CN203055881U - Silicon wafer automatic loading and unloading device for PECVD equipment - Google Patents

Silicon wafer automatic loading and unloading device for PECVD equipment Download PDF

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Publication number
CN203055881U
CN203055881U CN201220734043.9U CN201220734043U CN203055881U CN 203055881 U CN203055881 U CN 203055881U CN 201220734043 U CN201220734043 U CN 201220734043U CN 203055881 U CN203055881 U CN 203055881U
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fixed
cylinder
plate
synchronous
motor
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CN201220734043.9U
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Chinese (zh)
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王燕清
周昕
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Wuxi Lead Auto Equipment Co Ltd
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Wuxi Lead Auto Equipment Co Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model relates to an automatic unloader that goes up of silicon chip for PECVD equipment, rotate and install the manipulator in the frame, install the sucking disc on the manipulator, install first silicon chip box conveying mechanism, first lift platform mechanism, guiding mechanism, first play piece transport mechanism, first storage mechanism, first transport mechanism, first dolly positioning mechanism, first graphite boat positioning mechanism and first floor truck in the frame outside the manipulator, install second silicon chip box conveying mechanism, second lift platform mechanism, play piece conveying mechanism, second play piece transport mechanism, second storage mechanism, second transport mechanism, second dolly positioning mechanism, second graphite boat positioning mechanism and second floor truck in the inboard position in the frame; the utility model discloses improve production efficiency greatly, reduced workman intensity of labour, avoided artifical manual unloading and the problem that the silicon chip percentage of damage is high that arouses of going up, reduced manufacturing cost.

Description

The silicon chip automatic loading and unloading device that is used for PECVD equipment
Technical field
The utility model relates to solar silicon wafers process automation apparatus field, and the utility model especially relates to a kind of silicon chip automatic loading and unloading device for PECVD equipment.
Background technology
In existing silicon chip antireflective coating preparation section, need with the silicon chip of handling without PECVD in the Carrier box pack in the graphite boat, with the Carrier box of packing into of the silicon chip of handling through PECVD in the graphite boat.At present, above-mentioned silicon chip transfer action need be by manually finishing, and its shortcoming is that a dead lift causes that easily the silicon chip fragmentation makes production cost improve, and simultaneously, manual operation production efficiency is low, labour intensity is big.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of and can reduce production costs, reduce labor strength, the silicon chip automatic loading and unloading device that is used for PECVD equipment that automaticity is high.
The technical scheme that provides according to the utility model, described silicon chip automatic loading and unloading device for PECVD equipment, be rotatablely equipped with manipulator in frame, at manipulator sucker is installed, frame in the manipulator outside is equipped with the first silicon box conveying mechanism, the first hoistable platform mechanism, guiding mechanism, the first slice carrying mechanism, the first storing mechanism, first transport establishment, the first dolly detent mechanism, the first graphite boat detent mechanism and first floor truck, inner side is equipped with the second silicon box conveying mechanism on frame, the second hoistable platform mechanism, the slice conveying mechanism, the second slice carrying mechanism, the second storing mechanism, second transport establishment, the second dolly detent mechanism, the second graphite boat detent mechanism and second floor truck; Described first transport establishment is installed on the place ahead of the first slice carrying mechanism, and second transport establishment is installed on the place ahead of slice conveying mechanism, and manipulator is installed on the frame between first transport establishment and second transport establishment.
The described first silicon box conveying mechanism is identical with the second silicon box conveying mechanism structure, they comprise first motor, supporting plate, be with synchronously, first synchronous pulley, second synchronous pulley, rotation axis, the 3rd synchronous pulley and the 4th synchronous pulley, output at first motor is connected with the 4th synchronous pulley, all fixedly there is first synchronous pulley at the two ends of rotation axis, on the rotation axis between two first synchronous pulleys the 3rd synchronous pulley is arranged fixedly, the 4th synchronous pulley is by the 3rd synchronous pulley of band connection synchronously, and band is walked around first synchronous pulley synchronously, supporting plate and second synchronous pulley.
The described first hoistable platform mechanism is identical with the second hoistable platform mechanism structure, they comprise erection support, vertical lifting assembly and horizontal feed assembly, the horizontal feed assembly is fixed on the vertical hoistable platform assembly by first connecting plate, and vertical lifting assembly is fixed on the frame by erection support;
Described vertical lifting assembly comprises second motor, second motor is installed on the erection support, the output of second motor is connected with an end of first leading screw by shaft coupling, the two ends of described first leading screw are rotatably installed on the erection support by bearing pedestal, the parallel first line rail that is equipped with on the erection support, slidely connect first slide block in the first line rail, first nut is installed on first leading screw, first slide block and first nut are fixed on first connecting plate;
Described horizontal feed assembly comprises the 3rd motor, the output of the 3rd motor is synchronous pulley fixedly, two the 5th synchronous pulleys are fixed at the two ends of rotating shaft, the synchronous pulley of the output of the 3rd motor by second synchronously band be connected with the tenth synchronous pulley in the rotating shaft, the second synchronous band is walked around the 6th synchronous pulley and the 5th synchronous pulley, the rotating shaft top is provided with two blocks, and fixedly there is first cylinder upper end of described first connecting plate, and the piston rod end of first cylinder is equipped with hold-down head.
Described guiding mechanism comprises first mounting panel, located lateral assembly and longitudinally guiding assembly; The downside of first mounting panel is equipped with the longitudinally guiding assembly, and the located lateral assembly is installed in the top of first mounting panel;
Described located lateral assembly comprises push pedal, the second line rail, and the described second line rail is fixed in first mounting panel, fixes second slide block in the push pedal, and described second slide block is flush-mounted on the second line rail, and the front end of first mounting panel fixedly pushes away bar; The lateral adjustments unit is fixed on first mounting panel by contiguous block, described lateral adjustments unit comprises second cylinder and the 5th cylinder, described second cylinder and the 5th cylinder are opposing fixing, the piston rod of the 5th cylinder is fixed on first mounting panel by contiguous block, and the piston end of second cylinder is fixed by connecting rod and push pedal.
Described longitudinally guiding assembly comprises the synchronous band delivery unit of first mounting panel below and the longitudinal adjustment mechanism of first mounting panel top; Described synchronous band delivery unit comprises two the 7th synchronous pulleys, two the 7th synchronous pulleys are fixed on first mounting panel by connecting axle, be with connection synchronously by the 3rd between described two the 7th synchronous pulleys, first mounting panel below arranges the line rail, slide block is fixedly arranged respectively on first drive block and second drive block, slide block on described first drive block and the 4th drive block is flush-mounted in respectively on the line rail of first mounting panel below setting, wherein a side of first drive block fixedly has the first profile of tooth piece, tooth and the 3rd on the described first profile of tooth piece synchronously with on tooth engagement, and profile of tooth piece and the 3rd is with synchronously and second drive block is fixed, a side fixedly has the second profile of tooth piece on described the 4th drive block, tooth and the 3rd on the described second profile of tooth piece synchronously with on tooth engagement, and the second profile of tooth piece and the 3rd is with synchronously and the 5th drive block is fixed, described second drive block is fixed by two connecting rods and the 3rd drive block, the lower end of connecting rod and second connecting plate are fixed, fix a plurality of first directive wheels on second connecting plate, described the 5th drive block is connected with the 8th connecting plate by two connecting rods, fixes a plurality of second directive wheels on the 8th connecting plate; Described the 3rd drive block is connected with vertical adjusting part; Described longitudinal adjustment mechanism comprises the 3rd cylinder, four-cylinder, and described the 3rd cylinder and four-cylinder are opposing fixing, and wherein the piston rod of four-cylinder is fixed on first mounting panel by contiguous block, and the 3rd cylinder is connected with the 3rd drive block.
The described first slice carrying mechanism comprises Rodless cylinder, the 4th motor and second mounting panel, fixedly Rodless cylinder, the 3rd line rail on described second mounting panel, and the Rodless cylinder output is fixed by connecting plate and first movable plate; On described first movable plate the 3rd slide block is arranged fixedly, the 3rd slide block is flush-mounted in described the 3rd line rail; Pass through the conveyer belt transmission between one side of described two group of the 3rd connecting plate, the front end both sides that base plate both sides, first movable plate are installed and the difference fixed idler whell of the connecting plate on the Rodless cylinder output and the roller; The output of described the 4th motor is synchronous pulley fixedly, one side of base plate is installed by two bearings seat supports power transmission shaft, the two ends of described power transmission shaft fixedly arrange the 11 synchronous belt wheel between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor is by conveyer belt transmission the 11 synchronous belt wheel; Fix the 6th cylinder between described the 3rd connecting plate, output and the locating piece of described the 6th cylinder are fixed, fixing slide block and be flush-mounted in the 3rd line rail by slide block on the described locating piece.
