CN202245328U - Device for circularly taking out box-packed silicon wafers - Google Patents

Device for circularly taking out box-packed silicon wafers Download PDF

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Publication number
CN202245328U
CN202245328U CN 201120348900 CN201120348900U CN202245328U CN 202245328 U CN202245328 U CN 202245328U CN 201120348900 CN201120348900 CN 201120348900 CN 201120348900 U CN201120348900 U CN 201120348900U CN 202245328 U CN202245328 U CN 202245328U
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China
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conveyings
lifting table
silicon
fixed
unloading
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Expired - Lifetime
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CN 201120348900
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Chinese (zh)
Inventor
王燕清
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Wuxi Lead Intelligent Equipment Co Ltd
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Wuxi Lead Auto Equipment Co Ltd
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Priority to CN 201120348900 priority Critical patent/CN202245328U/en
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Abstract

The utility model relates to a device for circularly taking out box-packed silicon wafers. The device comprises loading and unloading mechanisms for a silicon wafer box, two lifting platform mechanisms, a middle conveying mechanism, a three-shaft conveying mechanism and a silicon wafer pushing mechanism which are mounted on a frame, wherein the loading and unloading mechanisms for the silicon wafer box are matched with the two lifting platform mechanisms; the two lifting platform mechanisms are matched with the middle conveying mechanism; the middle conveying mechanism is matched with the three-shaft conveying mechanism; the three-shaft conveying mechanism is matched with the silicon wafer pushing mechanism; and the silicon wafer pushing mechanism is matched with the loading and unloading mechanisms for the silicon wafer box. According to the utility model, a loading conveying mechanism and an unloading conveying mechanism which are symmetrical with each other are designed, and two lifting platforms are used for circularly and alternately conveying the silicon wafers in a full silicon wafer box on the two lifting platforms, so that the efficiency of conveying the silicon wafers is increased, the production efficiency is increased, the defect of manually taking the silicon wafers is overcome, and meanwhile, the labor intensity of workers is reduced.

Description

Boxed silicon wafers circulation withdrawing device
Technical field
The utility model relates to a kind of withdrawing device of solar silicon wafers, especially a kind of boxed silicon wafers circulation withdrawing device.
Background technology
Need in the silicon chip production process silicon chip is transported on the other machine, be that production efficiency is low through a dead lift in the past, and cause silicon chip broken easily, thereby influence production efficiency.
Summary of the invention
The purpose of the utility model is to overcome the deficiency that exists in the prior art, provides a kind of the raising to transmit silicon chip efficient, overcome the boxed silicon wafers circulation withdrawing device that the sheet shortcoming is got in manual work.
The technical scheme that provides according to the utility model; Said boxed silicon wafers circulation withdrawing device; Be included in silicon box charging and discharging mechanism, two lifting table mechanisms, intermediate carrier structure, three conveying mechanisms of installing on the frame and push away silicon chip mechanism; Described silicon box charging and discharging mechanism cooperates with two lifting table mechanisms, and two lifting table mechanisms cooperate with the intermediate carrier structure, and the intermediate carrier structure cooperates with three conveying mechanisms; Three conveying mechanisms with push away silicon chip mechanism and cooperate, push away silicon chip mechanism and cooperate with the silicon box charging and discharging mechanism.
Said silicon box charging and discharging mechanism is included in silicon box loading and unloading side plate fixing on the frame; Be rotatablely equipped with silicon box loading and unloading roller shaft at the both ends of silicon box loading and unloading side plate; Silicon box loading and unloading roller shaft is provided with silicon box loading and unloading load-transfer device; Silicon box loading and unloading motor is installed on silicon box loading and unloading side plate; The output shaft of silicon box loading and unloading motor is connected through coupler with silicon box loading and unloading roller shaft, when material loading, is provided with silicon box loading and unloading sensor on the silicon box loading and unloading load-transfer device head end portion cooresponding silicon box loading and unloading side plate.
