CN203055881U - Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device - Google Patents
Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device Download PDFInfo
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- CN203055881U CN203055881U CN 201220734043 CN201220734043U CN203055881U CN 203055881 U CN203055881 U CN 203055881U CN 201220734043 CN201220734043 CN 201220734043 CN 201220734043 U CN201220734043 U CN 201220734043U CN 203055881 U CN203055881 U CN 203055881U
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Abstract
The utility model relates to a silicon wafer automatic feeding and discharging device for a plasma enhanced chemical vapor deposition (PECVD) device. A mechanical arm is installed on a rack in a rotating manner, and a sucker is installed on the mechanical arm. A first silicon box transmission mechanism, a first lifting platform mechanism, a guide mechanism, a first out slice transporting mechanism, a first material storing mechanism, a first transporting mechanism, a first trolley positioning mechanism, a first graphite boat positioning mechanism and a first transporting trolley are installed on the rack which is arranged on the outer side of the mechanical arm. A second silicon box transmission mechanism, a second lifting platform mechanism, an out slice transporting mechanism, a second out slice transporting mechanism, a second material storing mechanism, a second transporting mechanism, a second trolley positioning mechanism, a second graphite boat positioning mechanism and a second transporting trolley are installed on the inner side of the rack. The silicon wafer automatic feeding and discharging device for the PECVD device has the advantages of greatly improving production efficiency, reducing labor intensity of workers, preventing the problem of high silicon damage rate caused by manual feeding and discharging from happening and decreasing manufacturing cost.
Description
Technical field
The utility model relates to solar silicon wafers process automation apparatus field, and the utility model especially relates to a kind of silicon chip automatic loading and unloading device for PECVD equipment.
Background technology
In existing silicon chip antireflective coating preparation section, need with the silicon chip of handling without PECVD in the Carrier box pack in the graphite boat, with the Carrier box of packing into of the silicon chip of handling through PECVD in the graphite boat.At present, above-mentioned silicon chip transfer action need be by manually finishing, and its shortcoming is that a dead lift causes that easily the silicon chip fragmentation makes production cost improve, and simultaneously, manual operation production efficiency is low, labour intensity is big.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, provides a kind of and can reduce production costs, reduce labor strength, the silicon chip automatic loading and unloading device that is used for PECVD equipment that automaticity is high.
The technical scheme that provides according to the utility model, described silicon chip automatic loading and unloading device for PECVD equipment, be rotatablely equipped with manipulator in frame, at manipulator sucker is installed, frame in the manipulator outside is equipped with the first silicon box conveying mechanism, the first hoistable platform mechanism, guiding mechanism, the first slice carrying mechanism, the first storing mechanism, first transport establishment, the first dolly detent mechanism, the first graphite boat detent mechanism and first floor truck, inner side is equipped with the second silicon box conveying mechanism on frame, the second hoistable platform mechanism, the slice conveying mechanism, the second slice carrying mechanism, the second storing mechanism, second transport establishment, the second dolly detent mechanism, the second graphite boat detent mechanism and second floor truck; Described first transport establishment is installed on the place ahead of the first slice carrying mechanism, and second transport establishment is installed on the place ahead of slice conveying mechanism, and manipulator is installed on the frame between first transport establishment and second transport establishment.
The described first silicon box conveying mechanism is identical with the second silicon box conveying mechanism structure, they comprise first motor, supporting plate, be with synchronously, first synchronous pulley, second synchronous pulley, rotation axis, the 3rd synchronous pulley and the 4th synchronous pulley, output at first motor is connected with the 4th synchronous pulley, all fixedly there is first synchronous pulley at the two ends of rotation axis, on the rotation axis between two first synchronous pulleys the 3rd synchronous pulley is arranged fixedly, the 4th synchronous pulley is by the 3rd synchronous pulley of band connection synchronously, and band is walked around first synchronous pulley synchronously, supporting plate and second synchronous pulley.
The described first hoistable platform mechanism is identical with the second hoistable platform mechanism structure, they comprise erection support, vertical lifting assembly and horizontal feed assembly, the horizontal feed assembly is fixed on the vertical hoistable platform assembly by first connecting plate, and vertical lifting assembly is fixed on the frame by erection support;
Described vertical lifting assembly comprises second motor, second motor is installed on the erection support, the output of second motor is connected with an end of first leading screw by shaft coupling, the two ends of described first leading screw are rotatably installed on the erection support by bearing pedestal, the parallel first line rail that is equipped with on the erection support, slidely connect first slide block in the first line rail, first nut is installed on first leading screw, first slide block and first nut are fixed on first connecting plate;
Described horizontal feed assembly comprises the 3rd motor, the output of the 3rd motor is synchronous pulley fixedly, two the 5th synchronous pulleys are fixed at the two ends of rotating shaft, the synchronous pulley of the output of the 3rd motor by second synchronously band be connected with the tenth synchronous pulley in the rotating shaft, the second synchronous band is walked around the 6th synchronous pulley and the 5th synchronous pulley, the rotating shaft top is provided with two blocks, and fixedly there is first cylinder upper end of described first connecting plate, and the piston rod end of first cylinder is equipped with hold-down head.
Described guiding mechanism comprises first mounting panel, located lateral assembly and longitudinally guiding assembly; The downside of first mounting panel is equipped with the longitudinally guiding assembly, and the located lateral assembly is installed in the top of first mounting panel;
Described located lateral assembly comprises push pedal, the second line rail, and the described second line rail is fixed in first mounting panel, fixes second slide block in the push pedal, and described second slide block is flush-mounted on the second line rail, and the front end of first mounting panel fixedly pushes away bar; The lateral adjustments unit is fixed on first mounting panel by contiguous block, described lateral adjustments unit comprises second cylinder and the 5th cylinder, described second cylinder and the 5th cylinder are opposing fixing, the piston rod of the 5th cylinder is fixed on first mounting panel by contiguous block, and the piston end of second cylinder is fixed by connecting rod and push pedal.
Described longitudinally guiding assembly comprises the synchronous band delivery unit of first mounting panel below and the longitudinal adjustment mechanism of first mounting panel top; Described synchronous band delivery unit comprises two the 7th synchronous pulleys, two the 7th synchronous pulleys are fixed on first mounting panel by connecting axle, be with connection synchronously by the 3rd between described two the 7th synchronous pulleys, first mounting panel below arranges the line rail, slide block is fixedly arranged respectively on first drive block and second drive block, slide block on described first drive block and the 4th drive block is flush-mounted in respectively on the line rail of first mounting panel below setting, wherein a side of first drive block fixedly has the first profile of tooth piece, tooth and the 3rd on the described first profile of tooth piece synchronously with on tooth engagement, and profile of tooth piece and the 3rd is with synchronously and second drive block is fixed, a side fixedly has the second profile of tooth piece on described the 4th drive block, tooth and the 3rd on the described second profile of tooth piece synchronously with on tooth engagement, and the second profile of tooth piece and the 3rd is with synchronously and the 5th drive block is fixed, described second drive block is fixed by two connecting rods and the 3rd drive block, the lower end of connecting rod and second connecting plate are fixed, fix a plurality of first directive wheels on second connecting plate, described the 5th drive block is connected with the 8th connecting plate by two connecting rods, fixes a plurality of second directive wheels on the 8th connecting plate; Described the 3rd drive block is connected with vertical adjusting part; Described longitudinal adjustment mechanism comprises the 3rd cylinder, four-cylinder, and described the 3rd cylinder and four-cylinder are opposing fixing, and wherein the piston rod of four-cylinder is fixed on first mounting panel by contiguous block, and the 3rd cylinder is connected with the 3rd drive block.
