CN108447817A - Silicon chip lifting apparatus - Google Patents

Abstract

The invention discloses a kind of silicon chip lifting apparatus, including bottom frame, slipping block, the first lifting assembly, bracket and the second lifting assembly；Slipping block is slidably mounted on bottom frame；And it can in X direction be moved on bottom frame；First lifting assembly is slidably mounted on slipping block；And can be moved in slipping block upper edge Y-direction, the first lifting assembly includes the first lifter plate that can be moved in the first lifting assembly upper edge Z-direction；The first end of bracket is fixedly connected with the first lifter plate, and second end extends in X direction；Second lifting assembly is fixed on bottom frame, and the second lifter plate is supported in the second end of bracket, and including can the second lifter plate moved along Z-direction synchronous with the first lifter plate.In the present invention, the both ends of bracket are supported by the first and second lifting assemblies respectively, and the first and second lifting assemblies are run simultaneously, under the premise of the both ends synchronizing moving for ensureing bracket, the supporting point for increasing bracket avoids the shaking in bracket moving process, increases pallet stationarity.

Description

Silicon Wafer Lifting Device

technical field

The invention relates to the technical field of solar cells, in particular to a silicon wafer lifting device.

Background technique

Solar cells are recognized as one of the clean energy sources that can be applied on a large scale in the future. With the continuous reduction of energy sources and the use of other energy sources will bring immeasurable environmental pollution, people are increasingly calling for clean energy sources. Along with the strengthening of national environmental protection awareness, my country also strongly supports this power generation method, especially for high-efficiency batteries, which has been increasing year by year, and high-efficiency heterojunction batteries, as the forefront of high-efficiency battery power generation efficiency, occupy a large market in the field of high-efficiency batteries. proportion.

The most critical process and equipment in the preparation of this type of battery is the PECVD preparation process and equipment, and the transfer of silicon wafers is an important part of this process, that is, the original silicon wafer is transferred to the PECVD chamber by the transfer device, and then passed through The transfer mechanism drives the tray with the original silicon wafers arranged into the PECVD chamber. Since the bracket corresponding to the pallet is about 2.5 meters, and its size is strictly controlled, due to its own rigidity and length, it is easy to cause shaking when the transfer mechanism is lifted and lowered, so how to realize the stable lifting of the pallet is a pendulum A big problem facing designers.

Contents of the invention

The purpose of the present invention is to provide a device for lifting silicon wafers to solve the above problems, to ensure that the position of the silicon wafers on the tray is accurate, not to be affected by shaking and swinging during lifting and conveying, and to ensure accurate conveyance of the silicon wafers.

The silicon wafer lifting device provided by the present invention includes:

Bottom frame;

a sliding block, the sliding block is slidably installed on the bottom frame; and the sliding block can move along the X direction on the bottom frame;

The first lifting component is slidably installed on the sliding block; and the first lifting component can move along the Y direction on the sliding block; the first lifting component includes a first lifting plate, and the first lifting component can move along the Y direction on the sliding block; A lifting plate can move along the Z direction on the first lifting assembly;

a bracket, the first end of the bracket is fixedly connected to the first lifting plate, and the second end of the bracket extends along the X direction;

The second lifting assembly is fixed on the bottom frame, the second lifting assembly includes a second lifting plate, the second lifting plate supports the second end of the bracket, and the second lifting plate can The lifting assembly moves along the Z direction, and the movement of the second lifting plate is synchronized with that of the first lifting plate.

In the silicon wafer lifting device described above, preferably, the bottom frame is provided with two first rails parallel to each other and along the X direction; both ends of the sliding block are slidably installed on the two first rails on a track;

The sliding block is provided with a second track along the Y direction; the first lifting assembly is slidably installed on the second track.

In the silicon wafer lifting device described above, preferably, the first lifting assembly further includes a first mounting plate; the first mounting plate is slidably installed on the second rail;

The first mounting plate is provided with a third track along the Z direction, and the first lifting plate is slidably installed on the third track.

In the silicon wafer lifting device described above, preferably, the first lifting assembly further includes a first driving device, the first driving device is arranged on the first mounting plate, and the first driving device The device is in transmission connection with the first lifting plate, and is used to drive the first lifting plate to slide along the third track.

In the silicon wafer lifting device as described above, preferably, the second lifting assembly further includes a second installation plate, the second installation plate is arranged on the bottom frame, and the second installation plate is arranged There is a fourth track along the Z direction, and the second lifting plate is slidably installed on the fourth track.