Said two lifting table mechanisms are included in first fixing on the frame lifting table and use supporting seat; Be fixed with lifting table at first lifting table on supporting seat and use the line rail; Slidely connect lifting table at lifting table on the line rail and use slide block; Be provided with lifting table through the bearing turret at first lifting table on supporting seat and use screw mandrel; Lifting table is used nut with being bolted with lifting table on the screw mandrel, is fixedly connected with second lifting table at lifting table on nut and uses supporting seat, and second lifting table is fixed as one with slide block with nut and lifting table with supporting seat, lifting table; Lifting table is installed on frame uses lead screw motor; Lifting table is connected with screw mandrel with lifting table with the output shaft of lead screw motor; Be fixed with two lifting tables at second lifting table on supporting seat and use riser; Be rotatablely equipped with lifting table at lifting table with the both ends of riser and use roller shaft, be provided with lifting table at lifting table on roller shaft and use load-transfer device, be fixed with lifting table at lifting table with an end of roller shaft and use passive belt wheel; Lifting table is installed at lifting table on riser and uses the load-transfer device motor; Be fixed with lifting table on the output shaft of lifting table with the load-transfer device motor and use driving pulley, lifting table cooperates with passive belt wheel with lifting table with driving pulley, and lifting table is provided with lifting table with the cooresponding lifting table of load-transfer device head end portion on riser and uses sensor when material loading.
Said intermediate carrier structure is included in middle conveying the fixing on the frame and uses gripper shoe; Carry both ends to be rotatablely equipped with middle conveying roller in the centre with gripper shoe; Carry in the middle of being provided with on carrying with roller in the centre and use conveyer belt; Carry in the middle of on frame, being equipped with and use motor; The centre conveying carries the roller shaft with roller to be connected by shaft coupling with motor and centre, carries the middle part madial wall with gripper shoe to be fixed with middle conveying sensor in the centre; Conveying cylinder in the middle of in the middle of being equipped with first on the frame of carrying the left and right sides, middle part, folded zone correspondence in the middle of two, carrying with cylinder and second with gripper shoe; In the middle of being fixed with first on the cylinder rod of carrying in the middle of first with cylinder, carry and use baffle plate, in the middle of being fixed with second on the cylinder rod of carrying in the middle of second with cylinder, carry and use baffle plate.
Said three conveying mechanisms are included in two fixing on the frame three conveyings and use first connecting panel; Be fixed with three conveyings three conveyings on first connecting panel and use second bearing seat with primary shaft bearing and three conveyings; Be rotatablely equipped with three conveyings three conveyings on the primary shaft bearing and use first synchronous pulley; Be rotatablely equipped with three conveyings three conveyings on second bearing seat and use second synchronous pulley; Be provided with three conveyings on second synchronous pulley with vertical band synchronously three conveyings with first synchronous pulley and three conveyings; Be fixed with three conveyings and use first contiguous block with being with synchronously three conveyings with the first profile of tooth piece and three conveyings; Three conveyings are fixed as one with first contiguous block with the first profile of tooth piece and three conveyings with drive block, three conveyings; Be fixed with two three conveyings three conveyings on drive block and use upright slide block, be fixed with three conveyings three conveyings on connecting panel and use the vertical curve rail with cushion block and two three conveyings, three conveyings cooperate with the vertical curve rail with three conveyings with upright slide block; Three conveyings are installed with motor and reductor thereof on frame; On frame, be fixed with three conveyings and use the transmission shafts bearing; Three conveyings are provided with three conveyings with turret on the transmission shafts bearing and use transmission shaft; Three conveyings link to each other with first synchronous pulley with three conveyings through coupler with transmission shaft; Be fixed with three conveyings three conveyings on drive block and use second connecting panel; Be fixed with three conveyings three conveyings on second connecting panel and use the third axle bearing, three conveyings all are installed in three conveyings with on second connecting panel through three conveyings with the third axle bearing with the 3rd synchronous pulley and three conveyings with the 4th synchronous pulley, and three conveyings are provided with three conveyings with horizontal band synchronously with the 3rd synchronous pulley and three conveyings with the 4th synchronous pulley; Carry with laterally being with synchronously and drive with cross motor through rack-mounted three conveyings; Three conveyings are fixed with three conveyings and use second contiguous block with the second profile of tooth piece and three conveyings with laterally being with synchronously, are fixed with three conveyings with the 3rd connecting panel three conveyings on second contiguous block, and three conveyings are used cross sliding clock with being fixed with three conveyings on the 3rd connecting panel; Be fixed with three conveyings three conveyings on second connecting panel and use the horizon rail, three conveyings cooperate with cross sliding clock with three conveyings with the horizon rail; Be equipped with three on the 3rd connecting panel three conveyings and carry the electricity consumption cylinders, carry at three with pipe link three conveyings to be installed through three conveyings on the electricity consumption cylinders and to use vacuum cup.