The described second slice carrying mechanism comprises Rodless cylinder, the 4th motor, fixedly Rodless cylinder, the 3rd line rail on described second mounting panel, the Rodless cylinder output is fixed by connecting plate and first movable plate, on described first movable plate the 3rd slide block is arranged fixedly, described the 3rd slide block is flush-mounted on described the 3rd line rail; Pass through the conveyer belt transmission between one side of described two group of the 3rd connecting plate, the front end both sides that base plate both sides, first movable plate are installed and the difference fixed idler whell of the connecting plate on the Rodless cylinder output and the roller, the output of described the 4th motor is synchronous pulley fixedly, one side of base plate is installed by two bearings seat supports power transmission shaft, the two ends of described power transmission shaft fixedly arrange the 11 synchronous belt wheel between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor is by conveyer belt transmission the 11 synchronous belt wheel.
The described first storing mechanism is identical with the second storing mechanism structure, and they include hoistable platform assembly and storing assembly;
Described hoistable platform assembly comprises the 3rd mounting panel, second screw mandrel, the 5th motor; Described the 3rd mounting panel is fixed in frame, described the 5th motor is fixed in the 3rd mounting panel, described second screw mandrel is supported on the 3rd mounting panel by bearing pedestal, the 5th motor output end is connected with second screw mandrel by shaft coupling, the both sides of second screw mandrel arrange two the 4th line rails, two the 4th line rails also are fixed in the 3rd mounting panel, one side of mount pad is fixed second nut and the second nut both sides secured in parallel Four-slider, described Four-slider is flush-mounted on the 4th line rail, on described second screw mandrel second nut is installed;
Described storing assembly comprises mount pad, driver element and storing frame; Fixed drive unit on the mount pad is fixed the 5th slide block respectively on the described two storing frames, and the 5th slide block is flush-mounted on the 5th line rail, and described two driver elements are connected with two storing frames by connecting rod respectively; Described driver element comprises the 11 cylinder, the 12 cylinder, described the 11 cylinder, the opposing installation of the 12 cylinder, the tailpiece of the piston rod of described the 11 cylinder is fixed in mount pad by mounting blocks, and the tailpiece of the piston rod of described the 12 cylinder is connected with the storing frame by connecting rod.
Described first transport establishment is identical with the structure of second transport establishment, and they include horizontal feed assembly, jacking assembly and hold down assembly;
Described horizontal feed assembly comprises the 6th motor, the 5th connecting plate, the 9th synchronous pulley; The output shaft of described the 6th motor links to each other with decelerator, the decelerator two ends arrange two group of the 9th synchronous pulley, pass through contiguous block connection case between the synchronous band of two groups of synchronous pulleys nine, two group of the 5th connecting plate is fixed in the two ends of install bin, two the 7th slide block secured in parallel are in the outside of the 5th connecting plate, article two, the 7th line rail secured in parallel is on frame, and described the 7th slide block is flush-mounted in the 7th line rail;
Described jacking assembly comprises the 6th motor, the 8th synchronous pulley, vertical screw mandrel; The inboard of two the 5th connecting plates is supported a vertical screw mandrel respectively, nut is spirally connected on the vertical screw mandrel, the nut that is spirally connected is also fixed with the 4th connecting plate, slide block is installed on the 4th connecting plate and is slidingly connected with line rail on the 5th connecting plate, the 8th synchronous pulley is installed in the bottom of vertical screw mandrel, fix the 12 synchronous pulley on the output of the 6th motor, pass through band transmission synchronously between described the 12 synchronous pulley, two the 8th synchronous pulleys;
Described compressing unit comprises the 4th connecting plate, the 6th cylinder and the 7th cylinder; Fixing tray respectively on two group of the 4th connecting plate, the 6th cylinder and two group of the 6th line rail are fixed in tray, the output of described the 6th cylinder is fixed in second movable plate, two group of the 6th slide block of parallel installation on described second movable plate, described the 6th slide block is flush-mounted on the 6th line rail, on described second movable plate the 7th cylinder is arranged fixedly.
The described first dolly positioner is identical with the structure of the second dolly positioner, and they include guidance set and latch assembly, and guidance set is installed on the both sides of frame, and latch assembly is installed on the below of first transport establishment and second transport establishment;
Described guider comprises second directive wheel and mounting panel; Several second directive wheels are installed on a side of described mounting panel, and described mounting panel is fixed in frame;
Described locking device comprises the 8th cylinder, the tenth cylinder, bearing, centering block and the 6th connecting plate; Described the 6th connecting plate is installed on frame, described two groups of bearings are installed on the 6th connecting plate, one end of the 8th cylinder is movably connected on two bearings respectively, the other end of the 8th cylinder is movably connected on centering block, one end of described centering block is movably connected on bearing, and first pinch roller is installed in the both sides of described centering block, and the tenth cylinder is installed on the 6th connecting plate, the output of described the tenth cylinder connects connecting rod, and two second pinch rollers are installed in the both sides of described connecting rod.
The described first graphite boat detent mechanism is identical with the structure of the second graphite boat detent mechanism, and they include the 4th mounting panel, location-plate and bearing; Described the 4th mounting panel is installed on the frame, described location-plate is installed on a side of mounting panel four, locating piece is installed on the location-plate, two article of the 9th line rail of the parallel installation of an other side of described the 4th mounting panel, the 9th slide block is fixed on the bearing, and the 9th slide block is flush-mounted in described the 9th line rail, the 9th cylinder is fixed in bearing, the tailpiece of the piston rod of described the 9th cylinder is connected with the 4th mounting panel by contiguous block, the depression bar that is slidingly connected on the described bearing, mounting spring between depression bar and axle sleeve; Locating piece is installed in described the 4th mounting panel both sides, the 8th line rail and the 8th cylinder are fixed in a side of the 4th mounting panel, one side of the 7th connecting plate is installed the 8th slide block, described the 8th slide block is flush-mounted in the 8th line rail, one side of described the 7th connecting plate flexibly connects by the tailpiece of the piston rod of contiguous block and the 8th cylinder, and an end of described the 7th connecting plate is equipped with pressing plate.
Described slice conveying mechanism comprises base plate, the 8th motor, driving wheel and driven pulley; Described base plate is fixed in frame, base plate upper fixed biside plate, power transmission shaft is fixedly installed between return idler, the biside plate in the described biside plate outside, a driving wheel is fixed at the two ends of described power transmission shaft respectively, the output of described the 8th motor is connected with power transmission shaft by shaft coupling, transmit by conveyer belt between described driven pulley, the driving wheel, the conveyer belt below is backing plate fixedly.
The utility model can automation be realized will be without the silicon chip that PECVD the handles graphite boat of packing into automatically, simultaneously equipment can realize automatically from graphite boat, taking out through the silicon chip that PECVD handles and the silicon chip Carrier box of packing in, equipment is realized the full-automatic operation of feeding and discharging of silicon chip, improved production efficiency greatly, reduced labor strength, the high problem of silicon chip percentage of damage of having avoided loading and unloading manually and having caused has reduced production cost.
Description of drawings
Fig. 1 is overall diagram of the present utility model.
Fig. 2 is overall structure front view of the present utility model.
Fig. 3 is overall structure vertical view of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with specific embodiment.
As shown in the figure, the silicon chip automatic loading and unloading device that should be used for PECVD equipment, be rotatablely equipped with manipulator 10 in frame, at manipulator 10 sucker 11 is installed, frame in manipulator 10 outsides is equipped with the first silicon box conveying mechanism 1a, first 2a of hoistable platform mechanism, guiding mechanism 3, the first slice carrying mechanism 4a, first 5a of storing mechanism, first 6a of transport establishment, the first dolly detent mechanism 7a, the first graphite boat detent mechanism 8a and the first floor truck 9a, inner side is equipped with the second silicon box conveying mechanism 1b on frame, second 2b of hoistable platform mechanism, slice conveying mechanism 12, the second slice carrying mechanism 4b, second 5b of storing mechanism, second 6b of transport establishment, the second dolly detent mechanism 7b, the second graphite boat detent mechanism 8b and the second floor truck 9b; Described first 6a of transport establishment is installed on the place ahead of the first slice carrying mechanism 4a, and second 6b of transport establishment is installed on the place ahead of slice conveying mechanism 12, and manipulator 10 is installed on the frame between first 6a of transport establishment and second 6b of transport establishment.
The described first silicon box conveying mechanism 1a is identical with the second silicon box conveying mechanism 1b structure, they comprise first motor 1.1, supporting plate 1.2, be with 1.3 synchronously, first synchronous pulley 1.4, second synchronous pulley 1.5, rotation axis 1.6, the 3rd synchronous pulley 1.7 and the 4th synchronous pulley 1.8, output at first motor 1.1 is connected with the 4th synchronous pulley 1.8, all fixedly there is first synchronous pulley 1.4 at the two ends of rotation axis 1.6, the 3rd synchronous pulley 1.7 is fixedly arranged on the rotation axis 1.6 between two first synchronous pulleys 1.4, the 4th synchronous pulley 1.8 is with 1.3 to walk around first synchronous pulley 1.4 by being with 1.3 to connect the 3rd synchronous pulley 1.7 synchronously synchronously, supporting plate 1.2 and second synchronous pulley 1.5.