In the silicon wafer lifting device as described above, preferably, the second lifting assembly further includes a second driving device, the second driving device is arranged on the second mounting plate, and the second driving device The device is in transmission connection with the second lifting plate, and is used to drive the second lifting plate to slide along the fourth track.

In the silicon wafer lifting device described above, preferably, the second lifting plate includes a connecting plate and a supporting plate, the connecting plate and the supporting plate are fixedly connected in an L shape, and the connecting plate is connected to the supporting plate The fourth rail is slidably connected, and a guide wheel is arranged on the support plate, and the guide wheel supports the second end of the bracket.

The silicon wafer lifting device described above, wherein, preferably, the bracket includes a fixing plate and a lifting plate, the fixing plate is fixedly connected to the lifting plate in an L shape, and the fixing plate is connected to the lifting plate The first lifting plate is fixedly connected, and the lifting plate extends along the X direction.

In the silicon wafer lifting device described above, preferably, a U-shaped groove is provided on the lifting plate.

The silicon wafer lifting device described above preferably further includes a sliding driving device connected to the bottom frame for driving the sliding block to slide along the X direction.

The silicon wafer lifting device provided by the present invention includes a bottom frame, a sliding block, a first lifting assembly, a bracket and a second lifting assembly; wherein, the sliding block is slidably installed on the bottom frame; Move in the X direction; the first lifting assembly is slidably installed on the sliding block; and can move in the Y direction on the sliding block, and the first lifting assembly includes a first lifting plate that can move in the Z direction on the first lifting assembly; The first end of the bracket is fixedly connected with the first lifting plate, and the second end extends along the X direction; the second lifting assembly is fixed on the bottom frame, and the second lifting plate is supported on the second end of the bracket, and includes a The first lifting plate synchronizes the second lifting plate moving in the Z direction. In the present invention, the two ends of the bracket are respectively supported by the first and second lifting components, and the first and second lifting components operate synchronously, and on the premise of ensuring that the two ends of the bracket move synchronously, the supporting points of the bracket are increased, Avoid shaking during the carriage movement and increase the stability of the pallet.

Description of drawings

Fig. 1 is a schematic structural view of a silicon wafer lifting device provided by an embodiment of the present invention;

2 is a partial enlarged view of the silicon wafer lifting device provided by the embodiment of the present invention;

3 is a schematic structural view of the second lifting assembly of the silicon wafer lifting device provided by the embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a bracket of a silicon wafer lifting device provided by an embodiment of the present invention.

Explanation of reference signs:

10-bottom frame 11-first track 20-sliding block 21-second track

30-the first lifting assembly 31-the first lifting plate 32-the first mounting plate 321-the third rail

33-the first driving device 331-the first lead screw 40-bracket 41-fixed plate

42-lifting plate 421-U-shaped groove 50-second lifting assembly 51-second lifting plate

511-connecting plate 512-supporting plate 513-guide wheel 52-second mounting plate

521-the fourth track 53-the second driving device 54-the second lead screw 60-sliding driving device

Detailed ways

Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

As shown in FIGS. 1 to 4 , the silicon wafer lifting device provided by the embodiment of the present invention includes a bottom frame 10 , a sliding block 20 , a first lifting assembly 30 , a bracket 40 and a second lifting assembly 50 .

Wherein, the sliding block 20 is slidably installed on the bottom frame 10, and the sliding block 20 can move along the X direction on the bottom frame 10, the first lifting assembly 30 is slidingly installed on the sliding block 20, and the first lifting assembly 30 Can move along the Y direction on the sliding block 20; The first lifting assembly 30 includes a first lifting plate 31; The first lifting plate 31 can move along the Z direction on the first lifting assembly 30; The first end of the bracket 40 is connected to The first lifting plate 31 is fixedly connected, and the second end extends along the X direction; the second lifting assembly 50 is fixed on the bottom frame 10 , the second lifting assembly 50 includes a second lifting plate 51 , and the second lifting plate 51 is supported on the bracket 40 the second end, and the movement of the second lifting plate 51 and the first lifting plate 31 can be synchronized.

Preferably, a sliding driving device 60 is further included, and the sliding driving device 60 is connected to the bottom frame 10 for driving the sliding block 20 to slide along the X direction. The sliding driving device 60 may be a cylinder or a servo motor, and those skilled in the art may choose according to actual needs.

Further, the bottom frame 10 is provided with two first rails 11 parallel to each other and along the X direction; the two ends of the sliding block 20 are slidably installed on the two first rails 11; The second rail 21; the second lifting assembly 50 is slidably installed on the second rail 21. The first track 11 and the second track 21 are used to guide the bottom frame 10 and the sliding block 20 to slide smoothly, so as to precisely control the position of the tray.