The said silicon chip mechanism that pushes away is included in pushing away the silicon chip first electric cylinder and pushing away the silicon chip second electric cylinder of installing on the frame, pushes away to be equipped with on the silicon chip first electric cylinder pushing away silicon chip first pushing block, pushes away to be equipped with on the silicon chip second electric cylinder pushing away silicon chip second pushing block.
The utility model is through material loading conveying mechanism, the blanking conveying mechanism of design twice symmetry; Through two lifting tables; Cycle alternation is carried the silicon chip in the full silicon box on two lifting tables, transmits silicon chip efficient thereby improve, and increases production efficiency; Overcome artificial shortcoming of getting sheet, reduced hand labor intensity simultaneously.
Description of drawings
Fig. 1 is the front view of the utility model.
Fig. 2 is the birds-eye view of the utility model.
Fig. 3 is the left view of the utility model.
The specific embodiment
Below in conjunction with concrete accompanying drawing and embodiment the utility model is described further.
As shown in the figure, the utility model mainly by three conveyings with primary shaft bearing 1, three conveyings with first connecting panel 2, three conveyings with second bearing seat 3, three conveyings with upright slide block 4, three conveyings with the first profile of tooth piece 5, three conveyings with first contiguous block 6, three conveyings with drive block 7, three conveyings with vertical curve rail 8, three conveyings with second synchronous pulley 9, three conveyings with first synchronous pulley 10, three conveyings with vertically be with synchronously 11, three conveyings with transmission shafts bearing 12, three conveyings with motor 13, three conveyings with transmission shaft 14, three conveyings with second connecting panel 15, three conveyings with horizon rail 16, three conveyings with the 3rd synchronous pulley 17, three conveyings with the 4th synchronous pulley 18, three conveyings with third axle bearing 19, three conveyings with cross motor 20, three conveyings with the second profile of tooth piece 21, three conveyings with second contiguous block 22, three conveyings with cross sliding clock 23, three conveyings with the 3rd connecting panel 24, three carry electricity consumption cylinder 25, three conveyings with pipe link 26, three conveyings with vacuum cup 27, push away the electric cylinder of silicon chip first 28, push away silicon chip first pushing block 29, push away silicon chip second pushing block 30, push away the electric cylinder of silicon chip second 31, silicon box loading and unloading motor 32, silicon box loading and unloading roller shaft 33, silicon box loading and unloading load-transfer device 34, lifting table Yong nut 35, lifting table Yong screw mandrel 36, first lifting table Yong supporting seat 37, lifting table Yong driving pulley 38, lifting table Yong passive belt wheel 39, lifting table Yong load-transfer device motor 40, second lifting table from supporting seat 41, lifting table because of roller shaft 42, silicon box loading and unloading sensor 43, lifting table & CAT[I
This boxed silicon wafers circulation withdrawing device; Be included in silicon box charging and discharging mechanism, two lifting table mechanisms, intermediate carrier structure, three conveying mechanisms of installing on the frame 51 and push away silicon chip mechanism; Described silicon box charging and discharging mechanism cooperates with two lifting table mechanisms, and two lifting table mechanisms cooperate with the intermediate carrier structure, and the intermediate carrier structure cooperates with three conveying mechanisms; Three conveying mechanisms with push away silicon chip mechanism and cooperate, push away silicon chip mechanism and cooperate with the silicon box charging and discharging mechanism.
Said silicon box charging and discharging mechanism is included in silicon box loading and unloading side plate fixing on the frame 51; Be rotatablely equipped with silicon box loading and unloading roller shaft 33 at the both ends of silicon box loading and unloading side plate; Silicon box loading and unloading roller shaft 33 is provided with silicon box loading and unloading load-transfer device 34; Silicon box loading and unloading motor 32 is installed on silicon box loading and unloading side plate; The output shaft of silicon box loading and unloading motor 32 and silicon box loading and unloading roller shaft 33 are connected through coupler, when material loading, are provided with silicon box loading and unloading sensor 43 on the silicon box loading and unloading load-transfer device 34 head end portions cooresponding silicon box loading and unloading side plate.
