting is in second feed device (16) close to institute One end of the first lifting device (13) is stated to send taking the empty magazine on first lifting device (13) to described second Expect device (16)；

First reclaimer robot (17) includes the first manipulator being arranged between described two group second synchronous wheel assembly (171) and the first telescopic component (172) for driving first manipulator (171) flexible；

First telescopic component (172) include the first telescopic cylinder (1721) being connect with first manipulator (171), with First telescopic cylinder (1721) the second guide rail (1722) disposed in parallel and it is arranged on second guide rail (1722) The second sliding block (1723) that can be slided on second guide rail (1722)；Second sliding block (1723) and first machinery Hand (171) connection is to drive first manipulator (171) to slide；

The first splicing plate (131) and the opposite side of first feed device (12) offer a notch；The notch It is extended from the side of the splicing plate (131) towards the middle part of the splicing plate (131) so that the first splicing plate (131) In concave shape, first manipulator (171) is equipped with the first mistake for being pierced by and being arranged side by side for the first splicing plate (131) Hole (1711) and the second via hole (1712).

9. the handling equipment of integrated circuit material surface processing equipment according to claim 7, which is characterized in that also Including the transfer (18) being arranged between described two group second synchronous wheel assembly；The transfer (18) includes described in confession The rotary cylinder of turntable (181), setting drive below the turntable (181) turntable (181) rotation that empty magazine is placed (182) and setting drives the lifting cylinder (183) of turntable (181) lifting below the turntable (181).

10. the handling equipment of integrated circuit material surface processing equipment according to claim 7, which is characterized in that It further include lower material conveying device (19), the second lifting device (20) and the second reclaimer robot (21)；The blanking conveying dress (19) setting is set in the one end of the first baffle (112) far from the feeding and conveying device (15), conveys and fills with the feeding (15) are set to be arranged in parallel；Second lifting device (20) is arranged on the pedestal (111) and it is located at second feeding The one end of device (16) far from first lifting device (13)；Second reclaimer robot (21) is arranged in the first gear Between plate (112) and the second baffle (113) and one end far from first reclaimer robot (17).

11. the handling equipment of integrated circuit material surface processing equipment according to claim 10, which is characterized in that The lower material conveying device (19) include it is several side by side and spaced 4th mounting plate (191), setting it is described 4th peace In loading board (191) and spaced fifth gear plate (192) and sixth gear plate (193), the 4th driving mechanism, with the 4 wheel driven The connection of motivation structure drives the 4th transmission mechanism (194) of transmission by the 4th driving mechanism, is separately positioned on the fifth gear Two group of second tensioning wheel assembly in the outside of plate (192) and the sixth gear plate (193) and setting are in the sixth gear plate (193) several second sensors (196) being arranged side by side on；

4th driving mechanism includes the 7th motor；

4th transmission mechanism (194) include be arranged between the fifth gear plate (192) and the sixth gear plate (193) and Two group of second pulley assembly of parallel interval setting；Second pulley assembly includes long along the fifth gear plate (192) Spend direction or along sixth gear plate (193) length direction and the 4th belt pulley (1941) being positioned apart from and the 5th belt pulley And the second belt for being set on the 4th belt pulley (1941) and the 5th belt pulley (1943) (1943), (1942)；5th belt pulley (1943) is driven by the 7th motor and is rotated；

Second tensioning wheel assembly (195) setting is in the fifth gear plate (192) and the sixth gear plate (193) close to described One end of second lifting device (20)；Each second tensioning wheel assembly (195) is corresponding with second pulley assembly Setting；Each second tensioning wheel assembly (195) include the 6th belt pulley and connect with the 6th belt pulley second Gear combination (1951)；6th belt pulley be arranged on the 5th belt pulley (1943) and with the 5th belt pulley (1943) direction of rotation with the 5th belt pulley (1943) on the contrary to cooperate the workpiece clamp to second belt (1942) on；Second gear combination (1951) setting is on the outside of the fifth gear plate (192) or the sixth gear plate (193) To drive the 5th belt pulley (1943) to rotate.

12. the handling equipment of integrated circuit material surface processing equipment according to claim 10, which is characterized in that Second lifting device (20) includes the second splicing plate (201), connect drive described second with the second splicing plate (201) The second lifting assembly (202) of splicing plate (201) lifting, the second screw rod for driving the second lifting assembly (202) lifting (203), the 8th motor (204) for driving the second screw rod (203) rotation is connect with second screw rod (203)；

Second lifting assembly (202) include be set in second screw rod (203) periphery by second screw rod (203) It drives the 5th mounting plate (2021) of lifting and is arranged on the 5th mounting plate (2021) and second screw rod (203) several second guide rods (2022) disposed in parallel；Second guide rod (2022) connect with the second splicing plate (201) And setting is pierced by drive the second splicing plate (201) to go up and down from the pedestal (111)；

The second binder component (205) is additionally provided on second lifting device (20), the second binder component (205) includes setting It sets on the splicing plate with vertically disposed 6th mounting plate (2051) of the splicing plate, setting in the 6th mounting plate (2051) the 9th motor (2052), setting on are connect on the 5th mounting plate (2021) with the 9th motor (2052) The second rotating arm (2053) of rotation is driven by the 9th motor (2052) and is arranged in second rotating arm (2053) Bottom is with the second briquetting (2054) of the fixation magazine.

13. the handling equipment of integrated circuit material surface processing equipment according to claim 11, which is characterized in that Second reclaimer robot (21) include the second manipulator (211) for being arranged between described two group second synchronous wheel assembly with And the second telescopic component (212) for driving second manipulator (211) flexible；

Second telescopic component (212) include the second telescopic cylinder (2121) being connect with second manipulator (211), with Second telescopic cylinder (2121) third guide rail (2122) disposed in parallel, be arranged on the third guide rail (2122) can be The third sliding block (2123) slided on the third guide rail (2122)；The third sliding block (2123) and second manipulator (211) to drive second manipulator (211) to slide.

14. the handling equipment of integrated circuit material surface processing equipment according to claim 10, which is characterized in that Discharge port (1132) are additionally provided on the second baffle (113)；

The handling equipment of the integrated circuit material surface processing equipment further includes third feed device (22), the third Feed device (22) is arranged between the first baffle (112) and the second baffle (113), is located at second feeding and fills Set the lower section of (16) and be located at same level with first feed device (12), will have it is processed after workpiece magazine from Second lifting device (20) is delivered to the discharge port (1132)；The third feed device (22) includes the 5th driving machine Structure (221) connect the 5th transmission that transmission is driven by the 5th driving mechanism (221) with the 5th driving mechanism (221) Mechanism (222)；

5th driving mechanism (221) includes the tenth motor, and the 5th transmission mechanism (222) includes spaced two groups Third synchronizes wheel assembly；The synchronous wheel assembly of the third includes along the first baffle (112) length direction spaced the Five synchronizing wheels (2221), the 6th synchronizing wheel (2222) and it is set in the 5th synchronizing wheel (2221) and the 6th synchronizing wheel (2222) the third synchronous belt (2223) on；Tenth motor is connect to drive described with the 5th synchronizing wheel (2221) Five synchronizing wheels (2221) rotation.