Described first 2a of hoistable platform mechanism is identical with second 2b of the hoistable platform mechanism structure, they comprise erection support 2.10, vertical lifting assembly and horizontal feed assembly, the horizontal feed assembly is fixed on the vertical hoistable platform assembly by first connecting plate 2.7, and vertical lifting assembly is fixed on the frame by erection support 2.10;
Described vertical lifting assembly comprises second motor 2.1, second motor 2.1 is installed on the erection support 2.10, the output of second motor 2.1 is connected by the end of shaft coupling with first leading screw 2.5, the two ends of described first leading screw 2.5 are rotatably installed on the erection support 2.10 by bearing pedestal, the parallel first line rail 2.2 that is equipped with on the erection support 2.10, in the first line rail 2.2, slidely connect first slide block 2.3, first nut, 2.4, the first slide blocks 2.3 and first nut 2.4 are installed on first leading screw 2.5 to be fixed on first connecting plate 2.7;
Described horizontal feed assembly comprises the 3rd motor 2.11, the output of the 3rd motor 2.11 is synchronous pulley fixedly, two the 5th synchronous pulleys 2.12 are fixed at the two ends of rotating shaft 2.13, the synchronous pulley of the output of the 3rd motor 2.11 is connected with the tenth synchronous pulley 2.16 in the rotating shaft 2.13 with 2.14 synchronously by second, second is with 2.14 to walk around the 6th synchronous pulley 2.15 and the 5th synchronous pulley 2.12 synchronously, rotating shaft 2.13 tops are provided with two blocks 2.9, the upper end of described first connecting plate 2.7 fixedly has the piston rod end of first cylinder, 2.6, the first cylinders 2.6 that hold-down head is installed.
Described guiding mechanism 3 comprises first mounting panel 3.4, located lateral assembly and longitudinally guiding assembly; The downside of first mounting panel 3.4 is equipped with the longitudinally guiding assembly, and the located lateral assembly is installed in the top of first mounting panel 3.4;
Described located lateral assembly comprises push pedal 3.2, the second line rail 3.6, the described second line rail 3.6 is fixed in first mounting panel 3.4, fix second slide block 3.7 in the push pedal 3.2, described second slide block 3.7 is flush-mounted on the second line rail 3.6, and the front end of first mounting panel 3.4 fixedly pushes away bar 3.3; The lateral adjustments unit is fixed on first mounting panel 3.4 by contiguous block, described lateral adjustments unit comprises second cylinder 3.1 and the 5th cylinder 3.16, described second cylinder 3.1 and the 5th cylinder 3.16 are opposing fixing, the piston rod of the 5th cylinder 3.16 is fixed on first mounting panel 3.4 by contiguous block, and the piston end of second cylinder 3.1 is fixing by connecting rod and push pedal 3.2.
Described longitudinally guiding assembly comprises the synchronous band delivery unit of first mounting panel, 3.4 belows and the longitudinal adjustment mechanism of first mounting panel, 3.4 tops; Described synchronous band delivery unit comprises two the 7th synchronous pulleys 3.10, two the 7th synchronous pulleys 3.10 are fixed on first mounting panel 3.4 by connecting axle, be with 3.13 to connect synchronously by the 3rd between described two the 7th synchronous pulleys 3.10, first mounting panel, 3.4 belows arrange the line rail, on first drive block 3.11 and second drive block 3.20 slide block is arranged fixedly respectively, slide block on described first drive block 3.11 and the 4th drive block 3.20 is flush-mounted in respectively on the line rail of first mounting panel, 3.4 belows setting, wherein a side of first drive block 3.11 fixedly has the first profile of tooth piece 3.17, tooth and the 3rd on the described first profile of tooth piece 3.17 is synchronously with the engagement of the tooth on 3.13, and profile of tooth piece 3.17 and the 3rd is with 3.13 and second drive block 3.12 fixing synchronously, a side fixedly has the second profile of tooth piece 3.18 on described the 4th drive block 3.20, tooth and the 3rd on the described second profile of tooth piece 3.18 is synchronously with the engagement of the tooth on 3.13, and the second profile of tooth piece 3.18 and the 3rd is with the 3.13 and the 5th drive block 3.19 fixing synchronously, described second drive block 3.12 is fixing by two connecting rods and the 3rd drive block 3.14, the lower end of connecting rod and second connecting plate 3.9 are fixing, fix a plurality of first directive wheels 3.8 on second connecting plate 3.9, described the 5th drive block 3.19 is connected with the 8th connecting plate 3.22 by two connecting rods, fixes a plurality of second directive wheels 3.21 on the 8th connecting plate 3.22; Described the 3rd drive block 3.14 is connected with vertical adjusting part; Described longitudinal adjustment mechanism comprises the 3rd cylinder 3.5, four-cylinder 3.15, described the 3rd cylinder 3.5 and four-cylinder 3.15 are opposing fixing, wherein the piston rod of four-cylinder 3.15 is fixed on first mounting panel 3.4 by contiguous block, and the 3rd cylinder 3.5 is connected with the 3rd drive block 3.14.
The described first slice carrying mechanism 4a comprises Rodless cylinder 4.2, the 4th motor 4.1 and second mounting panel 4.10, fixedly Rodless cylinder 4.2, the 3rd line rail 4.4 on described second mounting panel 4.10, Rodless cylinder 4.2 outputs are fixing by connecting plate and first movable plate 4.3; Fixedly there are the 3rd slide block 4.5, the three slide blocks 4.5 to be flush-mounted in described the 3rd line rail 4.4 on described first movable plate 4.3; Pass through the conveyer belt transmission between one side of described two group of the 3rd connecting plate 4.11, the front end both sides that base plate 4.9 both sides, first movable plate 4.3 are installed and the difference fixed idler whell of the connecting plate on Rodless cylinder 4.2 outputs and the roller; The output of described the 4th motor 4.1 is synchronous pulley fixedly, one side of base plate 4.9 is installed by two bearings seat supports power transmission shaft 4.12, the two ends of described power transmission shaft 4.12 fixedly arrange the 11 synchronous belt wheel 4.13 between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor 4.1 is by conveyer belt transmission the 11 synchronous belt wheel 4.13; Fix the 6th cylinder 4.7 between described the 3rd connecting plate 4.11, the output of described the 6th cylinder 4.7 and locating piece 4.6 is fixing, fixing slide block and be flush-mounted in the 3rd line rail 4.4 by slide block on the described locating piece 4.6.
The described second slice carrying mechanism 4b comprises Rodless cylinder 4.2, the 4th motor 4.1, fixedly Rodless cylinder 4.2, the 3rd line rail 4.4 on described second mounting panel 4.10, Rodless cylinder 4.2 outputs are fixing by connecting plate and first movable plate 4.3, on described first movable plate 4.3 the 3rd slide block 4.5 is arranged fixedly, described the 3rd slide block 4.5 is flush-mounted on described the 3rd line rail 4.4; One side of described two group of the 3rd connecting plate 4.11, base plate 4.9 both sides are installed, connecting plate on the front end both sides of first movable plate 4.3 and Rodless cylinder 4.2 outputs is fixed idler whell respectively, and pass through the conveyer belt transmission between the roller, the output of described the 4th motor 4.1 is synchronous pulley fixedly, one side of base plate 4.9 is installed by two bearings seat supports power transmission shaft 4.12, the two ends of described power transmission shaft 4.12 fixedly arrange the 11 synchronous belt wheel 4.13 between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor 4.1 is by conveyer belt transmission the 11 synchronous belt wheel 4.13.
Described first 5a of storing mechanism is identical with second 5b of the storing mechanism structure, and they include hoistable platform assembly and storing assembly;
Described hoistable platform assembly comprises the 3rd mounting panel 5.10, second screw mandrel 5.7, the 5th motor 5.2; Described the 3rd mounting panel 5.10 is fixed in frame, described the 5th motor 5.2 is fixed in the 3rd mounting panel 5.10, described second screw mandrel 5.7 is supported on the 3rd mounting panel 5.10 by bearing pedestal, the 5th motor 5.2 outputs are connected with second screw mandrel 5.7 by shaft coupling, the both sides of second screw mandrel 5.7 arrange two the 4th line rails 5.4, two the 4th line rails 5.4 also are fixed in the 3rd mounting panel 5.10, one side of mount pad 5.3 is fixed second nut 5.6, and second nut, 5.6 both sides secured in parallel Four-sliders 5.5, described Four-slider 5.5 is flush-mounted on the 4th line rail 5.4, on described second screw mandrel 5.7 second nut 5.6 is installed;
Described storing assembly comprises mount pad 5.3, driver element and storing frame 5.11; Fixed drive unit on the mount pad 5.3 is fixed the 5th slide block 5.9, the five slide blocks 5.9 respectively and is flush-mounted on the 5th line rail 5.8 on the described two storing frames 5.11, described two driver elements are connected with two storing frames 5.11 by connecting rod respectively; Described driver element comprises the 11 cylinder 5.1, the 12 cylinder 5.12, described the 11 cylinder 5.1, the 5.12 opposing installations of the 12 cylinder, the tailpiece of the piston rod of described the 11 cylinder 5.1 is fixed in mount pad 5.3 by mounting blocks, and the tailpiece of the piston rod of described the 12 cylinder 5.12 is connected with storing frame 5.11 by connecting rod.