Said two lifting table mechanisms are included in first fixing on the frame 51 lifting table with supporting seat 37; Be fixed with lifting table with line rail 60 at first lifting table on supporting seat 37; Slidely connect lifting table with slide block 61 at lifting table on line rail 60; Be provided with lifting table with screw mandrel 36 through the bearing turret at first lifting table on supporting seat 37; Lifting table is with being bolted with lifting table with nut 35 on the screw mandrel 36, be fixedly connected with second lifting table at lifting table on nut 35 and be fixed as one with slide block 61 with nut 35 and lifting table with supporting seat 41, lifting table with supporting seat 41, the second lifting tables; Lifting table is installed with lead screw motor 59 on frame 51; Lifting table is connected with screw mandrel 36 with lifting table with the output shaft of lead screw motor 59; Be fixed with two lifting tables at second lifting table on supporting seat 41 and use riser; Be rotatablely equipped with lifting table with roller shaft 42 at lifting table with the both ends of riser; Be provided with lifting table at lifting table on roller shaft 42 and use load-transfer device; Be fixed with lifting table with passive belt wheel 39 at lifting table with an end of roller shaft 42, lifting table be installed with load-transfer device motor 40 on riser, be fixed with lifting table with driving pulley 38 on the output shaft of lifting table with load-transfer device motor 40 at lifting table; Lifting table passes through the load-transfer device transmission with driving pulley 38 and lifting table with passive belt wheel 39, and lifting table is provided with lifting table with sensor 44 with the cooresponding lifting table of load-transfer device head end portion on riser when material loading.
Said intermediate carrier structure is included in middle the conveying with stay bearing plate 47 fixing on the frame 51; Carry both ends to be rotatablely equipped with middle the conveying in the centre with roller 45 with stay bearing plate 47; Carry with load-transfer device 46 in the middle of being provided with on carrying with roller 45 in the centre; Carry in the middle of on frame 51, being equipped with motor 56; The centre is carried with motor 56 and centre and is carried the roller shaft with roller 45 to be connected through coupler, carries the middle part madial wall with stay bearing plate 47 to be fixed with middle the conveying with sensor 50 in the centre; Carry with cylinder 57 in the middle of carrying with cylinder 48 and second in the middle of on carrying in the middle of two, being equipped with first with the cooresponding frame 51 in stay bearing plate 47 left and right sides, middle part, folded zone; In the middle of being fixed with first on the cylinder rod of carrying in the middle of first with cylinder 48, carry, in the middle of being fixed with second on the cylinder rod of carrying in the middle of second with cylinder 57, carry with baffle plate 58 with baffle plate 49.
Said three conveying mechanisms are included in two fixing on the frame 51 three conveyings with first connecting panel 2; Three conveyings be fixed with on first connecting panel 2 three conveyings with primary shaft bearing 1 and three conveyings with second bearing seat 3; Be rotatablely equipped with three conveyings with first synchronous pulley 10 three conveyings on primary shaft bearing 1; Be rotatablely equipped with three conveyings with second synchronous pulley 9 three conveyings on second bearing seat 3; Be provided with three spool conveyings with vertically synchronously be with 11 with first synchronous pulley 10 and three conveyings on second synchronous pulley 9 three conveyings; Three conveyings be with synchronously be fixed with three conveyings with the first profile of tooth piece 5 and three conveyings with first contiguous block 6; Three conveyings are fixed as one with first contiguous block 6 with the first profile of tooth piece 5 and three conveyings with drive block 7, three conveyings; Be fixed with two three conveyings with upright slide block 4 three conveyings on drive block 7, be fixed with three conveyings three conveyings on connecting panel 2 and cooperate with vertical curve rail 8 with three conveyings with upright slide block 4 with 8, three conveyings of vertical curve rail with cushion block and two three conveyings; Three conveyings are installed with motor 13 and reductor thereof on frame 51; On frame 51, be fixed with three conveyings with transmission shafts bearing 12; Three conveyings are provided with three conveyings with transmission shaft 14 with turret on the transmission shafts bearing 12; Three conveyings link to each other with first synchronous pulley 10 with three conveyings through coupler with transmission shaft 14; Be fixed with three conveyings with second connecting panel 15 three conveyings on drive block 7; Be fixed with three conveyings with third axle bearing 19 three conveyings on second connecting panel 15; Three conveyings all are installed in three conveyings with on second connecting panel 15 through three conveyings with third axle bearing 19 with the 3rd synchronous pulley 17 and three conveyings with the 4th synchronous pulley 18; Three conveyings are provided with three conveyings with horizontal band synchronously with the 3rd synchronous pulley 17 and three conveyings with the 4th synchronous pulley 18, carry with laterally synchronously band through being installed in three conveyings on the frame 51 with cross motor 20 drivings, three conveyings with laterally be with synchronously be fixed with three conveyings with the second profile of tooth piece 21 and three conveyings with second contiguous block 22; Be fixed with three conveyings with the 3rd connecting panel 24 three conveyings on second contiguous block 22; Three conveyings are with being fixed with three conveyings with cross sliding clock 23 on the 3rd connecting panel 24, be fixed with three conveyings three conveyings on second connecting panel 15 and cooperate with cross sliding clock 23 with three conveyings with horizon rail 16 with 16, three conveyings of horizon rail; Be equipped with three on the 3rd connecting panel 24 three conveyings and carry electricity consumption cylinders 25, carry on the electricity consumption cylinders 25 at three three conveyings to be installed with vacuum cup 27 with pipe link 26 through three conveyings.