The described first slice carrying mechanism comprises Rodless cylinder, the 4th motor and second mounting panel, fixedly Rodless cylinder, the 3rd line rail on described second mounting panel, and the Rodless cylinder output is fixed by connecting plate and first movable plate; On described first movable plate the 3rd slide block is arranged fixedly, the 3rd slide block is flush-mounted in described the 3rd line rail; Pass through the conveyer belt transmission between one side of described two group of the 3rd connecting plate, the front end both sides that base plate both sides, first movable plate are installed and the difference fixed idler whell of the connecting plate on the Rodless cylinder output and the roller; The output of described the 4th motor is synchronous pulley fixedly, one side of base plate is installed by two bearings seat supports power transmission shaft, the two ends of described power transmission shaft fixedly arrange the 11 synchronous belt wheel between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor is by conveyer belt transmission the 11 synchronous belt wheel; Fix the 6th cylinder between described the 3rd connecting plate, output and the locating piece of described the 6th cylinder are fixed, fixing slide block and be flush-mounted in the 3rd line rail by slide block on the described locating piece.
The described second slice carrying mechanism comprises Rodless cylinder, the 4th motor, fixedly Rodless cylinder, the 3rd line rail on described second mounting panel, the Rodless cylinder output is fixed by connecting plate and first movable plate, on described first movable plate the 3rd slide block is arranged fixedly, described the 3rd slide block is flush-mounted on described the 3rd line rail; Pass through the conveyer belt transmission between one side of described two group of the 3rd connecting plate, the front end both sides that base plate both sides, first movable plate are installed and the difference fixed idler whell of the connecting plate on the Rodless cylinder output and the roller, the output of described the 4th motor is synchronous pulley fixedly, one side of base plate is installed by two bearings seat supports power transmission shaft, the two ends of described power transmission shaft fixedly arrange the 11 synchronous belt wheel between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor is by conveyer belt transmission the 11 synchronous belt wheel.
The described first storing mechanism is identical with the second storing mechanism structure, and they include hoistable platform assembly and storing assembly;
Described hoistable platform assembly comprises the 3rd mounting panel, second screw mandrel, the 5th motor; Described the 3rd mounting panel is fixed in frame, described the 5th motor is fixed in the 3rd mounting panel, described second screw mandrel is supported on the 3rd mounting panel by bearing pedestal, the 5th motor output end is connected with second screw mandrel by shaft coupling, the both sides of second screw mandrel arrange two the 4th line rails, two the 4th line rails also are fixed in the 3rd mounting panel, one side of mount pad is fixed second nut and the second nut both sides secured in parallel Four-slider, described Four-slider is flush-mounted on the 4th line rail, on described second screw mandrel second nut is installed;
Described storing assembly comprises mount pad, driver element and storing frame; Fixed drive unit on the mount pad is fixed the 5th slide block respectively on the described two storing frames, and the 5th slide block is flush-mounted on the 5th line rail, and described two driver elements are connected with two storing frames by connecting rod respectively; Described driver element comprises the 11 cylinder, the 12 cylinder, described the 11 cylinder, the opposing installation of the 12 cylinder, the tailpiece of the piston rod of described the 11 cylinder is fixed in mount pad by mounting blocks, and the tailpiece of the piston rod of described the 12 cylinder is connected with the storing frame by connecting rod.
Described first transport establishment is identical with the structure of second transport establishment, and they include horizontal feed assembly, jacking assembly and hold down assembly;
Described horizontal feed assembly comprises the 6th motor, the 5th connecting plate, the 9th synchronous pulley; The output shaft of described the 6th motor links to each other with decelerator, the decelerator two ends arrange two group of the 9th synchronous pulley, pass through contiguous block connection case between the synchronous band of two groups of synchronous pulleys nine, two group of the 5th connecting plate is fixed in the two ends of install bin, two the 7th slide block secured in parallel are in the outside of the 5th connecting plate, article two, the 7th line rail secured in parallel is on frame, and described the 7th slide block is flush-mounted in the 7th line rail;
Described jacking assembly comprises the 6th motor, the 8th synchronous pulley, vertical screw mandrel; The inboard of two the 5th connecting plates is supported a vertical screw mandrel respectively, nut is spirally connected on the vertical screw mandrel, the nut that is spirally connected is also fixed with the 4th connecting plate, slide block is installed on the 4th connecting plate and is slidingly connected with line rail on the 5th connecting plate, the 8th synchronous pulley is installed in the bottom of vertical screw mandrel, fix the 12 synchronous pulley on the output of the 6th motor, pass through band transmission synchronously between described the 12 synchronous pulley, two the 8th synchronous pulleys;
Described compressing unit comprises the 4th connecting plate, the 6th cylinder and the 7th cylinder; Fixing tray respectively on two group of the 4th connecting plate, the 6th cylinder and two group of the 6th line rail are fixed in tray, the output of described the 6th cylinder is fixed in second movable plate, two group of the 6th slide block of parallel installation on described second movable plate, described the 6th slide block is flush-mounted on the 6th line rail, on described second movable plate the 7th cylinder is arranged fixedly.
The described first dolly positioner is identical with the structure of the second dolly positioner, and they include guidance set and latch assembly, and guidance set is installed on the both sides of frame, and latch assembly is installed on the below of first transport establishment and second transport establishment;
Described guider comprises second directive wheel and mounting panel; Several second directive wheels are installed on a side of described mounting panel, and described mounting panel is fixed in frame;
Described locking device comprises the 8th cylinder, the tenth cylinder, bearing, centering block and the 6th connecting plate; Described the 6th connecting plate is installed on frame, described two groups of bearings are installed on the 6th connecting plate, one end of the 8th cylinder is movably connected on two bearings respectively, the other end of the 8th cylinder is movably connected on centering block, one end of described centering block is movably connected on bearing, and first pinch roller is installed in the both sides of described centering block, and the tenth cylinder is installed on the 6th connecting plate, the output of described the tenth cylinder connects connecting rod, and two second pinch rollers are installed in the both sides of described connecting rod.
The described first graphite boat detent mechanism is identical with the structure of the second graphite boat detent mechanism, and they include the 4th mounting panel, location-plate and bearing; Described the 4th mounting panel is installed on the frame, described location-plate is installed on a side of mounting panel four, locating piece is installed on the location-plate, two article of the 9th line rail of the parallel installation of an other side of described the 4th mounting panel, the 9th slide block is fixed on the bearing, and the 9th slide block is flush-mounted in described the 9th line rail, the 9th cylinder is fixed in bearing, the tailpiece of the piston rod of described the 9th cylinder is connected with the 4th mounting panel by contiguous block, the depression bar that is slidingly connected on the described bearing, mounting spring between depression bar and axle sleeve; Locating piece is installed in described the 4th mounting panel both sides, the 8th line rail and the 8th cylinder are fixed in a side of the 4th mounting panel, one side of the 7th connecting plate is installed the 8th slide block, described the 8th slide block is flush-mounted in the 8th line rail, one side of described the 7th connecting plate flexibly connects by the tailpiece of the piston rod of contiguous block and the 8th cylinder, and an end of described the 7th connecting plate is equipped with pressing plate.