Described first 6a of transport establishment is identical with the structure of second 6b of transport establishment, and they include horizontal feed assembly, jacking assembly and hold down assembly;
Described horizontal feed assembly comprises the 6th motor 6.11, the 5th connecting plate 6.6, the 9th synchronous pulley 6.10; The output shaft of described the 6th motor 6.11 links to each other with decelerator, the decelerator two ends arrange two group of the 9th synchronous pulley 6.10, pass through contiguous block connection case 6.14 between the synchronous band of two groups of synchronous pulleys 9 6.10, two group of the 5th connecting plate 6.6 is fixed in the two ends of install bin 6.14, two the 7th slide block 6.7 secured in parallel are in the outside of the 5th connecting plate 6.6, article two, the 7th line rail 6.8 secured in parallel are on frame, and described the 7th slide block 6.7 is flush-mounted in the 7th line rail 6.8;
Described jacking assembly comprises the 6th motor 6.11, the 8th synchronous pulley 6.9, vertical screw mandrel 6.16; The inboard of two the 5th connecting plates 6.6 is supported a vertical screw mandrel 6.16 respectively, nut is spirally connected on the vertical screw mandrel 6.16, the nut that is spirally connected is also fixing with the 4th connecting plate 6.5, slide block is installed on the 4th connecting plate 6.5 and is slidingly connected with line rail on the 5th connecting plate 6.6, the 8th synchronous pulley 6.9 is installed in the bottom of vertical screw mandrel 6.16, fix the 12 synchronous pulley 6.15 on the output of the 6th motor 6.11, pass through band transmission synchronously between described the 12 synchronous pulley 6.15, two the 8th synchronous pulleys 6.9;
Described compressing unit comprises the 4th connecting plate 6.5, the 6th cylinder 6.3 and the 7th cylinder 6.1; Fixing tray 6.4 respectively on two group of the 4th connecting plate 6.5, the 6th cylinder 6.3 and two group of the 6th line rail 6.13 are fixed in tray 6.4, the output of described the 6th cylinder 6.3 is fixed in second movable plate 6.17, two group of the 6th slide block 6.2 of parallel installation on described second movable plate 6.17, described the 6th slide block 6.2 is flush-mounted on the 6th line rail 6.13, on described second movable plate 6.17 the 7th cylinder 6.1 is arranged fixedly.
The described first dolly positioner 7a is identical with the structure of the second dolly positioner 7b, and they include guidance set and latch assembly, and guidance set is installed on the both sides of frame, and latch assembly is installed on the below of first 6a of transport establishment and second 6b of transport establishment;
Described guider comprises second directive wheel 7.1 and the mounting panel; Several second directive wheels 7.1 are installed on a side of described mounting panel, and described mounting panel is fixed in frame;
Described locking device comprises the 8th cylinder 7.3, the tenth cylinder 7.7, bearing 7.6, centering block 7.5 and the 6th connecting plate 7.2; Described the 6th connecting plate 7.2 is installed on frame, described two groups of bearings 7.6 are installed on the 6th connecting plate 7.2, one end of the 8th cylinder 7.3 is movably connected on two bearings 7.6 respectively, the other end of the 8th cylinder 7.3 is movably connected on centering block 7.5, one end of described centering block 7.5 is movably connected on bearing 7.6, first pinch roller 7.4 is installed in the both sides of described centering block 7.5, the tenth cylinder 7.7 is installed on the 6th connecting plate 7.2, the output of described the tenth cylinder 7.7 connects connecting rod 7.8, and two second pinch rollers 7.9 are installed in the both sides of described connecting rod 7.8.
The described first graphite boat detent mechanism 8a is identical with the structure of the second graphite boat detent mechanism 8b, and they include the 4th mounting panel 8.11, location-plate 8.1 and bearing 8.8; Described the 4th mounting panel 8.11 is installed on the frame, described location-plate 8.1 is installed on a side of mounting panel 4 8.11, on the location-plate 8.1 locating piece is installed, two article of the 9th line rail 8.6 of the parallel installation of an other side of described the 4th mounting panel 8.11, the 9th slide block 8.7 is fixed on the bearing 8.8, the 9th slide block 8.7 is flush-mounted in described the 9th line rail 8.6, the 9th cylinder 8.10 is fixed in bearing 8.8, the tailpiece of the piston rod of described the 9th cylinder 8.10 is connected with the 4th mounting panel 8.11 by contiguous block, the depression bar 8.9 that is slidingly connected on the described bearing 8.8, mounting spring between depression bar 8.9 and axle sleeve; Locating piece 8.12 is installed in described the 4th mounting panel 8.11 both sides, the 8th line rail 8.3 and the 8th cylinder 8.5 are fixed in a side of the 4th mounting panel 8.11, one side of the 7th connecting plate 8.13 is installed the 8th slide block 8.4, described the 8th slide block 8.4 is flush-mounted in the 8th line rail 8.3, one side of described the 7th connecting plate 8.13 flexibly connects by the tailpiece of the piston rod of contiguous block and the 8th cylinder 8.5, and an end of described the 7th connecting plate 8.13 is equipped with pressing plate 8.2.
Described slice conveying mechanism 12 comprises base plate 12.4, the 8th motor 12.1, driving wheel 12.2 and driven pulley 12.3; Described base plate 12.4 is fixed in frame, base plate 12.4 upper fixed biside plates, power transmission shaft 12.5 is fixedly installed in the described biside plate outside between return idler 12.3, the biside plate, a driving wheel 12.2 is fixed at the two ends of described power transmission shaft 12.5 respectively, the output of described the 8th motor 12.1 is connected with power transmission shaft 12.5 by shaft coupling, transmit by conveyer belt between described driven pulley 12.3, the driving wheel 12.2, the conveyer belt below is backing plate fixedly.
In order better to improve silicon chip loading and unloading efficient, this two overlaps mechanism and is parallel installation the utility model with the first silicon box conveying mechanism 1a, first 2a of hoistable platform mechanism, the first slice carrying mechanism 4a and first 5a of storing mechanism and the second silicon box conveying mechanism 1b, second 2b of hoistable platform mechanism, the second slice conveying mechanism 12, slice carrying mechanism 4b and the 5b of storing mechanism.
During work, first motor, 1.1 rotation directions on the twice conveying mechanism are opposite up and down, wherein the first silicon box conveying mechanism 1a realizes filling the silicon chip magazine of handling without PECVD and is delivered to first 2a of hoistable platform mechanism, treat that silicon chip in the silicon box all takes out after, empty silicon chip magazine is transported out;
The first silicon box conveying mechanism 1b realizes empty silicon chip magazine is delivered to the second hoistable platform 2b, and treating will expire the silicon chip magazine and transfer out after PECVD processing silicon chip is filled the silicon chip magazine.
During work, first 2a of hoistable platform mechanism will fill the upwards lifting of silicon box of handling silicon chip without PECVD, the height of undermost silicon chip arrives predetermined slice position in silicon box, the first slice carrying mechanism 4a takes out the silicon chip in the silicon chip magazine from bottom to top one by one, after treating that silicon chip in the silicon chip magazine is taken out one by one, first 2a of hoistable platform mechanism is delivered to empty silicon chip magazine on the first silicon box conveying mechanism 1a.
During work, second 2b of hoistable platform mechanism descends empty silicon box downwards, toply in silicon box wait to put the silicon chip place and arrive predetermined slice position, the second slice carrying mechanism 4b will be through the silicon chip that PECVD the handles sky silicon chip magazine of packing into one by one from top to down, after treating that sky silicon chip magazine is filled, second 2b of hoistable platform mechanism will expire the silicon chip magazine and be delivered on the silicon box pipeline device 1b.
During work, the first slice carrying mechanism 4a is by Rodless cylinder 4.2, the action of the 4th motor 4.1, and the silicon wafer horizontal in the silicon chip magazine on first 2a of hoistable platform mechanism is delivered in the storing frame 5.11 on first 5a of storing mechanism.
During work, the second slice carrying mechanism 4b is by Rodless cylinder 4.2, the action of the 4th motor 4.1, and the silicon wafer horizontal on the slice conveying mechanism 12 is delivered in the empty silicon chip magazine on the second hoistable platform 2b.
Second 5b of storing mechanism stores the silicon chip of handling through PECVD.
During work, go out piece conveying device and realize the silicon chip in the storing frame 5.11 on second 5b of storing mechanism is transferred out.
During work, the 6th motor 6.11 on first 6a of transport establishment, vertical lines module 6.16 control hold-down mechanisms move up and down, the 7th motor 6.12, the 7th slide block 6.7, the 7th line rail 6.8 control hold-down mechanisms move forward and backward, and the cylinder action on the hold-down mechanism realizes clamping the graphite boat on the floor truck.
For silicon chip better is delivered on first 5a of storing mechanism from first 2a of hoistable platform mechanism, the utility model is at the first slice carrying mechanism 4a upper fixed guiding mechanism 3.
During work, when the first slice carrying mechanism 4a will pack storing frame 5.11 among first 5a of storing mechanism into without the silicon chip that PECVD handles, guiding mechanism 3 actions are carried out longitudinally guiding to the silicon chip on the first slice carrying mechanism 4a, after the storing frame 5.11 among first 5a of storing mechanism was filled silicon chip, guiding mechanism 3 actions were carried out located lateral to the silicon chip of storing frame 5.11.