The said silicon chip mechanism that pushes away is included in pushing away the silicon chip first electric cylinder 28 and pushing away the silicon chip second electric cylinder 31 of installing on the frame 51, pushes away to be equipped with on the silicon chip first electric cylinder 28 pushing away silicon chip first pushing block 29, pushes away to be equipped with on the silicon chip second electric cylinder 31 pushing away silicon chip second pushing block 30.
The principle of work of the utility model is following:
It forms full silicon box feed mechanism of twice and the empty silicon box cutting agency of twice by silicon box loading and unloading motor 32, silicon box loading and unloading roller shaft 33 and silicon box loading and unloading load-transfer device 34 etc.
Forms two lifting table mechanisms with driving pulley 38 and lifting table with passive belt wheel 39 etc. with load-transfer device motor 40, lifting table with nut 35, lifting table with screw mandrel 36, lifting table with supporting seat 37, lifting table by first lifting table, the full silicon box on the full silicon box feed mechanism of twice is transported to respectively in the two lifting table mechanisms, after two lifting tables are responded to the full silicon chip magazine of transmission with sensor 44; Make silicon chip magazine location, to be positioned after, push away silicon chip first electric cylinder 28 actions; Push away 29 actions of silicon chip first pushing block, silicon chip in the full silicon chip magazine in the first lifting table mechanism is transported on the load-transfer device 46, silicon chip is carried with sensor 50 inductions by the centre; Carry in the middle of making second with cylinder 57 actions, promote second middle the conveying and stretch out, make the silicon chip location with baffle plate 58; After treating silicon chip location, three conveying mechanisms carrying electricity consumption cylinder 25 and three conveyings to form with vacuum cup 27 etc. with motor 13, three conveyings with cross motor 20 actions, three by three conveyings move, and three conveyings are transported to the silicon chip of locating on the outer load-transfer device 52 on the outer support frame 53 with vacuum cup 27; Lead screw motor on first lifting table 59 actions simultaneously drive the silicon box decline certain distance on the supporting seat 41 on first lifting table, to satisfy next piece silicon chip that silicon chip first pushing block 29 promotes in the silicon chip magazine; Full silicon box on another bay-lift of while; Under the effect that pushes away the silicon chip second electric cylinder 31, its silicon chip is pushed to by the centre conveying with carrying in the middle of the roller 45 with on the load-transfer device 46, equally; When silicon chip is carried with sensor 50 inductions by the centre; Make and carry in the middle of first, silicon chip is located thereby carry in the middle of promoting first to stretch out with baffle plate 49 with cylinder 48 actions, treat that silicon chip is located after; Three conveyings are with vacuum cup 27 effects on three conveying mechanisms; The silicon chip of location is transported on the outer load-transfer device 52, and simultaneously, this lifting table mechanism is with the decline certain distance; To satisfy the transmission of next silicon chip; After treating that silicon chip transfers out, the silicon chip in the silicon box in the first lifting table mechanism is released silicon chip under the effect of the first electric cylinder 28, to realize carrying continuously silicon chip.
Two lifting tables alternately repeat above-mentioned transmission silicon chip action; After treating that silicon chip in the full silicon box all transfers out, behind the lifting table decline certain distance in the two lifting table mechanisms, driving belt counter motion on the roller shaft 42; Empty silicon chip magazine is transported on the silicon box loading and unloading load-transfer device 34; Simultaneously, the full silicon box of twice silicon box loading and unloading load-transfer device 34 continues to expire silicon box and is transported in the two lifting table mechanisms, transfers out to realize the silicon chip that circulation will be expired in the silicon chip magazine.