Please refer to Fig. 1, all X, Y, Z directions of the present invention are all with reference to the coordinate axis marked in Fig. 1, as can be seen from Fig. A lifting assembly 30 can slide along the second track 21 in the Y direction, and at the same time, the first lifting assembly 30 can also drive the bracket 40 to move along the Z direction. Therefore, in this embodiment, the bracket 40 can move from X, Y and Z to move in three directions.

The two ends of the bracket 40 are respectively supported by the first lifting assembly 30 and the second lifting assembly 50, and the first lifting assembly 30 and the second lifting assembly 50 operate synchronously to ensure that the two ends of the bracket 40 rise or fall synchronously. On the premise, the supporting points of the bracket 40 are increased, thereby avoiding the shaking of the bracket 40 in the process of rising and falling, and increasing the stability of the pallet.

When the silicon wafer needs to be transported from the conveyor belt to the PECVD chamber, the tray with the silicon wafer can be placed on the carriage 40, and then the X, Y, and Z direction positions of the carriage 40 can be adjusted according to the transportation situation, so that Precise transport of silicon wafers into PECVD chambers.

Specifically, please refer to FIG. 3 , the first lifting assembly 30 also includes a first mounting plate 32; the first mounting plate 32 is slidably mounted on the second track 21; the first mounting plate 32 is provided with a third track 321 along the Z direction , the first lifting plate 31 is slidably installed on the third track 321 .

In order to increase the convenience of operation and realize automatic operation, the first lifting assembly 30 also includes a first driving device 33, the first driving device 33 is arranged on the first mounting plate 32, and the first driving device 33 is in transmission connection with the first lifting plate 31 , for driving the first lifting plate 31 to slide along the third track 321 . The first driving device 33 can be a servo motor, and the rotor of the servo motor is connected to the first leading screw 331, and the first lifting plate 31 is connected with a first leading screw nut. When the servo motor starts, it drives the first leading screw 331. Rotate in the first lead screw nut, thereby driving the first lifting plate 31 to rise or fall along the second track 21 . Those skilled in the art can understand that the above-mentioned first driving device 33 can also be an air cylinder, wherein the cylinder body of the air cylinder is fixed on the first mounting plate 32 , and the connecting rod of the air cylinder drives the first lifting plate 31 to rise or fall.

Specifically, the second lifting assembly 50 also includes a second mounting plate 52, the second mounting plate 52 is fixed on the bottom frame 10, the second mounting plate 52 is provided with a fourth track 521 along the Z direction, and the second lifting plate 51 slides Installed on the fourth rail 521.

In order to increase the convenience of operation and realize automatic operation, the second lifting assembly 50 also includes a second driving device 53, the second driving device 53 is connected to the second mounting plate 52, and the second driving device 53 is connected to the second lifting plate 51 in transmission , for driving the second lifting plate 51 to slide along the fourth track 521 . This second driving device 53 can be a servo motor, and the rotor of the servo motor is connected with the second leading screw 54, and the second leading screw nut is connected with the second lifting plate 51, when the servo motor starts, it drives the second leading screw 54 Rotate in the second lead screw nut, so as to drive the second lifting plate 51 to rise or fall along the third track 321 . Those skilled in the art can understand that the above-mentioned second driving device 53 can also be an air cylinder, wherein the cylinder body of the air cylinder is fixed on the second mounting plate 52 , and the connecting rod of the air cylinder drives the second lifting plate 51 to rise or fall.

And preferably, the second lifting plate 51 includes a connecting plate 511 and a supporting plate 512, the connecting plate 511 and the supporting plate 512 are fixedly connected in an L shape, the connecting plate 511 is slidably connected with the fourth track 521, and the supporting plate 512 is provided with guide wheels 513 , the guide wheel 513 supports the second end of the bracket 40 . When the bracket 40 moves along the Y direction, the bracket 40 can roll on the guide wheel 513. The guide wheel 513 provides support for the bracket 40 on the one hand, ensuring that the bracket 40 is stable and does not shake; The carriage 40 moves along the guide wheels 513, which can increase the stability of the carriage 40 when it moves.

Those skilled in the art can understand that the connection plate 511 and the support plate 512 can be integrally formed, or can be fixed by welding, or fixed by fasteners such as bolts, which can be selected by those skilled in the art according to actual needs.

It can be understood that, since the two ends of the carriage 40 need to rise and fall synchronously, the main control system should control the first driving device 33 and the second driving device 53 to start or stop simultaneously to ensure that the two ends of the carriage 40 are synchronized. up or down.