When the first floor truck 9a or the second floor truck 9b push below first 6a of transport establishment or second 6b of transport establishment, in order to guarantee the first floor truck 9a or the second floor truck 9b stand unanimity, the first dolly detent mechanism 7a, the second dolly detent mechanism 7b are installed on the utility model frame, during work, floor truck pushes under first 6a of transport establishment along second directive wheel 7.1 of both sides, and the tenth cylinder 7.7,7.3 actions of the 8th cylinder clamp the first floor truck 9a.
In order to guarantee that graphite boat accurately locatees, the utility model is installed the first graphite boat detent mechanism 8a in first 6a of transport establishment, one side, and second 6b of transport establishment, one side is installed the second graphite boat detent mechanism 8b.
During work, after first 6a of transport establishment, second 6b of transport establishment are carried to graphite boat respectively the first graphite boat detent mechanism 8a, the second graphite boat detent mechanism 8b, the 9th cylinder 8.10 on the first graphite boat detent mechanism 8a, the second graphite boat detent mechanism 8b, 8.5 actions of the 8th cylinder realize the location graphite boat.
Although by reference to the accompanying drawings preferred embodiment of the present utility model is described above; but the utility model is not limited to above-mentioned embodiment; above-mentioned embodiment only is schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present utility model; under the scope situation that does not break away from the protection of the utility model aim and claim, can also make the concrete conversion of a lot of forms, these all belong within the protection range of the present utility model.

Claims (10)

1.一种用于PECVD设备的硅片自动上下料装置，其特征是：在机架上转动安装有机械手（10），在机械手（10）上安装有吸盘（11），在机械手（10）外侧的机架上安装有第一硅片盒输送机构（1a）、第一升降平台机构（2a）、导向机构（3）、第一出片搬运机构（4a）、第一储料机构（5a）、第一运输机构（6a）、第一小车定位机构（7a）、第一石墨舟定位机构（8a）与第一搬运小车（9a），在机架上内侧位置安装有第二硅片盒输送机构（1b）、第二升降平台机构（2b）、出片输送机构（12）、第二出片搬运机构（4b）、第二储料机构（5b）、第二运输机构（6b）、第二小车定位机构（7b）、第二石墨舟定位机构（8b）与第二搬运小车（9b）；所述第一运输机构（6a）安装于第一出片搬运机构（4a）的前方，第二运输机构（6b）安装于出片输送机构（12）的前方，机械手（10）安装于第一运输机构（6a）与第二运输机构（6b）之间的机架上。 1. An automatic silicon wafer loading and unloading device for PECVD equipment, characterized in that: a manipulator (10) is rotated on the frame, a suction cup (11) is installed on the manipulator (10), and a manipulator (10) is installed on the manipulator (10). The outer frame is equipped with the first silicon wafer box conveying mechanism (1a), the first lifting platform mechanism (2a), the guiding mechanism (3), the first wafer delivery mechanism (4a), the first material storage mechanism (5a ), the first transportation mechanism (6a), the first trolley positioning mechanism (7a), the first graphite boat positioning mechanism (8a) and the first transport trolley (9a), the second silicon wafer box is installed on the inner side of the frame The conveying mechanism (1b), the second lifting platform mechanism (2b), the film-out conveying mechanism (12), the second film-out conveying mechanism (4b), the second material storage mechanism (5b), the second transport mechanism (6b), The second trolley positioning mechanism (7b), the second graphite boat positioning mechanism (8b) and the second conveying trolley (9b); the first transport mechanism (6a) is installed in front of the first film output conveying mechanism (4a), The second transport mechanism (6b) is installed in front of the film output transport mechanism (12), and the manipulator (10) is installed on the frame between the first transport mechanism (6a) and the second transport mechanism (6b). 2.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述第一硅片盒输送机构（1a）与第二硅片盒输送机构（1b）结构相同，它们包括第一电机（1.1）、托板（1.2）、同步带（1.3）、第一同步带轮（1.4）、第二同步带轮（1.5）、转动轴（1.6）、第三同步带轮（1.7）与第四同步带轮（1.8），在第一电机（1.1）的输出端连接有第四同步带轮（1.8），转动轴（1.6）的两端均固定有第一同步带轮（1.4），两第一同步带轮（1.4）之间的转动轴（1.6）上固定有第三同步带轮（1.7），第四同步带轮（1.8）通过同步带（1.3）连接第三同步带轮（1.7），同步带（1.3）绕过第一同步带轮（1.4）、托板（1.2）与第二同步带轮（1.5）。 2. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the first wafer cassette conveying mechanism (1a) and the second wafer cassette conveying mechanism (1b) have the same structure , they include the first motor (1.1), pallet (1.2), timing belt (1.3), first timing pulley (1.4), second timing pulley (1.5), rotating shaft (1.6), third timing belt pulley (1.7) and the fourth synchronous pulley (1.8), the fourth synchronous pulley (1.8) is connected to the output end of the first motor (1.1), and the first synchronous belt is fixed at both ends of the rotating shaft (1.6) (1.4), the third synchronous pulley (1.7) is fixed on the rotating shaft (1.6) between the two first synchronous pulleys (1.4), and the fourth synchronous pulley (1.8) is connected to the second synchronous belt (1.3) Three synchronous belt pulleys (1.7), the synchronous belt (1.3) bypasses the first synchronous belt pulley (1.4), the supporting plate (1.2) and the second synchronous belt pulley (1.5). 3.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述第一升降平台机构（2a）与第二升降平台机构（2b）结构相同，它们包括安装支座（2.10）、竖向升降组件和水平输送组件，水平输送组件通过第一连接板（2.7）固定于竖向升降平台组件上，竖向升降组件通过安装支座（2.10）固定于机架上； 3. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the first lifting platform mechanism (2a) and the second lifting platform mechanism (2b) have the same structure, and they include installation The support (2.10), the vertical lifting assembly and the horizontal conveying assembly, the horizontal conveying assembly is fixed on the vertical lifting platform assembly through the first connecting plate (2.7), and the vertical lifting assembly is fixed on the frame through the mounting support (2.10) superior; 所述竖向升降组件包括第二电机（2.1），第二电机（2.1）安装在安装支座（2.10）上，第二电机（2.1）的输出端通过联轴器与第一丝杠（2.5）的一端连接，所述第一丝杠（2.5）的两端通过轴承座转动安装在安装支座（2.10）上，安装支座（2.10）上平行安装有第一线轨（2.2），在第一线轨（2.2）内滑动连接有第一滑块（2.3），第一丝杠（2.5）上安装有第一螺母（2.4），第一滑块（2.3）及第一螺母（2.4）固定在第一连接板（2.7）上； The vertical lifting assembly includes a second motor (2.1), the second motor (2.1) is installed on the mounting support (2.10), and the output end of the second motor (2.1) is connected to the first lead screw (2.5) through a coupling ), the two ends of the first lead screw (2.5) are installed on the installation support (2.10) through the rotation of the bearing seat, and the first line rail (2.2) is installed in parallel on the installation support (2.10). The first slider (2.3) is slidingly connected in the first line rail (2.2), the first nut (2.4), the first slider (2.3) and the first nut (2.4) are installed on the first lead screw (2.5) fixed on the first connecting plate (2.7); 所述水平输送组件包括第三电机（2.11），第三电机（2.11）的输出端固定同步带轮，转轴（2.13）的两端固定两个第五同步带轮（2.12），第三电机（2.11）的输出端的同步带轮通过第二同步带（2.14）与转轴（2.13）上的第十同步带轮（2.16）连接，第二同步带（2.14）绕过第六同步带轮（2.15）与第五同步带轮（2.12），转轴（2.13）上方设置有两个挡块（2.9），所述第一连接板（2.7）的上端固定有第一气缸（2.6），第一气缸（2.6）的活塞杆端部安装有压紧头。 The horizontal conveying assembly includes a third motor (2.11), the output end of the third motor (2.11) is fixed with a synchronous pulley, two ends of the rotating shaft (2.13) are fixed with two fifth synchronous pulleys (2.12), the third motor ( The synchronous pulley at the output end of 2.11) is connected to the tenth synchronous pulley (2.16) on the rotating shaft (2.13) through the second synchronous belt (2.14), and the second synchronous belt (2.14) bypasses the sixth synchronous pulley (2.15) With the fifth synchronous pulley (2.12), there are two stoppers (2.9) above the rotating shaft (2.13), the first cylinder (2.6) is fixed on the upper end of the first connecting plate (2.7), the first cylinder (2.6 ) is fitted with a compression head at the end of the piston rod. 4.