Claims (6)

1. boxed silicon wafers circulation withdrawing device; It is characterized in that: be included in frame (51) and go up silicon box charging and discharging mechanism, two lifting table mechanisms, intermediate carrier structure, three conveying mechanisms of installing and push away silicon chip mechanism; Described silicon box charging and discharging mechanism cooperates with two lifting table mechanisms; Two lifting table mechanisms cooperate with the intermediate carrier structure; The intermediate carrier structure cooperates with three conveying mechanisms, three conveying mechanisms with push away silicon chip mechanism and cooperate, push away silicon chip mechanism and cooperate with the silicon box charging and discharging mechanism.
2. boxed silicon wafers circulation withdrawing device as claimed in claim 1; It is characterized in that: said silicon box charging and discharging mechanism is included in frame (51) and goes up fixing silicon box loading and unloading side plate; Be rotatablely equipped with silicon box loading and unloading roller shaft (33) at the both ends of silicon box loading and unloading side plate; Silicon box loading and unloading roller shaft (33) is provided with silicon box loading and unloading load-transfer device (34); Silicon box loading and unloading motor (32) is installed on silicon box loading and unloading side plate; The output shaft of silicon box loading and unloading motor (32) is connected through coupler with silicon box loading and unloading roller shaft (33), when material loading, is provided with silicon box loading and unloading sensor (43) on silicon box loading and unloading load-transfer device (34) the head end portion cooresponding silicon box loading and unloading side plate.
3. boxed silicon wafers circulation withdrawing device as claimed in claim 1; It is characterized in that: said two lifting table mechanisms are included in frame (51) and go up the first fixing lifting table with supporting seat (37); Be fixed with lifting table with line rail (60) at first lifting table on supporting seat (37); Slidely connect lifting table with slide block (61) at lifting table on line rail (60); Upward be provided with lifting table with screw mandrel (36) at first lifting table with supporting seat (37) through the bearing turret; Lifting table is with being bolted with lifting table with nut (35) on the screw mandrel (36), be fixedly connected with second lifting table with supporting seat (41) at lifting table on nut (35), and second lifting table is fixed as one with slide block (61) with nut (35) and lifting table with supporting seat (41), lifting table; Lifting table is installed with lead screw motor (59) on frame (51); Lifting table is connected with screw mandrel (36) with lifting table with the output shaft of lead screw motor (59); Be fixed with two lifting tables at second lifting table on supporting seat (41) and use riser; Be rotatablely equipped with lifting table with roller shaft (42) at lifting table with the both ends of riser; Be provided with lifting table at lifting table on roller shaft (42) and use load-transfer device; Be fixed with lifting table with passive belt wheel (39) at lifting table with an end of roller shaft (42), lifting table be installed with load-transfer device motor (40) on riser, be fixed with lifting table on the output shaft of lifting table with load-transfer device motor (40) with driving pulley (38) at lifting table; Lifting table cooperates with passive belt wheel (39) with lifting table with driving pulley (38), and lifting table is provided with lifting table with sensor (44) with the cooresponding lifting table of load-transfer device head end portion on riser when material loading.
4. boxed silicon wafers circulation withdrawing device as claimed in claim 1; It is characterized in that: said intermediate carrier structure is included in frame (51) and goes up fixing middle the conveying with stay bearing plate (47); Carry both ends to be rotatablely equipped with middle the conveying in the centre with roller (45) with stay bearing plate (47); Carry with load-transfer device (46) in the middle of being provided with on carrying with roller (45) in the centre; Carry in the middle of on frame (51), being equipped with motor (56), the centre is carried with motor (56) and centre and is carried the roller shaft with roller (45) to be connected through coupler, carries the middle part madial wall with stay bearing plate (47) to be fixed with middle the conveying with sensor (50) in the centre; Carry with cylinder (57) in the middle of in the middle of conveying in the middle of two is equipped with first with stay bearing plate (47) on the folded zone middle part cooresponding frame in the left and right sides (51), carrying with cylinder (48) and second; In the middle of being fixed with first on the cylinder rod of carrying in the middle of first with cylinder (48), carry, in the middle of being fixed with second on the cylinder rod of carrying in the middle of second with cylinder (57), carry with baffle plate (58) with baffle plate (49).