Further, please refer to FIG. 4 , the bracket 40 includes a fixed plate 41 and a lifting plate 42, the fixed plate 41 is fixedly connected with the lifting plate 42 in an L shape, the fixed plate 41 is fixedly connected with the first lifting plate 31, and the lifting plate 42 extends along the X direction. Preferably, the lifting plate 42 is provided with a U-shaped groove 421 . The fixing plate 41 is mainly used to fix the entire bracket 40 on the first lifting assembly 30, and the lifting plate 42 is mainly used to lift the tray loaded with silicon wafers. The U-shaped groove 421 can reduce the overall height of the bracket 40. weight and help save costs.

Those skilled in the art can understand that the fixing plate 41 and the lifting plate 412 can be integrally processed and formed, or can be fixed by welding, or fixed by fasteners such as bolts, which can be selected by those skilled in the art according to actual needs. .

Preferably, the above-mentioned bottom frame 10 may be a cube frame, the first rail 11 is arranged above the bottom frame 10 , and other components are all arranged above the bottom frame 10 in sequence.

The structure, features and effects of the present invention have been described in detail above based on the embodiments shown in the drawings. The above are only preferred embodiments of the present invention, but the present invention does not limit the scope of implementation as shown in the drawings. Changes made to the idea of the present invention, or modifications to equivalent embodiments that are equivalent changes, and still within the spirit covered by the description and illustrations, shall be within the scope of protection of the present invention.

Claims (10)

1. A silicon chip lifting device is characterized in that, comprising: Bottom frame; a sliding block, the sliding block is slidably installed on the bottom frame; and the sliding block can move along the X direction on the bottom frame; The first lifting component is slidably installed on the sliding block; and the first lifting component can move along the Y direction on the sliding block; the first lifting component includes a first lifting plate, and the first lifting component can move along the Y direction on the sliding block; A lifting plate can move along the Z direction on the first lifting assembly; a bracket, the first end of the bracket is fixedly connected to the first lifting plate, and the second end of the bracket extends along the X direction; The second lifting assembly is fixed on the bottom frame, the second lifting assembly includes a second lifting plate, the second lifting plate supports the second end of the bracket, and the second lifting plate can The lifting assembly moves along the Z direction, and the movement of the second lifting plate is synchronized with that of the first lifting plate. 2. The silicon wafer lifting device according to claim 1, wherein the bottom frame is provided with two first rails parallel to each other and along the X direction; the two ends of the sliding block are slidably installed on the two on said first track; The sliding block is provided with a second track along the Y direction; the first lifting assembly is slidably installed on the second track. 3. The silicon wafer lifting device according to claim 2, wherein the first lifting assembly further comprises a first mounting plate; the first mounting plate is slidably mounted on the second rail; The first mounting plate is provided with a third track along the Z direction, and the first lifting plate is slidably installed on the third track. 4. The silicon wafer lifting device according to claim 3, wherein the first lifting assembly further comprises a first driving device, the first driving device is arranged on the first mounting plate, and the The first driving device is in transmission connection with the first lifting plate, and is used to drive the first lifting plate to slide along the third track. 5. The silicon wafer lifting device according to claim 1, wherein the second lifting assembly further comprises a second mounting plate, the second mounting plate is arranged on the bottom frame, and the second The installation plate is provided with a fourth track along the Z direction, and the second lifting plate is slidably installed on the fourth track. 6. The silicon wafer lifting device according to claim 5, wherein the second lifting assembly further comprises a second driving device, the second driving device is arranged on the second mounting plate, the The second driving device is in transmission connection with the second lifting plate, and is used to drive the second lifting plate to slide along the fourth track. 7. The silicon wafer lifting device according to claim 5, wherein the second lifting plate comprises a connecting plate and a supporting plate, and the connecting plate and the supporting plate are fixedly connected in an L shape, and the connecting plate and the supporting plate are fixedly connected in an L shape. The plate is slidably connected with the fourth track, and guide wheels are arranged on the support plate, and the guide wheels support the second end of the bracket. 8. The silicon wafer lifting device according to claim 1, wherein the bracket comprises a fixing plate and a lifting plate, the fixing plate is fixedly connected to the lifting plate in an L shape, and the fixing plate The plate is fixedly connected with the first lifting plate, and the lifting plate extends along the X direction. 9. The silicon wafer lifting device according to claim 8, wherein a U-shaped groove is arranged on the lifting plate. 10. The silicon wafer lifting device according to any one of claims 1-9, further comprising a sliding drive device connected to the bottom frame for driving the The sliding block slides along the X direction.