Described slice conveying mechanism comprises base plate, the 8th motor, driving wheel and driven pulley; Described base plate is fixed in frame, base plate upper fixed biside plate, power transmission shaft is fixedly installed between return idler, the biside plate in the described biside plate outside, a driving wheel is fixed at the two ends of described power transmission shaft respectively, the output of described the 8th motor is connected with power transmission shaft by shaft coupling, transmit by conveyer belt between described driven pulley, the driving wheel, the conveyer belt below is backing plate fixedly.
The utility model can automation be realized will be without the silicon chip that PECVD the handles graphite boat of packing into automatically, simultaneously equipment can realize automatically from graphite boat, taking out through the silicon chip that PECVD handles and the silicon chip Carrier box of packing in, equipment is realized the full-automatic operation of feeding and discharging of silicon chip, improved production efficiency greatly, reduced labor strength, the high problem of silicon chip percentage of damage of having avoided loading and unloading manually and having caused has reduced production cost.
Description of drawings
Fig. 1 is overall diagram of the present utility model.
Fig. 2 is overall structure front view of the present utility model.
Fig. 3 is overall structure vertical view of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with specific embodiment.
As shown in the figure, the silicon chip automatic loading and unloading device that should be used for PECVD equipment, be rotatablely equipped with manipulator 10 in frame, at manipulator 10 sucker 11 is installed, frame in manipulator 10 outsides is equipped with the first silicon box conveying mechanism 1a, first 2a of hoistable platform mechanism, guiding mechanism 3, the first slice carrying mechanism 4a, first 5a of storing mechanism, first 6a of transport establishment, the first dolly detent mechanism 7a, the first graphite boat detent mechanism 8a and the first floor truck 9a, inner side is equipped with the second silicon box conveying mechanism 1b on frame, second 2b of hoistable platform mechanism, slice conveying mechanism 12, the second slice carrying mechanism 4b, second 5b of storing mechanism, second 6b of transport establishment, the second dolly detent mechanism 7b, the second graphite boat detent mechanism 8b and the second floor truck 9b; Described first 6a of transport establishment is installed on the place ahead of the first slice carrying mechanism 4a, and second 6b of transport establishment is installed on the place ahead of slice conveying mechanism 12, and manipulator 10 is installed on the frame between first 6a of transport establishment and second 6b of transport establishment.
The described first silicon box conveying mechanism 1a is identical with the second silicon box conveying mechanism 1b structure, they comprise first motor 1.1, supporting plate 1.2, be with 1.3 synchronously, first synchronous pulley 1.4, second synchronous pulley 1.5, rotation axis 1.6, the 3rd synchronous pulley 1.7 and the 4th synchronous pulley 1.8, output at first motor 1.1 is connected with the 4th synchronous pulley 1.8, all fixedly there is first synchronous pulley 1.4 at the two ends of rotation axis 1.6, the 3rd synchronous pulley 1.7 is fixedly arranged on the rotation axis 1.6 between two first synchronous pulleys 1.4, the 4th synchronous pulley 1.8 is with 1.3 to walk around first synchronous pulley 1.4 by being with 1.3 to connect the 3rd synchronous pulley 1.7 synchronously synchronously, supporting plate 1.2 and second synchronous pulley 1.5.
Described first 2a of hoistable platform mechanism is identical with second 2b of the hoistable platform mechanism structure, they comprise erection support 2.10, vertical lifting assembly and horizontal feed assembly, the horizontal feed assembly is fixed on the vertical hoistable platform assembly by first connecting plate 2.7, and vertical lifting assembly is fixed on the frame by erection support 2.10;
Described vertical lifting assembly comprises second motor 2.1, second motor 2.1 is installed on the erection support 2.10, the output of second motor 2.1 is connected by the end of shaft coupling with first leading screw 2.5, the two ends of described first leading screw 2.5 are rotatably installed on the erection support 2.10 by bearing pedestal, the parallel first line rail 2.2 that is equipped with on the erection support 2.10, in the first line rail 2.2, slidely connect first slide block 2.3, first nut, 2.4, the first slide blocks 2.3 and first nut 2.4 are installed on first leading screw 2.5 to be fixed on first connecting plate 2.7;
Described horizontal feed assembly comprises the 3rd motor 2.11, the output of the 3rd motor 2.11 is synchronous pulley fixedly, two the 5th synchronous pulleys 2.12 are fixed at the two ends of rotating shaft 2.13, the synchronous pulley of the output of the 3rd motor 2.11 is connected with the tenth synchronous pulley 2.16 in the rotating shaft 2.13 with 2.14 synchronously by second, second is with 2.14 to walk around the 6th synchronous pulley 2.15 and the 5th synchronous pulley 2.12 synchronously, rotating shaft 2.13 tops are provided with two blocks 2.9, the upper end of described first connecting plate 2.7 fixedly has the piston rod end of first cylinder, 2.6, the first cylinders 2.6 that hold-down head is installed.
Described guiding mechanism 3 comprises first mounting panel 3.4, located lateral assembly and longitudinally guiding assembly; The downside of first mounting panel 3.4 is equipped with the longitudinally guiding assembly, and the located lateral assembly is installed in the top of first mounting panel 3.4;
Described located lateral assembly comprises push pedal 3.2, the second line rail 3.6, the described second line rail 3.6 is fixed in first mounting panel 3.4, fix second slide block 3.7 in the push pedal 3.2, described second slide block 3.7 is flush-mounted on the second line rail 3.6, and the front end of first mounting panel 3.4 fixedly pushes away bar 3.3; The lateral adjustments unit is fixed on first mounting panel 3.4 by contiguous block, described lateral adjustments unit comprises second cylinder 3.1 and the 5th cylinder 3.16, described second cylinder 3.1 and the 5th cylinder 3.16 are opposing fixing, the piston rod of the 5th cylinder 3.16 is fixed on first mounting panel 3.4 by contiguous block, and the piston end of second cylinder 3.1 is fixing by connecting rod and push pedal 3.2.