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述导向机构3包括第一安装板（3.4）、横向定位组件与纵向导向组件；第一安装板（3.4）的下侧安装有纵向导向组件，第一安装板（3.4）的上方安装横向定位组件； 4. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the guide mechanism 3 includes a first mounting plate (3.4), a lateral positioning assembly and a longitudinal guiding assembly; the first installation A longitudinal guide assembly is installed on the underside of the plate (3.4), and a transverse positioning assembly is installed above the first mounting plate (3.4); 所述横向定位组件包括推板（3.2）、第二线轨（3.6），所述第二线轨（3.6）固定于第一安装板（3.4），推板（3.2）上固定第二滑块（3.7），所述第二滑块（3.7）嵌装于第二线轨（3.6）上，第一安装板（3.4）的前端固定推条（3.3）；横向调节单元通过连接块固定于第一安装板（3.4）上，所述横向调节单元包括第二气缸（3.1）与第五气缸（3.16），所述第二气缸（3.1）与第五气缸（3.16）相背固定，第五气缸（3.16）的活塞杆通过连接块固定于第一安装板（3.4）上，第二气缸（3.1）的活塞端通过连接杆与推板（3.2）固定； The lateral positioning assembly includes a push plate (3.2), a second wire rail (3.6), the second wire rail (3.6) is fixed on the first mounting plate (3.4), and the second slider (3.7) is fixed on the push plate (3.2) ), the second slider (3.7) is embedded on the second line rail (3.6), and the front end of the first installation plate (3.4) is fixed to the push bar (3.3); the lateral adjustment unit is fixed on the first installation plate through the connecting block (3.4), the lateral adjustment unit includes the second cylinder (3.1) and the fifth cylinder (3.16), the second cylinder (3.1) and the fifth cylinder (3.16) are fixed opposite to each other, and the fifth cylinder (3.16) The piston rod of the cylinder is fixed on the first mounting plate (3.4) through the connecting block, and the piston end of the second cylinder (3.1) is fixed with the push plate (3.2) through the connecting rod; 所述纵向导向组件包括第一安装板（3.4）下方的同步带传送单元与第一安装板（3.4）上方的纵向调节单元；所述同步带传送单元包括两第七同步带轮（3.10），两第七同步带轮（3.10）通过连接轴固定于第一安装板（3.4）上，所述的两第七同步带轮（3.10）之间通过第三同步带（3.13）连接，第一安装板（3.4）下方设置线轨，第一传动块（3.11）与第二传动块（3.20）上分别固定有滑块，所述第一传动块（3.11）与第四传动块（3.20）上的滑块分别嵌装于第一安装板（3.4）下方设置的线轨上，其中第一传动块（3.11）的一侧固定有第一齿形块（3.17），所述第一齿形块（3.17）上的齿与第三同步带（3.13）上的齿啮合，且齿形块（3.17）与第三同步带（3.13）及第二传动块（3.12）固定，所述第四传动块（3.20）上一侧固定有第二齿形块（3.18），所述第二齿形块（3.18）上的齿与第三同步带（3.13）上的齿啮合，且第二齿形块（3.18）与第三同步带（3.13）及第五传动块（3.19）固定，所述第二传动块（3.12）通过两连杆与第三传动块（3.14）固定，连杆的下端与第二连接板（3.9）固定，第二连接板（3.9）上固定多个第一导向轮（3.8），所述第五传动块（3.19）通过两连杆与第八连接板（3.22）连接，第八连接板（3.22）上固定多个第二导向轮（3.21）；所述第三传动块（3.14）与纵向调节组件连接；所述纵向调节单元包括第三气缸（3.5）、第四气缸（3.15），所述第三气缸（3.5）与第四气缸（3.15）相背固定，其中第四气缸（3.15）的活塞杆通过连接块固定于第一安装板（3.4）上，第三气缸（3.5）与第三传动块（3.14）连接。 The longitudinal guide assembly includes a synchronous belt transmission unit below the first mounting plate (3.4) and a longitudinal adjustment unit above the first mounting plate (3.4); the synchronous belt transmission unit includes two seventh synchronous pulleys (3.10), The two seventh synchronous pulleys (3.10) are fixed on the first installation plate (3.4) through the connecting shaft, and the two seventh synchronous pulleys (3.10) are connected by the third synchronous belt (3.13). Line rails are set under the plate (3.4), sliders are respectively fixed on the first transmission block (3.11) and the second transmission block (3.20), the first transmission block (3.11) and the fourth transmission block (3.20) are The sliders are respectively embedded on the line rails provided under the first mounting plate (3.4), wherein a first toothed block (3.17) is fixed on one side of the first transmission block (3.11), and the first toothed block ( The teeth on 3.17) mesh with the teeth on the third synchronous belt (3.13), and the toothed block (3.17) is fixed with the third synchronous belt (3.13) and the second transmission block (3.12), and the fourth transmission block ( 3.20) A second toothed block (3.18) is fixed on the upper side, and the teeth on the second toothed block (3.18) mesh with the teeth on the third synchronous belt (3.13), and the second toothed block (3.18 ) is fixed with the third timing belt (3.13) and the fifth transmission block (3.19), the second transmission block (3.12) is fixed with the third transmission block (3.14) through two connecting rods, and the lower end of the connecting rod is connected with the second The plate (3.9) is fixed, a plurality of first guide wheels (3.8) are fixed on the second connecting plate (3.9), the fifth transmission block (3.19) is connected with the eighth connecting plate (3.22) through two connecting rods, and the eighth A plurality of second guide wheels (3.21) are fixed on the connecting plate (3.22); the third transmission block (3.14) is connected with the longitudinal adjustment assembly; the longitudinal adjustment unit includes the third cylinder (3.5), the fourth cylinder (3.15 ), the third cylinder (3.5) is fixed opposite to the fourth cylinder (3.15), wherein the piston rod of the fourth cylinder (3.15) is fixed on the first mounting plate (3.4) through the connecting block, and the third cylinder (3.5 ) is connected with the third transmission block (3.14). 5.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述第一出片搬运机构4a包括无杆气缸（4.2）、第四电机（4.1）与第二安装板（4.10），所述第二安装板（4.10）上固定无杆气缸（4.2）、第三线轨（4.4），无杆气缸（4.2）输出端通过连接板与第一移动板（4.3）固定；所述第一移动板（4.3）上固定有第三滑块（4.5），第三滑块（4.5）嵌装于所述的第三线轨（4.4）；所述两组第三连接板（4.11）的一侧、安装底板（4.9）两侧、第一移动板（4.3）的前端两侧及无杆气缸（4.2）输出端上的连接板分别固定滚轮、且滚轮之间通过输送带传动；所述第四电机（4.1）的输出端固定同步带轮，安装底板（4.9）的一侧通过两轴承支座支撑传动轴（4.12），所述传动轴（4.12）的两端固定同步带轮、且两同步带轮之间设置第十一同步带轮（4.13），所述第四电机（4.1）的输出端的同步带轮通过输送带传动第十一同步带轮（4.13）；所述第三连接板（4.11）之间固定第六气缸（4.7），所述第六气缸（4.7）的输出端与定位块（4.6）固定，所述定位块（4.6）上固定滑块、并通过滑块嵌装于第三线轨（4.4）； 5. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the first wafer delivery mechanism 4a includes a rodless cylinder (4.2), a fourth motor (4.1) and a second Two mounting plates (4.10), the rodless cylinder (4.2) and the third line rail (4.4) are fixed on the second mounting plate (4.10), and the output end of the rodless cylinder (4.2) connects with the first moving plate (4.3) through the connecting plate ) is fixed; the third slider (4.5) is fixed on the first moving plate (4.3), and the third slider (4.5) is embedded in the third line rail (4.4); the two groups of third connections One side of the plate (4.11), both sides of the installation base plate (4.9), both sides of the front end of the first moving plate (4.3) and the connecting plate on the output end of the rodless cylinder (4.2) respectively fix the rollers, and the rollers are conveyed through Belt transmission; the output end of the fourth motor (4.1) is fixed to the synchronous pulley, one side of the installation base plate (4.9) supports the transmission shaft (4.12) through two bearing supports, and the two ends of the transmission shaft (4.12) are fixed A synchronous pulley, and an eleventh synchronous pulley (4.13) is arranged between the two synchronous pulleys, and the synchronous pulley at the output end of the fourth motor (4.1) drives the eleventh synchronous pulley (4.13) through a conveyor belt; The sixth cylinder (4.7) is fixed between the third connecting plate (4.11), the output end of the sixth cylinder (4.7) is fixed to the positioning block (4.6), and the slider (4.6) is fixed on the positioning block, And embedded in the third line rail (4.4) through the slider; 所述第二出片搬运机构4b包括无杆气缸（4.2）、第四电机（4.1），所述第二安装板（4.10）上固定无杆气缸（4.2）、第三线轨（4.4），无杆气缸（4.2）输出端通过连接板与第一移动板（4.3）固定，所述第一移动板（4.3）上固定有第三滑块（4.5），所述第三滑块（4.5）嵌装于所述第三线轨（4.4）上；所述两组第三连接板（4.11）的一侧、安装底板（4.9）两侧、第一移动板（4.3）的前端两侧及无杆气缸（4.2）输出端上的连接板分别固定滚轮、且滚轮之间通过输送带传动，所述第四电机（4.1）的输出端固定同步带轮，安装底板（4.9）的一侧通过两轴承支座支撑传动轴（4.12），所述传动轴（4.12）的两端固定同步带轮且两同步带轮之间设置第十一同步带轮（4.13），所述第四电机（4.1）的输出端的同步带轮通过输送带传动第十一同步带轮（4.13）。 