5. boxed silicon wafers circulation withdrawing device as claimed in claim 1; It is characterized in that: said three conveying mechanisms are included in frame (51) and go up two fixing three conveyings with first connecting panel (2); Three conveyings be fixed with on first connecting panel (2) three conveyings with primary shaft bearing (1) and three conveyings with second bearing seat (3); Be rotatablely equipped with three conveyings with first synchronous pulley (10) three conveyings on primary shaft bearing (1); Be rotatablely equipped with three conveyings with second synchronous pulley (9) three conveyings on second bearing seat (3); Be provided with three spool conveyings with vertically synchronously be with (11) with first synchronous pulley (10) and three conveyings on second synchronous pulley (9) three conveyings; Three conveyings be with synchronously be fixed with three conveyings with the first profile of tooth piece (5) and three conveyings with first contiguous block (6); Three conveyings are fixed as one with first contiguous block (6) with the first profile of tooth piece (5) and three conveyings with drive block (7), three conveyings; Be fixed with two three conveyings with upright slide block (4) three conveyings on drive block (7), three conveyings be fixed with on connecting panel (2) three conveyings with cushion block and two three conveyings with vertical curve rail (8), three conveyings cooperate with vertical curve rail (8) with three conveyings with upright slide block (4); Three conveyings are installed with motor (13) and reductor thereof on frame (51); On frame (51), be fixed with three conveyings and use the transmission shafts bearing; Three conveyings are provided with three conveyings with transmission shaft (14) with turret on the transmission shafts bearing; Three conveyings link to each other with first synchronous pulley (10) with three conveyings through coupler with transmission shaft (14); Be fixed with three conveyings with second connecting panel (15) three conveyings on drive block (7); Be fixed with three conveyings with third axle bearing (19) three conveyings on second connecting panel (15); Three conveyings all are installed in three conveyings with on second connecting panel (15) through three conveyings with third axle bearing (19) with the 3rd synchronous pulley (17) and three conveyings with the 4th synchronous pulley (18); Three conveyings are provided with three conveyings with laterally being with synchronously with the 3rd synchronous pulley (17) and three conveyings with the 4th synchronous pulley (18); Carry with laterally being with synchronously and drive with cross motor (20) through three conveyings that are installed on the frame (51); Three conveyings with laterally be with synchronously be fixed with three conveyings with the second profile of tooth piece (21) and three conveyings with second contiguous block (22), be fixed with three conveyings with the 3rd connecting panel (24) three conveyings on second contiguous block (22), three conveyings are with being fixed with three conveyings on the 3rd connecting panel (24) with cross sliding clock (23); Be fixed with three conveyings with horizon rail (16) three conveyings on second connecting panel (15), three conveyings cooperate with cross sliding clock (23) with three conveyings with horizon rail (16); Be equipped with three on the 3rd connecting panel (24) three conveyings and carry electricity consumption cylinders (25), carry electricity consumption cylinders (25) to go up at three and three conveyings are installed with vacuum cup (27) with pipe link (26) through three conveyings.
6. boxed silicon wafers circulation withdrawing device as claimed in claim 1; It is characterized in that: the said silicon chip mechanism that pushes away is included in last the pushing away the silicon chip first electric cylinder (28) and pushing away the silicon chip second electric cylinder (31) of installing of frame (51); Push away to be equipped with on the silicon chip first electric cylinder (28) pushing away silicon chip first pushing block (29), push away to be equipped with on the silicon chip second electric cylinder (31) pushing away silicon chip second pushing block (30).