Described longitudinally guiding assembly comprises the synchronous band delivery unit of first mounting panel, 3.4 belows and the longitudinal adjustment mechanism of first mounting panel, 3.4 tops; Described synchronous band delivery unit comprises two the 7th synchronous pulleys 3.10, two the 7th synchronous pulleys 3.10 are fixed on first mounting panel 3.4 by connecting axle, be with 3.13 to connect synchronously by the 3rd between described two the 7th synchronous pulleys 3.10, first mounting panel, 3.4 belows arrange the line rail, on first drive block 3.11 and second drive block 3.20 slide block is arranged fixedly respectively, slide block on described first drive block 3.11 and the 4th drive block 3.20 is flush-mounted in respectively on the line rail of first mounting panel, 3.4 belows setting, wherein a side of first drive block 3.11 fixedly has the first profile of tooth piece 3.17, tooth and the 3rd on the described first profile of tooth piece 3.17 is synchronously with the engagement of the tooth on 3.13, and profile of tooth piece 3.17 and the 3rd is with 3.13 and second drive block 3.12 fixing synchronously, a side fixedly has the second profile of tooth piece 3.18 on described the 4th drive block 3.20, tooth and the 3rd on the described second profile of tooth piece 3.18 is synchronously with the engagement of the tooth on 3.13, and the second profile of tooth piece 3.18 and the 3rd is with the 3.13 and the 5th drive block 3.19 fixing synchronously, described second drive block 3.12 is fixing by two connecting rods and the 3rd drive block 3.14, the lower end of connecting rod and second connecting plate 3.9 are fixing, fix a plurality of first directive wheels 3.8 on second connecting plate 3.9, described the 5th drive block 3.19 is connected with the 8th connecting plate 3.22 by two connecting rods, fixes a plurality of second directive wheels 3.21 on the 8th connecting plate 3.22; Described the 3rd drive block 3.14 is connected with vertical adjusting part; Described longitudinal adjustment mechanism comprises the 3rd cylinder 3.5, four-cylinder 3.15, described the 3rd cylinder 3.5 and four-cylinder 3.15 are opposing fixing, wherein the piston rod of four-cylinder 3.15 is fixed on first mounting panel 3.4 by contiguous block, and the 3rd cylinder 3.5 is connected with the 3rd drive block 3.14.
The described first slice carrying mechanism 4a comprises Rodless cylinder 4.2, the 4th motor 4.1 and second mounting panel 4.10, fixedly Rodless cylinder 4.2, the 3rd line rail 4.4 on described second mounting panel 4.10, Rodless cylinder 4.2 outputs are fixing by connecting plate and first movable plate 4.3; Fixedly there are the 3rd slide block 4.5, the three slide blocks 4.5 to be flush-mounted in described the 3rd line rail 4.4 on described first movable plate 4.3; Pass through the conveyer belt transmission between one side of described two group of the 3rd connecting plate 4.11, the front end both sides that base plate 4.9 both sides, first movable plate 4.3 are installed and the difference fixed idler whell of the connecting plate on Rodless cylinder 4.2 outputs and the roller; The output of described the 4th motor 4.1 is synchronous pulley fixedly, one side of base plate 4.9 is installed by two bearings seat supports power transmission shaft 4.12, the two ends of described power transmission shaft 4.12 fixedly arrange the 11 synchronous belt wheel 4.13 between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor 4.1 is by conveyer belt transmission the 11 synchronous belt wheel 4.13; Fix the 6th cylinder 4.7 between described the 3rd connecting plate 4.11, the output of described the 6th cylinder 4.7 and locating piece 4.6 is fixing, fixing slide block and be flush-mounted in the 3rd line rail 4.4 by slide block on the described locating piece 4.6.
The described second slice carrying mechanism 4b comprises Rodless cylinder 4.2, the 4th motor 4.1, fixedly Rodless cylinder 4.2, the 3rd line rail 4.4 on described second mounting panel 4.10, Rodless cylinder 4.2 outputs are fixing by connecting plate and first movable plate 4.3, on described first movable plate 4.3 the 3rd slide block 4.5 is arranged fixedly, described the 3rd slide block 4.5 is flush-mounted on described the 3rd line rail 4.4; One side of described two group of the 3rd connecting plate 4.11, base plate 4.9 both sides are installed, connecting plate on the front end both sides of first movable plate 4.3 and Rodless cylinder 4.2 outputs is fixed idler whell respectively, and pass through the conveyer belt transmission between the roller, the output of described the 4th motor 4.1 is synchronous pulley fixedly, one side of base plate 4.9 is installed by two bearings seat supports power transmission shaft 4.12, the two ends of described power transmission shaft 4.12 fixedly arrange the 11 synchronous belt wheel 4.13 between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor 4.1 is by conveyer belt transmission the 11 synchronous belt wheel 4.13.
Described first 5a of storing mechanism is identical with second 5b of the storing mechanism structure, and they include hoistable platform assembly and storing assembly;
Described hoistable platform assembly comprises the 3rd mounting panel 5.10, second screw mandrel 5.7, the 5th motor 5.2; Described the 3rd mounting panel 5.10 is fixed in frame, described the 5th motor 5.2 is fixed in the 3rd mounting panel 5.10, described second screw mandrel 5.7 is supported on the 3rd mounting panel 5.10 by bearing pedestal, the 5th motor 5.2 outputs are connected with second screw mandrel 5.7 by shaft coupling, the both sides of second screw mandrel 5.7 arrange two the 4th line rails 5.4, two the 4th line rails 5.4 also are fixed in the 3rd mounting panel 5.10, one side of mount pad 5.3 is fixed second nut 5.6, and second nut, 5.6 both sides secured in parallel Four-sliders 5.5, described Four-slider 5.5 is flush-mounted on the 4th line rail 5.4, on described second screw mandrel 5.7 second nut 5.6 is installed;
Described storing assembly comprises mount pad 5.3, driver element and storing frame 5.11; Fixed drive unit on the mount pad 5.3 is fixed the 5th slide block 5.9, the five slide blocks 5.9 respectively and is flush-mounted on the 5th line rail 5.8 on the described two storing frames 5.11, described two driver elements are connected with two storing frames 5.11 by connecting rod respectively; Described driver element comprises the 11 cylinder 5.1, the 12 cylinder 5.12, described the 11 cylinder 5.1, the 5.12 opposing installations of the 12 cylinder, the tailpiece of the piston rod of described the 11 cylinder 5.1 is fixed in mount pad 5.3 by mounting blocks, and the tailpiece of the piston rod of described the 12 cylinder 5.12 is connected with storing frame 5.11 by connecting rod.
Described first 6a of transport establishment is identical with the structure of second 6b of transport establishment, and they include horizontal feed assembly, jacking assembly and hold down assembly;
Described horizontal feed assembly comprises the 6th motor 6.11, the 5th connecting plate 6.6, the 9th synchronous pulley 6.10; The output shaft of described the 6th motor 6.11 links to each other with decelerator, the decelerator two ends arrange two group of the 9th synchronous pulley 6.10, pass through contiguous block connection case 6.14 between the synchronous band of two groups of synchronous pulleys 9 6.10, two group of the 5th connecting plate 6.6 is fixed in the two ends of install bin 6.14, two the 7th slide block 6.7 secured in parallel are in the outside of the 5th connecting plate 6.6, article two, the 7th line rail 6.8 secured in parallel are on frame, and described the 7th slide block 6.7 is flush-mounted in the 7th line rail 6.8;
Described jacking assembly comprises the 6th motor 6.11, the 8th synchronous pulley 6.9, vertical screw mandrel 6.16; The inboard of two the 5th connecting plates 6.6 is supported a vertical screw mandrel 6.16 respectively, nut is spirally connected on the vertical screw mandrel 6.16, the nut that is spirally connected is also fixing with the 4th connecting plate 6.5, slide block is installed on the 4th connecting plate 6.5 and is slidingly connected with line rail on the 5th connecting plate 6.6, the 8th synchronous pulley 6.9 is installed in the bottom of vertical screw mandrel 6.16, fix the 12 synchronous pulley 6.15 on the output of the 6th motor 6.11, pass through band transmission synchronously between described the 12 synchronous pulley 6.15, two the 8th synchronous pulleys 6.9;
Described compressing unit comprises the 4th connecting plate 6.5, the 6th cylinder 6.3 and the 7th cylinder 6.1; Fixing tray 6.4 respectively on two group of the 4th connecting plate 6.5, the 6th cylinder 6.3 and two group of the 6th line rail 6.13 are fixed in tray 6.4, the output of described the 6th cylinder 6.3 is fixed in second movable plate 6.17, two group of the 6th slide block 6.2 of parallel installation on described second movable plate 6.17, described the 6th slide block 6.2 is flush-mounted on the 6th line rail 6.13, on described second movable plate 6.17 the 7th cylinder 6.1 is arranged fixedly.