The second film output transport mechanism 4b includes a rodless cylinder (4.2), a fourth motor (4.1), a rodless cylinder (4.2) and a third line rail (4.4) are fixed on the second mounting plate (4.10), and there is no The output end of the rod cylinder (4.2) is fixed to the first moving plate (4.3) through the connecting plate, and the third sliding block (4.5) is fixed on the first moving plate (4.3), and the third sliding block (4.5) is embedded Installed on the third line rail (4.4); one side of the two sets of third connecting plates (4.11), both sides of the installation bottom plate (4.9), both sides of the front end of the first moving plate (4.3) and the rodless cylinder (4.2) The connecting plates on the output end respectively fix the rollers, and the rollers are driven by the conveyor belt, the output end of the fourth motor (4.1) is fixed to the synchronous pulley, and one side of the installation base plate (4.9) is supported by two bearings. The seat supports the transmission shaft (4.12), the two ends of the transmission shaft (4.12) are fixed with synchronous pulleys and the eleventh synchronous pulley (4.13) is arranged between the two synchronous pulleys, and the output of the fourth motor (4.1) The synchronous pulley at the end drives the eleventh synchronous pulley (4.13) through the conveyor belt. 6.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述第一储料机构（5a）与第二储料机构（5b）结构相同，它们均包括升降平台组件与储料组件；  6. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the first storage mechanism (5a) and the second storage mechanism (5b) have the same structure, and they both include Lifting platform components and storage components; 所述升降平台组件包括第三安装板（5.10）、第二丝杆（5.7）、第五电机（5.2）；所述第三安装板（5.10）固定于机架，所述第五电机（5.2）固定于第三安装板（5.10），所述第二丝杆（5.7）通过轴承座支撑在第三安装板（5.10），第五电机（5.2）输出端通过联轴器与第二丝杆（5.7）连接，第二丝杆（5.7）的两侧设置两第四线轨（5.4），两第四线轨（5.4）并固定于第三安装板（5.10），安装座（5.3）的一侧固定第二螺母（5.6）、且第二螺母（5.6）两侧平行固定第四滑块（5.5），所述第四滑块（5.5）嵌装于第四线轨（5.4）上，所述第二丝杆（5.7）上安装有第二螺母（5.6）； The lifting platform assembly includes a third mounting plate (5.10), a second screw rod (5.7), and a fifth motor (5.2); the third mounting plate (5.10) is fixed on the frame, and the fifth motor (5.2 ) is fixed on the third mounting plate (5.10), the second screw rod (5.7) is supported on the third mounting plate (5.10) through the bearing seat, and the output end of the fifth motor (5.2) is connected to the second screw rod through a coupling (5.7) connection, two fourth line rails (5.4) are set on both sides of the second screw rod (5.7), and the two fourth line rails (5.4) are fixed on the third mounting plate (5.10) and the mounting seat (5.3) The second nut (5.6) is fixed on one side, and the fourth slider (5.5) is fixed parallel to both sides of the second nut (5.6), and the fourth slider (5.5) is embedded on the fourth line rail (5.4), A second nut (5.6) is installed on the second screw rod (5.7); 所述储料组件包括安装座（5.3）、驱动单元与储料框（5.11）；安装座（5.3）上固定驱动单元，所述两储料框（5.11）上分别固定第五滑块（5.9），第五滑块（5.9）嵌装于第五线轨（5.8）上，所述两驱动单元分别通过连接杆与两储料框（5.11）连接；所述驱动单元包括第十一气缸（5.1）、第十二气缸（5.12），所述第十一气缸（5.1）、第十二气缸（5.12）相背安装，所述第十一气缸（5.1）的活塞杆端通过安装块固定于安装座（5.3），所述第十二气缸（5.12）的活塞杆端通过连接杆与储料框（5.11）连接。 The storage assembly includes a mounting base (5.3), a drive unit and a storage frame (5.11); the drive unit is fixed on the mounting base (5.3), and the fifth slider (5.9) is respectively fixed on the two storage frames (5.11). ), the fifth slider (5.9) is embedded on the fifth rail (5.8), and the two drive units are respectively connected to the two storage frames (5.11) through connecting rods; the drive unit includes the eleventh cylinder ( 5.1), the twelfth cylinder (5.12), the eleventh cylinder (5.1) and the twelfth cylinder (5.12) are installed opposite to each other, and the piston rod end of the eleventh cylinder (5.1) is fixed on the The mounting seat (5.3), the piston rod end of the twelfth cylinder (5.12) is connected with the storage frame (5.11) through a connecting rod. 7.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述第一运输机构（6a）与第二运输机构（6b）的结构相同，它们均包括水平输送组件、顶升组件与压紧组件； 7. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the first transport mechanism (6a) and the second transport mechanism (6b) have the same structure, and they both include horizontal Conveying components, jacking components and pressing components; 所述水平输送组件包括第六电机（6.11）、第五连接板（6.6）、第九同步带轮（6.10）；所述第六电机（6.11）的输出轴与减速器相连，减速器两端设置两组第九同步带轮（6.10），两组同步带轮九（6.10）的同步带之间通过连接块连接安装箱（6.14），两组第五连接板（6.6）固定于安装箱（6.14）的两端，两块第七滑块（6.7）平行固定于第五连接板（6.6）的外侧，两条第七线轨（6.8）平行固定于机架上，所述第七滑块（6.7）嵌装于第七线轨（6.8）； The horizontal conveying assembly includes the sixth motor (6.11), the fifth connecting plate (6.6), and the ninth synchronous pulley (6.10); the output shaft of the sixth motor (6.11) is connected to the reducer, and both ends of the reducer Set two sets of ninth timing pulleys (6.10), the timing belts of the two sets of timing pulleys nine (6.10) are connected to the installation box (6.14) through the connecting block, and the two sets of fifth connecting plates (6.6) are fixed to the installation box ( 6.14) at both ends, two seventh sliders (6.7) are fixed on the outside of the fifth connecting plate (6.6) in parallel, and two seventh line rails (6.8) are fixed on the frame in parallel, the seventh slider (6.7) Embedded in the seventh track (6.8); 所述顶升组件包括第六电机（6.11）、第八同步带轮（6.9）、竖向丝杆（6.16）；两块第五连接板（6.6）的内侧分别支承一竖向丝杆（6.16），竖向丝杆（6.16）上螺接螺母，螺接的螺母并与第四连接板（6.5）固定，第四连接板（6.5）上安装滑块并与第五连接板（6.6）上的线轨滑动连接，竖向丝杆（6.16）的底端安装第八同步带轮（6.9），第六电机（6.11）的输出端上固定第十二同步带轮（6.15），所述第十二同步带轮（6.15）、两第八同步带轮（6.9）之间通过同步带传动； The jacking assembly includes the sixth motor (6.11), the eighth synchronous pulley (6.9), and the vertical screw (6.16); the inner sides of the two fifth connecting plates (6.6) respectively support a vertical screw (6.16 ), the nut is screwed on the vertical screw rod (6.16), the screwed nut is fixed with the fourth connecting plate (6.5), the slider is installed on the fourth connecting plate (6.5) and connected with the fifth connecting plate (6.6) The line rail is slidingly connected, the eighth synchronous pulley (6.9) is installed at the bottom of the vertical screw rod (6.16), and the twelfth synchronous pulley (6.15) is fixed on the output end of the sixth motor (6.11). Twelve synchronous pulleys (6.15) and two eighth synchronous pulleys (6.9) are driven by synchronous belts; 所述压紧单元包括第四连接板（6.5）、第六气缸（6.3）与第七气缸（6.1）；两组第四连接板（6.5）上分别固定托块（6.4），第六气缸（6.3）及两组第六线轨（6.13）固定于托块（6.4），所述第六气缸（6.3）的输出端固定于第二移动板（6.17），所述第二移动板（6.17）上平行安装两组第六滑块（6.2），所述第六滑块（6.2）嵌装于第六线轨（6.13）上，所述第二移动板（6.17）上固定有第七气缸（6.1）。 The pressing unit includes the fourth connecting plate (6.5), the sixth cylinder (6.3) and the seventh cylinder (6.1); two groups of fourth connecting plates (6.5) respectively fix the brackets (6.4), the sixth cylinder ( 6.3) and two sets of sixth line rails (6.13) are fixed on the bracket (6.4), the output end of the sixth cylinder (6.3) is fixed on the second moving plate (6.17), and the second moving plate (6.17) Two sets of sixth sliders (6.2) are installed in parallel on the top, the sixth sliders (6.2) are embedded on the sixth line rail (6.13), and the seventh cylinder ( 6.1). 8.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述第一小车定位装置（7a）与第二小车定位装置（7b）的结构相同，它们均包括导向组件与锁紧组件，导向组件安装于机架的两侧，锁紧组件安装于第一运输机构（6a）与第二运输机构（6b）的下方； 8. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the first trolley positioning device (7a) and the second trolley positioning device (7b) have the same structure, and they are both It includes a guide assembly and a locking assembly, the guide assembly is installed on both sides of the frame, and the locking assembly is installed under the first transportation mechanism (6a) and the second transportation mechanism (6b); 所述导向装置包括第二导向轮（7.1）与安装板；若干个第二导向轮（7.1）安装于所述安装板的一侧，所述安装板固定于机架； The guide device includes a second guide wheel (7.1) and a mounting plate; several second guide wheels (7.1) are installed on one side of the mounting plate, and the mounting plate is fixed to the frame; 所述锁紧装置包括第八气缸（7.3）、第十气缸（7.7）、支座（7.6）、摆块（7.5）与第六连接板（7.2）；所述第六连接板（7.2）安装于机架，所述两组支座（7.6）安装于第六连接板（7.2），第八气缸（7.3）的一端分别活动连接于两支座（7.6），第八气缸（7.3）的另一端活动连接于摆块（7.5），所述摆块（7.5）的一端活动连接于支座（7.6），所述摆块（7.5）的两侧安装第一压轮（7.4），第十气缸（7.7）安装于第六连接板（7.2），所述第十气缸（7.7）的输出端连接连杆（7.8），所述连杆（7.8）的两侧安装两个第二压轮（7.9）。 The locking device includes the eighth cylinder (7.3), the tenth cylinder (7.7), the support (7.6), the swing block (7.5) and the sixth connecting plate (7.2); the sixth connecting plate (7.2) is installed On the frame, the two sets of supports (7.6) are installed on the sixth connecting plate (7.2), one end of the eighth cylinder (7.3) is respectively movably connected to the two supports (7.6), and the other end of the eighth cylinder (7.3) One end is movably connected to the pendulum block (7.5), and one end of the pendulum block (7.5) is movably connected to the support (7.6). The first pressure roller (7.4) is installed on both sides of the pendulum block (7.5), and the tenth cylinder (7.7) is installed on the sixth connecting plate (7.2), the output end of the tenth cylinder (7.7) is connected to the connecting rod (7.8), and two second pressure rollers (7.9 ). 9.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述第一石墨舟定位机构（8a）与第二石墨舟定位机构（8b）的结构相同，它们均包括第四安装板（8.11）、定位板（8.1）与支座（8.8）；所述第四安装板（8.11）安装于机架上，所述定位板（8.1）安装于安装板四（8.11）的一侧，定位板（8.1）上安装定位块，所述第四安装板（8.11）的另外一侧平行安装两条第九线轨（8.6），第九滑块（8.7）固定于支座（8.8）上，第九滑块（8.7）嵌装于所述的第九线轨（8.6），第九气缸（8.10）固定于支座（8.8），所述第九气缸（8.10）的活塞杆端通过连接块与第四安装板（8.11）连接，所述支座（8.8）上滑动连接压杆（8.9），在压杆（8.9）与轴套之间安装弹簧；所述第四安装板（8.11）两侧安装定位块（8.12），第八线轨（8.3）与第八气缸（8.5）固定于第四安装板（8.11）的一侧，第七连接板（8.13）的一侧安装第八滑块（8.4），所述第八滑块（8.4）嵌装于第八线轨（8.3），所述第七连接板（8.13）的一侧通过连接块与第八气缸（8.5）的活塞杆端活动连接，所述第七连接板（8.13）的一端安装有压板（8.2）。 9. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the first graphite boat positioning mechanism (8a) and the second graphite boat positioning mechanism (8b) have the same structure, They all include a fourth mounting plate (8.11), a positioning plate (8.1) and a support (8.8); the fourth mounting plate (8.11) is installed on the frame, and the positioning plate (8.1) is installed on the fourth mounting plate On one side of (8.11), the positioning block is installed on the positioning plate (8.1), and two ninth line rails (8.6) are installed in parallel on the other side of the fourth mounting plate (8.11), and the ninth sliding block (8.7) is fixed On the support (8.8), the ninth slider (8.7) is embedded in the ninth line rail (8.6), the ninth cylinder (8.10) is fixed on the support (8.8), and the ninth cylinder (8.10 ) of the piston rod end is connected with the fourth mounting plate (8.11) through the connecting block, and the pressure rod (8.9) is slidably connected to the support (8.8), and a spring is installed between the pressure rod (8.9) and the bushing; Positioning blocks (8.12) are installed on both sides of the fourth mounting plate (8.11), the eighth line rail (8.3) and the eighth cylinder (8.5) are fixed on one side of the fourth mounting plate (8.11), and the seventh connecting plate (8.13) One side of the eighth slider (8.4) is installed, the eighth slider (8.4) is embedded in the eighth line rail (8.3), one side of the seventh connecting plate (8.13) is connected with the eighth The piston rod end of the cylinder (8.5) is movably connected, and a pressure plate (8.2) is installed at one end of the seventh connecting plate (8.13). 10.如权利要求1所述的用于PECVD设备的硅片自动上下料装置，其特征是：所述出片输送机构（12）包括底板（12.4）、第八电机（12.1）、主动轮（12.2）与从动轮（12.3）；所述底板（12.4）固定于机架，底板（12.4）上方固定两侧板，所述两侧板外侧固定从动滚轮（12.3）、两侧板之间安装传动轴（12.5），所述传动轴（12.5）的两端分别固定一主动轮（12.2），所述第八电机（12.1）的输出端通过联轴器与传动轴（12.5）连接，所述从动轮（12.3）、主动轮（12.2）之间通过输送带传送，输送带下方固定垫板。 10. The silicon wafer automatic loading and unloading device for PECVD equipment according to claim 1, characterized in that: the wafer delivery mechanism (12) includes a bottom plate (12.4), an eighth motor (12.1), a driving wheel ( 12.2) and driven wheels (12.3); the bottom plate (12.4) is fixed on the frame, the two side plates are fixed above the bottom plate (12.4), the driven rollers (12.3) are fixed outside the two side plates, and the two side plates are installed The transmission shaft (12.5), the two ends of the transmission shaft (12.5) are respectively fixed with a drive wheel (12.2), the output end of the eighth motor (12.1) is connected with the transmission shaft (12.5) through a coupling, the The driven wheel (12.3) and the driving wheel (12.2) are conveyed through the conveyor belt, and the backing plate is fixed under the conveyor belt.
CN201220734043.9U 2012-12-27 2012-12-27 Silicon wafer automatic loading and unloading device for PECVD equipment Expired - Lifetime CN203055881U (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103035555A (en) * 2012-12-27 2013-04-10 无锡先导自动化设备股份有限公司 Silicon wafer automatic loading and unloading device for PECVD equipment
CN105293081A (en) * 2015-10-27 2016-02-03 苏州和瑞科自动化科技有限公司 Lifting type charging tray feeding and discharging equipment
CN106542289A (en) * 2016-12-06 2017-03-29 上海考迈机器人有限公司 Silicon chip sorts the using method of loading and unloading robot system
CN107990730A (en) * 2017-11-28 2018-05-04 乐山新天源太阳能科技有限公司 Blanking device for silicon wafer sintering stove
CN108447817A (en) * 2018-03-20 2018-08-24 君泰创新（北京）科技有限公司 Silicon chip lifting apparatus
CN111469901A (en) * 2020-05-15 2020-07-31 无锡奇科穆德机电科技有限公司 Roll-like electric core transport platform truck
CN111628046A (en) * 2020-05-28 2020-09-04 湖南红太阳光电科技有限公司 A kind of loading and unloading method of PECVD surface coating
CN112873570A (en) * 2021-01-07 2021-06-01 广州钧天自动化科技有限责任公司 Full-automatic machining equipment and machining method for graphite clamping flap

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103035555A (en) * 2012-12-27 2013-04-10 无锡先导自动化设备股份有限公司 Silicon wafer automatic loading and unloading device for PECVD equipment
CN103035555B (en) * 2012-12-27 2015-07-22 无锡先导自动化设备股份有限公司 Automatic silicon wafer loading and unloading device for PECVD (plasma enhanced chemical vapor deposition) equipment
CN105293081A (en) * 2015-10-27 2016-02-03 苏州和瑞科自动化科技有限公司 Lifting type charging tray feeding and discharging equipment
CN105293081B (en) * 2015-10-27 2017-11-14 苏州和瑞科自动化科技有限公司 A kind of lift charging tray loading and unloading equipment
CN106542289A (en) * 2016-12-06 2017-03-29 上海考迈机器人有限公司 Silicon chip sorts the using method of loading and unloading robot system
CN106542289B (en) * 2016-12-06 2019-08-30 上海考迈机器人有限公司 The application method of silicon wafer sorting loading and unloading robot system
CN107990730A (en) * 2017-11-28 2018-05-04 乐山新天源太阳能科技有限公司 Blanking device for silicon wafer sintering stove
CN108447817A (en) * 2018-03-20 2018-08-24 君泰创新（北京）科技有限公司 Silicon chip lifting apparatus
CN111469901A (en) * 2020-05-15 2020-07-31 无锡奇科穆德机电科技有限公司 Roll-like electric core transport platform truck
CN111628046A (en) * 2020-05-28 2020-09-04 湖南红太阳光电科技有限公司 A kind of loading and unloading method of PECVD surface coating
CN112873570A (en) * 2021-01-07 2021-06-01 广州钧天自动化科技有限责任公司 Full-automatic machining equipment and machining method for graphite clamping flap

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