CN 201120348900 2011-09-17 2011-09-17 Device for circularly taking out box-packed silicon wafers Expired - Lifetime CN202245328U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201120348900 CN202245328U (en) 2011-09-17 2011-09-17 Device for circularly taking out box-packed silicon wafers

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Application Number Priority Date Filing Date Title
CN 201120348900 CN202245328U (en) 2011-09-17 2011-09-17 Device for circularly taking out box-packed silicon wafers

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CN103063882A (en) * 2012-12-24 2013-04-24 芜湖市凤翔设备制造有限公司 Transmission and jacking device for optoelectronic device battery assembly detecting system
CN104528334A (en) * 2014-12-31 2015-04-22 苏州格林电子设备有限公司 Bearing box conveying mechanism for silicon wafer pushing device
CN105314393A (en) * 2015-11-20 2016-02-10 江苏艾科瑞思封装自动化设备有限公司 No-machine-halt feed device
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CN107123587A (en) * 2016-09-23 2017-09-01 深圳市复德科技有限公司 Plasma cleaner
CN108642973A (en) * 2018-06-15 2018-10-12 康馨(海门)环保科技发展有限公司 The process units of disposable lunch-box
CN108747546A (en) * 2018-06-15 2018-11-06 宁波市创捷自动化有限公司 A kind of platform of blanking for long products
CN109110478A (en) * 2018-06-14 2019-01-01 深圳市奥美特科技有限公司 A kind of handling equipment of integrated circuit material surface processing equipment
CN109550704A (en) * 2017-09-26 2019-04-02 天津环鑫科技发展有限公司 Automatic silicon wafer sorting equipment
CN110589493A (en) * 2019-09-23 2019-12-20 大同新成新材料股份有限公司 Conveying device with stable structure for chip silicon production
CN111331477A (en) * 2020-05-15 2020-06-26 宁波德玛智能机械有限公司 Non-standard grinding machine for batch grinding production of small parts
CN111799202A (en) * 2020-07-22 2020-10-20 黎功成 Silicon chip laser identification production line
WO2020248325A1 (en) * 2019-06-13 2020-12-17 上海提牛机电设备有限公司 Wafer loading device and wafer processing system

Cited By (20)

* Cited by examiner, † Cited by third party
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CN102730400B (en) * 2012-06-18 2015-04-22 中国电子科技集团公司第四十八研究所 Battery piece conveying, loading and unloading system of laser edge etcher
CN102730400A (en) * 2012-06-18 2012-10-17 中国电子科技集团公司第四十八研究所 Battery piece conveying, loading and unloading system of laser edge etcher
CN103063882A (en) * 2012-12-24 2013-04-24 芜湖市凤翔设备制造有限公司 Transmission and jacking device for optoelectronic device battery assembly detecting system
CN102983229A (en) * 2012-12-27 2013-03-20 无锡先导自动化设备股份有限公司 Solar battery piece automatic feeding device
CN102983229B (en) * 2012-12-27 2015-05-20 无锡先导自动化设备股份有限公司 Solar battery piece automatic feeding device
CN104528334A (en) * 2014-12-31 2015-04-22 苏州格林电子设备有限公司 Bearing box conveying mechanism for silicon wafer pushing device
CN105314393A (en) * 2015-11-20 2016-02-10 江苏艾科瑞思封装自动化设备有限公司 No-machine-halt feed device
CN107123587A (en) * 2016-09-23 2017-09-01 深圳市复德科技有限公司 Plasma cleaner
CN106653667A (en) * 2016-12-22 2017-05-10 新奥光伏能源有限公司 Chip loading and unloading equipment, control method thereof and solar cell production line
CN106653667B (en) * 2016-12-22 2020-01-14 新奥光伏能源有限公司 Sheet handling equipment, control method thereof and solar cell production line
CN109550704A (en) * 2017-09-26 2019-04-02 天津环鑫科技发展有限公司 Automatic silicon wafer sorting equipment
CN109110478A (en) * 2018-06-14 2019-01-01 深圳市奥美特科技有限公司 A kind of handling equipment of integrated circuit material surface processing equipment
CN108747546A (en) * 2018-06-15 2018-11-06 宁波市创捷自动化有限公司 A kind of platform of blanking for long products
CN108642973A (en) * 2018-06-15 2018-10-12 康馨(海门)环保科技发展有限公司 The process units of disposable lunch-box
CN108747546B (en) * 2018-06-15 2024-01-02 宁波市创捷自动化有限公司 A unloading platform for rectangular product
WO2020248325A1 (en) * 2019-06-13 2020-12-17 上海提牛机电设备有限公司 Wafer loading device and wafer processing system
CN110589493A (en) * 2019-09-23 2019-12-20 大同新成新材料股份有限公司 Conveying device with stable structure for chip silicon production
CN111331477A (en) * 2020-05-15 2020-06-26 宁波德玛智能机械有限公司 Non-standard grinding machine for batch grinding production of small parts
CN111331477B (en) * 2020-05-15 2020-08-07 宁波德玛智能机械有限公司 Non-standard grinding machine for batch grinding production of small parts
CN111799202A (en) * 2020-07-22 2020-10-20 黎功成 Silicon chip laser identification production line

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