The described first dolly positioner 7a is identical with the structure of the second dolly positioner 7b, and they include guidance set and latch assembly, and guidance set is installed on the both sides of frame, and latch assembly is installed on the below of first 6a of transport establishment and second 6b of transport establishment;
Described guider comprises second directive wheel 7.1 and the mounting panel; Several second directive wheels 7.1 are installed on a side of described mounting panel, and described mounting panel is fixed in frame;
Described locking device comprises the 8th cylinder 7.3, the tenth cylinder 7.7, bearing 7.6, centering block 7.5 and the 6th connecting plate 7.2; Described the 6th connecting plate 7.2 is installed on frame, described two groups of bearings 7.6 are installed on the 6th connecting plate 7.2, one end of the 8th cylinder 7.3 is movably connected on two bearings 7.6 respectively, the other end of the 8th cylinder 7.3 is movably connected on centering block 7.5, one end of described centering block 7.5 is movably connected on bearing 7.6, first pinch roller 7.4 is installed in the both sides of described centering block 7.5, the tenth cylinder 7.7 is installed on the 6th connecting plate 7.2, the output of described the tenth cylinder 7.7 connects connecting rod 7.8, and two second pinch rollers 7.9 are installed in the both sides of described connecting rod 7.8.
The described first graphite boat detent mechanism 8a is identical with the structure of the second graphite boat detent mechanism 8b, and they include the 4th mounting panel 8.11, location-plate 8.1 and bearing 8.8; Described the 4th mounting panel 8.11 is installed on the frame, described location-plate 8.1 is installed on a side of mounting panel 4 8.11, on the location-plate 8.1 locating piece is installed, two article of the 9th line rail 8.6 of the parallel installation of an other side of described the 4th mounting panel 8.11, the 9th slide block 8.7 is fixed on the bearing 8.8, the 9th slide block 8.7 is flush-mounted in described the 9th line rail 8.6, the 9th cylinder 8.10 is fixed in bearing 8.8, the tailpiece of the piston rod of described the 9th cylinder 8.10 is connected with the 4th mounting panel 8.11 by contiguous block, the depression bar 8.9 that is slidingly connected on the described bearing 8.8, mounting spring between depression bar 8.9 and axle sleeve; Locating piece 8.12 is installed in described the 4th mounting panel 8.11 both sides, the 8th line rail 8.3 and the 8th cylinder 8.5 are fixed in a side of the 4th mounting panel 8.11, one side of the 7th connecting plate 8.13 is installed the 8th slide block 8.4, described the 8th slide block 8.4 is flush-mounted in the 8th line rail 8.3, one side of described the 7th connecting plate 8.13 flexibly connects by the tailpiece of the piston rod of contiguous block and the 8th cylinder 8.5, and an end of described the 7th connecting plate 8.13 is equipped with pressing plate 8.2.
Described slice conveying mechanism 12 comprises base plate 12.4, the 8th motor 12.1, driving wheel 12.2 and driven pulley 12.3; Described base plate 12.4 is fixed in frame, base plate 12.4 upper fixed biside plates, power transmission shaft 12.5 is fixedly installed in the described biside plate outside between return idler 12.3, the biside plate, a driving wheel 12.2 is fixed at the two ends of described power transmission shaft 12.5 respectively, the output of described the 8th motor 12.1 is connected with power transmission shaft 12.5 by shaft coupling, transmit by conveyer belt between described driven pulley 12.3, the driving wheel 12.2, the conveyer belt below is backing plate fixedly.
In order better to improve silicon chip loading and unloading efficient, this two overlaps mechanism and is parallel installation the utility model with the first silicon box conveying mechanism 1a, first 2a of hoistable platform mechanism, the first slice carrying mechanism 4a and first 5a of storing mechanism and the second silicon box conveying mechanism 1b, second 2b of hoistable platform mechanism, the second slice conveying mechanism 12, slice carrying mechanism 4b and the 5b of storing mechanism.
During work, first motor, 1.1 rotation directions on the twice conveying mechanism are opposite up and down, wherein the first silicon box conveying mechanism 1a realizes filling the silicon chip magazine of handling without PECVD and is delivered to first 2a of hoistable platform mechanism, treat that silicon chip in the silicon box all takes out after, empty silicon chip magazine is transported out;
The first silicon box conveying mechanism 1b realizes empty silicon chip magazine is delivered to the second hoistable platform 2b, and treating will expire the silicon chip magazine and transfer out after PECVD processing silicon chip is filled the silicon chip magazine.
During work, first 2a of hoistable platform mechanism will fill the upwards lifting of silicon box of handling silicon chip without PECVD, the height of undermost silicon chip arrives predetermined slice position in silicon box, the first slice carrying mechanism 4a takes out the silicon chip in the silicon chip magazine from bottom to top one by one, after treating that silicon chip in the silicon chip magazine is taken out one by one, first 2a of hoistable platform mechanism is delivered to empty silicon chip magazine on the first silicon box conveying mechanism 1a.
During work, second 2b of hoistable platform mechanism descends empty silicon box downwards, toply in silicon box wait to put the silicon chip place and arrive predetermined slice position, the second slice carrying mechanism 4b will be through the silicon chip that PECVD the handles sky silicon chip magazine of packing into one by one from top to down, after treating that sky silicon chip magazine is filled, second 2b of hoistable platform mechanism will expire the silicon chip magazine and be delivered on the silicon box pipeline device 1b.
During work, the first slice carrying mechanism 4a is by Rodless cylinder 4.2, the action of the 4th motor 4.1, and the silicon wafer horizontal in the silicon chip magazine on first 2a of hoistable platform mechanism is delivered in the storing frame 5.11 on first 5a of storing mechanism.
During work, the second slice carrying mechanism 4b is by Rodless cylinder 4.2, the action of the 4th motor 4.1, and the silicon wafer horizontal on the slice conveying mechanism 12 is delivered in the empty silicon chip magazine on the second hoistable platform 2b.
Second 5b of storing mechanism stores the silicon chip of handling through PECVD.
During work, go out piece conveying device and realize the silicon chip in the storing frame 5.11 on second 5b of storing mechanism is transferred out.
During work, the 6th motor 6.11 on first 6a of transport establishment, vertical lines module 6.16 control hold-down mechanisms move up and down, the 7th motor 6.12, the 7th slide block 6.7, the 7th line rail 6.8 control hold-down mechanisms move forward and backward, and the cylinder action on the hold-down mechanism realizes clamping the graphite boat on the floor truck.
For silicon chip better is delivered on first 5a of storing mechanism from first 2a of hoistable platform mechanism, the utility model is at the first slice carrying mechanism 4a upper fixed guiding mechanism 3.
During work, when the first slice carrying mechanism 4a will pack storing frame 5.11 among first 5a of storing mechanism into without the silicon chip that PECVD handles, guiding mechanism 3 actions are carried out longitudinally guiding to the silicon chip on the first slice carrying mechanism 4a, after the storing frame 5.11 among first 5a of storing mechanism was filled silicon chip, guiding mechanism 3 actions were carried out located lateral to the silicon chip of storing frame 5.11.
When the first floor truck 9a or the second floor truck 9b push below first 6a of transport establishment or second 6b of transport establishment, in order to guarantee the first floor truck 9a or the second floor truck 9b stand unanimity, the first dolly detent mechanism 7a, the second dolly detent mechanism 7b are installed on the utility model frame, during work, floor truck pushes under first 6a of transport establishment along second directive wheel 7.1 of both sides, and the tenth cylinder 7.7,7.3 actions of the 8th cylinder clamp the first floor truck 9a.
In order to guarantee that graphite boat accurately locatees, the utility model is installed the first graphite boat detent mechanism 8a in first 6a of transport establishment, one side, and second 6b of transport establishment, one side is installed the second graphite boat detent mechanism 8b.
During work, after first 6a of transport establishment, second 6b of transport establishment are carried to graphite boat respectively the first graphite boat detent mechanism 8a, the second graphite boat detent mechanism 8b, the 9th cylinder 8.10 on the first graphite boat detent mechanism 8a, the second graphite boat detent mechanism 8b, 8.5 actions of the 8th cylinder realize the location graphite boat.
Although by reference to the accompanying drawings preferred embodiment of the present utility model is described above; but the utility model is not limited to above-mentioned embodiment; above-mentioned embodiment only is schematic; be not restrictive; those of ordinary skill in the art is under enlightenment of the present utility model; under the scope situation that does not break away from the protection of the utility model aim and claim, can also make the concrete conversion of a lot of forms, these all belong within the protection range of the present utility model.
Claims (10)
1. silicon chip automatic loading and unloading device that is used for PECVD equipment, it is characterized in that: be rotatablely equipped with manipulator (10) in frame, at manipulator (10) sucker (11) is installed, frame in manipulator (10) outside is equipped with the first silicon box conveying mechanism (1a), the first hoistable platform mechanism (2a), guiding mechanism (3), the first slice carrying mechanism (4a), the first storing mechanism (5a), first transport establishment (6a), the first dolly detent mechanism (7a), the first graphite boat detent mechanism (8a) and first floor truck (9a), inner side is equipped with the second silicon box conveying mechanism (1b) on frame, the second hoistable platform mechanism (2b), slice conveying mechanism (12), the second slice carrying mechanism (4b), the second storing mechanism (5b), second transport establishment (6b), the second dolly detent mechanism (7b), the second graphite boat detent mechanism (8b) and second floor truck (9b); Described first transport establishment (6a) is installed on the place ahead of the first slice carrying mechanism (4a), second transport establishment (6b) is installed on the place ahead of slice conveying mechanism (12), and manipulator (10) is installed on the frame between first transport establishment (6a) and second transport establishment (6b).
2. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: the described first silicon box conveying mechanism (1a) is identical with second silicon box conveying mechanism (1b) structure, they comprise first motor (1.1), supporting plate (1.2), be with synchronously (1.3), first synchronous pulley (1.4), second synchronous pulley (1.5), rotation axis (1.6), the 3rd synchronous pulley (1.7) and the 4th synchronous pulley (1.8), output at first motor (1.1) is connected with the 4th synchronous pulley (1.8), all fixedly there is first synchronous pulley (1.4) at the two ends of rotation axis (1.6), rotation axis (1.6) between two first synchronous pulleys (1.4) is gone up fixedly the 3rd synchronous pulley (1.7), the 4th synchronous pulley (1.8) is by the 3rd synchronous pulley (1.7) of band (1.3) connection synchronously, and band (1.3) is walked around first synchronous pulley (1.4) synchronously, supporting plate (1.2) and second synchronous pulley (1.5).
3. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: the described first hoistable platform mechanism (2a) is identical with second hoistable platform mechanism (2b) structure, they comprise erection support (2.10), vertical lifting assembly and horizontal feed assembly, the horizontal feed assembly is fixed on the vertical hoistable platform assembly by first connecting plate (2.7), and vertical lifting assembly is fixed on the frame by erection support (2.10);
Described vertical lifting assembly comprises second motor (2.1), second motor (2.1) is installed on the erection support (2.10), the output of second motor (2.1) is connected by the end of shaft coupling with first leading screw (2.5), the two ends of described first leading screw (2.5) are rotatably installed on the erection support (2.10) by bearing pedestal, erection support (2.10) is gone up the parallel first line rail (2.2) that is equipped with, in the first line rail (2.2), slidely connect first slide block (2.3), first nut (2.4) is installed on first leading screw (2.5), and first slide block (2.3) and first nut (2.4) are fixed on first connecting plate (2.7);
Described horizontal feed assembly comprises the 3rd motor (2.11), the output of the 3rd motor (2.11) is synchronous pulley fixedly, two the 5th synchronous pulleys (2.12) are fixed at the two ends of rotating shaft (2.13), the synchronous pulley of the output of the 3rd motor (2.11) by second synchronously band (2.14) be connected with the tenth synchronous pulley (2.16) in the rotating shaft (2.13), second is with (2.14) to walk around the 6th synchronous pulley (2.15) and the 5th synchronous pulley (2.12) synchronously, rotating shaft (2.13) top is provided with two blocks (2.9), fixedly there is first cylinder (2.6) upper end of described first connecting plate (2.7), and the piston rod end of first cylinder (2.6) is equipped with hold-down head.
4. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: described guiding mechanism 3 comprises first mounting panel (3.4), located lateral assembly and longitudinally guiding assembly; The downside of first mounting panel (3.4) is equipped with the longitudinally guiding assembly, and the located lateral assembly is installed in the top of first mounting panel (3.4);
Described located lateral assembly comprises push pedal (3.2), the second line rail (3.6), the described second line rail (3.6) is fixed in first mounting panel (3.4), fix second slide block (3.7) in the push pedal (3.2), described second slide block (3.7) is flush-mounted on the second line rail (3.6), and the front end of first mounting panel (3.4) fixedly pushes away bar (3.3); The lateral adjustments unit is fixed on first mounting panel (3.4) by contiguous block, described lateral adjustments unit comprises second cylinder (3.1) and the 5th cylinder (3.16), described second cylinder (3.1) is opposing fixing with the 5th cylinder (3.16), the piston rod of the 5th cylinder (3.16) is fixed on first mounting panel (3.4) by contiguous block, and the piston end of second cylinder (3.1) is fixing by connecting rod and push pedal (3.2);
Described longitudinally guiding assembly comprises the synchronous band delivery unit of first mounting panel (3.4) below and the longitudinal adjustment mechanism of first mounting panel (3.4) top; Described synchronous band delivery unit comprises two the 7th synchronous pulleys (3.10), two the 7th synchronous pulleys (3.10) are fixed on first mounting panel (3.4) by connecting axle, be with (3.13) to connect synchronously by the 3rd between described two the 7th synchronous pulleys (3.10), first mounting panel (3.4) below arranges the line rail, on first drive block (3.11) and second drive block (3.20) slide block is arranged fixedly respectively, slide block on described first drive block (3.11) and the 4th drive block (3.20) is flush-mounted in respectively on the line rail of first mounting panel (3.4) below setting, wherein a side of first drive block (3.11) fixedly has the first profile of tooth piece (3.17), tooth and the 3rd on the described first profile of tooth piece (3.17) is with the tooth engagement on (3.13) synchronously, and profile of tooth piece (3.17) and the 3rd is with (3.13) and second drive block (3.12) fixing synchronously, the last side of described the 4th drive block (3.20) fixedly has the second profile of tooth piece (3.18), tooth and the 3rd on the described second profile of tooth piece (3.18) is with the tooth engagement on (3.13) synchronously, and the second profile of tooth piece (3.18) and the 3rd is with (3.13) and the 5th drive block (3.19) fixing synchronously, described second drive block (3.12) is fixing by two connecting rods and the 3rd drive block (3.14), the lower end of connecting rod and second connecting plate (3.9) are fixing, second connecting plate (3.9) is gone up fixing a plurality of first directive wheels (3.8), described the 5th drive block (3.19) is connected with the 8th connecting plate (3.22) by two connecting rods, and the 8th connecting plate (3.22) is gone up fixing a plurality of second directive wheels (3.21); Described the 3rd drive block (3.14) is connected with vertical adjusting part; Described longitudinal adjustment mechanism comprises the 3rd cylinder (3.5), four-cylinder (3.15), described the 3rd cylinder (3.5) is opposing fixing with four-cylinder (3.15), wherein the piston rod of four-cylinder (3.15) is fixed on first mounting panel (3.4) by contiguous block, and the 3rd cylinder (3.5) is connected with the 3rd drive block (3.14).
5. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: the described first slice carrying mechanism 4a comprises Rodless cylinder (4.2), the 4th motor (4.1) and second mounting panel (4.10), described second mounting panel (4.10) is gone up fixedly Rodless cylinder (4.2), the 3rd line rail (4.4), and Rodless cylinder (4.2) output is fixing by connecting plate and first movable plate (4.3); Described first movable plate (4.3) is gone up fixedly has the 3rd slide block (4.5), the 3rd slide block (4.5) to be flush-mounted in described the 3rd line rail (4.4); Pass through the conveyer belt transmission between one side of described two group of the 3rd connecting plate (4.11), the front end both sides that base plate (4.9) both sides, first movable plate (4.3) are installed and the difference fixed idler whell of the connecting plate on Rodless cylinder (4.2) output and the roller; The output of described the 4th motor (4.1) is synchronous pulley fixedly, one side of base plate (4.9) is installed by two bearings seat supports power transmission shaft (4.12), the two ends of described power transmission shaft (4.12) fixedly arrange the 11 synchronous belt wheel (4.13) between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor (4.1) is by conveyer belt transmission the 11 synchronous belt wheel (4.13); Fix the 6th cylinder (4.7) between described the 3rd connecting plate (4.11), the output of described the 6th cylinder (4.7) and locating piece (4.6) are fixing, and described locating piece (4.6) is gone up fixedly slide block and is flush-mounted in the 3rd line rail (4.4) by slide block;
The described second slice carrying mechanism 4b comprises Rodless cylinder (4.2), the 4th motor (4.1), described second mounting panel (4.10) is gone up fixedly Rodless cylinder (4.2), the 3rd line rail (4.4), Rodless cylinder (4.2) output is fixing by connecting plate and first movable plate (4.3), described first movable plate (4.3) is gone up fixedly has the 3rd slide block (4.5), described the 3rd slide block (4.5) to be flush-mounted on described the 3rd line rail (4.4); One side of described two group of the 3rd connecting plate (4.11), base plate (4.9) both sides are installed, connecting plate on the front end both sides of first movable plate (4.3) and Rodless cylinder (4.2) output is fixed idler whell respectively, and pass through the conveyer belt transmission between the roller, the output of described the 4th motor (4.1) is synchronous pulley fixedly, one side of base plate (4.9) is installed by two bearings seat supports power transmission shaft (4.12), the two ends of described power transmission shaft (4.12) fixedly arrange the 11 synchronous belt wheel (4.13) between synchronous pulley and two synchronous pulleys, and the synchronous pulley of the output of described the 4th motor (4.1) is by conveyer belt transmission the 11 synchronous belt wheel (4.13).
6. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: the described first storing mechanism (5a) is identical with second storing mechanism (5b) structure, and they include hoistable platform assembly and storing assembly;
Described hoistable platform assembly comprises the 3rd mounting panel (5.10), second screw mandrel (5.7), the 5th motor (5.2); Described the 3rd mounting panel (5.10) is fixed in frame, described the 5th motor (5.2) is fixed in the 3rd mounting panel (5.10), described second screw mandrel (5.7) is supported on the 3rd mounting panel (5.10) by bearing pedestal, the 5th motor (5.2) output is connected with second screw mandrel (5.7) by shaft coupling, the both sides of second screw mandrel (5.7) arrange two the 4th line rails (5.4), two the 4th line rails (5.4) also are fixed in the 3rd mounting panel (5.10), one side of mount pad (5.3) is fixed second nut (5.6), and second nut (5.6) both sides secured in parallel Four-sliders (5.5), described Four-slider (5.5) is flush-mounted on the 4th line rail (5.4), and second nut (5.6) is installed on described second screw mandrel (5.7);
Described storing assembly comprises mount pad (5.3), driver element and storing frame (5.11); Mount pad (5.3) is gone up the fixed drive unit, fix the 5th slide block (5.9) respectively on the described two storing frames (5.11), the 5th slide block (5.9) is flush-mounted on the 5th line rail (5.8), and described two driver elements are connected with two storing frames (5.11) by connecting rod respectively; Described driver element comprises the 11 cylinder (5.1), the 12 cylinder (5.12), described the 11 cylinder (5.1), the opposing installation of the 12 cylinder (5.12), the tailpiece of the piston rod of described the 11 cylinder (5.1) is fixed in mount pad (5.3) by mounting blocks, and the tailpiece of the piston rod of described the 12 cylinder (5.12) is connected with storing frame (5.11) by connecting rod.
7. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: described first transport establishment (6a) is identical with the structure of second transport establishment (6b), and they include horizontal feed assembly, jacking assembly and hold down assembly;
Described horizontal feed assembly comprises the 6th motor (6.11), the 5th connecting plate (6.6), the 9th synchronous pulley (6.10); The output shaft of described the 6th motor (6.11) links to each other with decelerator, the decelerator two ends arrange two group of the 9th synchronous pulley (6.10), pass through contiguous block connection case (6.14) between the synchronous band of two groups of synchronous pulleys nine (6.10), two group of the 5th connecting plate (6.6) is fixed in the two ends of install bin (6.14), two the 7th slide blocks (6.7) secured in parallel is in the outside of the 5th connecting plate (6.6), article two, the 7th line rail (6.8) secured in parallel is on frame, and described the 7th slide block (6.7) is flush-mounted in the 7th line rail (6.8);
Described jacking assembly comprises the 6th motor (6.11), the 8th synchronous pulley (6.9), vertical screw mandrel (6.16); The inboard of two the 5th connecting plates (6.6) is supported a vertical screw mandrel (6.16) respectively, nut is spirally connected on the vertical screw mandrel (6.16), the nut that is spirally connected is also fixing with the 4th connecting plate (6.5), the 4th connecting plate (6.5) go up to be installed slide block and is slidingly connected with line rail on the 5th connecting plate (6.6), the 8th synchronous pulley (6.9) is installed in the bottom of vertical screw mandrel (6.16), fix the 12 synchronous pulley (6.15) on the output of the 6th motor (6.11), described the 12 synchronous pulley (6.15), pass through band transmission synchronously between two the 8th synchronous pulleys (6.9);
Described compressing unit comprises the 4th connecting plate (6.5), the 6th cylinder (6.3) and the 7th cylinder (6.1); Fixing tray (6.4) respectively on two group of the 4th connecting plate (6.5), the 6th cylinder (6.3) and two group of the 6th line rail (6.13) are fixed in tray (6.4), the output of described the 6th cylinder (6.3) is fixed in second movable plate (6.17), described second movable plate (6.17) is gone up two group of the 6th slide block of parallel installation (6.2), described the 6th slide block (6.2) is flush-mounted on the 6th line rail (6.13), and described second movable plate (6.17) is gone up fixedly the 7th cylinder (6.1).
8. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: the described first dolly positioner (7a) is identical with the structure of the second dolly positioner (7b), they include guidance set and latch assembly, guidance set is installed on the both sides of frame, and latch assembly is installed on the below of first transport establishment (6a) and second transport establishment (6b);
Described guider comprises second directive wheel (7.1) and mounting panel; Several second directive wheels (7.1) are installed on a side of described mounting panel, and described mounting panel is fixed in frame;
Described locking device comprises the 8th cylinder (7.3), the tenth cylinder (7.7), bearing (7.6), centering block (7.5) and the 6th connecting plate (7.2); Described the 6th connecting plate (7.2) is installed on frame, described two groups of bearings (7.6) are installed on the 6th connecting plate (7.2), one end of the 8th cylinder (7.3) is movably connected on two bearings (7.6) respectively, the other end of the 8th cylinder (7.3) is movably connected on centering block (7.5), one end of described centering block (7.5) is movably connected on bearing (7.6), first pinch roller (7.4) is installed in the both sides of described centering block (7.5), the tenth cylinder (7.7) is installed on the 6th connecting plate (7.2), the output of described the tenth cylinder (7.7) connects connecting rod (7.8), and two second pinch rollers (7.9) are installed in the both sides of described connecting rod (7.8).
9. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1, it is characterized in that: the described first graphite boat detent mechanism (8a) is identical with the structure of the second graphite boat detent mechanism (8b), and they include the 4th mounting panel (8.11), location-plate (8.1) and bearing (8.8); Described the 4th mounting panel (8.11) is installed on the frame, described location-plate (8.1) is installed on a side of mounting panel four (8.11), location-plate (8.1) is gone up locating piece is installed, an other side two article of the 9th line rail of parallel installation (8.6) of described the 4th mounting panel (8.11), the 9th slide block (8.7) is fixed on the bearing (8.8), the 9th slide block (8.7) is flush-mounted in described the 9th line rail (8.6), the 9th cylinder (8.10) is fixed in bearing (8.8), the tailpiece of the piston rod of described the 9th cylinder (8.10) is connected with the 4th mounting panel (8.11) by contiguous block, the depression bar (8.9) that is slidingly connected on the described bearing (8.8), mounting spring between depression bar (8.9) and axle sleeve; Locating piece (8.12) is installed in described the 4th mounting panel (8.11) both sides, the 8th line rail (8.3) and the 8th cylinder (8.5) are fixed in a side of the 4th mounting panel (8.11), one side of the 7th connecting plate (8.13) is installed the 8th slide block (8.4), described the 8th slide block (8.4) is flush-mounted in the 8th line rail (8.3), one side of described the 7th connecting plate (8.13) flexibly connects by the tailpiece of the piston rod of contiguous block and the 8th cylinder (8.5), and an end of described the 7th connecting plate (8.13) is equipped with pressing plate (8.2).
10. the silicon chip automatic loading and unloading device for PECVD equipment as claimed in claim 1 is characterized in that: described slice conveying mechanism (12) comprises base plate (12.4), the 8th motor (12.1), driving wheel (12.2) and driven pulley (12.3); Described base plate (12.4) is fixed in frame, base plate (12.4) upper fixed biside plate, power transmission shaft (12.5) is fixedly installed in the described biside plate outside between return idler (12.3), the biside plate, a driving wheel (12.2) is fixed at the two ends of described power transmission shaft (12.5) respectively, the output of described the 8th motor (12.1) is connected with power transmission shaft (12.5) by shaft coupling, transmit by conveyer belt between described driven pulley (12.3), the driving wheel (12.2), the conveyer belt below is backing plate fixedly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220734043 CN203055881U (en) | 2012-12-27 | 2012-12-27 | Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220734043 CN203055881U (en) | 2012-12-27 | 2012-12-27 | Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203055881U true CN203055881U (en) | 2013-07-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220734043 Withdrawn - After Issue CN203055881U (en) | 2012-12-27 | 2012-12-27 | Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device |
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| CN (1) | CN203055881U (en) |
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| CN103035555A (en) * | 2012-12-27 | 2013-04-10 | 无锡先导自动化设备股份有限公司 | Silicon wafer automatic feeding and discharging device for plasma enhanced chemical vapor deposition (PECVD) device |
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| CN107990730A (en) * | 2017-11-28 | 2018-05-04 | 乐山新天源太阳能科技有限公司 | Blanking device for silicon wafer sintering stove |
| CN108447817A (en) * | 2018-03-20 | 2018-08-24 | 君泰创新（北京）科技有限公司 | Silicon chip lifting apparatus |
| CN111469901A (en) * | 2020-05-15 | 2020-07-31 | 无锡奇科穆德机电科技有限公司 | Roll-like electric core transport platform truck |
| CN111628046A (en) * | 2020-05-28 | 2020-09-04 | 湖南红太阳光电科技有限公司 | Feeding and discharging method for PECVD surface coating |
| CN112873570A (en) * | 2021-01-07 | 2021-06-01 | 广州钧天自动化科技有限责任公司 | Full-automatic machining equipment and machining method for graphite clamping flap |
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2012
- 2012-12-27 CN CN 201220734043 patent/CN203055881U/en not_active Withdrawn - After Issue
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